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DLC Coating on a Micro/Nano-Trench by Bipolar PBII&D and Analysis of Plasma Behavior

Research Project

Project/Area Number 23360072
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionThe University of Tokyo

Principal Investigator

CHOI Junho  東京大学, 工学(系)研究科(研究院), 准教授 (30392632)

Co-Investigator(Kenkyū-buntansha) KATO Takahisa  東京大学, 工学系研究科, 教授 (60152716)
Co-Investigator(Renkei-kenkyūsha) NAKAO Setsuo  産業技術総合研究所, サステナブルマテリアル研究部門, 主任研究員 (60357605)
Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Fiscal Year 2013: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2012: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Fiscal Year 2011: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
KeywordsDLC膜 / バイポーラPBII / 3次元コーティング / プラズマシミュレーション / ラマン分光分析 / バイポーラPBII / PIC-MCC / マイクロトレンチ / PBII / 3次元成膜 / PIC-MCCM / トレンチパターン / プラズマイオン注入法 / ナノコーティング / プラズマ / ナノインプリント
Research Abstract

Diamond-like carbon (DLC) coating was deposited on a micro/nano-trench by bipolar PBII, and the structure of the DLC film across the overall surface region of the trench was examined by making use of their corresponding Raman spectra. The plasma behavior in surrounding of the trench was calculated with Particle-In-Cell Monte Carlo Collision Method. As a result, DLC film was successfully coated on the overall surface of the trench. When the applied negative voltage was -0.5 kV, the structure of DLC film on the trench-sidewall became more polymer-like carbon than those of the top and bottom surfaces did. This is because the ions, which strike the sidewall, tend to have less incident energy. Whereas in the case of -15 kV, the DLC film on the sidewall was more graphite-like, despite of its smaller incident ion energy in comparison to those of the top and bottom surfaces. This is attributed to sputtering effect from the bottom surface of the trench, as evidenced by the plasma simulation.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (60 results)

All 2014 2013 2012 2011

All Journal Article (14 results) (of which Peer Reviewed: 12 results) Presentation (46 results) (of which Invited: 4 results)

  • [Journal Article] 古典分子動力学法を用いた水素フリーDLC膜における表面構造のナノスケール解析2014

    • Author(s)
      澤井周, 熊谷知久, 崔埈豪, 加藤孝久
    • Journal Title

      トライボロジスト

      Volume: Vol.59,No.2 Pages: 110-117

    • NAID

      130006731328

    • URL

      http://www.tribology.jp/publication/journal/journal59.html

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 古典分子動力学法を用いた水素フリーDLC 膜における表面構造のナノスケール解析2014

    • Author(s)
      澤井周, 熊谷知久, 崔埈豪, 加藤孝久
    • Journal Title

      トライボロジスト

      Volume: 59, 2 Pages: 110-117

    • NAID

      130006731328

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] バイポーラ PBII 法によるトレンチ形状物への DLC 成膜2013

    • Author(s)
      平田祐樹, 朴元淳, 崔埈豪, 加藤孝久
    • Journal Title

      トライボロジスト

      Volume: Vol.58,No.11 Pages: 841-847

    • NAID

      130006732295

    • URL

      http://www.tribology.jp/publication/journal/journal58.html

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Structural and environmental dependence of superlow friction in ion vapor deposited a-C : H:Si films for solid lubrication application2013

    • Author(s)
      X. Chen, T. Kato, M. Kawaguchi, M. Nosaka, J. Choi
    • Journal Title

      Journal of Physics D : Applied Physics

      Volume: Vol.46 Issue: 25 Pages: 255304-255304

    • DOI

      10.1088/0022-3727/46/25/255304

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] ラマン分光法によるDLC膜の機械特性評価および予測(第1報) - トルエン原料ガスを用いたバイポーラPBII&D法により作成したDLC膜 -2013

    • Author(s)
      崔埈豪, 石井啓資, 加藤孝久, 川口雅弘
    • Journal Title

      トライボロジスト

      Volume: Vol.58,No.8 Pages: 596-602

    • NAID

      10031189151

    • URL

      http://www.tribology.jp/publication/journal/journal58.html

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] マイクロ・ナノスケール3次元DLCコーティング2013

    • Author(s)
      崔埈豪
    • Journal Title

      月刊トライボロジー

      Volume: Vol.27,No.1 Pages: 16-18

    • URL

      http://tribology.press-shinjusha.co.jp/monthlytribology2013.htm#jan

    • Related Report
      2013 Final Research Report
  • [Journal Article] ラマン分光法によるDLC膜の機械特性評価および予測(第1報)―トルエン原料ガスを用いたバイポーラPBII&D法により作成したDLC膜―2013

