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Nanoprocessing of surface photonic elements with high intensity scattered near-field excited by femtosecond laser

Research Project

Project/Area Number 23360161
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionKeio University

Principal Investigator

OBARA Minoru  慶應義塾大学, 理工学部, 名誉教授 (90101998)

Co-Investigator(Kenkyū-buntansha) SAIKI Toshiharu  慶應義塾大学, 理工学部, 教授 (70261196)
TSUDA Hiroyuki  慶應義塾大学, 理工学部, 教授 (90327677)
TERAKAWA Mitsuhiro  慶應義塾大学, 理工学部, 専任講師 (60580090)
Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥20,020,000 (Direct Cost: ¥15,400,000、Indirect Cost: ¥4,620,000)
Fiscal Year 2013: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2012: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2011: ¥11,440,000 (Direct Cost: ¥8,800,000、Indirect Cost: ¥2,640,000)
Keywordsナノプロセシング / ミー散乱 / 表面プラズモニック散乱 / 散乱近接場・遠方場 / フェムト秒レーザー / 表面周期構造 / FDTD法 / フェムト秒レーザ / 表面周期構造作製 / 近接場光加工 / 表面プラズモン / 近接場光トラップ / 表面周期リップル / プラズモン制御 / フェムト秒レーザプロセシング
Research Abstract

An enhanced near-field scattered from nanostructures is localized to the nano-scale zone, and is then used for nano-ablation processing of a variety of advanced functional materials. This report presents theoretically and experimentally the characteristics of near-field and nano-ablation in terms of femtosecond laser polarization, irradiation angles, scattering structures, scattering materials, work materials. Near-fields from plasmonic scattering and Mie scattering are clearly explained. In addition to the enhanced near-field processing, the mechanism of surface ripples formed by the interference of the incident femtosecond laser and the scattered far-field light is well explained by using the 3D FDTD method. The nano-patterned surfaces fabricated these methods can potentially be used for surface photonic devices.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (58 results)

All 2014 2013 2012 2011 Other

All Journal Article (14 results) (of which Peer Reviewed: 14 results) Presentation (42 results) (of which Invited: 7 results) Book (2 results)

  • [Journal Article] 招待論文 : Electron excitation effect on scattering near-field and far-field ablation material processing by femtosecond laser irradiation.2014

    • Author(s)
      Taira Enami, Go Obara, Mitsuhiro Terakawa, Minoru Obara
    • Journal Title

      Appl. Phys. A

      Volume: 114 Issue: 1 Pages: 253-259

    • DOI

      10.1007/s00339-013-8096-2

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electron Electron excitation effect on scattering near-field and far-field ablation material processing by femtosecond laser irradiation2014

    • Author(s)
      T. Enami, G. Obara, M. Terakawa, M. Obara
    • Journal Title

      Applied Physics A

      Volume: 114 Pages: 253-259

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of high spatial frequency periodic ripple structures on SiC crystal surfaces irradiated with successive femtosecond laser pulses2013

    • Author(s)
      Go Obara, Hisashi Shimizu, Taira Enami, Eric Mazur, Mitsuhiro Terakawa, Minoru Obara
    • Journal Title

      Optics Express

      Volume: 21 Issue: 22 Pages: 26323-26334

    • DOI

      10.1364/oe.21.026323

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Evolution of femtosecond laserinduced surface ripples on lithium niobate crystal surfaces2013

    • Author(s)
      H. Shimizu, G. Obara, M. Terakawa, M. Obara
    • Journal Title

      Applied Physics Express 6

      Volume: 6 Issue: 11 Pages: 112701-112701

    • DOI

      10.7567/apex.6.112701

    • NAID

      210000136860

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Plasmonic nanometric optical tweezers in an asymmetric space of gold nanostructured substrates2013

    • Author(s)
      K. Hirano, H. Shimizu, T. Enami, M. Terakawa, M. Obara, N. N. Nedyalkov, P. A. Atanasov
    • Journal Title

      Journal of Nanotechnology in Diagnosis and Treatment

      Volume: 1 Issue: 1 Pages: 2-10

    • DOI

      10.12974/2311-8792.2013.01.01.1

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Tuning the optical properties of gold nanostructures fabricated on flexible substrates2013

    • Author(s)
      R. Nikova, N. Nedyalkova, P.A. Atanasova, M. Terakawa, H. Shimizu, and M. Obara
    • Journal Title

