Resonant behavior control through ferroelectric polarization and its applications to vibratory MEMS devices with improved functionality

• Project/Area Number: 23360136
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: Kyoto Institute of Technology
• Principal Investigator: YAMASHITA Kaoru 京都工芸繊維大学, 工芸科学研究科, 准教授 (40263230)
• Co-Investigator(Kenkyū-buntansha): FUJITA Takayuki 兵庫県立大学, 工学研究科, 准教授 (50336830) ; NODA Minoru 京都工芸繊維大学, 工芸科学研究科, 教授 (20294168)
• Project Period (FY): 2011-04-01 – 2014-03-31
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥19,630,000 (Direct Cost: ¥15,100,000、Indirect Cost: ¥4,530,000); Fiscal Year 2013: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000); Fiscal Year 2012: ¥10,270,000 (Direct Cost: ¥7,900,000、Indirect Cost: ¥2,370,000); Fiscal Year 2011: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
• Keywords: 圧電体 / 強誘電体 / MEMS / 共振 / 分極 / 応力

Research Abstract

Functionalities of vibratory MEMS (micro-electro-mechanical systems) devices have been improved using piezoelectricity with ferroelectric polarization of the ferroelectric material in the device. Resonant frequency control has firstly been investigated through converse-piezoelectric stress by applying external voltage, and it has been clarified that the frequency controllability by the stress and the effect of the shape of the vibrating plate to the controllability. The effects of the applied voltage to the performance of MEMS sensors have next been revealed through static deformation of the device plate due to the converse-piezoelectric stress and improvement of piezoelectric properties through alignment of ferroelectric polarization. We have finally dealt with ultrasonic array sensor and its array as instances of the vibratory MEMS device to apply the results of the investigation and proposed an improvement method of their sensitivity and measurement technique with super-resolution.

