Development of nano-probe with low noise actuation mechanism for nano-machining and in situ measurement
| Project/Area Number |
23360108
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Yamagata University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
FURUYA Yasubumi 弘前大学, 北日本新エネルギー研究所, 教授 (20133051)
KUMAKI Jiro 山形大学, 大学院・理工学研究科, 教授 (00500290)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2013: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2012: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Fiscal Year 2011: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
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| Keywords | AFM / デュアルカンチレバー / 磁歪薄膜 / 近接探針 / ナノ加工 / その場計測 / 低ノイズ変位機構 / 磁性薄膜 / 磁性形状記憶合金薄膜 |
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| Research Abstract |
Atmic force micrscopy (AFM) is expected not only as a mesurement tool but also as a novel nano-machining tool in molecular science field such as molecular surgery. In order to relize nano-machining and in-situ molecular imaging with high resolution, this research focused on the development of narrow-gapped dual AFM probe with individual nano-tips on each cantilever for nano-machining and imaging. Self-align etching process was developed to fabricate a sharp dual tip separated by 500 nm. A dual cantilever with magneto-strictive film (FePd alloy) was also developed as a low noise actuator for switching the two tips by external magnetic field.
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Report
(4 results)
Research Products
(72 results)