    • Author(s)
      崔埈豪, 石井啓資, 加藤孝久, 川口雅弘
    • Journal Title

      トライボロジスト

      Volume: 58,8 Pages: 596-602

    • NAID

      10031189151

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] バイポーラPBII法によるトレンチ形状物へのDLC成膜2013

    • Author(s)
      平田祐樹, 朴元淳, 崔埈豪, 加藤孝久
    • Journal Title

      トライボロジスト

      Volume: 58, 11 Pages: 841-847

    • NAID

      130006732295

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ラマン分光法によるDLC膜の機械特性評価および予測(第1報)―トルエン原料ガスを用いたバイポーラPBII&D法により作成したDLC膜―2013

    • Author(s)
      崔 埈豪
    • Journal Title

      トライボロジスト

      Volume: -

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] マイクロ・ナノスケール3次元DLCコーティング2013

    • Author(s)
      崔 埈豪
    • Journal Title

      月刊トライボロジー

      Volume: 305 Pages: 16-18

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Mechanical properties and thermal stability of SiBCN films prepared by ion beam assisted sputter deposition2013

    • Author(s)
      崔 埈豪
    • Journal Title

      Diamond and Related Materials

      Volume: 34 Pages: 95-99

    • DOI

      10.1016/j.diamond.2013.02.010

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nitriding of high speed steel by bipolar PBII for improvement in adhesion strength of DLC films2012

    • Author(s)
      J. Choi, K. Soejima, T . Kato, M. Kawaguchi, W Lee
    • Journal Title

      Nuclear Instruments & Methods in Physics Research B

      Volume: Vol.272 Pages: 357-360

    • DOI

      10.1016/j.nimb.2011.01.100

    • Related Report
      2013 Final Research Report 2012 Annual Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural and mechanical properties of DLC films prepared by bipolar PBII&D2011

    • Author(s)
      J. Choi, K. Ishii, T. Kato, M. Kawaguchi, W. Lee
    • Journal Title

      Diamond and Related Materials

      Volume: Vol.20 Issue: 5-6 Pages: 845-848

    • DOI

      10.1016/j.diamond.2011.04.003

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low temperature Si-DLC coatings on fluoro rubber by a bipolar pulse type PBII system2011

    • Author(s)
      M Ikeyama,H Masuda, T Miyajima, J.Choi
    • Journal Title

      Surface & Coatings Technology

      Volume: 206 Issue: 5 Pages: 999-1002

    • DOI

      10.1016/j.surfcoat.2011.04.011

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] DLC Coating on a Trench-Shaped T arget by Bipolar PBII2014

    • Author(s)
      Y . Hirata, T . Kato, J. Choi
    • Organizer
      10th International Conference on the Science of Hard Materials
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2014-03-14
    • Related Report
      2013 Final Research Report
  • [Presentation] マイクロ・ナノスケール三次元DLC コーティング : 膜特性の評価およびプラズマ挙動解析2014

    • Author(s)
      崔埈豪
    • Organizer
      第16回「トライボコーティングの現状と将来」シンポジウム
    • Place of Presentation
      和光
    • Year and Date
      2014-02-28
    • Related Report
      2013 Final Research Report
  • [Presentation] マイクロ・ナノスケール三次元DLCコーティング:膜特性の評価およびプラズマ挙動解析2014

    • Author(s)
      崔埈豪
    • Organizer
      第16回「トライボコーティングの現状と将来」シンポジウム
    • Place of Presentation
      埼玉県和光市, 独立行政法人理化学研究所
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] DLC Coating on a Trench-Shaped Target by Bipolar PBII2014

    • Author(s)
      Y. Hirata, T. Kato, J. Choi
    • Organizer
      10th International Conference on the Science of Hard Materials 2014
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイポーラPBII法によるトレンチ形状物へのDLCコーティング-プラズマ挙動解析2013

    • Author(s)
      平田祐樹, 朴元淳, 加藤孝久, 崔埈豪
    • Organizer
      第54回真空に関する連合講演会
    • Place of Presentation
      つくば
    • Year and Date
      2013-11-27
    • Related Report
      2013 Final Research Report
  • [Presentation] バイポーラPBII法によるトレンチ形状物へのDLCコーティング-膜の構造および機械的特性評価2013

