| Budget Amount *help |
¥18,070,000 (Direct Cost: ¥13,900,000、Indirect Cost: ¥4,170,000)
Fiscal Year 2013: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2012: ¥9,100,000 (Direct Cost: ¥7,000,000、Indirect Cost: ¥2,100,000)
Fiscal Year 2011: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
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| Research Abstract |
For medical ultrasonic devices and micro piezoelectric actuators, thick piezoelectric films are strongly demanded. In the conventional piezoelectric film deposition processes, the thickness have been limited because the crack was easily made inside the film due to high temperature crystallization process more than 600 degree C.
In this study, we focused on the hydrothermal method whose reaction temperature is 250 degree C. By developing the ultrasonic assisted hydrothermal method, we demonstrated a 172 micrometer thickness of potassium niobate film.
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