      Applied Surface Sciences

      Volume: 264 Pages: 779-782

    • DOI

      10.1016/j.apsusc.2012.10.125

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Photocatalytic nano-optical trapping using TiO2 nanosphere pairs mediated with Mie scattered near-field2013

    • Author(s)
      T. Honda, M. Terakawa, M. Obara
    • Journal Title

      Applied Physics B

      Volume: 111 Issue: 1 Pages: 117-126

    • DOI

      10.1007/s00340-012-5314-0

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Laser annealing of bimetal thin films : A route of fabrication of composite nanostructures2012

    • Author(s)
      N.N. Nedyalkov, R. Nikov, A.Og. Dikovska, P.A. Atanasov, G. Obara, and M. Obara
    • Journal Title

      Applied Surface Sciences

      Volume: 258 Issue: 23 Pages: 9162-9166

    • DOI

      10.1016/j.apsusc.2011.12.023

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhanced localized near field and scattered far field for surface nanophotonics applications2012

    • Author(s)
      M. Terakawa, S, Takeda, Y.Tanaka, G.Obara, T. Miyanishi, T. Sakai, T. Sumiyoshi, H. Sekita, M. Hasegawa, P. Viktorovitch, M. Obara
    • Journal Title

      Progress in Quantum Electronics

      Volume: 36 Issue: 1 Pages: 194-271

    • DOI

      10.1016/j.pquantelec.2012.03.006

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] High intensity near-field generation for silicon nanoparticle arrays with oblique irradiation for large-area high throughput nanopatterning2012

    • Author(s)
      T. Miyanishi, M. Terakawa, M. Obara
    • Journal Title

      Applied Physics B

      Volume: 107 Issue: 2 Pages: 323-332

    • DOI

      10.1007/s00340-012-4995-8

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] High intensity near-field generation for silicon nanoparticle arrays with oblique irradiation for large-area high throughput nanopatterning2012

    • Author(s)
      Tomoya Miyanishi, Mitsuhiro Terakawa, Minoru Obara
    • Journal Title

      Applied Physics B

      Volume: (掲載決定)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhanced localized near field and scattered far field for surface nanophotonics applications2012

    • Author(s)
      M.Terakawa, S, Takeda, Y.Tanaka, G.Obara, T.Miyanishi, T.Sakai, T Sumiyoshi, H.Sekita, M.Hasegawa, P.Viktorovitch, M.Obara
    • Journal Title

      Progress in Quantum Electronics

      Volume: (掲載決定)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Plasmonic and Mie scattering control of far-field interference for regular ripple formation on various material substrates2011

    • Author(s)
      G. Obara, N. Maeda, T. Miyanishi, M. Terakawa, N. N. Nedyalkov, M. Obara
    • Journal Title

      Optics Express

      Volume: 19 Issue: 20 Pages: 19093-19103

    • DOI

      10.1364/oe.19.019093

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct observation of surface plasmon far field for regular surface ripple formation by femtosecond laser pulse irradiation of gold nanostructures on silicon substrates2011

    • Author(s)
      Go Obara, Yuto Tanaka, Nikolay N.Nedyalkov, Mitsuhiro Terakawa, Minoru Obara
    • Journal Title

      Applied Physics Letters

      Volume: 99 Issue: 6 Pages: 61106-61106

    • DOI

      10.1063/1.3624925

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Spot size dependence of LIPSS formation threshold using femtosecond laser2014

    • Author(s)
      発表者, 清水九史
    • Organizer
      SPIE Photonics West 2014
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2014-02-04
    • Related Report
      2013 Final Research Report
  • [Presentation] Growth evolution of high spatial frequency LIPSS on SiC crystal surfaces2014

    • Author(s)
      発表者, 小原豪
    • Organizer
      SPIE Photonics West 2014
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2014-02-03
    • Related Report
      2013 Final Research Report
  • [Presentation] レーザー誘起表面微細周期構造生成閾値のスポットサイズ依存性2014

    • Author(s)
      発表者, 清水九史
    • Organizer
      レーザー学会学術講演会第34回年次大会
    • Place of Presentation
      北九州国際会議場, 北九州市
    • Year and Date
      2014-01-22
    • Related Report
      2013 Final Research Report
  • [Presentation] Growth evolution of high spatial frequency LIPSS on SiC crystal surfaces2014

