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Measurements of Electron Conditions in High Pressure Plasmas for Materials Processing

Research Project

Project/Area Number 23540581
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Plasma science
Research InstitutionChubu University

Principal Investigator

NAKAMURA Keiji  中部大学, 工学部, 教授 (20227888)

Co-Investigator(Renkei-kenkyūsha) SUGAI Hideo  中部大学, 工学部, 教授 (40005517)
Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2012: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords電子密度 / 電子状態 / モニタリング / プローブ / パルス放電 / ネットワークアナライザ
Research Abstract

In this study, employing microwave resonator probe available for electron density monitoring, we have investigated on application of the probe for atmospheric pressure plasma as well as extension of the probe function. In high-pressure plasma, resonance width of the observed probe spectra expands in proportional to electron density which suggests this method will be usable for electron density measurements. Accuracy of the measurement will be improved by considering resonance width observed without plasma. Further, we showed conditions for precise measurements in repetitive pulse discharge plasmas and possibility of simultaneous measurements of electron density and reactive species by installing optical fiber to the probe head on the basis of spectroscopic technique.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (31 results)

All 2014 2013 2012 2011

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (25 results) (of which Invited: 2 results)

  • [Journal Article] Curling probe measurement of electron density in pulse-modulated plasma2014

    • Author(s)
      A. Pandey, W. Sakakibara and , H. Matsuoka, K. Nakamura and H. Sugai
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol. 104

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Curling probe measurement of electron density in pulse-modulated plasma2014

    • Author(s)
      Anil Pandey, Wataru Sakakibara, Hiroyuki Matsuoka, Keiji Nakamura, Hideo Sugai
    • Journal Title

      Appl. Phys. Lett. Vol. 104

      Volume: 104

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas2013

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Journal Title

      Appl. Phys. Express

      Volume: Vol. 6 Pages: 56202-1

    • NAID

      10031174342

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Temperature dependence of coercivity behavior in Fe films on fractal rough ceramic surfaces2013

    • Author(s)
      M. Chen, Z. Jiao and , S. Yu, M. Yu, F. Bao and K. Nakamura
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: Vol. 52

    • NAID

      210000141761

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas2013

    • Author(s)
      Anil Pandey, Keiji Nakamura, Hideo Sugai
    • Journal Title

      Appl. Phys. Express

      Volume: 6

    • NAID

      10031174342

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Temperature Dependence of Coercivity Behavior in Fe Films on Fractal Rough Ceramics Surfaces2013

    • Author(s)
      Miao-Gen Chen, Zhi-Wei Jiao, Sen-Jiang Yu, Ming-Zhou Yu, Fu-Bing Bao, and Keiji Nakamura
    • Journal Title

      Japanese Journal of Applied Physics 52 (2013) 01AC13-1~4

      Volume: 52

    • NAID

      210000141761

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Simplified analysis and FDTD simulation of curling probe2014

    • Author(s)
      A. PANDEY, K. NAKAMURA and H. SUGAI
    • Organizer
      6th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2014) / 7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014)
    • Place of Presentation
      Meijo University, Japan
    • Year and Date
      2014-03-03
    • Related Report
      2013 Final Research Report
  • [Presentation] Development of curling probe for monitoring of reactive plasmas2014

    • Author(s)
      K. Nakamura and H. Sugai
    • Organizer
      8th International Conference on Reactive Plasmas (ICRP2014) /31st Symposium on Plasma Processing(SPP-31)
    • Place of Presentation
      Fukuoka Convention Center, Japan
    • Year and Date
      2014-02-07
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Curling probe analysis and simulation for collisional plasma2014

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Organizer
      8th International Conference on Reactive Plasmas (ICRP2014) /31st Symposium on Plasma Processing(SPP-31)
    • Place of Presentation
      Fukuoka Convention Center, Japan
    • Year and Date
      2014-02-05
    • Related Report
      2013 Final Research Report
  • [Presentation] Simplified analysis and FDTD simulation of curling probe2014

    • Author(s)
      A. PANDEY, K. NAKAMURA and H. SUGAI
    • Organizer
      6th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2014)
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Development of curling probe for monitoring of reactive plasmas2014

    • Author(s)
      K. Nakamura and H. Sugai
    • Organizer
      8th International Conference on Reactive Plasmas (ICRP2013) /31st Symposium on Plasma Processing(SPP-31) (February 2014, Japan) 7C-AM-I5
    • Place of Presentation
      Fukuoka, Japan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Curling probe analysis and simulation for collisional plasma2014

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Organizer
      8th International Conference on Reactive Plasmas (ICRP2013) /31st Symposium on Plasma Processing(SPP-31) (February 2014, Japan) 7C-AM-I5
    • Place of Presentation
      Fukuoka, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Opto-curling Probe Method for Space-resolved Measurement of Electron and Radical Densities in Plasma2013

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Organizer
      35th Int. Symp. Dry Process (DPS2013)
    • Place of Presentation
      Korea
    • Year and Date
      2013-08-30
    • Related Report
      2013 Final Research Report
  • [Presentation] Opto-curling probe Monitoring of local density of electron and radicals2013

    • Author(s)
      A. Pandey, K. Kato. , S. Ikezawa, K. Nakamura and H. Sugai
    • Organizer
      21st International Symposium on Plasma Chemistry (ISPC2013)
    • Place of Presentation
      Australia
    • Year and Date
      2013-08-06
    • Related Report
      2013 Final Research Report
  • [Presentation] Opto-curling Probe Method for Space-resolved Measurement of Electron and Radical Densities in Plasma2013

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Organizer
      35th Int. Symp. Dry Process (DPS2013)
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2013 Annual Research Report
  • [Presentation] Opto-curling probe Monitoring of local density of electron and radicals2013

