Development of micro actuation systems using ac electroosmotic flows
| Project/Area Number |
23360073
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
YOKOTA Shinichi 東京工業大学, 精密工学研究所, 教授 (10092579)
KIM Joon-wan 東京工業大学, 精密工学研究所, 准教授 (40401517)
EOM Sang In 東京工業大学, 精密工学研究所, 助教 (20551576)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Fiscal Year 2013: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2012: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2011: ¥12,350,000 (Direct Cost: ¥9,500,000、Indirect Cost: ¥2,850,000)
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| Keywords | 先端機能デバイス / マイクロ・ナノデバイス / アクチュエータ / 電気浸透 / MEMS / 機械力学・制御 / マイクロポンプ / 流体 / マイクロ流動源 |
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| Research Abstract |
The ac electroosmosis (ACEO) produces convection flows of water by applying relatively low ac voltage to the liquid through simple fixed electrodes. By obtaining a unidirectional flow from the ACEO convection flow, advanced micro actuation systems will be realized. In this study, to realize above-mentioned function, three micropumps using flow deflectors, square pole-slit electrodes, and plate-small pipe electrodes were proposed and developed. Based on the FEM simulation, the performances of micropumps were theoretically evaluated. Then the MEMS processes were developed and the micropumps were fabricated. Through experiments, the characteristics of micropumps were clarified and their validity was confirmed.
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Report
(4 results)
Research Products
(14 results)
