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A Gaussian Shaped Resonator for Sensing Single Cell

Research Project

Project/Area Number 23510126
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionNiigata University

Principal Investigator

ABE Takashi  新潟大学, 自然科学系, 教授 (00333857)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywords水晶振動子微小天秤 / 単一細胞 / ナノ計測 / MEMS / 単一微粒子 / 極限センシング / 水晶振動子 / QCMセンサ / 微粒子
Research Abstract

In this study, we tried to improve the sensitivity of quartz crystal sensor for sensing single cell. The enhancement of mass sensitivity was realized by shaping the resonator based on the simulation results. As the result, the mass sensitivity was improved at least one order of magnitude and the responses show a linear relationship between mass changes and frequency changes.
The developed method is expected to be used for evaluation of nanomaterials in addition to measurements of single cell.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (14 results)

All 2013 2012 2011

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (12 results)

  • [Journal Article] A fabrication method of high-Q quartz crystal resonator using double-layered etching mask for DRIE2012

    • Author(s)
      Takashi Abe 、Yousuke Itasaka
    • Journal Title

      Sensors and Actuators A

      Volume: vol. 188 Pages: 503-506

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] A fabrication method of high-Q quartz crystal resonator using double-layered etching mask for DRIE2012

    • Author(s)
      Takashi Abe, Yousuke Itasaka
    • Journal Title

      SENSORS AND ACTUATORS A-PHYSICAL

      Volume: 188 Pages: 503-506

    • DOI

      10.1016/j.sna.2012.02.006

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] 楕円形状AT カット水晶振動子の形状最適化2013

    • Author(s)
      渡邊 将、気谷裕樹、寒川雅之、安部隆
    • Organizer
      第30回「センサ・マイクロマシン応用システム」シンポジウム
    • Place of Presentation
      仙台
    • Related Report
      2013 Final Research Report
  • [Presentation] 微細加工 QCM を用いた単一微粒子計測技術の開発2013

    • Author(s)
      気谷裕樹、渡邊 将、寒川雅之、安部隆
    • Organizer
      第30回「センサ・マイクロマシン応用システム」シンポジウム
    • Place of Presentation
      仙台
    • Related Report
      2013 Final Research Report
  • [Presentation] 楕円形状ATカット水晶振動子の形状最適化2013

    • Author(s)
      渡邉 将,気谷 裕樹,寒川 雅之,安部 隆
    • Organizer
      第30回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      仙台国際センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] 微細加工QCMを用いた単一微粒子計測技術の開発2013

    • Author(s)
      気谷 裕樹,渡邉 将,寒川 雅之,安部 隆
    • Organizer
      第30回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      仙台国際センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] A simple method to fabricate 3D microstructures using gray-scale lithography and dry etching2011

    • Author(s)
      Yuuki Yamada、Takashi Abe
    • Place of Presentation
      京都
    • Year and Date
      2011-11-11
    • Related Report
      2013 Final Research Report
  • [Presentation] 結晶異方性を考慮した水晶振動子の形状最適化2011

    • Author(s)
      柳澤真規、安部 隆
    • Organizer
      第28回「センサ・マイクロマシン応用システム」シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2013 Final Research Report
  • [Presentation] 立体モデルを縮小可能なグレイスケールリソグラフィ法2011

    • Author(s)
      山田悠貴、安部 隆
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2013 Final Research Report
  • [Presentation] A DRY ETCHING METHOD USING DOUBLE-LAYERED MASK FOR MODULATING SHAPE OF DEEP-ETCHED QUARTZ SURFACE2011

    • Author(s)
      Takashi Abe、Yousuke Itasaka
    • Organizer
      Tech. Digest of Transducers
    • Place of Presentation
      北京
    • Related Report
      2013 Final Research Report
  • [Presentation] A DRY ETCHING METHOD USING DOUBLE-LAYERED ETCHING MASK FOR MODULATING SHAPE OF DEEP-ETCHED QUARTZ SURFACE2011

    • Author(s)
      Takashi Abe, Yousuke Itasaka
    • Organizer
      Transducers 11
    • Place of Presentation
      北京
    • Related Report
      2011 Research-status Report
  • [Presentation] A simple method to fabricate 3D microstructures using gray-scale lithography and dry etching2011

    • Author(s)
      Yuuki Yamada, Takashi Abe
    • Organizer
      DPS 2011
    • Place of Presentation
      京都
    • Related Report
      2011 Research-status Report
  • [Presentation] 結晶異方性を考慮した水晶振動子の形状最適化2011

    • Author(s)
      柳澤真規、安部 隆
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2011 Research-status Report
  • [Presentation] 立体モデルを縮小可能なグレイスケールリソグラフィ法2011

    • Author(s)
      山田悠貴、安部 隆
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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