| Budget Amount *help |
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2012: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2011: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
|
|---|
| Research Abstract |
In various industrial fields, it is frequently necessary to measure surface roughness in confined spaces such as boreholes and grooves. However, using a small stylus, the surface roughness of a narrow borehole can be directly measured only a few millimeters from its end; alternatively, destructive measurements must be performed. In this research, we propose a novel surface roughness measurement sensor. To make the surface roughness sensor small, we used a stylus with a cylindrical mirror and a lensed fiber instead of a conventional inductive pick-up. The proposed sensor converts the signal obtained by measuring the surface roughness of a borehole into an optical signal, which is transferred outside the borehole by an optical fiber. Experimental results demonstrate that this system has a measurement range of 8 micron and a sensitivity of 19 nm. Surface profiles were measured by the proposed sensor and by a conventional surface profiler and the results were found to be very similar.
|
