Measurements of Electron Conditions in High Pressure Plasmas for Materials Processing
| Project/Area Number |
23540581
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Chubu University |
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Principal Investigator |
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| Co-Investigator(Renkei-kenkyūsha) |
SUGAI Hideo 中部大学, 工学部, 教授 (40005517)
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| Project Period (FY) |
2011 – 2013
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2012: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | 電子密度 / 電子状態 / モニタリング / プローブ / パルス放電 / ネットワークアナライザ |
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| Research Abstract |
In this study, employing microwave resonator probe available for electron density monitoring, we have investigated on application of the probe for atmospheric pressure plasma as well as extension of the probe function. In high-pressure plasma, resonance width of the observed probe spectra expands in proportional to electron density which suggests this method will be usable for electron density measurements. Accuracy of the measurement will be improved by considering resonance width observed without plasma. Further, we showed conditions for precise measurements in repetitive pulse discharge plasmas and possibility of simultaneous measurements of electron density and reactive species by installing optical fiber to the probe head on the basis of spectroscopic technique.
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Report
(4 results)
Research Products
(31 results)
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[Presentation] Simplified analysis and FDTD simulation of curling probe2014
Author(s)
A. PANDEY, K. NAKAMURA and H. SUGAI
Organizer
6th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2014) / 7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014)
Place of Presentation
Meijo University, Japan
Year and Date
2014-03-03
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