Control of crystal orientation and acceptor doping properties on polycrystalline zinc oxide thin films
| Project/Area Number |
23560026
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Kochi University of Technology |
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Principal Investigator |
MAKINO Hisao 高知工科大学, 総合研究所, 准教授 (40302210)
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| Co-Investigator(Renkei-kenkyūsha) |
YAMAMOTO Tetsuya 高知工科大学, 総合研究所, 教授 (30320120)
SASAKI Takayoshi 物質・材料研究機構, NIMSフェロー (70354404)
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| Project Period (FY) |
2011 – 2013
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2012: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
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| Keywords | 酸化物半導体 / 酸化亜鉛 / 配向制御 / ドーピング / アクセプタ / 多結晶薄膜 / ミクロ構造制御 / 電気伝導特性 |
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| Research Abstract |
Control of crystal orientation of polycrystalline thin films on glass substrates and doping properties of nitrogen acceptors have been investigated for zinc oxide films by ion-plating deposition with direct current arc discharge. In order to realize p-type doping, not only single doping but also co-doping with gallium was explored. Although we could not obtain p-type zinc oxides, we could find out characteristic change of electrical properties by the doping. We realized control of orientation using nanosheet seed layers as templates on glass substrates. Details about changes of microstructural properties like as grain size and degree of orientation caused by the nanosheet seed layer and the influences of the structural control on carrier transport properties have been clarified in detail.
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Report
(4 results)
Research Products
(13 results)