    • Author(s)
      A. Pandey, K. Kato. , S. Ikezawa, K. Nakamura and H. Sugai
    • Organizer
      21st International Symposium on Plasma Chemistry (ISPC2013)
    • Place of Presentation
      Cairns, Australia
    • Related Report
      2013 Annual Research Report
  • [Presentation] Monitoring of electron density and wall deposit by curling probe during plasma process2012

    • Author(s)
      A. Pandey, M. Imai, H. Kanematsu, S. Ikezawa, K. Nakamura and H. Sugai
    • Organizer
      34th Int. Symp. Dry Process (DPS2012)
    • Place of Presentation
      Univ. Tokyo, Japan
    • Year and Date
      2012-11-16
    • Related Report
      2013 Final Research Report
  • [Presentation] In-situ Photoluminescence Measurements of GaN Films Exposed to Inductively-Coupled Plasmas2012

    • Author(s)
      K. NAKAMURA, M. CHEN, Y. NAKANO and H. SUGAI
    • Organizer
      34th Int. Symp. Dry Process (DPS2012)
    • Place of Presentation
      Univ. Tokyo, Japan
    • Year and Date
      2012-11-15
    • Related Report
      2013 Final Research Report
  • [Presentation] In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas2012

    • Author(s)
      K. NAKAMURA, M. CHEN, Y. NAKANO and H. SUGAI
    • Organizer
      65th Annual Gaseous Electronics Conference (GEC)
    • Place of Presentation
      U. S. A.
    • Year and Date
      2012-10-25
    • Related Report
      2013 Final Research Report
  • [Presentation] Novel diagnostic tool, curling probe, for monitoring electron density during plasma processing2012

    • Author(s)
      A. PANDEY, Y. LIANG. , S. IKEZAWA, K. NAKAMURA and H. SUGAI
    • Organizer
      65th Annual Gaseous Electronics Conference (GEC)
    • Place of Presentation
      U. S. A.
    • Year and Date
      2012-10-24
    • Related Report
      2013 Final Research Report
  • [Presentation] Miniaturization of Plane-Type Microwave Resonator Probe with Multi-Resonant Frequencies2012

    • Author(s)
      K. Nakamura, H. Kumazaki and H. Sugai
    • Organizer
      5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012)
    • Place of Presentation
      Meitetsu Inuyama Hotel, Japan
    • Year and Date
      2012-03-09
    • Related Report
      2013 Final Research Report
  • [Presentation] Miniaturization of plane-type microwave resonator probe2012

    • Author(s)
      E. Kumazaki, K. Nakamura and H. Sugai
    • Organizer
      4th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2012)
    • Place of Presentation
      Chubu Univ. Japan
    • Year and Date
      2012-03-05
    • Related Report
      2013 Final Research Report
  • [Presentation] Monitoring of electron density and wall deposit by curling probe during plasma process2012

    • Author(s)
      A. Pandey, M. Imai, H. Kanematsu, S. Ikezawa, K. Nakamura and H. Sugai
    • Organizer
      2012 International Symposium on Dry Process
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] In-situ Photoluminescence Measurements of GaN Films Exposed to Inductively-Coupled Plasmas2012

    • Author(s)
      K. Nakamura M. G. Chen, Y. Nakano and H. Sugai
    • Organizer
      2012 International Symposium on Dry Process
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Novel diagnostic tool, curling probe, for monitoring electron density during plasma processing2012

    • Author(s)
      Anil Pandey, Kimitaka Kato, Shunjiro Ikezawa, Keiji Nakamura, Hideo Sugai
    • Organizer
      65th Gaseous Electronics Conference
    • Place of Presentation
      Austin, Texas, U. S. A.
    • Related Report
      2012 Research-status Report
  • [Presentation] In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas2012

    • Author(s)
      Keiji Nakamura, Mio-Gen Chen, Yoshitaka Nakano, Hideo Sugai
    • Organizer
      65th Gaseous Electronics Conference
    • Place of Presentation
      Austin, Texas, U. S. A.
    • Related Report
      2012 Research-status Report
  • [Presentation] スパイラルアンテナを用いたマルチ共振型マイクロ波共振器プローブの小型化2012

    • Author(s)
      中村圭二, 熊崎恵未, 菅井秀郎
    • Organizer
      第59回応用物理学関係連合講演会17p-B8-3
    • Place of Presentation
      東京・早稲田大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Miniaturization of Plane-Type Microwave Resonator Probe with Multi-Resonant Frequencies2012

    • Author(s)
      K. Nakamura, H. Kumazaki and N. Sugai
    • Organizer
      5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012) P-01
    • Place of Presentation
      Japan/ Meitetsu Inuyama Hotel
    • Related Report
      2011 Research-status Report
  • [Presentation] Miniaturization of plane-type microwave resonator probe2012

    • Author(s)
      E. Kumazaki, K. Nakamura and H. Sugai
    • Organizer
      4th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2012) P2005A
    • Place of Presentation
      Japan/ Chubu University
    • Related Report
      2011 Research-status Report
  • [Presentation] 周波数プローブによる電子密度計測2011

    • Author(s)
      中村圭二, 菅井秀郎
    • Organizer
      Plasma Conference 2011 (PLASMA2011) S-O1-1(招待講演)
    • Place of Presentation
      金沢・石川県立音楽堂
    • Related Report
      2011 Research-status Report
  • [Presentation] マイクロ波共振器プローブを用いた密度計測における精度向上2011

    • Author(s)
      熊崎恵未, 中村圭二, 菅井秀郎
    • Organizer
      第72回応用物理学会学術講演会 31a-ZJ-3
    • Place of Presentation
      山形・山形大学
    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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