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Preparation and properties of TiO2n-1 thin film via reduction of TiO2 film

Research Project

Project/Area Number 23550204
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Functional materials/Devices
Research InstitutionGifu University

Principal Investigator

OHYA Yutaka  岐阜大学, 工学部, 教授 (80167311)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2011: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywordsチタン酸化物 / チタニア-シリカ複合膜 / ゾルゲル法 / 薄膜 / Ti3O5 / 酸化物薄膜 / 還元処理 / チタニア薄膜
Research Abstract

Aqueous precursors for titania and silica were prepared using titan tetraisopropoxide and silicon tetraethoxide, respectively, with addition of tetramethylammonium hydroxide. Appropriate amount of the two precursors were mixed and silica-titania composite films were dip-coated. After heating at 700C, the resultant films were reduced under nitrogen-hydrogen mixture or nitrogen with low oxygen partial pressure, which was controlled using zirconia oxygen pump. The temperatures of the reduction were 1000 and 1200C for up to 1 week.
By reducing in nitrogen-hydrogen mixture gas, the formation of Ti3O5 was confirmed. On the other hand, the films reduced under the controlled low oxygen partial pressure of 10e-22 atm were not. The conditions of reduction in low oxygen partial pressure at tested temperatures are enough to reduce titanium dioxide. A reason why the reduced oxide was not detected was an evaporation of the reduced oxide and this was suggested by some experiments.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (54 results)

All 2014 2013 2012 2011 Other

All Journal Article (15 results) (of which Peer Reviewed: 14 results) Presentation (30 results) Book (3 results) Patent(Industrial Property Rights) (6 results) (of which Overseas: 5 results)

  • [Journal Article] Influence of Si species on intergrowth and anisotropic crystal growth of silicalite-12014

    • Author(s)
      T. Ban, S. Ohishi, and Y. Ohya
    • Journal Title

      J. Porous Mater.

      Volume: 21, [3] Issue: 3 Pages: 337-344

    • DOI

      10.1007/s10934-013-9779-y

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Orientation of tungsten trioxide thin films fabricated by sol-gel method using aqueous sols of colloidal layered tungstates2013

    • Author(s)
      T. Ban, T. Ito, and Y. Ohya
    • Journal Title

      J. Sol-Gel Sci. Tech.

      Volume: 68 Issue: 1 Pages: 88-94

    • DOI

      10.1007/s10971-013-3138-y

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Phase Transition between Layered Tungstates and Polyoxotungstates in Aqueous Solutions2013

    • Author(s)
      Ban, T. Ito, and Y. Ohya
    • Journal Title

      TInorg. Chem.

      Volume: 52 Issue: 18 Pages: 10520-10524

    • DOI

      10.1021/ic4014587

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis and Magnetic Behavior of Nickel Zinc Ferrite Nanoparticles Coated onto Carbon Microcoils2013

    • Author(s)
      M. Shima, K. Oguri, Y. Ohya, M. Gomi, Y. H. Ikuhara, Y. Sasaki,Y. Hishikawa, and K. Kawabe
    • Journal Title

      IEEE Trans Magn.

      Volume: 49, [8] Issue: 8 Pages: 4824-4826

    • DOI

      10.1109/tmag.2013.2243461

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Comparison of organic ligand effects on morphology control between disc-like zeolite L crystals and zeolite A and W crystals2013

    • Author(s)
      T. Ban, M. Takamura, M. Morikawa, and Y. Ohya
    • Journal Title

      Mater. Chem. Phys.

      Volume: 137 Issue: 3 Pages: 1067-1072

    • DOI

      10.1016/j.matchemphys.2012.11.035

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Complex changes in the framework of endohedrally Na-doped type II Si clathrates with respect to Na content2013

    • Author(s)
      T. Ban, T. Ogura, Y. Ohashi, R. Himeno, F. Ohashi, T. Kume, Y. Ohya, H. Natsuhara, T. Iida, H. Habuchi and S. Nonomura
    • Journal Title

      J. Mater. Sci.

      Volume: 48 Issue: 3 Pages: 989-996

    • DOI

      10.1007/s10853-012-6886-0

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 多結晶セラミックス中に生じた熱応力による亀裂の発生および熱応力の緩和2013

