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Linear stepping actuator with ultra-fine resolution over a millimeter stroke applying overlapped coaxial differential ball screw

Research Project

Project/Area Number 23560159
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionShinshu University

Principal Investigator

FUKADA Shigeo  信州大学, 工学部, 教授 (70156743)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2012: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2011: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywordsボールねじ / 精密位置決め / 差動機構 / アクチュエータ / 精密機構 / 機械要素
Research Abstract

In this study, a compact linear stepping actuator with ultra-fine resolution over a one-millimeter stroke (millimeter-stroke) is designed and fabricated by integrating a coaxial differential ball screw with a stepping motor. The performance of the fabricated actuator is evaluated experimentally, and a method of error compensation is devised and applied to this actuation system. Consequently, ultra-precise linear stepping actuator is realized with travel deviation of less than 0.06 microns (RMS) and with fine positioning resolution of 5 nm.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (10 results)

All 2014 2013 2012

All Journal Article (7 results) (of which Peer Reviewed: 2 results) Presentation (3 results) (of which Invited: 3 results)

  • [Journal Article] Linear stepping actuator with ultra-fine resolution using coaxial differential ball screw2014

    • Author(s)
      S. Fukada, T. Mimura, H. Sato, D. Kobayashi
    • Journal Title

      Proceedings of the 14th International Conference of the European Society for Precision Engineering and Nanotechnology

      Volume: vol.1 Pages: 347-350

    • NAID

      130005486418

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 送りねじ機構による位置決め精度の向上と高分解能化2014

    • Author(s)
      深田茂生
    • Journal Title

      日本機械学会第14回機素潤滑設計部門講演会講演論文集

      Volume: (招待講演) Pages: 1-4

    • Related Report
      2013 Final Research Report
  • [Journal Article] Linear stepping actuator with ultra-fine resolution using coaxial differential ball screw2014

    • Author(s)
      S. Fukada, T. Mimura, H. Sato, D. Kobayashi
    • Journal Title

      Proceedings of the 14th euspen International Conference

      Volume: 印刷中

    • NAID

      130005486418

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 同軸二重差動ボールねじを用いたリニアステッピングアクチュエータ2012

    • Author(s)
      三村徹也,深田茂生
    • Journal Title

      2012年度精密工学会北陸信越支部学術講演会講演論文集

      Pages: 35-36

    • Related Report
      2013 Final Research Report
  • [Journal Article] 差動ボールねじを用いたミリストローク超精密位置決め(開ループ駆動における位置決め性能と補正による精度向上)2012

    • Author(s)
      深田茂生,佐藤勇仁,三村徹也
    • Journal Title

      2012年度精密工学会春季大会学術講演会講演論文集

      Pages: 263-264

    • NAID

      130005031150

    • Related Report
      2013 Final Research Report
  • [Journal Article] 同軸二重型差動ボールねじを用いたリニアステッピングアクチュエータ2012

    • Author(s)
      三村徹也,深田茂生
    • Journal Title

      2012年度精密工学会北陸信越支部学術講演会講演論文集

      Volume: 1 Pages: 35-36

    • Related Report
      2012 Research-status Report
  • [Journal Article] 差動ボールねじを用いたミリストローク超精密位置決め2012

    • Author(s)
      深田茂生,佐藤勇仁,三村徹也
    • Journal Title

      2012年度精密工学会春季大会学術講演会講演論文集

      Volume: 全1巻 Pages: 263-264

    • Related Report
      2011 Research-status Report
  • [Presentation] 送りねじ機構による位置決め精度の向上と高分解能化2014

    • Author(s)
      深田茂生
    • Organizer
      日本機械学会第14回機素潤滑設計部門講演会
    • Place of Presentation
      長野県長野市
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] ボールねじ機構の非線形弾性挙動と超精密位置決め制御2013

    • Author(s)
      深田茂生
    • Organizer
      日本ねじ研究協会第44回定時総会技術講演会
    • Place of Presentation
      機械振興会館(東京都港区芝公園)
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] ボールねじ駆動による位置決め精度の向上と高分解能化の試み2013

    • Author(s)
      深田茂生
    • Organizer
      精密工学会超精密位置決め専門委員会定例会
    • Place of Presentation
      東京理科大学 森戸記念館
    • Related Report
      2013 Annual Research Report
    • Invited

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Published: 2011-08-05   Modified: 2019-07-29  

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