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Large-area stacked silicon photonics based on amorphous Si

Research Project

Project/Area Number 23560036
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionUniversity of Fukui

Principal Investigator

KATSUYAMA TOSHIO  福井大学, 工学(系)研究科(研究院), 教授 (90467134)

Co-Investigator(Kenkyū-buntansha) WADA Yasuo  東洋大学, 大学院学際・融合科学研究科, 教授 (50386736)
AOKI Kanna  神戸大学, 自然科学系先端融合研究環重点研究部, 助教 (90332254)
Project Period (FY) 2011-04-28 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywordsシリコンフォトニクス / アモルファス・シリコン / Si細線導波路 / フォトニック結晶 / ベータ鉄シリサイド / シリコン細線導波路
Outline of Final Research Achievements

We have studied optical devices based on amorphous Si (a-Si) in order to realize new large-area stacked structures composing silicon-based optical circuits. We have thus realized (1) an air-bridge-type a-Si slab structure with a large area (20 μm square), (2) a two-layered stacked optical circuit composed of an a-Si wire waveguide with an a-Si grating layer mediated by a SiO2 layer, and (3) a directional-coupler-type stacked light-emitting device composed of an a-Si wire waveguide with a β-FeSi2 light-emitting layer mediated by a SiO2 layer. As a result, it is shown that various stacked optical circuits can be realized by using a-Si material.

Report

(5 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (29 results)

All 2015 2014 2011 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Acknowledgement Compliant: 3 results) Presentation (26 results)

  • [Journal Article] Photonic crystals composed of β-FeSi2 with amorphous Si cladding layers2015

    • Author(s)
      H. Tokushige, T. Endo, K. Hiidome, K. Saiki, S. Kitamura, T. Katsuyama, N. Ikeda, Y. Sugimoto, Y. Maeda
    • Journal Title

      Japan. J. Appl. Phys

      Volume: 54 Pages: 1-10

    • NAID

      210000145470

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Amorphous Si waveguides with high-quality stacked gratings for multi-layer Si optical circuits2014

    • Author(s)
      H. Tokushige, T. Endo, K. Saiki, K. Hiidome, S. Kitamura, T. Katsuyama, M. Tokuda, H. Takagi, M. Morita, Y. Ito, K. Tsutsui, Y. Wada, N. Ikeda and Y. Sugimoto
    • Journal Title

      Photonics and Nanostructures - Fundamentals and Applications

      Volume: 12 Pages: 501-507

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Spectral and temporal photoluminescence behavior of colloidal PbS quantum dots2014

    • Author(s)
      Kitamura, M. Senshu, H. Tokushige, T. Katsuyama, N. Ozaki, I. Tanaka and Y. Sugimoto
    • Journal Title

      Superlattices and Microstructures

      Volume: 79 Pages: 123-134

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Spectral and temporal photoluminescence behavior of colloidal PbS quantum dots2014

    • Author(s)
      S. Kitamura, M. Senshu, H. Tokushige, T. Katsuyama, N. Ozaki, I. Tanaka and Y. Sugimoto
    • Organizer
      The 4th International Symposium on Photonics and Electronics Convergence -Advanced Nanophotonics and Silicon Device Systems- (ISPEC2014)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2014-11-17 – 2014-11-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Photonic crystals composed of β-FeSi2 with amorphous Si cladding -Comparison with air/SiO2 claddings-2014

    • Author(s)
      H. Tokushige, T. Endo, K. Hiidome, K. Saiki, S. Kitamura, T. Katsuyama, N. Ikeda, Y. Sugimoto and Y. Maeda
    • Organizer
      The 4th International Symposium on Photonics and Electronics Convergence -Advanced Nanophotonics and Silicon Device Systems- (ISPEC2014)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2014-11-17 – 2014-11-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Photonic crystals composed of β-FeSi2 with amorphous Si cladding layers2014

    • Author(s)
      H. Tokushige, T. Endo, K. Hiidome, K. Saiki, S. Kitamura, T. Katsuyama, N. Ikeda, Y. Sugimoto, Y. Maeda
    • Organizer
      International conference and summer school on advanced silicide technology 2014 (ICSS-Silicide 2014)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2014-07-19 – 2014-07-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] Compact beam splitters based on a simple silicon slit structure2014