    • Author(s)
      大矢 豊
    • Journal Title

      耐火物

      Volume: 65 Pages: 340-347

    • NAID

      10031188768

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Anomalous Field-Angle Dependence of the Specific Heat of Heavy-Fermion Superconductor UPt3 【Editor's Choice】2013

    • Author(s)
      Shunichiro Kittaka
    • Journal Title

      J. Phys. Soc. Jpn.

      Volume: 82 Issue: 2 Pages: 74709-74709

    • DOI

      10.7566/jpsj.82.024707

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Synthesis of layered tantalate nanocrystals by aqueous process at room temperature2012

    • Author(s)
      T. Ban, S. Yoshikawa and Y. Ohya
    • Journal Title

      Cryst. Eng. Comm.

      Volume: 14 Issue: 22 Pages: 7709-7714

    • DOI

      10.1039/c2ce25531f

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Theory and the experimental confirmation of the local electronic structure of the multiferroic PbVO_3, a new member of PbTiO_3 family, studied by X-ray near edge absorption structure2012

    • Author(s)
      S. Alam, J. Ahmad, Y Ohya, D. Chungli, C.-C. Hsu, J.-F. Lee, M. Shima, K. Miki, S. S. Al-Deyab, J. Guo, C. Nishimura
    • Journal Title

      J. Phys. Soc. Jpn

      Volume: 81 (7) Issue: 7 Pages: 074709-074709

    • DOI

      10.1143/jpsj.81.074709

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effect of grain boundary cracks on the corrosion behaviour of aluminium titanate ceramics in a molten aluminium alloy2012

    • Author(s)
      M. Tanaka, K. Kashiwagi, N. Kawashima, S. Kitaoka, O. Sakurada, and Y. Ohya
    • Journal Title

      Corrosion Science

      Volume: 54 Pages: 90-96

    • DOI

      10.1016/j.corsci.2011.09.002

    • Related Report
      2013 Final Research Report 2012 Research-status Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Synthesis of Transparent Aqueous Sols of Colloidal Layered Niobate Nanocrystals at Room Temperature2011

    • Author(s)
      T. Ban, S. Yoshikawa, and Y. Ohya
    • Journal Title

      J. Colloid and Interface Science

      Volume: 364 Issue: 1 Pages: 85-91

    • DOI

      10.1016/j.jcis.2011.08.026

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Diversity of the Cuticle Layer of Avian Eggshells2011

    • Author(s)
      S. Kusuda, A. Iwasawa, O. Doi, Y. Ohya, and N. Yoshizaki
    • Journal Title

      J. Poult. Sci.

      Volume: 48 [2] Pages: 119-124

    • NAID

      10028047631

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of titania films by sol-gel method using transparent colloidal aqueous solutions of anatase nanocrystals2011

    • Author(s)
      T. Ban, Y. Tanaka, and Y. Ohya
    • Journal Title

      Thin Solid Films

      Volume: 519 Issue: 11 Pages: 3468-3474

    • DOI

      10.1016/j.tsf.2010.12.247

    • Related Report
      2013 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Hydrothermal synthesis of highly water-dispersible anatase nanocrystals from transparent aqueous sols of titanate colloids2011

    • Author(s)
      T. Ban, Y. Tanaka, and Y. Ohya
    • Journal Title

      J. Nanopart. Res.

      Volume: 13 Issue: 1 Pages: 273-281

    • DOI

      10.1007/s11051-010-0027-y

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Presentation] ムライト前駆体水溶液を用いたSiC基板への薄膜作製2014

    • Author(s)
      棚橋由季・吉田道之・田中誠・北岡諭・大矢豊・櫻田修
    • Organizer
      日本セラミックス協会2014年年会
    • Place of Presentation
      慶應義塾大学日吉キャンパス
    • Year and Date
      2014-03-18
    • Related Report
      2013 Final Research Report
  • [Presentation] Synthesis of Metal Carbide Nanoparticles by Solution Plasma2014

