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A study on phase change characteristics of Ge-Cu-Te alloy film for PCRAM

Research Project

Project/Area Number 23360297
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Structural/Functional materials
Research InstitutionTohoku University

Principal Investigator

SUTOU Yuji  東北大学, 工学(系)研究科(研究院), 准教授 (80375196)

Co-Investigator(Renkei-kenkyūsha) KOIKE Junichi  東北大学, 未来科学技術共同研究センター, 教授 (10261588)
KOBAYASHI Keisuke  高知工科大学, 総合研究所, 客員教授 (50372149)
Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥19,240,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥4,440,000)
Fiscal Year 2013: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2012: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2011: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
Keywords相変化メモリ / 不揮発性メモリ / アモルファス / 結晶化 / 半導体メモリ / 反射率 / 密度 / 電気抵抗 / 電子状態 / 結晶化速度 / 結晶成長
Research Abstract

Phase change random access memory (PCRAM) has attracted much attention as a new class of non-volatile memories because of its low production cost and high scalability. PCRAM is operated by way of Joule heating to induce phase transition between high resistance amorphous (reset state) and low resistance crystalline (set state) phases of a phase change material (PCM). In this study, we proposed a new PCM, Ge-Cu-Te compounds, with high crystallization temperature and low melting point, and investigated their phase change behaviors and memory characteristics.
We found that the GeCu2Te3 compound shows unique phase change characteristics, such as volume expansion by crystallization and reflectance increase by amorphization. Moreover, it was also found that the GeCu2Te3 compound shows a fast phase change speed. Therefore, the GCT film is strongly expected as a phase change material for PCRAM with low energy consumption, high data retention and fast writing speed.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (49 results)

All 2014 2013 2012 2011 Other

All Journal Article (20 results) (of which Peer Reviewed: 12 results) Presentation (25 results) (of which Invited: 11 results) Remarks (2 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 2 results)

  • [Journal Article] Multiple phase change structure for the scalable phase change random access memory array2014

    • Author(s)
      鄭鎭源、他
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 4 Pages: 041801-041801

    • DOI

      10.7567/jjap.53.041801

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Origin of the unusual reflectance and density contrasts in the phase-change material Cu_2GeT_32013

    • Author(s)
      J.M. Skelton, K. Kobayashi, Y. Sutou, S.R. Elliott
    • Journal Title

      Appl. Phys. Lett

      Volume: 102 Issue: 22 Pages: 224105-224105

    • DOI

      10.1063/1.4809598

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Investigation of a selective switching device using a phase-change material for a 3-dimensional PCRAM array2013

    • Author(s)
      JM. Lee, YH. Song, Y. Saito, Y. Sutou, J. Koike
    • Journal Title

      J. Kore. Phys. Soc

      Volume: 62 Issue: 9 Pages: 1258-1263

    • DOI

      10.3938/jkps.62.1258

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fourfold coordicated Te atoms in amorhous GeCu_2Te_3 phase change material2013

    • Author(s)
      P. Jovari, Y. Sutou, I. Kaban, Y. Saito, J. Koike
    • Journal Title

      Scr. Mater

      Volume: 68 Pages: 122-125

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Optical contrast and laser-induced phase transition in GeCu_2Te_3 thin film2013

    • Author(s)
      齊藤雄太、須藤祐司、小池淳一
    • Journal Title

      Applied Physics Letters

      Volume: 102 Issue: 5

    • DOI

      10.1063/1.4791567

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fourfold coordinated Te atoms in amorphous GeCu_2Te_3 phase change material2013

    • Author(s)
      R Jovari、須藤祐司、I. Kaban、斎藤雄太、小池淳一
    • Journal Title

      Scripta Materialia

      Volume: 68 Issue: 2 Pages: 122-125

    • DOI

      10.1016/j.scriptamat.2012.09.028

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fast crystal nucleation induced by surface oxidation in Si-doped GeTe amorphous thin film2012

    • Author(s)
      齊藤雄太、須藤祐司、小池淳一
    • Journal Title

      Applied Physics Letters

      Volume: 100 Issue: 23

    • DOI

      10.1063/1.4726107

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study of GeCu_2Te_3 by hard X-ray photoelectron spectroscopy2012