    • Author(s)
      G. Obara, H. Shimizu, T. Enami, M. Sher, B. Franta, E. Mazur, M. Terakawa, M. Obara
    • Organizer
      SPIE Photonics West
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Spot size dependence of LIPSS formation threshold using femtosecond laser2014

    • Author(s)
      H. Shimizu, G. Obara, M. Terakawa
    • Organizer
      SPIE Photonics West
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] レーザー誘起表面微細周期構造生成閾値のスポットサイズ依存性2014

    • Author(s)
      清水九史、小原豪、寺川光洋
    • Organizer
      レーザー学会学術講演会第34回年次大会
    • Place of Presentation
      福岡
    • Related Report
      2013 Annual Research Report
  • [Presentation] Plasmonic scattering of near-field and far-field by femtosecond laser irradiation2013

    • Author(s)
      発表者, 江並平
    • Organizer
      12th International Conference on Laser Ablation (COLA)
    • Place of Presentation
      Ischia, Italy
    • Year and Date
      2013-10-07
    • Related Report
      2013 Final Research Report
  • [Presentation] Control of localized near field and long-range plasmon polaritons for nanophotonics2013

    • Author(s)
      発 表者, 寺川光洋
    • Organizer
      Fundamentals of Laser Assisted Micro- & Nanotechnologies 2013 (FLAMN-13)
    • Place of Presentation
      St. Petersburg, Russia
    • Year and Date
      2013-06-25
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Periodic surface nanopatterning controlled with preformed scattering structures excited by femtosecond laser irradiation2013

    • Author(s)
      発表者, 小原豪
    • Organizer
      SPIE Photonics West 2013
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2013-02-04
    • Related Report
      2013 Final Research Report
  • [Presentation] Direct observation of early stages of surface ripples formation on LiNbO3 substrate2013

    • Author(s)
      発表者, 清水久史
    • Organizer
      SPIE Photonics West 2013
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2013-02-03
    • Related Report
      2013 Final Research Report
  • [Presentation] Plasmonic scattering of near-field and far-field by femtosecond laser irradiation2013

    • Author(s)
      T. Enami, G. Obara, M. Terakawa, M. Obara
    • Organizer
      12th International Conference on Laser Ablation (COLA2013)
    • Place of Presentation
      Ischia, Italy
    • Related Report
      2013 Annual Research Report
  • [Presentation] Control of localized near field and long-range plasmon polaritons for nanophotonics2013

    • Author(s)
      M. Terakawa, G. Obara, A. Yamada, H. Shimizu, M. Obara
    • Organizer
      Fundamentals of Laser Assisted Micro- & Nanotechnologies (FLAMN-13)
    • Place of Presentation
      St Petersburg, Russia
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Nanotemplateassisted fabrication of nanoneedle/ nanoprotrusion array and nano-periodic surface ripple2012

    • Author(s)
      発表者, 寺川光洋
    • Organizer
      31st International Congress on Applications of Lasers & Electro-Optics 2012 (ICALEO 2012)
    • Place of Presentation
      Anaheim, CA, USA
    • Year and Date
      2012-09-25
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Control of coherent long-range plasmon polaritons excited by a femtosecond laser for nano periodic surface patterning2012

    • Author(s)
      発表者, 小原豪
    • Organizer
      International Conference on Nanoscience + Technology (ICN+T 2012)
    • Place of Presentation
      Paris, France
    • Year and Date
      2012-07-25
    • Related Report
      2013 Final Research Report
  • [Presentation] Localized near field and scattered far field for surface photonics2012

    • Author(s)
      発表者, 寺川光洋
    • Organizer
      14th International Conference on Transparent Optical Networks (ICTON'12)
    • Place of Presentation
      Coventry, UK
    • Year and Date
      2012-07-03
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Nonlinear optical effect of nano periodic surface patterning using coherent long-range surface plasmon polaritons excited by femtosecond laser2012

    • Author(s)
      発表者, 小原豪
    • Organizer
      The 8th Asia Pacific Laser Symposium (APLS 2012)
    • Place of Presentation
      黄山, 中国
    • Year and Date
      2012-05-29
    • Related Report
      2013 Final Research Report
  • [Presentation] Enhanced near field properties of gold nanoparticle pairs for size selective trap2012

    • Author(s)
      発表者, 平野広大
    • Organizer
      SPIE Photonics West 2012
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-26
    • Related Report
      2013 Final Research Report
  • [Presentation] Enhanced near field properties of gold nanoparticle pairs for size selective trap2012

