Development of novel attosecond oxide multilayer mirrors at soft X-ray wavelengths fabricated by atomic layer epitaxy
Project/Area Number |
23560041
|
Research Category |
Grant-in-Aid for Scientific Research (C)
|
Allocation Type | Multi-year Fund |
Section | 一般 |
Research Field |
Applied optics/Quantum optical engineering
|
Research Institution | Kitasato University (2012-2013) Osaka City University (2011) |
Principal Investigator |
|
Project Period (FY) |
2011 – 2013
|
Project Status |
Completed (Fiscal Year 2013)
|
Budget Amount *help |
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
|
Keywords | 軟X線ミラー / 水の窓 / アト秒 / 軟X線光学素子 / 酸化物 / 原子層成長 / アト秒ミラー |
Research Abstract |
A new approach to the fabrication of attosecond soft X ray multilayer mirrors on an atomic scale at soft X ray wavelengths is proposed to overcome serious problems regarding scattering loss at the rough surface and interface of the multilayer. In this research project, novel approaches utilizing atomic layer epitaxy to the fabrication of ZnO/TiO2 oxide superlattice multilayer film mirror on a sapphire substrate for soft X ray wavelengths was studied. We demonstrated high reflectance and that phase could control soft X ray frequency precisely by a multiplex period in a window soft X ray domain of the so-called "water window" that ZnO/TiO2 oxide superstructure provided large frequency band.
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Report
(4 results)
Research Products
(22 results)