    • Author(s)
      K. Kobayashi, M. Kobata, Y. Saito, Y. Sutou, J. Koike
    • Journal Title

      Proceedings of PCOS2012

      Volume: 1 Pages: 76-84

    • Related Report
      2013 Final Research Report
  • [Journal Article] Multi-resistance characteristics of PCRAM with Ge_1Cu_2Te_3 and Ge_2Sb_2Te_5 film2012

    • Author(s)
      齊藤雄太、Y. H. Song、J. M. Lee、須藤祐司、小池淳一
    • Journal Title

      IEEE Electron Device Letters

      Volume: 33 Issue: 10 Pages: 1399-1401

    • DOI

      10.1109/led.2012.2210534

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Si addition on the crystallization behavior of GeTe phase change materials2012

    • Author(s)
      齊藤雄太、須藤祐司、小池淳一
    • Journal Title

      Journal of Physics D : Applied Physics

      Volume: 45 Issue: 40 Pages: 405302-405302

    • DOI

      10.1088/0022-3727/45/40/405302

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystallization and electrical characteristics of Ge_1Cu_2Te_3 films for phase change random access memory2012

    • Author(s)
      鎌田俊哉、須藤祐司、隅谷真志、斎藤雄太、小池淳一
    • Journal Title

      Thin Solid Films

      Volume: 520 Issue: 13 Pages: 4389-4393

    • DOI

      10.1016/j.tsf.2012.02.025

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystallization process and thermal stability of Ge_1Cu_2Te_3 amorphous thin films for use as phase change materials2012

    • Author(s)
      須藤祐司、鎌田俊哉、隅谷真志、齊藤雄太、小池淳一
    • Journal Title

      Acta Materialia

      Volume: 60 Issue: 3 Pages: 872-880

    • DOI

      10.1016/j.actamat.2011.10.048

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystallization behavior and resistance change in eutectic Si_<15>Te_<85> amorphous film2012

    • Author(s)
      齊藤雄太、須藤祐司、小池淳一
    • Journal Title

      Thin Solid Films

      Volume: 520 Issue: 6 Pages: 2128-2131

    • DOI

      10.1016/j.tsf.2011.09.012

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystallization behaviors and structural study of amorphous GeCu2Te32012

    • Author(s)
      Y. Sutou
    • Journal Title

      Proceedings of EPCOS 2012

      Volume: 1 Pages: 50-55

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Composition dependence on phase change characteristics in Ge-Cu-Te ternary phase change materials2012

    • Author(s)
      Y. Saito
    • Journal Title

      Proceedings of EPCOS 2012

      Volume: 1 Pages: 152-153

    • Related Report
      2012 Annual Research Report
  • [Journal Article] A study on phase change characteristics of Ge-Cu-Te ternary alloy thin films2012

    • Author(s)
      Y. Sutou
    • Journal Title

      Proceedings of the 24th symposium on PCOS 2012

      Volume: 1 Pages: 45-48

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Study of GeCu2Te3 by Hard X-ray Photoelectron Spectroscopy2012

    • Author(s)
      K. Kobayashi
    • Journal Title

      Proceedings of the 24th symposium on PCOS 2012

      Volume: 1 Pages: 76-84

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Phase change characteristics of Ge_1Cu_2Te_3 films2011

    • Author(s)
      Y.Sutou, Y.Saito, T.Kamada, M.Sumiya, J.Koike
    • Journal Title

      Proceedings of E\PCOS 2011

      Volume: 1 Pages: 53-58

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Crystallization behaviors of Si-doped GeTe phase change materials2011

    • Author(s)
      Y.Saito, Y.Sutou, J.Koike
    • Journal Title

      Proceedings of E\PCOS 2011

      Volume: 1 Pages: 197-198

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Ge-Cu-Te films for phase change random access memory2011

    • Author(s)
      Y.Sutou, Y.Saito, T.Kamada, M.Sumiya, J.Koike
    • Journal Title

