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Detection of free-radical in plasmas by terahertz frequency-domain spectroscopy

Research Project

Project/Area Number 23540573
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Plasma science
Research InstitutionOsaka University

Principal Investigator

KITAHARA Hideaki  大阪大学, レーザーエネルギー学研究センタ, 特任研究員 (20397649)

Co-Investigator(Renkei-kenkyūsha) HANGYO Masanori  大阪大学, レーザーエネルギー学研究センター, 教授 (10144429)
HAMAGUCHI Satoshi  大阪大学, 工学系研究科, 教授 (60301826)
TANI Masahiko  福井大学, 遠赤外領域開発研究センター, 教授 (00346181)
KITANO Katsuhisa  大阪大学, 工学系研究科, 准教授 (20379118)
Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2013: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2012: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2011: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywordsプラズマ計測 / フリーラジカル計測 / テラヘルツ分光 / プラズマ分光 / THz分光 / 国際情報交換 / 多国籍 / プラズマ物理学 / テラヘルツ分光学 / フリーラジカル
Research Abstract

The aim of this research is to do the in-situ analysis of the plasma-elementary reaction by establishing the method of measurement using Cavity Ring-Down detection at the terahertz region for the small-quantity unstable-molecules that is generated in the plasmas.
In the experiment, the stable measurement could not be performed by the large error signal contained in the observed data of the frequency domain because the constructed measuring system did not have enough stability in mechanically and temporally.
As the result, it becomes clear that there need more stable spectrometer and the plasma chamber with the thermal stability.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (1 results)

All 2012

All Presentation (1 results)

  • [Presentation] Plasma Diagnosis by Terahertz Frequency-Domain Spectroscopy2012

    • Author(s)
      Hideaki Kitahara, Masahiko Tani, Katsuhisa Kitano, Satoshi Hamaguchi, and Masanori Hangyo
    • Organizer
      The 8th EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Todaiji Culture Center, Todaiji Temple, Nara
    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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