Fabrication of single cell isolation structure and very narrow slit cell separation microchannel by semiconductor processing
| Project/Area Number |
23510141
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Renkei-kenkyūsha) |
TAKADA Ayako 東京工業大学, 技術部, 技術職員 (20401565)
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| Project Period (FY) |
2011 – 2013
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2012: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2011: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
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| Keywords | マイクロバイオシステム / 半導体プロセス技術 / 単一細胞 / 細胞分離 / バイオチップ / プラズマプロセス / リソグラフィ / マイクロ・ナノデバイス / プラズマ加工 / マイクロ流路 / 半導体プロセス |
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| Research Abstract |
In this research, Si-based microchannels without cover plates were fabricated by the Ar/F2 vapor etching process. We succeeded in the transport of E. coli cells in the microchannel. We also fabricated Si-based two-step microchannels without top cover plates by Ar/F2 vapor etching and Cl2-ICP etching processes. We think that the development of cell research, drug discovery, and rapid response measurement such as in food poisoning can be expected by shortening the analysis time using the proposed techniques.
We propose a size sieving microbial cell separation apparatus consist of multipillar microenclosures. Single cells of Escherichia coli and Saccharomyces cerevisiae were separately captured in smaller and lager microenclosures just by dropping mixtures. Moreover, we succeeded in making multipillar microenclosures on surface emitting laser wafers.
In this research, basic technologies on single cell isolation and cell separation using microchannel and microenclosure were established.
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Report
(4 results)
Research Products
(29 results)
