| Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2012: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2011: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
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| Research Abstract |
In this study, a compact linear stepping actuator with ultra-fine resolution over a one-millimeter stroke (millimeter-stroke) is designed and fabricated by integrating a coaxial differential ball screw with a stepping motor. The performance of the fabricated actuator is evaluated experimentally, and a method of error compensation is devised and applied to this actuation system. Consequently, ultra-precise linear stepping actuator is realized with travel deviation of less than 0.06 microns (RMS) and with fine positioning resolution of 5 nm.
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