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Fabrication of single cell isolation structure and very narrow slit cell separation microchannel by semiconductor processing

Research Project

Project/Area Number 23510141
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionTokyo Institute of Technology

Principal Investigator

MATSUTANI Akihiro  東京工業大学, 技術部, 技術職員 (40397047)

Co-Investigator(Renkei-kenkyūsha) TAKADA Ayako  東京工業大学, 技術部, 技術職員 (20401565)
Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2012: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2011: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywordsマイクロバイオシステム / 半導体プロセス技術 / 単一細胞 / 細胞分離 / バイオチップ / プラズマプロセス / リソグラフィ / マイクロ・ナノデバイス / プラズマ加工 / マイクロ流路 / 半導体プロセス
Research Abstract

In this research, Si-based microchannels without cover plates were fabricated by the Ar/F2 vapor etching process. We succeeded in the transport of E. coli cells in the microchannel. We also fabricated Si-based two-step microchannels without top cover plates by Ar/F2 vapor etching and Cl2-ICP etching processes. We think that the development of cell research, drug discovery, and rapid response measurement such as in food poisoning can be expected by shortening the analysis time using the proposed techniques.
We propose a size sieving microbial cell separation apparatus consist of multipillar microenclosures. Single cells of Escherichia coli and Saccharomyces cerevisiae were separately captured in smaller and lager microenclosures just by dropping mixtures. Moreover, we succeeded in making multipillar microenclosures on surface emitting laser wafers.
In this research, basic technologies on single cell isolation and cell separation using microchannel and microenclosure were established.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (29 results)

All 2013 2012 2011 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (27 results)

  • [Journal Article] Fabrication of Silicon Microchannel for Transport of Bacterial Cells by Ar/F2 Vapor Etching Process2013

    • Author(s)
      A. Matsutani, and A. Takada
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 4R Pages: 47001-47001

    • DOI

      10.7567/jjap.52.047001

    • NAID

      210000141963

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Microfabrication of Si and GaAs by Plasma Etching Process Using Bacterial Cells as an Etching Mask Material2012

    • Author(s)
      A. Matsutani and A. Takada
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 51 Issue: 8R Pages: 87001-87001

    • DOI

      10.1143/jjap.51.087001

    • NAID

      40019395655

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Presentation] InP 基板上に製作したマイクロ囲いを用いた出芽酵母の培養2013

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第28回化学とマイクロ・ナノシステム学会
    • Place of Presentation
      イーグレ姫路
    • Year and Date
      2013-12-06
    • Related Report
      2013 Final Research Report
  • [Presentation] マイクロ牧場アレイを用いた出芽酵母の培養2013

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学
    • Year and Date
      2013-09-16
    • Related Report
      2013 Final Research Report
  • [Presentation] Ar/F_2気相エッチングにより製作したSiマイクロ流路を用いた大腸菌細胞の輸送2013

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第4回集積化MEMS技術研究ワークショップ
    • Place of Presentation
      大阪府立大学
    • Year and Date
      2013-07-27
    • Related Report
      2013 Final Research Report
  • [Presentation] マイクロピラー構造を用いた大腸菌と酵母の単一細胞分離とサイズ分離2013

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2013-03-27
    • Related Report
      2013 Final Research Report
  • [Presentation] Single-Cell Isolation and Sizing of Microorganisms by Microenclosure Array with Multipillar Structure2012

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      MNC2012
    • Place of Presentation
      Kyot, Japan, 神戸メリケンパークオリエンタルホテル
    • Year and Date
      2012-11-01
    • Related Report
      2013 Final Research Report
  • [Presentation] Microfabrication of Single-Cell Isolation Structure on Vertical Cavity Surface Emitting Laser Wafer2012

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      第29回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      北九州国際会議場
    • Year and Date
      2012-10-23
    • Related Report
      2013 Final Research Report
  • [Presentation] Microfabrication of Si based Microchannel for Transport of Bacterial Cells by Ar/F_2 Vapor Etching and Cl_2 Inductively Coupled Plasma Etching2012

    • Author(s)
      A. Matsutani, H. Ohtsuki and A. Takada
    • Organizer
      11^<th> APCPST
    • Place of Presentation
      Kyot, Japan, 京都大学
    • Year and Date
      2012-10-03
    • Related Report
      2013 Final Research Report
  • [Presentation] 半導体プロセスを用いた細胞サイズ分離用マイクロピラー構造の製作2012

    • Author(s)
      松谷晃宏,高田綾子
    • Organizer
      2012年秋季第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学・松山大学
    • Year and Date
      2012-09-12
    • Related Report
      2013 Final Research Report
  • [Presentation] Single-Cell Isolation of Bacteria Using Microenclosure and Its Applications2012

