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Growth of p-, n-amorphous oxides and application to devices

Research Project

Project/Area Number 23550205
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Functional materials/Devices
Research InstitutionShizuoka University

Principal Investigator

KOBAYASHI Kenkichiro  静岡大学, 工学(系)研究科(研究院), 教授 (20153603)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2011: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords非晶質 / pn制御 / 非晶質InGaZnO4 / p型 / 非晶質酸化物 / クラスタードーピング / ドーピング
Research Abstract

We have prepared p-type InGaZnO4 (IGZO) films by radio frequency (RF) magnetron sputtering of targets of mixtures of ZnO and AlN powders. In the cases of sputtering of a target (7% AlN) at high pressure of 0.02 Torr, films prepared at 0.5 and 0.6% O2 atmospheres show positive Seebeck coefficients of 1.5 and 1.2 mV/K (p-type), respectively. As O2-concentration is raised up to 1%, films become insulators again. All of films prepared from targets containing 10% AlN or more are insulators irrespective of O2-concentration in atmospheres. For a p-type IGZO films, we evaluate the resistivity of 210 ohmcm, the hole-density of 7.5x1017 cm-3 and mobility of 0.4 cm2/Vs. The rectification characteristic is seen in a current vs. voltage curve of a device comprising of Au/p-type IGZO/n-type IGZO. A possible mechanism of the growth of p-type IGZO films is that Al-N clusters with lower kinetic energy are incorporated into the disordered IGZO lattice, without the dissociation of Al-N bonds.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (22 results)

All 2013 2012 2011 2010 Other

All Journal Article (18 results) (of which Peer Reviewed: 18 results) Presentation (3 results) (of which Invited: 2 results) Remarks (1 results)

  • [Journal Article] Photoluminescence of ZnO quantum dots films prepared by low temperature chemical vapor deposition2013

    • Author(s)
      X. Zhang, K. Kobayashi, Y. Tomita, Y. Maeda, and Y. Kohno
    • Journal Title

      physica status solidi c

      Volume: 10巻 Issue: 11 Pages: 1576-1579

    • DOI

      10.1002/pssc.201300229

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] p-type ZnO films prepared by alternate deposition of ZnO and Mg3N2 films2013

    • Author(s)
      K. Kobayashi, T. Koyama, X. Zhang, Y. Kohono, Y. Tomita, Y. Maeda, and S. Matsushima
    • Journal Title

      J. Phys. Chem. Solids

      Volume: 74 Issue: 1 Pages: 80-85

    • DOI

      10.1016/j.jpcs.2012.08.003

    • Related Report
      2013 Annual Research Report 2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] First-principles study on electronic structure and optical properties of Ca4Bi6O13 crystal2013

    • Author(s)
      Hiroyuki Nakamura, Yuki Obukuro, Kenji Obata, Shigenori Matsushima, Masao Arai, Kenkichiro Kobayashi
    • Journal Title

      J. Phys. Chem. Solids

      Volume: 74 Issue: 1 Pages: 25-29

    • DOI

      10.1016/j.jpcs.2012.07.012

    • Related Report
      2013 Annual Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Optical and Electron Emission Properties of h-BN Films Codoped with Mg and O Atoms2013

    • Author(s)
      Shinji Ohtani and Kenkichiro Kobayashi,
    • Journal Title

      Key Engineering Mater

      Volume: 566 Pages: 175-178

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Heat Treatment on Charge-Discharge Property of Fluoride Cathode Materials for Li ion secondary batteries2013

    • Author(s)
      Yasumasa Tomitaa, Jinta Kato, Yoshiumi Kohno, Yasuhisa Maeda and Kenkichiro Kobayashi
    • Journal Title

      Key Engineering Mater

      Volume: 566 Pages: 131-134

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation and characterization of CaO-Bi2O3 complex oxide2013

    • Author(s)
      H. Nakamura, T. Uehara, Y. Obukuro, K. Obata, S. Matusima, M. Arai, K. Kobayashi
    • Journal Title

      Int. J. Nanotechnology,

      Volume: 10 Pages: 100-106

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of PIN Devices Including ZnO Quantum Dots2013

    • Author(s)
      X. Zhang and K. Kobayashi
    • Journal Title

      Key Engineering Mater

      Volume: 566 Pages: 191-194

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electronic structure of CaFe<sub>2</sub>O<sub>4</sub> with antiferromagnetic spin ordering2013

    • Author(s)
      Kenji OBATA,Yuki OBUKURO,Shigenori MATSUSHIMA, Hiroyuki NAKAMURA,Masao ARAI and Kenkichiro KOBAYASHI
    • Journal Title

      Journal of the Ceramic Society of Japan

      Volume: 121 Issue: 1417 Pages: 766-769

    • DOI

      10.2109/jcersj2.121.766

    • NAID

      130004480206

    • ISSN
      1348-6535, 1882-0743
    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] (132) Electron emission from h-BN films codoped with Mg and O atoms2013

    • Author(s)
      Shinji Ohtani, Takahiro Yano , Satomi Kondo, Yoshiumi Kohno, Yasumasa Tomita,Yasuhisa Maeda a, Kenkichiro Kobayashi
    • Journal Title

      Thin Solid Films

      Volume: 546 Pages: 53-57

    • DOI

      10.1016/j.tsf.2013.05.027

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preoaration and Characterization of SrO-Bi2O3 Complex Oxide2012

    • Author(s)
      Y. Obukuro
    • Journal Title

      Funct. Mater. Lett.