    • Author(s)
      T. Inishi, T. Ban and Y. Ohya
    • Organizer
      6th Internatinal Symposium on Advanced Plasma Science and its Applications for Nitrides nad Nanomaterials
    • Place of Presentation
      名古屋市名城大学
    • Year and Date
      2014-03-06
    • Related Report
      2013 Final Research Report
  • [Presentation] ゾルゲルコーティングによるステンレス鋼の耐食性の向上2013

    • Author(s)
      都築潤一郎,伴隆幸,大矢豊
    • Organizer
      日本金属学会2013年秋期講演大会
    • Place of Presentation
      金沢大学角間キャンパス
    • Year and Date
      2013-09-19
    • Related Report
      2013 Final Research Report
  • [Presentation] 水溶液プロセスによりボトム・アップ合成した層状チタン酸塩結晶の形態制御2013

    • Author(s)
      中川拓也・伴隆幸・大矢豊
    • Organizer
      第26回秋季シンポジウム
    • Place of Presentation
      信州大学長野キャンパス
    • Year and Date
      2013-09-05
    • Related Report
      2013 Final Research Report
  • [Presentation] 液中プラズマ法による種々の金属炭化物の合成2013

    • Author(s)
      伊西拓弥,伴隆幸,大矢豊
    • Organizer
      日本ゾルゲル学会第11回討論会
    • Place of Presentation
      広島大学
    • Year and Date
      2013-08-01
    • Related Report
      2013 Final Research Report
  • [Presentation] シリカライト-1結晶のサイズと異方性の制御2013

    • Author(s)
      大石翔太,伴隆幸,大矢豊
    • Organizer
      日本ゾルゲル学会第11回討論会
    • Place of Presentation
      広島大学
    • Year and Date
      2013-08-01
    • Related Report
      2013 Final Research Report
  • [Presentation] 層間に嵩高いイオンをもつ層状タングステン酸塩とポリ酸の間での水溶液中の相転移2013

    • Author(s)
      伊藤寿紘,伴隆幸,大矢豊
    • Organizer
      日本ゾルゲル学会第11回討論会
    • Place of Presentation
      広島大学
    • Year and Date
      2013-08-01
    • Related Report
      2013 Final Research Report
  • [Presentation] 液中プラズマを用いたα-Al2O3ナノ粒子の合成2013

    • Author(s)
      今枝佑太・吉田道之・尾畑成造・大矢豊・櫻田修
    • Organizer
      日本セラミックス協会2013年年会
    • Place of Presentation
      仙台市青葉区
    • Year and Date
      2013-03-17
    • Related Report
      2013 Final Research Report
  • [Presentation] Novel synthesis of metal nitride and carbide by solution plasma2013

    • Author(s)
      T. Inishi, T. Ban and Y. Ohya
    • Organizer
      5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      名古屋市
    • Year and Date
      2013-02-01
    • Related Report
      2013 Final Research Report
  • [Presentation] 層間に嵩高いイオンをもつ層状タングステン酸塩の水溶液プロセスによる合成2013

    • Author(s)
      伊藤寿紘,伴隆幸,大矢豊
    • Organizer
      第51回セラミックス基礎科学討論会
    • Place of Presentation
      仙台市青葉区
    • Year and Date
      2013-01-09
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] 液中プラズマを用いたa-Al2O3ナノ粒子の合成2013

    • Author(s)
      今枝 佑太・吉田 道之・尾畑 成造・大矢 豊・櫻田 修
    • Organizer
      日本セラミックス協会 2013年 年会
    • Place of Presentation
      目黒区大岡山
    • Related Report
      2012 Research-status Report
  • [Presentation] Novel synthesis of metal nitride and carbide by solution plasma2013

    • Author(s)
      T. Inishi, T. Ban and Y. Ohya
    • Organizer
      5th Internatinal Symposium on Advanced Plasma Science and its Applications for Nitrides nad Nanomaterials
    • Place of Presentation
      名古屋市千種区
    • Related Report
      2012 Research-status Report
  • [Presentation] 種々のシリカゲルとアミンを用いたシリカライト-1の大きな結晶の合成2012

