Development of novel attosecond oxide multilayer mirrors at soft X-ray wavelengths fabricated by atomic layer epitaxy

• Project/Area Number: 23560041
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Applied optics/Quantum optical engineering
• Research Institution: Kitasato University (2012-2013); Osaka City University (2011)
• Principal Investigator: KUMAGAI Hiroshi 北里大学, 医療衛生学部, 教授 (00211889)
• Project Period (FY): 2011 – 2013
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000); Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
• Keywords: 軟X線ミラー / 水の窓 / アト秒 / 軟Ｘ線光学素子 / 酸化物 / 原子層成長 / アト秒ミラー

Research Abstract

A new approach to the fabrication of attosecond soft X ray multilayer mirrors on an atomic scale at soft X ray wavelengths is proposed to overcome serious problems regarding scattering loss at the rough surface and interface of the multilayer.
In this research project, novel approaches utilizing atomic layer epitaxy to the fabrication of ZnO/TiO2 oxide superlattice multilayer film mirror on a sapphire substrate for soft X ray wavelengths was studied. We demonstrated high reflectance and that phase could control soft X ray frequency precisely by a multiplex period in a window soft X ray domain of the so-called "water window" that ZnO/TiO2 oxide superstructure provided large frequency band.

Research Products

• [Journal Article] 酸化物軟X線ミラーの開発 (2013)
  • Author(s): 熊谷 寛
  • Journal Title: 電気学会論文誌C Volume: 133 Pages: 479-483
  • Peer Reviewed
• [Journal Article] 酸化物軟X線ミラーの開発 (2012)
  • Author(s): 熊谷寛
  • Journal Title: 電気学会論文誌C Volume: Vol.133, No.3 Pages: 479-483
  • Peer Reviewed
• [Journal Article] TiO_2/sapphire beam splitter for high-order harmonics (2012)
  • Author(s): Y. Sanjo, M. Murata, Y. Tanaka, H. Kumagai, and M. Chigane
  • Journal Title: Journal of Laser Micro/Nanoengineering Volume: vol.7, No. 3 Pages: 375-379
  • Peer Reviewed
• [Journal Article] TiO2/sapphire beam splitter for high-order harmonics (2012)
  • Author(s): Y. Sanjo, M. Murata, Y. Tanaka, H. Kumagai, and M. Chigane
  • Journal Title: Journal of Laser Micro/Nanoengineering Volume: 7 Pages: 375-379
  • Peer Reviewed
• [Journal Article] ピコ秒エンハンスメントキャビティによるテラヘルツパラメトリック発生（I）ー テラヘルツ発生の評価 (2012)
  • Author(s): 瀧田佑馬, 熊谷 寛, 前田真吾, 大平達也, 菜嶋茂喜
  • Journal Title: 日本赤外線学会誌 Volume: 21 Pages: 75-79
  • Peer Reviewed
• [Journal Article] ピコ秒エンハンスメントキャビティによるテラヘルツパラメトリック発生（II）ー 2重共振器の評価 (2012)
  • Author(s): 熊谷 寛, 瀧田佑馬, 前田真吾, 大平達也, 菜嶋茂喜
  • Journal Title: 日本赤外線学会誌 Volume: 21 Pages: 80-84
  • Peer Reviewed
• [Journal Article] 二重共振型テラヘルツ波パラメトリック発振器におけるアイドラー波の波長可変特性 (2012)
  • Author(s): 瀧田佑馬、大平達也、田所 譲、熊谷 寛、菜嶋茂喜
  • Journal Title: 電気学会論文誌C Volume: 132 Pages: 1299-1300
  • Peer Reviewed
• [Journal Article] 外部共振器型SHG におけるエンハンスメント効果- CW モード及びモード同期ピコ秒パルスモードの比較 – (2012)
  • Author(s): 大平 達也、瀧田 佑馬、田所 譲、熊谷 寛
  • Journal Title: 電気学会論文誌C Volume: 132 Pages: 1273-1277
  • Peer Reviewed
• [Journal Article] Self-limiting nature in atomic layer epitaxy of wurtzite thin films from sequentially pressurized Zn(CH_2CH_3) _2 and H_2O vapor pulses on sapphire (001) substrates (2011)
  • Author(s): H. Kumagai, Y. Masuda, and T. Shinagawa
  • Journal Title: Materials Science and Engineering Volume: Vol.24, No.012022 Pages: 1-9
  • Peer Reviewed
• [Journal Article] Design of novel titanium oxide / zinc oxide multilayer mirror for attosecond soft x rays (2011)
  • Author(s): K. Nagai and H. Kumagai