    • Author(s)
      平田祐樹, 大西弘益, 加藤孝久, 崔埈豪
    • Organizer
      第54回真空に関する連合講演会
    • Place of Presentation
      つくば
    • Year and Date
      2013-11-27
    • Related Report
      2013 Final Research Report
  • [Presentation] 曲面形状物の表面上に作製したDLC膜の構造評価2013

    • Author(s)
      崔埈豪, 八田鉄也, 加藤孝久
    • Organizer
      第5回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      仙台
    • Year and Date
      2013-11-06
    • Related Report
      2013 Final Research Report
  • [Presentation] バイポーラPBII 法によるマイクロトレンチへのDLCコーティング2013

    • Author(s)
      平田祐樹, 朴元淳, 下園隼人, 崔埈豪, 加藤孝久
    • Organizer
      第5回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      仙台
    • Year and Date
      2013-11-06
    • Related Report
      2013 Final Research Report
  • [Presentation] Raman Study of DLC Films prepared by Bipolar PBII&D2013

    • Author(s)
      Junho Choi, Takayuki Hibi, Takahisa Kato, Masahiro Kawaguchi
    • Organizer
      World Tribology Congress 2013
    • Place of Presentation
      Torino, Italy
    • Year and Date
      2013-09-09
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] Raman Evaluation on Structural Changes of DLC Films Prepared by Bipolar-T ype Plasma Based Ion Implantation and Deposition2013

    • Author(s)
      S. Nakao, J. Choi, T. Sonoda, M. Ikeyama, T. Kato
    • Organizer
      International Conference of Diamond and Carbon Materials
    • Place of Presentation
      Riva del Garda, Italy
    • Year and Date
      2013-09-04
    • Related Report
      2013 Final Research Report
  • [Presentation] DLC coating on a micro-trench using bipolar PBII2013

    • Author(s)
      J. Choi, H. Tokioka, W. Park, Y . Hirata, T. Kato
    • Organizer
      Collaborative Conference on Materials Research 2013
    • Place of Presentation
      Jeju, South Korea
    • Year and Date
      2013-06-26
    • Related Report
      2013 Final Research Report
  • [Presentation] バイポーラPBII 法によるマイクロ・ナノスケールトレンチパターンへの三次元DLCコーティング2013

    • Author(s)
      崔埈豪, 時岡秀行, 朴元淳, 平田祐樹, 加藤孝久
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      東京
    • Year and Date
      2013-05-22
    • Related Report
      2013 Final Research Report
  • [Presentation] トレンチ形状物への三次元 DLC コーティングおよびプラズマ挙動解析2013

    • Author(s)
      平田祐樹, 朴元淳, 崔埈豪, 加藤孝久
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      東京
    • Year and Date
      2013-05-22
    • Related Report
      2013 Final Research Report
  • [Presentation] プラズマシミュレーションによるマイクロレンチ形状物への三次元DLCコーティング解析2013

    • Author(s)
      朴元淳, 平田祐樹, 崔埈豪, 加藤孝久
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      東京
    • Year and Date
      2013-05-21
    • Related Report
      2013 Final Research Report
  • [Presentation] Three-Dimensional DLC Coating using Bipolar PBII2013

    • Author(s)
      J. Choi
    • Organizer
      The 9th Cooperative and Joint international conference on Ultra-precision Machining Process in conjunction with The 7th Conference of Ultra-Precision (ELID) Technology Research Group
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2013-03-28
    • Related Report
      2013 Final Research Report
  • [Presentation] プラズマシミュレーションによるマイクロレンチ形状物への三次元DLCコーティング解析2013

    • Author(s)
      朴元淳,平田祐樹,崔埈豪,加藤孝久
    • Organizer
      日本トライボロジー学会
    • Place of Presentation
      東京都, 国立オリンピック記念青少年総合センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイポーラPBII法によるマイクロ・ナノスケールトレンチパターンへの三次元DLCコーティング2013

    • Author(s)
      崔埈豪,時岡秀行,朴元淳,平田祐樹,加藤孝久
    • Organizer
      日本トライボロジー学会
    • Place of Presentation
      東京都, 国立オリンピック記念青少年総合センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] トレンチ形状物への三次元DLCコーティングおよびプラズマ挙動解析2013

    • Author(s)
      平田祐樹,朴元淳,崔埈豪,加藤孝久
    • Organizer
      日本トライボロジー学会
    • Place of Presentation
      東京都, 国立オリンピック記念青少年総合センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] DLC coating on a micro-trench using bipolar PBII2013

