| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
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| Research Abstract |
Semiconductor devices such as LED and photodiode are promising ones for not only visible but also ultraviolet region. However, investigations into the optical properties of these semiconductor materials require wide wavelength region including vacuum ultraviolet (VUV). Then, our final target is the permanent installation of a very unique VUV ellipsometer with the synchrotron radiation to measure absolute complex refractive indices of those semiconductor materials from visible to VUV, because synchrotron radiation is the ideal ultraviolet light source. Then, we have been constructing a synchrotron dedicated ellipsometer and over-all operation testing will be carried out at the next machine time.
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