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Nanoscale control of physical properties of grapheen by site-selective epitaxy of graphene using substrate microfabrication

Research Project

Project/Area Number 23560003
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionTohoku University

Principal Investigator

FUKIDOME Hirokazu  東北大学, 電気通信研究所, 准教授 (10342841)

Co-Investigator(Kenkyū-buntansha) KAWAI Yusuke  東北大学, 大学院工学研究科, 助教 (20451536)
KOTSUGI Masato  公益財団法人高輝度光科学研究センター, 利用研究促進部門, 研究員 (60397990)
KOMEDA Tadahiro  東北大学, 多元物質科学研究所, 教授 (30312234)
Project Period (FY) 2011-04-28 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2013: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywords界面 / グラフェン / SiC / 基板微細加工 / ナノスケール制御 / Si基板 / 微細加工
Outline of Final Research Achievements

Graphene is a promising next-generation device material. To realize graphene-based devices, it is significant to utilize unique characters of graphene physical properties. We have therefore performed a study on a nanoscale control of structural and electronic properties of graphene by using substrate microfabrication.
In this study, we formed graphene on SiC thin films on a microfabricated Si substrate. The interface structure of graphene thus formed depends on the microscopic crystallographic orientation of the substrate. As a result of this, we found that the stacking and therefore band structure of graphene is controlled by this method.

Report

(5 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (32 results)

All 2014 2013 2012 2011 Other

All Journal Article (9 results) (of which Peer Reviewed: 6 results,  Open Access: 1 results) Presentation (20 results) (of which Invited: 6 results) Remarks (3 results)

  • [Journal Article] Microscopically-Tuned Band Structure of Epitaxial Graphene through Interface and Stacking Variations Using Si Substrate Microfabrication2014

    • Author(s)
      Hirokazu Fukidome, Takayuki Ide, Yusuke Kawai, Toshihiro Shinohara, Naoka Nagamura, Koji Horiba, Masato Kotsugi, Takuo Ohkochi, Toyohiko Kinoshita, Hiroshi Kumighashira, Masaharu Oshima, Maki Suemitsu
    • Journal Title

      Scientific Reports

      Volume: 4 Issue: 1 Pages: 5173-5173

    • DOI

      10.1038/srep05173

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Site selective epitaxy of graphene on Si wafers2013

    • Author(s)
      H. Fukidome, Y. Kawai, H. Handa, H. Hibino, H. Miyashita, M. Kotsugi, T. Ohkochi, M. Jung, T. Suemitsu, T. Kinoshita, T. Otsuji, and M. Suemitsu
    • Journal Title

      Proceeding of the IEEE

      Volume: 101 Issue: 7 Pages: 1557-1566

    • DOI

      10.1109/jproc.2013.2259131

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Emergence of Pseudoelectromagnetic Field in Epitaxial Graphene on Microfabricated Substrate2013

    • Author(s)
      吹留博一、小嗣真人、川合祐輔、井出隆之、大河内拓雄、木下豊彦、末光眞希
    • Journal Title

      Hyomen Kagaku

      Volume: 34 Issue: 7 Pages: 380-384

    • DOI

      10.1380/jsssj.34.380

    • NAID

      10031184986

    • ISSN
      0388-5321, 1881-4743
    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] 基板微細加工の援用による超高品質グラフェンの作製2013

    • Author(s)
      吹留 博一
    • Journal Title

      マテリアルステージ

      Volume: 13 Pages: 23-26

    • Related Report
      2013 Research-status Report
  • [Journal Article] 基板相互作用を援用したグラフェンのナノ構造・物性制御2012

    • Author(s)
      吹留博一
    • Journal Title

      表面科学

      Volume: 33 Issue: 10 Pages: 546-551

    • DOI

      10.1380/jsssj.33.546

    • NAID

      130004486704

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Precise control of epitaxy of graphene by microfabricating SiC substrate2012

    • Author(s)
      H. Fukidome、 Y. Kawai、 F. Fromm、 M. Kotsugi、 H. Handa、 T. Ide、 T. Ohkouchi、 H. Miyashita、 Y. Enta、 T. Kinoshita、 Th. Seyller、 M. Suemitsu
    • Journal Title