Research Products

• [Journal Article] 圧電ダイアフラム型超音波センサのポーリングによる感度変化とその面内応力の影響 (2014)
  • Author(s): 山下馨, 田中光, 森本篤, 野田実
  • Journal Title: 電気学会論文誌 E Volume: vol. 124 Pages: 119-124
  • NAID: 10031193607
  • Peer Reviewed
• [Journal Article] 圧電ダイアフラム型超音波センサのポーリングによる感度変化とその面内応力の影響 (2014)
  • Author(s): 山下馨
  • Journal Title: 電気学会論文誌E Volume: 134 Pages: 119-124
  • NAID: 10031193607
  • Peer Reviewed
• [Presentation] 逆圧電応力による圧電ダイアフラム型超音波センサの撓み制御 (2014)
  • Author(s): 田中光
  • Organizer: 平成26年電気学会全国大会
  • Place of Presentation: 松山市
• [Presentation] Diaphragm buckling control of ultrasonic microsensors through converse-piezoelectric stress for high sensitivity (2014)
  • Author(s): Kaoru Yamashita
  • Organizer: APCOT 2014
  • Place of Presentation: Daegu, Korea
• [Presentation] Tunability and sen- sitivity modification by poling on PZT film of frequency-tunable ultrasonic microsensors (2013)
  • Author(s): K. Yamashita, H. Tanaka, A. Morimoto, Y. Yang, M. Noda
  • Organizer: UFFC2013
  • Place of Presentation: Prague, Czech Republic
• [Presentation] 圧電ダイアフラム型共振周波数可変センサのポーリングによる感度と周波数制御製の向上 (2013)
  • Author(s): 田中光
  • Organizer: 第30回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 仙台市
• [Presentation] Sensitivity-enhanced ultrasonic microsensors on buckled diaphragms through stress balance control of multilayered structure (2013)
  • Author(s): Kaoru Yamashita
  • Organizer: IEEE Sensors 2013
  • Place of Presentation: Maltimore, USA
• [Presentation] 圧電ダイアフラム型超音波センサのポーリングによる感度変化とその面内応力の影響 (2013)
  • Author(s): 田中光
  • Organizer: 平成25年度電気学会E部門総合研究会
  • Place of Presentation: 東京
• [Presentation] Tunability and sensitivity modification by poling on PZT film of frequency-tunable ultrasonic microsensors (2013)
  • Author(s): Kaoru Yamashita
  • Organizer: UFFC 2013
  • Place of Presentation: Prague, Czech Republic
• [Presentation] 共振周波数可変型圧電マイクロ超音波センサのポーリング処理による感度と周波数制御性の向上 (2013)
  • Author(s): 田中光
  • Organizer: 平成25年電気学会全国大会
  • Place of Presentation: 名古屋市
• [Presentation] Multiple-frequency design for high performance ultrasonic measure- ment by using phased array with re- duced number of sensor element (2012)
  • Author(s): K. Yamashita, Y. Yang, H. Tanaka, M. Noda
  • Organizer: ICETET 2012
  • Place of Presentation: Himeji, Japan
• [Presentation] Spontaneous diaphragm buck- ling control process on piezoelectric ultrasonic microsensors for high sensi- tivity (2012)
  • Author(s): K. Yamashita, H. Tanaka, Y. Yang, M. Noda
  • Organizer: Eurosensors 2012
  • Place of Presentation: Kraków, Po- land
• [Presentation] Multiple-Frequency Design for High Performance Ultrasonic Measurement by Using Phased Array with Reduced Number of Sensor Element (2012)
  • Author(s): Kaoru Yamashita
  • Organizer: The 12th International Conference on Emearging Trend in Engineering and Technology
  • Place of Presentation: 姫路市
• [Presentation] Spontaneous Diaphragm Buckling Control Process on Piezoelectric Ultrasonic Microsensors for High Sensitivity (2012)
  • Author(s): Kaoru Yamashita
  • Organizer: The 26th European Conference on Solid-State Transducers
  • Place of Presentation: ポーランド，クラクフ市
• [Presentation] Multi-Frequency Ultrasonic Measurement for Ghost Suppression with a Sparse Phased Array by Frequency-Tunable Microsensors (2012)
  • Author(s): Kaoru Yamashita
  • Organizer: World Automation Congress / The 8th International Forum on Multimedia and Image Processing
  • Place of Presentation: メキシコ，プエルトバヤルタ市
• [Presentation] マイクロ超音波センサの高感度化構造プロセスにおける圧電体/SiO2ダイアフラムの自発的座屈方向制御 (2012)
  • Author(s): 田中光
  • Organizer: 第29回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 北九州市
• [Presentation] 圧電ダイアフラム型超音波マイクロセンサ高感度化のための自発的座屈方向制御プロセス (2012)
  • Author(s): 田中光
  • Organizer: 平成24年電気学会センサ・マイクロマシン部門総合研究会
  • Place of Presentation: 京都市
• [Presentation] Spontaneous Buckling Control of Piezoelectric Diaphragm-Type Ultrasonic Microsensors for High Sensitivity by Stress Control in PZT Formation Process (2012)
  • Author(s): Yi Yang
  • Organizer: The 6th Asia-Pacific Conference on Transducers and Micro-Nano Technology
  • Place of Presentation: 中国，南京市
• [Presentation] Stress Control Process through Piezoelectric PZT Film Formation for Upward-Buckling of Diaphragm-Type Ultrasonic Microsensors (2012)
  • Author(s): Yi Yang
  • Organizer: The 2012 International Meeting for Future Electron Devices, Kansai
  • Place of Presentation: 吹田市
• [Presentation] Sensitivity enhancement of tunable microsensors induced by converse-piezoelectric stress on PZT diaphragms (2011)
  • Author(s): 山下馨
  • Organizer: The 20th International Symposium on Applications of Ferroelectrics
  • Place of Presentation: The Westin Bayshore Hotel, Vancouver, Canada
  • Year and Date: 2011-07-25