    • Author(s)
      大石翔太,伴隆幸,大矢豊
    • Organizer
      第28回ゼオライト研究発表会
    • Place of Presentation
      東京都江戸川区船堀
    • Year and Date
      2012-09-29
    • Related Report
      2013 Final Research Report
  • [Presentation] 種々の条件で熱処理したシュードプルッカイト型構造酸化物の陽イオン分布2012

    • Author(s)
      河内優希宏・伴隆幸・大矢豊
    • Organizer
      日本セラミックス協会第25回秋季シンポジウム
    • Place of Presentation
      名古屋市千種区
    • Year and Date
      2012-09-19
    • Related Report
      2013 Final Research Report
  • [Presentation] 異なる屈折率を有する酸化物薄膜多層ゾルゲルコーティングによる高耐久性赤外線反射フィルターの合成2012

    • Author(s)
      小山内駿平,伴隆幸,櫻田修,大矢豊,北岡諭
    • Organizer
      日本セラミックス協会第25回秋季シンポジウム
    • Place of Presentation
      名古屋市千種区
    • Year and Date
      2012-09-19
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] 層状タングステン酸塩ナノ結晶の透明コロイド水溶液の合成2012

    • Author(s)
      伊藤寿紘,伴隆幸,大矢豊
    • Organizer
      日本ゾルゲル学会第10回討論会
    • Place of Presentation
      横浜市港北区
    • Year and Date
      2012-07-26
    • Related Report
      2013 Final Research Report
  • [Presentation] シュードブルッカイト構造酸化物の結晶構造と低温安定性2012

    • Author(s)
      河内優希宏,伴隆幸,大矢豊
    • Organizer
      第44回東海若手セラミストト懇話会夏期セミナー
    • Place of Presentation
      静岡県浜松市
    • Year and Date
      2012-06-28
    • Related Report
      2013 Final Research Report
  • [Presentation] 層状タングステン酸塩ナノ結晶の透明コロイド水溶液の合成2012

    • Author(s)
      伊藤寿紘,伴隆幸,大矢豊
    • Organizer
      第44回東海若手セラミストト懇話会夏期セミナー
    • Place of Presentation
      静岡県浜松市
    • Year and Date
      2012-06-28
    • Related Report
      2013 Final Research Report
  • [Presentation] 層状タングステン酸塩ナノ結晶の透明コロイド水溶液の合成2012

    • Author(s)
      伊藤 寿紘,伴 隆幸,大矢 豊
    • Organizer
      第44回東海若手セラミスト懇話会 夏期セミナー
    • Place of Presentation
      静岡県浜松市
    • Related Report
      2012 Research-status Report
  • [Presentation] シュードブルッカイト構造酸化物の結晶構造と低温不安定性2012

    • Author(s)
      河内優希宏,伴 隆幸,大矢 豊
    • Organizer
      第44回東海若手セラミスト懇話会 夏期セミナー
    • Place of Presentation
      静岡県浜松市
    • Related Report
      2012 Research-status Report
  • [Presentation] 層状タングステン酸塩ナノ結晶の透明コロイド水溶液の合成2012

    • Author(s)
      伊藤 寿紘,伴 隆幸,大矢 豊
    • Organizer
      日本ゾルゲル学会 第10回討論会
    • Place of Presentation
      横浜市港北区
    • Related Report
      2012 Research-status Report
  • [Presentation] 種々の条件で熱処理したシュードブルッカイト型構造酸化物の陽イオン分布2012

    • Author(s)
      河内 優希宏・伴 隆幸・大矢 豊
    • Organizer
      日本セラミックス協会第25回秋季シンポジウム
    • Place of Presentation
      名古屋市千種区
    • Related Report
      2012 Research-status Report
  • [Presentation] 種々のシリカゲルとアミンを用いたシリカライト-1の大きな結晶の合成2012

    • Author(s)
      大石翔太,伴 隆幸,大矢 豊
    • Organizer
      第28回 ゼオライト研究発表会
    • Place of Presentation
      東京都江戸川区船堀
    • Related Report
      2012 Research-status Report
  • [Presentation] Synthesis of Metal Carbide Nanoparticles by Solution Plasma