      Applied Physics Letters

      Volume: 101 Issue: 4 Pages: 041605-041605

    • DOI

      10.1063/1.4740271

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] 基板相互作用によるグラフェンの電子状態制御2012

    • Author(s)
      吹留 博一、川合祐輔
    • Journal Title

      信学技報

      Volume: ED2012-2 Pages: 5-7

    • NAID

      110009564209

    • Related Report
      2012 Research-status Report
  • [Journal Article] グラフェンを用いた半導体素子との開発と将来展望2012

    • Author(s)
      吹留 博一
    • Journal Title

      電子ジャーナル

      Volume: 438 Pages: 7-57

    • Related Report
      2012 Research-status Report
  • [Journal Article] Epitaxy of graphene on 3C-SiC(111) thin films on microfabricated Si(111) substrates2012

    • Author(s)
      吹留博一、川合祐輔、小嗣真人
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51

    • NAID

      210000140718

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] 高輝度放射光を用いたオペランド顕微分光による材料とデバイスのギャップの橋渡し2014

    • Author(s)
      吹留博一
    • Organizer
      表面科学会
    • Place of Presentation
      島根県松江市
    • Year and Date
      2014-11-08
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Nanoscale Operando observation of graphene transistor by using photoelectron emission microscopy2014

    • Author(s)
      H. Fukidome
    • Organizer
      EMN SPring 2014
    • Place of Presentation
      Las Vegas, USA
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Nanoscale Operando Analysis of graphene transistor by combination use of PEEM & 3D nano-ESCA2014

    • Author(s)
      H. Fukidome
    • Organizer
      SPEM2014
    • Place of Presentation
      Oxford, UK
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] グラフェン・トランジスタの電子状態のオペランド光電子顕微鏡 観察2014

    • Author(s)
      吹留博一
    • Organizer
      SPring-8 ワークショップ-SPring-8とユーザーのさらなる連携を目指して-
    • Place of Presentation
      兵庫県佐用郡佐用町
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Microscopic Control of structural and electronic properties of graphene by growing on SiC thin film on a microfabricated Si substrate2013

    • Author(s)
      H. Fukidome, T. Ide, Y. Kawai, M. Suemitsu, T. Ohkouchi, M. Kotsugi, T. Kinoshita, T. Shinohara, N. Nagamura, S. Toyoda, K. Horiba, M. Oshima
    • Organizer
      Graphene Week 2013
    • Place of Presentation
      Chemniz, Germany
    • Related Report
      2013 Research-status Report
  • [Presentation] Microscopic Control of Epitaxial Graphene on SiC(111) and SiC(100) Thin Films on a Microfabricated Si(100) Substrate2013

    • Author(s)
      H. Fukidome
    • Organizer
      AVS2013
    • Place of Presentation
      Long Beach, USA
    • Related Report
      2013 Research-status Report
  • [Presentation] グラフェンデバイスのオペランド顕微分光2013

    • Author(s)
      吹留博一
    • Organizer
      物性研究所短期研究会 真空紫外・軟X線放射光物性研究の将来
    • Place of Presentation
      千葉県柏市
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] 三次元nanoESCAによるグラフェン・デバイスのその場観察に向けて2013

    • Author(s)
      吹留博一
    • Organizer
      ISSP workshop
    • Place of Presentation
      柏市
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] Epitaxy of Graphene on Si(100) and Si(111) Faces Simultaneously Formed on Si(100) Substrate2013

    • Author(s)
      Hirokazu Fukidome
    • Organizer
      SSNS'13
    • Place of Presentation
      蔵王
    • Related Report
      2012 Research-status Report
  • [Presentation] Control of Electronic and Structural Properties of Epitaxial Graphene on 3C-SiC/Si and Its Device Applications2012

    • Author(s)
      Hirokazu Fukidome, Masato Kotsugi, Takuo Ohkouchi, Akitaka Yoshigoe, Yuden Teraoka, Yoshiharu Enta, Toyohiko Kinoshita, Tetsuya Suemitsu, Taiichi Otsuji, Maki Suemitsu
    • Organizer
      2012 MRS Spring Meeting
    • Place of Presentation
      (San Francisco, USA)
    • Related Report
      2012 Research-status Report
  • [Presentation] Definite Observation of Interfacial Charge Transfer in Graphene Transistor  by Using Soft X-ray 3D Scanning Photoelectron Microscopy2012

