| Budget Amount *help |
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
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| Research Abstract |
In order to develop Zr-Al-TM (TM: transition metal) metallic glass films for MEMS applications, promising film compositions were exploered by combinatorial sputtering method. In the case of Zr-Ni-Al alloy system, the most promising composition was found to exist at around Zr:Ni:Al=40:30:30. For industrialization of these materials in future, the relationship between mechanical properties of metallic glass films deposited directly from an alloy target and deposition conditions were also investigated. We have also succeeded to fabricate 3-dimensional micro-structure using its glass transition behavior.
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