      Proceedings of the 23^<rd> Symposium on PCOS2011

      Volume: 1 Pages: 27-29

    • Related Report
      2011 Annual Research Report
  • [Presentation] Phase transition characteristics of GeCu_2Te_3 film2013

    • Author(s)
      Y. Sutou
    • Organizer
      PCOS2013
    • Place of Presentation
      仙台
    • Year and Date
      2013-11-29
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Phase transition characteristics of GeCu_2Te_3 for PCRAM2013

    • Author(s)
      Y, Sutou, Y. Saito, J. Koike
    • Organizer
      ADMETA2013
    • Place of Presentation
      東京
    • Year and Date
      2013-10-09
    • Related Report
      2013 Final Research Report
  • [Presentation] PCRAM 用Ge-Te 系薄膜の相変化挙動2013

    • Author(s)
      須藤祐司
    • Organizer
      第138回結晶工学分科会研究会
    • Place of Presentation
      東京
    • Year and Date
      2013-04-19
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] 不揮発性メモリ用相変化材料に関する研究2013

    • Author(s)
      須藤祐司
    • Organizer
      日本金属学会春季大会
    • Place of Presentation
      東京
    • Year and Date
      2013-03-29
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] PCRAM用Ge-Te系薄膜の相変化挙動2013

    • Author(s)
      須藤祐司
    • Organizer
      第138回結晶工学分科会研究会
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Phase transition characteristics of GeCu2Te3 for PCRAM2013

    • Author(s)
      Y. Sutou, Y. Saito, J. Koike
    • Organizer
      ADMETA 2013
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] Phase transition characteristics of GeCu2Te3 film2013

    • Author(s)
      Y. Sutou
    • Organizer
      PCOS 2013
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Feasibility study of Ge2Sb2Te5/GeCu2Te3 memory cell with multi-level resistance2013

    • Author(s)
      S. Shindo, Y. Saito, Y. Sutou, J. Koike, J.M. Lee, Y.H. Song
    • Organizer
      PCOS 2013
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
  • [Presentation] 不揮発性メモリ用相変化材料に関する研究2013

    • Author(s)
      須藤祐司
    • Organizer
      日本金属学会春期大会
    • Place of Presentation
      東京
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] A study on phase change characteristics of Ge-Cu-Te ternary alloy thin films2012

    • Author(s)
      Y. Sutou, Y. Saito, J. Koike
    • Organizer
      PCOS2012
    • Place of Presentation
      静岡
    • Year and Date
      2012-11-30
    • Related Report
      2013 Final Research Report
  • [Presentation] Study of GeCu_2Te_3 by hard X-ray photoelectron spectroscopy2012

    • Author(s)
      K. Kobayashi, M. Kobata, Y. Saito, Y. Sutou, J. Koike
    • Organizer
      PCOS2012
    • Place of Presentation
      静岡
    • Year and Date
      2012-11-30
    • Related Report
      2013 Final Research Report
  • [Presentation] Crystallization behaviors and structural study of amorhous GeCu_2Te_32012

    • Author(s)
      Y. Sutou, Y. Saito, J. Koike, P. Jovari, I. Kaban
    • Organizer
      EPCOS2012
    • Place of Presentation
      フィンランド, タンペレ
    • Year and Date
      2012-07-09
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] PCRAM 用相変化材料の最近の研究開発2012

    • Author(s)
      須藤祐司
    • Organizer
      反応工学部会CVD 反応分科会主催14回シンポジウム
    • Place of Presentation
      東京
    • Year and Date
      2012-01-30
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] PCRAM用相変化材料の最近の研究開発2012

    • Author(s)
      須藤祐司
    • Organizer
      反応工学部会CVD反応分科会主催14回シンポジウム「不揮発性メモリの材料とプロセス技術」
    • Place of Presentation
      東京(招待講演)
    • Year and Date
      2012-01-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Crystallization behaviors and structural study of amorphous GeCu2Te32012

