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30 GHz MEMS varibale capacitor utilizing pico-liter droplet

Research Project

Project/Area Number 23360165
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionRitsumeikan University

Principal Investigator

SUZUKI KENICHIRO  立命館大学, 理工学部, 教授 (70388122)

Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥19,630,000 (Direct Cost: ¥15,100,000、Indirect Cost: ¥4,530,000)
Fiscal Year 2013: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2012: ¥11,700,000 (Direct Cost: ¥9,000,000、Indirect Cost: ¥2,700,000)
Fiscal Year 2011: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
KeywordsRF-MEMS / 可変キャパシタ / 液滴搬送 / EWOD / フィルタ / 表面張力 / 空間二重層 / BEF / 流体 / 静電容量 / RFフィルタ / 毛管現象 / ファンデルワールス力 / 高周波 / マイクロ・ナノデバイス / 先端機能デバイス / 無線通信 / 流体制御 / エレクトロウェッティング
Research Abstract

The research on a novel principle utilizing the change of 80 in the permittivity in a capacitor with pure water is objective in this research. During the research, 0.1 nL water droplet could be transported in a 10 um gap. By using this varibale capacitor, a band elimination filter (BEF) for the operation of 1-6 GHz was fabricated. Note that it was indicated that water droplet in a 10 um gap could be transported, variable capacitor with water could be operated in 10 GHz, and the result could be adopted to a real filter by the success in the varibale BEF.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (28 results)

All 2014 2013 2012 2011 Other

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (19 results) (of which Invited: 5 results) Remarks (2 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] 1-5 GHz Monolithic Multi-frequency-variable Band Elimination Filter Utilizing Fluid Microelectromechanical System Variable Capacitors2014

    • Author(s)
      Y. Yamada, T. Yamanaka, T. Furutsuka, and K. Suzuki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol. 53

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 1-5GHz monolithic multifrequency-variable band elimination filter2014

    • Author(s)
      Yuuki Yamada, Tatsuya Yamanaka, Takashi Furutsuka, and Kenichiro Suzuki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Pages: 1-8

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Variable Resonant Frequency Selection for Fishbone-Shaped Microelectromechanical system Resonator Based on Multi-Physics Simulation2013

    • Author(s)
      S. Kuroda, N. Suzuki, H. Tanigawa, and K. Suzuki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52

    • NAID

      210000142416

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Higher-order Vibrational Mode Frequency Tuning Utilizing Fishbone-shaped Microelectromechanical Systems Resonator2013

    • Author(s)
      Naoya Suzuki, Hiroshi Tanigawa, and Kenichiro Suzuki
    • Journal Title

      J. Micromech. Microeng.

      Volume: 23 Pages: 45018-45018

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Drift of Electrical Characteristics over Time for Fluid MEMS Capacitors2011

    • Author(s)
      K. Ishida, T. Furutsuka, and K. Suzuki
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 131, No.11 Pages: 388-393

    • NAID

      10030533147

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Drift of Electrical Characteristics over Time for Fluid MEMS Capacitors2011

    • Author(s)
      石田勝通、古塚岐、鈴木健一郎
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 131 Pages: 388-393

    • NAID

      10030533147

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] ミリ波帯フェーズドアレイアンテナ(PAA)と高周波可変フィルタへのMEMS技術の展開2014

    • Author(s)
      鈴木健一郎
    • Organizer
      IEEE AP-S Kansai Chapter
    • Place of Presentation
      立命館大学朱雀キャンパス,京都府
    • Year and Date
      2014-04-17
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] A widely frequency variable UHF bandpass filter with fluid MEMS capacitors2013

    • Author(s)
      T. Nishimura, Y. Yamada, Y. Furuno, T. Furutsuka, and K. Suzuki
    • Organizer
      the 5th Integrated MEMS Symposium
    • Place of Presentation
      Sendai International Center, Miyagi
    • Year and Date
      2013-11-05
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] A fluid MEMS switch utilizing droplet elongation2013

    • Author(s)
      Y. Morikawa, Y. Yamada, Y. Furuno, T. Furutusuka, and K. Suzuki
    • Organizer
      the 30th Sensor Symposium
    • Place of Presentation
      Sendai International Center, Miyagi
    • Year and Date
      2013-11-05
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] 2-6 GHz Monolithic Multi-frequency-variable Band Elimination Filter Utilizing Fluid Microelectromechanical System Variable Capacitors2013

    • Author(s)
      Y. Yamada, T. Yamanaka, T. Furutsuka, and K. Suzuki
    • Organizer
      2013 International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Royton Sapporo, Hokkaido
    • Year and Date
      2013-11-05
    • Related Report
      2013 Final Research Report
  • [Presentation] SHF-band meander inductor with high Q-factor2012

    • Author(s)
      Y. Yamada, T. Yamanaka, T. Furutsuka, and K. Suzuki
    • Organizer
      the 4th Integrated MEMS Symposium
    • Place of Presentation
      Kitakyushu International Center, Fukuoka
    • Year and Date
      2012-10-22
    • Related Report
      2013 Final Research Report
  • [Presentation] MEMS Variable Capacitor Utilizing Pulse Voltage Control for Droplet Elongation2012