    • Author(s)
      Junho Choi, Hideyuki Tokioka, Wonsoon Park, Yuuki Hirata, Takahisa Kato
    • Organizer
      Collaborative Conference on Materials Research (CCMR) 2013
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Raman Evaluation on Structural Changes of DLC Films Prepared by Bipolar-Type Plasma Based Ion Implantation and Deposition2013

    • Author(s)
      S. Nakao, J. Choi, T. Sonoda, M. Ikeyama, T. Kato
    • Organizer
      International Conference of Diamond and Carbon Materials 2013
    • Place of Presentation
      Riva del Garda, Italy
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイポーラPBII法によるマイクロトレンチへのDLCコーティング2013

    • Author(s)
      平田祐樹, 朴元淳, 下園隼人, 崔埈豪, 加藤孝久
    • Organizer
      第5回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      宮城県仙台市, 仙台国際センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] 曲面形状物の表面上に作製したDLC膜の構造評価2013

    • Author(s)
      崔埈豪, 八田鉄也, 加藤孝久
    • Organizer
      第5回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      宮城県仙台市, 仙台国際センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイポーラPBII法によるトレンチ形状物へのDLCコーティング―膜の構造および機械的特性評価2013

    • Author(s)
      平田祐樹, 大西弘益, 加藤孝久, 崔埈豪
    • Organizer
      第54回 真空に関する連合講演会
    • Place of Presentation
      茨城県つくば市, つくば国際会議場
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイポーラPBII法によるトレンチ形状物へのDLCコーティング―プラズマ挙動解析2013

    • Author(s)
      平田祐樹, 朴元淳, 加藤孝久, 崔埈豪
    • Organizer
      第54回 真空に関する連合講演会
    • Place of Presentation
      茨城県つくば市, つくば国際会議場
    • Related Report
      2013 Annual Research Report
  • [Presentation] プラズマシミュレーションによるマイクロトレンチ形状物への三次元DLCコーティング解析2013

    • Author(s)
      朴元淳
    • Organizer
      トライボロジー会議2013春 東京
    • Place of Presentation
      東京, 国立オリンピック記念青少年総合センター
    • Related Report
      2012 Annual Research Report
  • [Presentation] バイポーラPBII法によるマイクロ・ナノスケールトレンチパターンへの三次元DLCコーティング2013

    • Author(s)
      崔埈豪
    • Organizer
      トライボロジー会議2013春 東京
    • Place of Presentation
      東京, 国立オリンピック記念青少年総合センター
    • Related Report
      2012 Annual Research Report
  • [Presentation] トレンチ形状物への三次元DLCコーティングおよびプラズマ挙動解析2013

    • Author(s)
      平田祐樹
    • Organizer
      トライボロジー会議2013春 東京
    • Place of Presentation
      東京, 国立オリンピック記念青少年総合センター
    • Related Report
      2012 Annual Research Report
  • [Presentation] Three-Dimensional DLC Coating using Bipolar PBII2013

    • Author(s)
      崔埈豪
    • Organizer
      The 9th Cooperative and Joint international conference on Ultra-precision Machining Process
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] ナノスケールシリコンモールドへのDLC保護膜の形成2012

    • Author(s)
      崔埈豪, 中原優也, 長藤圭介, 朴元淳, 加藤孝久
    • Organizer
      リコンモールドへのDLC保護膜の形成, 第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州市
    • Year and Date
      2012-10-24
    • Related Report
      2013 Final Research Report
  • [Presentation] ラマンスペクトルを用いた DLC 膜の構造および機械的特性評価2012

    • Author(s)
      日比貴之, 崔埈豪, 加藤孝久, 川口雅弘
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      室蘭
    • Year and Date
      2012-09-17
    • Related Report
      2013 Final Research Report
  • [Presentation] Nanoscale 3-dimensional DLC coating as anti-sticking layer for nanoimprint lithography2012

    • Author(s)
      J. Choi, Y. Nakahara, K. Nagato, W. Park, T. Kato
    • Organizer
      Collaborative Conference on Materials Research 2012
    • Place of Presentation
      Seoul, South Korea
    • Year and Date
      2012-06-26
    • Related Report
      2013 Final Research Report
  • [Presentation] 3-dimensional DLC coating on microgear by bipolar PBII&D and plasma analysis2012

