Digital hologram measurements of thermohydrodynamic behavior at a thermally-assisted UV nanoimprint process
Project/Area Number |
23560243
|
Research Category |
Grant-in-Aid for Scientific Research (C)
|
Allocation Type | Multi-year Fund |
Section | 一般 |
Research Field |
Thermal engineering
|
Research Institution | Tokyo University of Science |
Principal Investigator |
|
Project Period (FY) |
2011 – 2013
|
Project Status |
Completed (Fiscal Year 2013)
|
Budget Amount *help |
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2012: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2011: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
|
Keywords | 流体計測 / ホログラム / インプリント / 光硬化樹脂 |
Research Abstract |
This study reports on a technique for measuring four-dimensional flow of UV curable resin during the process of nanoimprinting by employing a micro-digital-holographic particle-tracking velocimetry (micro-DHPTV) technique. In this study, high time-resolution measurements of flow field of UV curable resin at a press process step accompanied by a heating of UV-NIL were carried. The temperature dependence of UV curable resin was evaluated by measuring the UV curable resin while varying its temperature.
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Report
(4 results)
Research Products
(16 results)