    • Author(s)
      K.Hirano, M.Terakawa, M.Obara
    • Organizer
      SPIE Photonics West 2011 (LASE)
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] High aspect ratio of near-field nano-lens for deep nano-crater patterning2012

    • Author(s)
      発表者, 藤村一郎
    • Organizer
      SPIE Photonics West 2012
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-24
    • Related Report
      2013 Final Research Report
  • [Presentation] Direct observation of surface plasmon far field for regular surface ripple formation by femtosecond laser irradiation of silicon wafer2012

    • Author(s)
      発表者, 前田直輝
    • Organizer
      SPIE Photonics West 2012
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-24
    • Related Report
      2013 Final Research Report
  • [Presentation] Plasmonic control of far-field interference for regular ripple formation on various material substrates irradiated by femtosecond laser2012

    • Author(s)
      発表者, 小原豪
    • Organizer
      SPIE Photonics West 2012
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-24
    • Related Report
      2013 Final Research Report
  • [Presentation] Plasmonic control of far-field interference for regular ripple formation on various material substrates irradiated by femtosecond laser2012

    • Author(s)
      G.Obara, N.Maeda, T.Miyanishi, M.Terakawa, M.Obara
    • Organizer
      SPIE Photonics West 2011 (LASE)
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Direct observation of surface plasmon far field for regular surface ripple formation by femtosecond laser irradiation of silicon wafer2012

    • Author(s)
      N.Maeda, G.Obara, T.Miyanishi, N.Nedyalkov, M.Obara
    • Organizer
      SPIE Photonics West 2011 (LASE)
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] High aspect ratio of near-field nano-lens for deep nano-crater patterning2012

    • Author(s)
      I.Fujimura, M.Terakawa
    • Organizer
      SPIE Photonics West 2011 (LASE)
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Templateassisted metal nanoneedle/nanoprotrusion array fabrication at a sub-diffractionlimited scale2012

    • Author(s)
      発表者, 田中悠人
    • Organizer
      SPIE Photonics West 2012
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-23
    • Related Report
      2013 Final Research Report
  • [Presentation] Template-assisted metal nanoneedle/nanoprotrusion array fabrication at a sub-diffraction-limited scale2012

    • Author(s)
      Y.Tanaka, J.D.B.Bradley, E.Mazur, M.Obara
    • Organizer
      SPIE Photonics West 2012 (LASE)
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2012-01-23
    • Related Report
      2011 Annual Research Report
  • [Presentation] Plasmonic and nanoplasmonic resonance scattered nearfield nanoprocessing2011

    • Author(s)
      発表者, 田中悠人
    • Organizer
      11th International Conference on Laser Ablation (COLA2011)
    • Place of Presentation
      Playa Del Carmen, Mexico
    • Year and Date
      2011-11-17
    • Related Report
      2013 Final Research Report
  • [Presentation] Uniform nanohole patterning by high intensity near field ablation with nanoparticle arrays obliquely irradiated with femtosecond laser2011

    • Author(s)
      発表者, 宮西智也
    • Organizer
      11th International Conference on Laser Ablation (COLA2011)
    • Place of Presentation
      Playa Del Carmen, Mexico
    • Year and Date
      2011-11-17
    • Related Report
      2013 Final Research Report
  • [Presentation] 1D and 2D arrays formation on the silicon surface by controlling coherent surface plasmon polaritons far-field excited by a femtosecond laser2011

    • Author(s)
      発表者, 小原豪
    • Organizer
      11th International Conference on Laser Ablation (COLA2011)
    • Place of Presentation
      Playa Del Carmen, Mexico
    • Year and Date
      2011-11-17
    • Related Report
      2013 Final Research Report
  • [Presentation] 1D and 2D arrays formation on the silicon surface by controlling coherent surface plasmon polaritons far-field excited by a femtosecond laser2011

    • Author(s)
      G.Obara, N.Maeda, T.Miyanishi, M.Terakawa, M.Obara
    • Organizer
      11th International Conference on Laser Ablation (COLA 2011)
    • Place of Presentation
      Playa del Carmen, Mexico
    • Year and Date
      2011-11-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] Far-field and near-field surface ablation patterning with coherent plasmon polaritons excited by a femtosecond laser2011