    • Author(s)
      Y. Furuno, Y. Matsunami, T. Furutsuka, and K. Suzuki
    • Organizer
      the 29th Sensor Symposium
    • Place of Presentation
      Kitakyushu International Center, Fukuoka
    • Year and Date
      2012-10-22
    • Related Report
      2013 Final Research Report
  • [Presentation] MEMS Fluidic Variable Capacitor for the Application of Wide-Band GHz Filters2012

    • Author(s)
      K. Suzuki
    • Organizer
      The 4th Int. Workshop on Material Issues for MEMS/MST Devices (IWMIMD)
    • Place of Presentation
      Shenyang, China
    • Year and Date
      2012-06-04
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] MEMS Resonator : What is the challenge?2011

    • Author(s)
      鈴木健一郎
    • Organizer
      International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      京都ANAホテル(京都)(招待講演)
    • Year and Date
      2011-10-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fluid Control for MEMS Variable Capacitance Based on Liquid Elongation2011

    • Author(s)
      Y. Furuno, T. Yamanaka, and K. Suzuki
    • Organizer
      the 28th Sensor Symposium
    • Place of Presentation
      Tower Hole Funabori, Tokyo
    • Year and Date
      2011-09-26
    • Related Report
      2013 Final Research Report
  • [Presentation] EWOD Droplet Transportation in a Closed Channel with a 20 um Narrow Gap2011

    • Author(s)
      Y. Matsunami, T. Yamanaka, and K. Suzuki
    • Organizer
      the 3rd Integrated MEMS Symposium
    • Place of Presentation
      Tower Hole Funabori, Tokyo
    • Year and Date
      2011-09-26
    • Related Report
      2013 Final Research Report
  • [Presentation] EWOD Droplet Transportation in a Closed Channel with a 20 μm Narrow Gap2011

    • Author(s)
      松波陽平
    • Organizer
      集積化MEMSシンポジウム(応用物理学会)
    • Place of Presentation
      タワーホール船堀(東京)
    • Year and Date
      2011-09-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fluid Control for MEMS Variable Capacitance Based on Liquid Elongation2011

    • Author(s)
      古野優太朗
    • Organizer
      電気学会センサ・マイクロマシンと応用シンポジウム
    • Place of Presentation
      タワーホール船堀(東京)
    • Year and Date
      2011-09-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] 集積化RF-MEMS が広げる新しいワイヤレス通信技術とユビキタス社会2011

    • Author(s)
      鈴木健一郎
    • Organizer
      シンポジウム<エレクトロニクス材料とプロセス>(化学工学会 第43回秋季大会)
    • Place of Presentation
      名古屋工業大学(愛知県)
    • Year and Date
      2011-09-14
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] 集積化RF-MEMSが広げる新しいワイヤレス通信技術とユビキタス社会2011

    • Author(s)
      鈴木健一郎
    • Organizer
      シンポジウム<エレクトロニクス材料とプロセス>化学工学会第43回秋季大会
    • Place of Presentation
      名古屋工業大学(愛知県)(招待講演)
    • Year and Date
      2011-09-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] 2 - 6 GHz Monolithic Multi-frequency-variable Band Elimination Filter Utilizing Fluid Microelectromechanical System Variable Capacitors

    • Author(s)
      Y. Yamada, T. Yamanaka, T. Furutsuka, and K. Suzuki
    • Organizer
      2013 International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Royton sapporo, Hokkaido
    • Related Report
      2013 Annual Research Report
  • [Presentation] ミリ波帯フェーズドアレイアンテナ(PAA)と高周波可変フィルタへのMEMS技術の展開

    • Author(s)
      鈴木健一郎
    • Organizer
      IEEE AP-S Kansai Chapter
    • Place of Presentation
      Ritsumeikan University, Kyoto
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] MEMS Fluidic Variable Capacitor for the Application of Wide-Band GHz Filters

    • Author(s)
      Kenichiro Suzuki
    • Organizer
      The 4th Int. Workshop on Material Issues for MEMS/MST Devices (IWMIMD)
    • Place of Presentation
      Shenyang, China
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] MEMS Variable Capacitor Utilizing Pulse Voltage Control for Droplet Elongation

    • Author(s)
      Y. Furuno et al.
    • Organizer
      The 29th Sensor Symposium
    • Place of Presentation
      福岡県北九州国際会議場
    • Related Report
      2012 Annual Research Report
  • [Presentation] SHF-band meander inductor with high Q-factor

    • Author(s)
      Y. Yamada et al.
    • Organizer
      The 4th Integrated MEMS Symposium
    • Place of Presentation
      福岡県北九州国際会議場
    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.ritsumei.ac.jp/se/rm/micro/laboratory/suzuki.html

    • Related Report
      2013 Final Research Report
  • [Remarks]

    • URL

      http://www.ritsumei.ac.jp/se/rm/micro/laboratory/suzuki.html

    • Related Report
      2011 Annual Research Report
  • [Patent(Industrial Property Rights)] MEMS 可変キャパシタとそれを用いたフィルタ装置2011

    • Inventor(s)
      鈴木健一郎
    • Industrial Property Rights Holder
      半導体理工学研究センター
    • Industrial Property Rights Type
      特許
    • Filing Date
      2011-11-04
    • Related Report
      2013 Final Research Report
    • Overseas

URL: 

Published: 2011-04-06   Modified: 2019-07-29  

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