    • Author(s)
      K. Saiki, Y. Kitamura, H. Tokushige, T. Endo, K. Hiidome, T. Yamaguchi, T. Katsuyama, N. Ikeda, and Y. Sugimoto
    • Organizer
      OptoElectronics and Communication Conference and Australian Conference on Optical Fibre Technology 2014 (OECC/ACOFT 2014)
    • Place of Presentation
      Melbourne, Australlia
    • Related Report
      2013 Research-status Report
  • [Presentation] アモルファスSiを用いた細線導波路のアニール効果2011

    • Author(s)
      吹留啓太,齋木健太,山口達也,北村友輔,勝山俊夫,徳田正秀,高木 均,森田正幸,伊藤嘉敏,筒井 謙,和田恭雄,
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形大
    • Related Report
      2011 Research-status Report
  • [Presentation] アモルファスSiからなる積層型光デバイスに関する基礎検討2011

    • Author(s)
      齋木健太,吹留啓太,北村友輔,山口達也,勝山俊夫,徳田正秀,高木 均,森田正幸,伊藤嘉敏,筒井 謙,和田恭雄
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形大
    • Related Report
      2011 Research-status Report
  • [Presentation] Low-temperature photoluminescence characteristics of GaAs quantum-well waveguides2011

    • Author(s)
      Y. Nagao, Y. Kuwamura, A. Nizamuddin, T. Nakahora, T. Hotani, N. Katsuki and T. Katsuyama
    • Organizer
      2011 International Conference on Solid State Devices and Materials (SSDM2011)
    • Place of Presentation
      Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan
    • Related Report
      2011 Research-status Report
  • [Presentation] Anisotropic nonlinear photoluminescence in a GaAs quantum-well waveguide2011

    • Author(s)
      T. Nakahora, A. Nizamuddin, Y. Kuwamura, Y. Nagao, N. Katsuki, T. Hotani, and T. Katsuyama
    • Organizer
      17th Microoptics Conference (MOC’11)
    • Place of Presentation
      SENDAI INTERNATIONAL CENTER, Sendai, Japan
    • Related Report
      2011 Research-status Report
  • [Presentation] Fabrication of Si wire waveguides composed of amorphous Si2011

    • Author(s)
      Y. Kitamura, T. Yamaguchi, K. Saiki, K. Hiidome, K. Kirimura, T. Katsuyama, M. Tokuda, H. Takagi, M. Morita, Y. Ito, K. Tsutsui, and Y. Wada
    • Organizer
      17th Microoptics Conference (MOC’11)
    • Place of Presentation
      SENDAI INTERNATIONAL CENTER, Sendai, Japan
    • Related Report
      2011 Research-status Report
  • [Presentation] アモルファスSiを用いたフォトニック結晶の作製と評価2011

    • Author(s)
      勝山俊夫,山口達也,北村友輔,吹留啓太,齋木健太,遠藤峻,徳田正秀,高木均,森田正幸,伊藤嘉敏,筒井謙, 和田恭雄
    • Organizer
      文部科学省先端研究施設共用イノベーション創出事業 平成23年度ナノテクノロジー・ネットワーク成果報告会
    • Place of Presentation
      東工大
    • Related Report
      2011 Research-status Report
  • [Presentation] Fabrication of slab-type photonic crystals composed of amorphous Si2011

    • Author(s)
      T. Yamaguchi, Y. Kitamura, K. Hiidome, K. Saiki, T. Katsuyama,, M. Tokuda, H. Takagi, M. Morita, Y. Ito, K. Tsutsui, and Y. Wada
    • Organizer
      The 1st International Symposium on Photonics and Electronics Convergence -Advanced Nanophotonics and Silicon Device Systems- (ISPEC2011)
    • Place of Presentation
      東大
    • Related Report
      2011 Research-status Report
  • [Presentation] Amorphous Si waveguides with high-quality stacked gratings for multi-layer Si optical circuits

    • Author(s)
      T. Endo, K. Saiki, K. Hiidome, H. Tokushige, T. Katsuyama, M. Tokuda, H. Takagi, M. Morita, Y. Ito, K. Tsutsui, Y. Wada, N. Ikeda, and Y. Sugimoto
    • Organizer
      The 10th Conference on Lasers and Electro-Optics Pacific Rim(CLEO-PR 2013)
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Research-status Report 2012 Research-status Report
  • [Presentation] CdSe/ZnS量子ドットの時間分解発光測定

    • Author(s)
      北村繁宏,千秋政也, 今井啓太, 温映輝, 勝山俊夫
    • Organizer
      2013年秋季第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Research-status Report
  • [Presentation] In-flush法で作製した自己組織化InAs量子ドットの時間分解発光測定