    • Author(s)
      T. Inishi, T. Ban and Y. Ohya
    • Organizer
      6th Internatinal Symposium on Advanced Plasma Science and its Applications for Nitrides nad Nanomaterials
    • Place of Presentation
      名古屋市 名城大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 水溶液プロセスによりボトム・アップ合成した層状チタン酸塩結晶の形態制御

    • Author(s)
      中川拓也・伴隆幸・大矢豊
    • Organizer
      日本セラミックス協会第26回秋季シンポジウム
    • Place of Presentation
      信州大学 長野キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] ゾルゲルコーティングによるステンレス鋼の耐食性の向上

    • Author(s)
      都築 潤一郎・伴 隆幸・大矢 豊
    • Organizer
      日本金属学会 2013年秋期講演大会
    • Place of Presentation
      金沢大学 角間キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] ムライト前駆体水溶液を用いたSiC 基板への薄膜作製

    • Author(s)
      棚橋由季・吉田道之・田中誠・北岡諭・大矢豊・櫻田修
    • Organizer
      日本セラミックス協会 2014 年年会
    • Place of Presentation
      慶應義塾大学 日吉キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] 液中プラズマ法による種々の金属炭化物の合成

    • Author(s)
      伊西拓弥・伴 隆幸・大矢 豊
    • Organizer
      日本ゾルゲル学会第11回討論会
    • Place of Presentation
      広島大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] シリカライト-1結晶のサイズと異方性の制御

    • Author(s)
      大石翔太・伴 隆幸・大矢 豊
    • Organizer
      日本ゾルゲル学会第11回討論会
    • Place of Presentation
      広島大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 層間に嵩高いイオンをもつ層状タングステン酸塩とポリ酸の間での水溶液中の相転移

    • Author(s)
      伊藤寿紘・伴 隆幸・大矢 豊
    • Organizer
      日本ゾルゲル学会第11回討論会
    • Place of Presentation
      広島大学
    • Related Report
      2013 Annual Research Report
  • [Book] "コロイド水溶液法による材料合成",野上正行監修,ゾル-ゲル法の最新応用と展望2014

    • Author(s)
      伴隆幸,大矢豊
    • Publisher
      シーエムシー出版
    • Related Report
      2013 Final Research Report
  • [Book] ゾル-ゲル法の最新応用と展望2014

    • Author(s)
      伴隆幸, 大矢豊
    • Publisher
      シーエムシー出版
    • Related Report
      2013 Annual Research Report
  • [Book] "多結晶セラミックス中に生じた熱応力による亀裂の発生および熱応力の緩和",耐火物, 65, [8]2013

    • Author(s)
      大矢豊
    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] チタン酸アルミニウム焼結体の製造方法2012

    • Inventor(s)
      大矢豊、伴隆幸、櫻田修、北岡諭、 田中誠
    • Industrial Property Rights Holder
      岐阜大学、JFCC
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-282645
    • Filing Date
      2012-12-27
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 金属炭化物の製造方法2012

    • Inventor(s)
      大矢豊、伴隆幸、伊西拓弥
    • Industrial Property Rights Holder
      岐阜大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-282645
    • Filing Date
      2012-12-26
    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Overseas
  • [Patent(Industrial Property Rights)] ガス遮蔽用材料2012

    • Inventor(s)
      松平恒昭、北岡諭、田中誠、和田 匡史、大矢豊、櫻田修
    • Industrial Property Rights Holder
      JFCC、岐阜大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-210096
    • Filing Date
      2012-09-24
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] α-酸化アルミニウムの製造方法2012

    • Inventor(s)
      櫻田修、今枝佑太、吉田道之、大矢豊
    • Industrial Property Rights Holder
      岐阜大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-182667
    • Filing Date
      2012-08-21
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 熱電対2012

    • Inventor(s)
      大矢豊、伴隆幸、櫻田修、吉田道之, ほか4名
    • Industrial Property Rights Holder
      (株)チノー、岐阜大学、JFCC
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-153179
    • Filing Date
      2012-07-09
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] a-酸化アルミニウムの製造方法2012

    • Inventor(s)
      櫻田修、今枝佑太、吉田道之、大矢豊
    • Industrial Property Rights Holder
      岐阜大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-182667
    • Filing Date
      2012-08-21
    • Related Report
      2012 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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