    • Author(s)
      W Park, J. Choi, T. Kato, W. Lee
    • Organizer
      International Conference on Metallurgical Coating & Thin Films
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2012-04-26
    • Related Report
      2013 Final Research Report
  • [Presentation] Improvement of Anti-Conrrosion Properties of Mg Alloy by Oxygen-Plasma Treatment and DLC Coatings2012

    • Author(s)
      J.Choi, F.Aikawa, T.Kato, S.Nakao, T.Sonoda, M.Ikeyama
    • Organizer
      Engineering Conferences International
    • Place of Presentation
      Puntarenas, Costa Rica
    • Year and Date
      2012-01-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] ラマンスペクトルを用いたDLC膜の構造および機械的特性評価2012

    • Author(s)
      日比貴之
    • Organizer
      トライボロジー会議2012秋室蘭
    • Place of Presentation
      室蘭市, 室蘭工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Mechanical properties and thermal stability of SiBCN films prepared by ion beam assisted deposition2012

    • Author(s)
      崔埈豪
    • Organizer
      International Conference on Diamond and Carbon Materials
    • Place of Presentation
      Granada, Spain
    • Related Report
      2012 Annual Research Report
  • [Presentation] ナノスケールシリコンモールドへのDLC保護膜の形成2012

    • Author(s)
      崔埈豪
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州市, 北九州国際会議場
    • Related Report
      2012 Annual Research Report
  • [Presentation] Nanoscale 3-dimensional DLC coating as anti-sticking layer for nanoimprint lithography2012

    • Author(s)
      崔埈豪
    • Organizer
      Collaborative Conference on Materials Research (CCMR) 2012
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 3-dimensional DLC coating on microgear by bipolar PBII&D and plasma analysis2012

    • Author(s)
      朴元淳
    • Organizer
      International Conference on Metallurgical Coating & Thin Films (ICMCTF2012)
    • Place of Presentation
      San Diego, CA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Systematic Studies of Ultrananocrystalline Diamond Films Grown by Bias-Enhanced Nucleation and Growth in Hydrogen-Rich Plasmas2011

    • Author(s)
      Jung-hyun Park, Yueh-chieh Chu, Chia-hao Tu, Pablo Gurman, Charudatta Phatak, Yonhua Tzeng, Ali Erdemir, Junho Choi, Orlando Auciello
    • Organizer
      2011 MRS Fall Meeting
    • Place of Presentation
      Boston, MA
    • Year and Date
      2011-11-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of Large-Area Nanoparticle Assembled Film of Carbon Onions Synthesized by Plasma-Based Ion Implantation2011

    • Author(s)
      N.Matsumoto, J.Choi, T.Kato
    • Organizer
      International Tribology Conference (ITC) 2011
    • Place of Presentation
      Hiroshima
    • Year and Date
      2011-11-03
    • Related Report
      2011 Annual Research Report
  • [Presentation] Carbon onion growth induced by low-energy CH4 plasma ion implantation into silver thin film2011

    • Author(s)
      N.Matsumoto, J.Choi, T.Kato
    • Organizer
      Diamond 2011
    • Place of Presentation
      Bavaria, Germany
    • Year and Date
      2011-09-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] Electrical conductivity of nitrogen-incorporated diamond-like carbon films prepared by bipolar PBII2011

    • Author(s)
      Junho Choi, Noritaka Takuta, Naohiro Matsumoto, Takahisa Kato
    • Organizer
      Diamond 2011
    • Place of Presentation
      Bavaria, Germany
    • Year and Date
      2011-09-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] Laser-Assisted Imprinting of Nanostructured Glass2011

    • Author(s)
      Toshimi Sato, Keisuke Nagato, Junho Choi, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      11th International Conference on Nanotechnology
    • Place of Presentation
      Portland, Oregon(招待講演)
    • Year and Date
      2011-08-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] プラズマイオン注入を用いたカーボンオニオンの合成2011

    • Author(s)
      松本直浩, 崔〓豪, 加藤孝久
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      東京
    • Year and Date
      2011-05-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] DLC薄膜のナノインプリント離型膜への応用2011

    • Author(s)
      中原優也, 崔〓豪, 長籐圭介, 朴相天, 朴元淳, 松本直浩, 加藤孝久
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      東京
    • Year and Date
      2011-05-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] DLC膜におけるラマンパラメータと機械的特性の相関評価2011

    • Author(s)
      日比貴之, 崔〓豪, 加藤孝久, 川口雅弘, 稲吉成彦
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      東京
    • Year and Date
      2011-05-24
    • Related Report
      2011 Annual Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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