    • Author(s)
      Y. Sutou
    • Organizer
      European/phase change and ovonics symposium 2012 (EPCOS)
    • Place of Presentation
      Tampere, Finland
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Composition dependence on phase change characteristics in Ge-Cu-Te ternary phase change materials2012

    • Author(s)
      Y. Saito
    • Organizer
      European/phase change and ovonics symposium 2012 (EPCOS)
    • Place of Presentation
      Tampere, Finland
    • Related Report
      2012 Annual Research Report
  • [Presentation] A study on phase change characteristics of Ge-Cu-Te ternary alloy thin films2012

    • Author(s)
      Y. Sutou
    • Organizer
      Phase change oriented science PCOS 2012
    • Place of Presentation
      静岡
    • Related Report
      2012 Annual Research Report
  • [Presentation] Study of GeCu2Te3 by Hard X-ray Photoelectron Spectroscopy2012

    • Author(s)
      K. Kobayashi
    • Organizer
      Phase change oriented science PCOS 2012
    • Place of Presentation
      静岡
    • Related Report
      2012 Annual Research Report
  • [Presentation] PCRAM 用相変化材料の研究開発動向2011

    • Author(s)
      須藤祐司
    • Organizer
      SEMI テクノロジーシンポジウム2011(セミコンジャパ2011)
    • Place of Presentation
      東京
    • Year and Date
      2011-12-08
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] PCRAM用相変化材料の研究開発動向2011

    • Author(s)
      須藤祐司
    • Organizer
      SEMIテクノロジーシンポジウム(STS)2011(セミコンジャパン2011)
    • Place of Presentation
      東京(招待講演)
    • Year and Date
      2011-12-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] Ge-Cu-Te films for phase change random access memory2011

    • Author(s)
      Y.Sutou, Y.Saito, T.Kamada, M.Sumiya, J.Koike
    • Organizer
      PCOS相変化研究会
    • Place of Presentation
      熱海
    • Year and Date
      2011-11-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] GeCu_2Te_3の電気特性とその相変化挙動2011

    • Author(s)
      隅谷真志、鎌田俊哉、齋藤雄太、須藤祐司、小池淳一
    • Organizer
      2011年日本金属学会秋期大会
    • Place of Presentation
      沖縄
    • Year and Date
      2011-11-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] Phase change characteristics of Ge_1Cu_2Te_3 films for use as phase change material2011

    • Author(s)
      Y. Sutou, Y. Saito, T. Kamada, M. Sumiya, J. Koike
    • Organizer
      EPCOS2011
    • Place of Presentation
      スイス, チューリッヒ
    • Year and Date
      2011-09-05
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Phase change characteristics of Ge_1Cu_2Te_3 films for use as phase change material2011

    • Author(s)
      Y.Sutou, Y.Saito, T.Kamada, M.Sumiya, J.Koike
    • Organizer
      European\Phase Changed and Ovonics Symposium (E\PCOS2011)
    • Place of Presentation
      スイス(チューリッヒ)(招待講演)
    • Year and Date
      2011-09-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] Crystallization behaviors of Si-doped GeTe phase change materials2011

    • Author(s)
      Y.Saito, Y.Sutou, J.Koike
    • Organizer
      European\Phase Changed and Ovonics Symposium (E\PCOS2011)
    • Place of Presentation
      スイス(チューリッヒ)
    • Year and Date
      2011-09-05
    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.koike-lab.jp/

    • Related Report
      2013 Final Research Report
  • [Remarks]

    • URL

      http://www.material.tohoku.ac.jp/~kyokugen/lab.html

    • Related Report
      2011 Annual Research Report
  • [Patent(Industrial Property Rights)] Multi-level phase change memory device2012

    • Inventor(s)
      Y. Sutou,Y. Saito, J. Koike, YH. Song
    • Industrial Property Rights Holder
      東北大学, Hanyang 大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-04-17
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] Multi-Level Phase Change Memory Device2012

    • Inventor(s)
      Y.Sutou 他3名
    • Industrial Property Rights Holder
      Y.Sutou 他3名
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-04-17
    • Related Report
      2012 Annual Research Report
    • Overseas

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Published: 2011-04-06   Modified: 2019-07-29  

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