      Volume: 5 Issue: 02 Pages: 1260015-1260015

    • DOI

      10.1142/s1793604712600156

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Preparation of p-type ZnO films by alternate deposition of ZnO and Mg3N2 films2012

    • Author(s)
      K. Kobayashi, T. Koyama, X. Zhang, Y. Kohono, Y. Tomita, Y. Maeda, and S. Matsushima
    • Journal Title

      Procedia Engineering

      Volume: 36 Pages: 427-433

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Possibility for hole doping into amorphous InGaZnO_4 films prepared by RF sputtering2011

    • Author(s)
      Kenkichiro Kobayashi, Yoshiumi Kohno, Yasumasa Tomita, Yasuhisa Maeda, and Shigenori Matsushima
    • Journal Title

      phys. status Solidi (c)

      Volume: 8 Issue: 2 Pages: 531-533

    • DOI

      10.1002/pssc.201000442

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Photo-induced coloration of 2-hydroxychalcone in the clay interlayer2011

    • Author(s)
      Y. Kohno, M. Ito, M. Kurata, S. Ikoma, M. Shibata, R. Matsushima, Y. Tomita, Y. Maeda, K. Kobayashi
    • Journal Title

      Journal of Photochemistry and Photobiology A: Chemistry

      Volume: vol.218 Issue: 1 Pages: 87-92

    • DOI

      10.1016/j.jphotochem.2010.12.007

    • NAID

      120002954716

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Possibility for hole doping into amorphous InGaZnO4 films prepared by RF sputtering2011

    • Author(s)
      Kenkichiro Kobayashi, Yoshiumi Kohno, Yasumasa Tomita, Yasuhisa Maeda, and Shigenori Matsushima
    • Journal Title

      phys. status solidi (c)

      Volume: 8 Pages: 531-533

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Photoelectrochemical Characteristics of Iron Oxide/Polyaniline in Aqueous Acidic Solution2011

    • Author(s)
      Y. Kohno, Y. Tomita, K. Kobayashi, Y. Maeda
    • Journal Title

      Electrochemistry

      Volume: 79 Issue: 3 Pages: 168-171

    • DOI

      10.5796/electrochemistry.79.168

    • NAID

      130002150459

    • ISSN
      1344-3542, 2186-2451
    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] First-principles study on electronic structure of Sr2Bi2O5 crystal2011

    • Author(s)
      Y. Obukuro
    • Journal Title

      J. Phys. Chem. Solids

      Volume: 72 Issue: 12 Pages: 1477-1481

    • DOI

      10.1016/j.jpcs.2011.08.030

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Stabilization of a hydrophobic natural dye byintercalation into organo- montmorillonite2011

    • Author(s)
      Y. Ko h n o, K. Kobayashi, C. Fukuharaet. al.
    • Journal Title

      Applied Clay Science

      Volume: vol.54 Issue: 3-4 Pages: 202-205

    • DOI

      10.1016/j.clay.2011.09.001

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Stabilization of flavylium dye by incorporation into Fe-containing mesoporous silicate2010

    • Author(s)
      Y. Kohno, M. Senga, M. Shibata, K. Yoda, R. Matsushima et al
    • Journal Title

      Microporous and Mesoporous Materials

      Volume: vol.141 Issue: 1-3 Pages: 77-80

    • DOI

      10.1016/j.micromeso.2010.11.004

    • NAID

      120002954717

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] Preparation of Amorphous p-type InGaZnO4 Films by Codoping of Al and N Atoms2012

    • Author(s)
      Kenkichiro Kobayashi, Xinyu Zhang, Yoshiumi Kohno, Yasumasa Tomita, Yasuhisa Maeda
    • Organizer
      IDW'12
    • Place of Presentation
      Kyoto
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Preparation of Amorphous p-type InGaZnO4 Films by Codoping of Al and N Atoms2012

    • Author(s)
      Kenkichiro Kobayashi, Xinyu Zhang, Yoshiumi Kohno, Yasumasa Tomita, Yasuhisa Maeda
    • Organizer
      IDW ’12,
    • Place of Presentation
      京都国際会議場(京都市)
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] Preparation of P-type ZnO Films by Alternate Deposition of Mg3N22011

    • Author(s)
      K. Kobayashi, T. Koyama, X. Zhang, Y. Kohno, Y. Tomita, Y. Maeda and S. Matsushima
    • Organizer
      IUMRS 2011
    • Place of Presentation
      Taipei World Trade Center Nangang Exhibition Hall (Taipei)
    • Related Report
      2011 Research-status Report
  • [Remarks]

    • URL

      http://kobaken.eng.shizuoka.ac.jp/kobayashi_hp/

    • Related Report
      2013 Final Research Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

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