    • Author(s)
      H. Fukidome, N. Nagamura, K. Horiba, S. Toyoda, S. Kurosumi, T. Shinohara, T. Ide,M. Suemitsu, K. Nagashio, A. Toriumi, and M. Oshima
    • Organizer
      SSDM (2012 International Conference on Solid State Devices and Materials)
    • Place of Presentation
      京都
    • Related Report
      2012 Research-status Report
  • [Presentation] Modulation of Electronic and Vibrational Properties of Epitaxial Graphene by Spatially Confining Eptaxy2012

    • Author(s)
      H. Fukidome, Y. Kawai, F. Fromm, M. Kosugi, T. Ide, T. Ohkouchi, H. Miyashita, Y. Enta, T. Kinoshita, T. Seyller, M. Suemitsu
    • Organizer
      VAS14(14th International Conference on Vibrations at Surfaces)
    • Place of Presentation
      神戸
    • Related Report
      2012 Research-status Report
  • [Presentation] Operando Analysis of Graphene Transistor by Soft X-ray 3D Scanning Photoelectron Microscopy2012

    • Author(s)
      H. Fukidome, N. Nagamura, K. Horiba, S. Toyoda, S. Kurosumi, T. Shinohara, T. Ide,M. Suemitsu, K. Nagashio, A. Toriumi, and M. Oshima
    • Organizer
      ISGD-3(3rd Internatinal Symposium on Graphene Devices
    • Place of Presentation
      (Paris, France)
    • Related Report
      2012 Research-status Report
  • [Presentation] 基板微細加工によるエピグラフェンの構造・電子状態の制御2012

    • Author(s)
      吹留 博一
    • Organizer
      第25回日本放射光学会年会
    • Place of Presentation
      佐賀県鳥栖市
    • Related Report
      2011 Research-status Report
  • [Presentation] グラフェンデバイスの電子状態のナノ分析2012

    • Author(s)
      吹留 博一
    • Organizer
      ISSP workshop
    • Place of Presentation
      東京都文京区
    • Related Report
      2011 Research-status Report
  • [Presentation] エピグラフェンの表面界面構造解析(invited)2012

    • Author(s)
      吹留 博一
    • Organizer
      平成23年度日本表面科学会東北・北海道支部学術講演会(招待講演)
    • Place of Presentation
      宮城県仙台市
    • Related Report
      2011 Research-status Report
  • [Presentation] Tuning of Structural and Electronic properties of Epitaxial Graphene by Substrate Microfabrication2011

    • Author(s)
      吹留 博一
    • Organizer
      2011 International Conference on Solid State Devices and Materials (SSDM2011)
    • Place of Presentation
      愛知県名古屋市
    • Related Report
      2011 Research-status Report
  • [Presentation] Tuning of Electronic Properties of Epitaxial Graphene on Microfabrication2011

    • Author(s)
      吹留 博一
    • Organizer
      第24回マイクロプロセス・ナノテクノロジー国際会議(MNC 2011)
    • Place of Presentation
      京都府京都市
    • Related Report
      2011 Research-status Report
  • [Presentation] グラフェンの結晶評価技術 (invited)2011

    • Author(s)
      吹留 博一
    • Organizer
      応用物理学会第49回応用物理学会スクール -グラフェンの基礎から応用まで(招待講演)
    • Place of Presentation
      山形県山形市
    • Related Report
      2011 Research-status Report
  • [Presentation] Spatial Confinement of Epitaxy of Graphene on Microfabricated SiC to Suppress Thickness Variation

    • Author(s)
      H. Fukidome, T. Ide, H. Handa, Y.Kawai, F. Fromm, M. Kotsugi, T. Ohkouchi, H. Miyashita, Y. Enta, T. Kinoshita, Th. Seyller, M.Suemitsu
    • Organizer
      AVS 59th International Symposium & Exhibition
    • Place of Presentation
      (Tampa, USA)
    • Related Report
      2012 Research-status Report
  • [Remarks] 東北大学研究者紹介

    • URL

      http://db.tohoku.ac.jp/whois/detail/07d0b9809a3935bd641ebf3d9ef57148.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] 東北大学電気通信研究所 末光・吹留研究室 研究紹介

    • URL

      http://www.suemitsu.riec.tohoku.ac.jp/about/index.html

    • Related Report
      2013 Research-status Report
  • [Remarks] 東北大学研究者紹介 吹留博一

    • URL

      http://db.tohoku.ac.jp/whois/detail/07d0b9809a3935bd641ebf3d9ef57148.html

    • Related Report
      2012 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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