  • Journal Title: Materials Science and Engineering Volume: Vol.24, No.012021 Pages: 1-8
  • Peer Reviewed
• [Journal Article] Self-limiting nature in atomic-layer epitaxy of rutile thin films from TiCl_4 and H_2O on sapphire (001) substrates (2011)
  • Author(s): H. Kumagai, Y. Masuda, and T. Shinagawa
  • Journal Title: Journal of Crystal Growth Volume: Vol.314 Pages: 146-150
  • Peer Reviewed
• [Journal Article] Self-limiting nature in atomic layer epitaxy of wurtzite thin films from sequentially pressurized Zn(CH2CH3)2 and H2O vapor pulses on sapphire (001) substrates (2011)
  • Author(s): H. Kumagai, Y. Masuda, and T. Shinagawa
  • Journal Title: Materials Science and Engineering Volume: 24
  • Peer Reviewed
• [Journal Article] Self-limiting nature in atomic-layer epitaxy of rutile thin films from TiCl4 and H2O on sapphire (001) substrates (2011)
  • Author(s): H. Kumagai, Y. Masuda, and T. Shinagawa
  • Journal Title: Journal of Crystal Growth Volume: 314 Pages: 146-150
  • Peer Reviewed
• [Presentation] Tunable picosecond THz-wave generation based on trapezoidal MgO:LiNbO3 crystal in novel pentagram-shaped pump-enhancement cavity (2013)
  • Author(s): Y. Takida, Y. Tadokoro, H. Kumagai, S. Nashima, and A. Kobayashi
  • Organizer: SPIE Photonics West 2013: LASE
  • Place of Presentation: San Francisco
• [Presentation] 酸化物軟X線光学素子 (2012)
  • Author(s): 熊谷寛
  • Organizer: 2012年秋季第73回応用物理学会学術講演会
  • Place of Presentation: 松山
• [Presentation] 逐次的表面化学反応法によるV_2O_3薄膜の作製 (2012)
  • Author(s): 川上陽子、三條泰隆、村田雅樹、熊谷寛、小林中
  • Organizer: 平成23年度大阪市立大学大学院工学研究科「人間・環境適合型機能性オキサイド・マテリアルの新展開」プロジェクト・シンポジウム
  • Place of Presentation: 大阪(P-17)
• [Presentation] 先端計測のための逐次的表面化学反応による酸化物薄膜材料の開発 (2012)
  • Author(s): 熊谷寛
  • Organizer: 平成23年度大阪市立大学大学院工学研究科「人間・環境適合型機能性オキサイド・マテリアルの新展開」プロジェクト・シンポジウム
  • Place of Presentation: 大阪(OP-9)
• [Presentation] Novel beam splitter for high-order harmonics with WO_3/TiO_2 bilayer grown on c-plane sapphire substrate by sequential surface chemical reactions (2012)
  • Author(s): Y. Sanjo, M. Murata, H. Kumagai, Y. Nabekawa, K. Midorikawa, and M. Chigane
  • Organizer: Photonics West 2012: LASE2012
  • Place of Presentation: San Francisco, USA(8245-25)
• [Presentation] Novel beam splitter for high-order harmonics with WO3/TiO2 bilayer grown on c-plane sapphire substrate by sequential surface chemical reactions (2012)
  • Author(s): Y. Sanjo, M. Murata, H. Kumagai, Y. Nabekawa, K. Midorikawa, and M. Chigane
  • Organizer: Photonics West 2012: LASE2012
  • Place of Presentation: San Francisco
• [Presentation] Temporal profiles of picosecond terahertz-wave pulses from arrayed Si-prism-coupled MgO:LiNbO3 parametric oscillator (2012)
  • Author(s): Y. Tadokoro, Y. Takida, T. Ohira, H. Kumagai, and S. Nashima
  • Organizer: The 1st Advanced Lasers and Photon Sources (ALPS’12)
  • Place of Presentation: Tokyo
• [Presentation] TiO_2/sapphire beam splitter for high-order harmonics (2011)
  • Author(s): Y. Sanjo, M. Murata, Y. Tanaka, H. Kumagai, and M. Chigane
  • Organizer: The 12th International Symposium on Laser Precision Microfabrication (LPM2011)
  • Place of Presentation: Takamatsu, Japan
• [Presentation] TiO2/sapphire beam splitter for high-order harmonics (2011)
  • Author(s): Y. Sanjo, M. Murata, Y. Tanaka, H. Kumagai, and M. Chigane
  • Organizer: The 12th International Symposium on Laser Precision Microfabrication (LPM2011)
  • Place of Presentation: Takamatsu