    • Author(s)
      発表者, 小原實
    • Organizer
      11th International Conference on Laser Ablation (COLA2011)
    • Place of Presentation
      Playa Del Carmen, Mexico
    • Year and Date
      2011-11-15
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Uniform nanohole patterning by high intensity near field ablation with nanoparticle arrays obliquely irradiated with femtosecond laser2011

    • Author(s)
      T.Miyanishi, M.Terakawa, M.Obara
    • Organizer
      11th International Conference on Laser Ablation (COLA 2011)
    • Place of Presentation
      Playa del Carmen, Mexico
    • Year and Date
      2011-11-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Plamonic and nonplasmonic resonance scattered near-field nanoprocessing2011

    • Author(s)
      Y.Tanaka, M.Terakawa, M.Obara
    • Organizer
      11th International Conference on Laser Ablation (COLA 2011)
    • Place of Presentation
      Playa del Carmen, Mexico
    • Year and Date
      2011-11-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Far-field and near-field surface ablation patterning with coherent plasmon polaritons excited by a femtosecond laser2011

    • Author(s)
      M.Obara, G.Obara, T.Miyanishi, Y.Tanaka, M.Terakawa
    • Organizer
      11th International Conference on Laser Ablation (COLA 2011)
    • Place of Presentation
      Playa del Carmen, Mexico(招待講演)
    • Year and Date
      2011-11-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Scattered near-field nanopatterning2011

    • Author(s)
      発表者, 田中悠人
    • Organizer
      European Materials Research Society 2011 Spring Meeting (E-MRS)
    • Place of Presentation
      Nice, France
    • Year and Date
      2011-05-12
    • Related Report
      2013 Final Research Report 2011 Annual Research Report
  • [Presentation] Periodic ripple formation on the silicon surface by controlling surface plasmon polariton excited by a femtosecond laser2011

    • Author(s)
      発表者, 小原豪
    • Organizer
      European Materials Research Society 2011 Spring Meeting (E-MRS)
    • Place of Presentation
      Nice, France
    • Year and Date
      2011-05-12
    • Related Report
      2013 Final Research Report 2011 Annual Research Report
  • [Presentation] Nonlinear optical effect of nano periodic surface patterning using coherent long-range surface plasmon polaritons excited by femtosecond laser

    • Author(s)
      G. Obara
    • Organizer
      The 8th Asia Pacific Laser Symposium (APLS 2012)
    • Place of Presentation
      黄山(中国)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Localized near field and scattered far field for surface photonics

    • Author(s)
      M. Terakawa
    • Organizer
      14th International Conference on Transparent Optical Networks (ICTON'12)
    • Place of Presentation
      コベントリー(英国)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Control of coherent long-range plasmon polaritons excited by a femtosecond laser for nano periodic surface patterning

    • Author(s)
      G. Obara
    • Organizer
      International Conference on Nanoscience+Technology (ICN+T2012)
    • Place of Presentation
      パリ(フランス)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Nanotemplate-Assisted Fabrication of Nanomeedle/Nanoprotrusion Array and Nano- Periodic Surface Ripple

    • Author(s)
      M. Terakawa
    • Organizer
      31st International Congress on Applications of Lasers & Electro-Optics (ICALEO 2012)
    • Place of Presentation
      アナハイム(米国)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Direct observation of early stages of surface ripples formation on LiNbO3 substrate

    • Author(s)
      H. Shimizu
    • Organizer
      SPIE Photonics West 2013
    • Place of Presentation
      サンフランシスコ(米国)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Periodic surface nanopatterning controlled with preformed scattering structures excited by femtosecond laser irradiation

    • Author(s)
      G. Obara
    • Organizer
      SPIE Photonics West 2013
    • Place of Presentation
      サンフランシスコ(米国)
    • Related Report
      2012 Annual Research Report
  • [Book] Ultrafast Laser Processing: From Micro- to Nano-scale, Chapter 7: Nanoablation using nanosphere and nanotip2012

    • Author(s)
      M. Terakawa, M. Obara
    • Total Pages
      27
    • Publisher
      Pan Stanford Publishing Pte Ltd
    • Related Report
      2013 Final Research Report
  • [Book] Ultrafast Laser Processing : From Micro- to Nano-scale, Chapter 7 : Nanoablation using nanosphere and nanotip (book chapter)2012

    • Author(s)
      M.Terakawa, M.Obara
    • Total Pages
      27
    • Publisher
      Pan Stanford Publishing Pte Ltd.
    • Related Report
      2011 Annual Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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