| Budget Amount *help |
¥18,460,000 (Direct Cost: ¥14,200,000、Indirect Cost: ¥4,260,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2012: ¥6,760,000 (Direct Cost: ¥5,200,000、Indirect Cost: ¥1,560,000)
Fiscal Year 2011: ¥9,750,000 (Direct Cost: ¥7,500,000、Indirect Cost: ¥2,250,000)
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| Research Abstract |
The purpose of this study was to develop high precision micro-diamond tool and to apply device fabrication with micro-structure. A diamond cutting tool was fabricated with silicon mold, and CVD diamond deposition, and then the edge with point, front, and side angles was conditioned with FIB. The diamond tool was attached to tool holders. In order to attach in desired position accurately, tool fabrication machine was fabricated. High-aspect ratio V-groove machining was demonstrated with the developed tools.
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