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      RSC Tokyo Conference
    • Place of Presentation
      Makuhari, Japan, 幕張メッセ
    • Year and Date
      2012-09-06
    • Related Report
      2013 Final Research Report
  • [Presentation] Ar/F_2 気相エッチングによる細菌細胞輸送用Si マイクロ流路の形成2012

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2012-03-18
    • Related Report
      2013 Final Research Report
  • [Presentation] 低圧プラズマプロセスによる細菌細胞の分解と細菌細胞を用いた半導体のドライエッチング2011

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      電気学会プラズマ/パルスパワー合同研究会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2011-12-15
    • Related Report
      2013 Final Research Report
  • [Presentation] Dry Etching of Escherichia coli by O_2-, Ar-, Air-, and H2_O- Plasma2011

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      Plasma Conference 2011 (PLASMA2011)
    • Place of Presentation
      石川県立音楽堂
    • Year and Date
      2011-11-23
    • Related Report
      2013 Final Research Report
  • [Presentation] Fabrication of Si based Microchannel by Ar/F_2 Vapor Etching and Plasma Etching2011

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      Plasma Conference 2011 (PLASMA2011)
    • Place of Presentation
      石川県立音楽堂
    • Year and Date
      2011-11-23
    • Related Report
      2013 Final Research Report
  • [Presentation] Ar/F_2 気相エッチングによる極微小径Si マイクロ流路の形成2011

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第24回化学とマイクロ・ナノシステム研究会
    • Place of Presentation
      大阪府立大学
    • Year and Date
      2011-11-02
    • Related Report
      2013 Final Research Report
  • [Presentation] Ar/F2気相エッチングによる極微小径Siマイクロ流路の形成2011

    • Author(s)
      松谷晃宏,高田綾子
    • Organizer
      第24回化学とマイクロ・ナノシステム研究会
    • Place of Presentation
      大阪府立大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Fabrication of Si based Microchannel by Ar/F2 Vapor Etching and Plasma Etching2011

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      Plasma Conference 2011 (PLASMA2011)
    • Place of Presentation
      石川県立音楽堂
    • Related Report
      2011 Research-status Report
  • [Presentation] Ar/F2 気相エッチングによる細菌細胞輸送用Si マイクロ流路の形成2011

    • Author(s)
      松谷晃宏,高田綾子
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Related Report
      2011 Research-status Report
  • [Presentation] InP基板上に製作したマイクロ囲いを用いた出芽酵母の培養

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第28回化学とマイクロ・ナノシステム学会
    • Place of Presentation
      イーグレ姫路
    • Related Report
      2013 Annual Research Report
  • [Presentation] マイクロ牧場アレイを用いた出芽酵母の培養

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ar/F2気相エッチングにより製作したSiマイクロ流路を用いた大腸菌細胞の輸送

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第4回集積化MEMS技術研究ワークショップ
    • Place of Presentation
      大阪府立大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] マイクロピラー構造を用いた大腸菌と酵母の単一細胞分離とサイズ分離

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2013年第60回応用物理学会春季学術講演会,27p-B6-10
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Research-status Report
  • [Presentation] 細菌細胞のプラズマエッチングマスクへの応用

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2012年度 東京工業大学技術部 技術発表会,6
    • Place of Presentation
      東京工業大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Single-Cell Isolation and Sizing of Microorganisms by Microenclosure Array with Multipillar Structure

    • Author(s)
      Akihiro Matsutani and Ayako Takada
    • Organizer
      MNC2012, 1P-7-83
    • Place of Presentation
      Kobe
    • Related Report
      2012 Research-status Report
  • [Presentation] Microfabrication of Single-Cell Isolation Structure on Vertical Cavity Surface Emitting Laser Wafer

    • Author(s)
      Akihiro Matsutani and Ayako Takada
    • Organizer
      第29回「センサ・マイクロマシンと応用システム」シンポジウム,SPLN-10
    • Place of Presentation
      北九州国際会議場
    • Related Report
      2012 Research-status Report
  • [Presentation] Microfabrication of Si based Microchannel for Transport of Bacterial Cells by Ar/F2 Vapor Etching and Cl2 Inductively Coupled Plasma Etching

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki and Ayako Takada
    • Organizer
      11th APCPST, 2-P83
    • Place of Presentation
      京都大学
    • Related Report
      2012 Research-status Report
  • [Presentation] 半導体プロセスを用いた細胞サイズ分離用マイクロピラー構造の製作

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2012年秋季第73回応用物理学会学術講演会,12p-PB3-3
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Single-Cell Isolation of Bacteria Using Microenclosure and Its Applications

    • Author(s)
      Akihiro Matsutani and Ayako Takada
    • Organizer
      RSC Tokyo Conference, A001
    • Place of Presentation
      幕張メッセ
    • Related Report
      2012 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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