    • Author(s)
      北村繁宏,温映輝,千秋政也,今井啓太,勝山俊夫,日野雄司,尾崎信彦,杉本喜正
    • Organizer
      2013年秋季第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Research-status Report
  • [Presentation] アモルファスSiをクラッドとするβ-FeSi2フォトニック結晶の作製検討

    • Author(s)
      徳繁 洋樹,遠藤 峻, 吹留 啓太, 齋木 健太, 勝山 俊夫, 池田 直樹, 杉本 喜正
    • Organizer
      2013年秋季第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Research-status Report
  • [Presentation] Time-resolved photoluminescence of InAs QDs fabricated by In-flush technique

    • Author(s)
      M. Senshu, S. Kitamura, Y. Wen, K. Imai, T. Katsuyama, Y. Hino, N. Ozaki and Y. Sugimoto
    • Organizer
      The 3rd International Symposium on Photonics and Electronics Convergence -Advanced Nanophotonics and Silicon Device Systems- (ISPEC2013)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Time-resolved photoluminescence spectroscopy of CdSe/ZnS quantum dots

    • Author(s)
      S. Kitamura, M. Senshu, K. Imai, Y. Wen and T. Katsuyama
    • Organizer
      Xi'an University of Technology Autumn Program 2013
    • Place of Presentation
      Xi’an, China
    • Related Report
      2013 Research-status Report
  • [Presentation] Photonic crystals composed of β-FeSi2 with amorphous Si cladding layers

    • Author(s)
      H. Tokushige, T. Endo, K. Hiidome, K. Saiki, T. Katsuyama, N. Ikeda, and Y. Sugimoto
    • Organizer
      Xi'an University of Technology Autumn Program 2013
    • Place of Presentation
      Xi’an, China
    • Related Report
      2013 Research-status Report
  • [Presentation] Compact red-green-blue beam combiner with a waveguide structure

    • Author(s)
      Ryuji Morimoto, Yoshiaki Kakinoki, Yuya Kato, and Toshio Katsuyama
    • Organizer
      The 1st Laser Display Conference (LDC’12)
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Annealing Behavior of Optical Transmission Loss of Amorphous Si Wire Waveguides for Silicon Photonics

    • Author(s)
      K. Hiidome, K. Saiki, T. Endo, T. Yamaguchi, T. Yamaguchi, T. Katsuyama, M. Tokuda, H. Takagi, M. Morita, Y. Ito, K. Tsutsui, Y. Wada, N. Ikeda, Y. Sugimoto
    • Organizer
      IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] アモルファスSiからなる積層型光回路の基礎検討(II)

    • Author(s)
      遠藤 峻,齋木 健太,吹留 啓太,勝山 俊夫,徳田 正秀,高木 均,森田 正幸,伊藤嘉敏,筒井 謙, 和田 恭雄
    • Organizer
      2012年秋季第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Research-status Report
  • [Presentation] コロイダルPbS量子ドットの時間分解発光測定

    • Author(s)
      千秋 政也,今井 啓太,中洞 敏業,長尾 祐希,勝山 俊夫,尾崎 信彦,杉本 喜正
    • Organizer
      2012年秋季第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Compact Optical Branching Filter with a Si Slit Structure

    • Author(s)
      K. Saiki, K. Hiidome, T. Endo, T. Yamaguchi, Y. Kitamura, T. Katsuyama, M. Tokuda, H. Takagi, M. Morita, Y. Ito, K. Tsutsui, and Y. Wada
    • Organizer
      JSAP-OSA Joint Symposia
    • Place of Presentation
      Matsuyama, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Integrated Waveguide-type Red-Green-Blue Beam Combiners for Compact Projection-type Displays

    • Author(s)
      Yuya Kato, Yoshiaki Kakinoki, Ryuji Morimoto, and Toshio Katsuyama
    • Organizer
      The 19th International Display Workshops in conjunction with Asia Display 2012 (IDW/AD ’12)
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] InGaAs系結合量子井戸のフォトリフレクタンス評価

    • Author(s)
      今井啓太,勝山俊夫,牛頭信一郎,物集照夫
    • Organizer
      2013年 第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大
    • Related Report
      2012 Research-status Report
  • [Presentation] Efficient plant growth using automatic position-feedback laser light irradiation

    • Author(s)
      Y. Kakinoki, Y. Kato, K. Ogawa, A. Nakao, Z. Okai and T. Katsuyama
    • Organizer
      The 1st International Conference on Sensing Technologies for Biomaterial, Food and Agriculture 2013 (SeTBio 2013)
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2012 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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