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Development of a micro vibration energy harvesting device using silicon dioxide electret film including alkali ions

Research Project

Project/Area Number 23560287
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionShizuoka University

Principal Investigator

HASHIGUCHI Gen  静岡大学, 電子工学研究所, 教授 (70314903)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywordsマイクロ・ナノデバイス / マイクロマシン / 環境技術 / 省エネルギー / エレクトレット / アルカリイオン / MEMS / 静電型アクチュエータ / 振動発電 / 静電トランス
Research Abstract

This research focuses on a newly developed electret film that is made of silicon dioxide including potassium ions. We conducted experiments that aim control of charging property, and found that (1) the charging voltage is controllable, (2) the charging end detection is possible, (3) the charging voltage is measureable using electrostatic actuators, and (4) the maximum charging voltage is over 400V. We also fabricated a vibration energy harvesting device using the electret method and demonstrated LED illumination by 0.85 micro watts.
In addition, we examined accelerated aging tests of the electret film and evaluated -1dB voltage decay time; resulting in the charging voltage will be maintained over 30000 year at room temperature.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (39 results)

All 2014 2013 2012 2011 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (30 results) (of which Invited: 2 results) Patent(Industrial Property Rights) (6 results) (of which Overseas: 3 results)

  • [Journal Article] Effect of neutral beam etching on mechanical properties of micro-cantilevers2013

    • Author(s)
      Yuki Nishimori, Shinji Ueki, Kazuhiro Miwa, Tomohiro Kubota, Masakazu Sugiyama, Seiji Samukawa, and Gen Hashiguchi
    • Journal Title

      J. Vac. Sci. Technol.

      Volume: B31 Issue: 2 Pages: 22001-22001

    • DOI

      10.1116/1.4788829

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] SiO2 Electret Generated by Potassium Ions on a Comb-Drive Actuator2011

    • Author(s)
      T.Sugiyama, M.Aoyama, Y.Shibata, M.Suzuki, T.Konno, M.Ataka, H.Fujita, G.Hashiguchi
    • Journal Title

      Appl. Phys.Express

      Volume: vol.4 Pages: 114103-114103

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] SiO2 Electret Generated by Potassium Ions on a Comb-Drive Actuator2011

    • Author(s)
      Tatsuhiko Sugiyama, Mitsuru Aoyama, Yasushi Shibata, Masato Suzuki, Takashi Konno, Manabu Ataka, Hiroyuki Fujita, and Gen Hashiguchi
    • Journal Title

      Applied Physics Express

      Volume: 4 Issue: 11 Pages: 114103-114103

    • DOI

      10.1143/apex.4.114103

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] ELECTRET-BASED LOW POWER RESONATOR FOR ROBUST PRESSURE SENSOR2014

    • Author(s)
      H. Mitsuya, H. Ashizawa, T. Sugiyama, H. Fujita, G.Hashiguchi
    • Organizer
      27th IEEE International Conference on Micro Electro Mechanical Systems(IEEE MEMS 2014 Conference)
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] VERY LOW POWER CONSUMPTION MEMS SCANNER WITH ALKALI ELECTRET COMB DRIVE2014

    • Author(s)
      T. Sugiyama, M. Aoyama, K.Kawai, G.Hashiguchi
    • Organizer
      27th IEEE International Conference on Micro Electro Mechanical Systems(IEEE MEMS 2014 Conference)
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] VERY LOW POWER CONSUMPTION MEMS SCANNER WITH ALKALI ELECTRET COMB DRIVE2014

    • Author(s)
      T. Sugiyama, M. Aoyama, K.Kawai, G.Hashiguchi
    • Organizer
      27th IEEE International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] ELECTRET-BASED LOW POWER RESONATOR FOR ROBUST PRESSURE SENSOR2014

    • Author(s)
      H. Mitsuya, H. Ashizawa, T. Sugiyama, H. Fujita, G.Hashiguchi
    • Organizer
      IEEE MEMS 2014 Conference
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] エレクトレットによる低消費電力双安定アクチュエータ2014

    • Author(s)
      芦澤久幸,三屋裕幸,石橋和徳,杉山達彦,橋口 原
    • Organizer
      IIP2014 日本機械学会情報・知能・精密機器部門講演会
    • Place of Presentation
      東洋大学白山キャンパス6号館(東京都)
    • Related Report
      2013 Annual Research Report
  • [Presentation] カリウムイオンエレクトレットの高帯電化と振動発電素子の効率に関する一考察2014

    • Author(s)
      橋口 原,芝田 泰,杉山達彦
    • Organizer
      IIP2014 日本機械学会情報・知能・精密機器部門講演会
    • Place of Presentation
      東洋大学白山キャンパス6号館(東京都)
    • Related Report
      2013 Annual Research Report
  • [Presentation] アルカリイオンエレクトレットを用いた低消費電力MEMSスキャナーの開発2014

    • Author(s)
      杉山達彦,青山満,芝田泰,橋口 原
    • Organizer
      平成26年電気学会全国大会
    • Place of Presentation
      愛媛大学城北キャンパス(愛媛県)
    • Related Report
      2013 Annual Research Report
  • [Presentation] ELECTROSTATIC MICRO TRANSFORMER USING POTASSIUM ION ELECTRET FORMING ON A COMB-DRIVE ACTUATOR2013

    • Author(s)
      H.Hayashi, M. Suzuki, T.Sugiyama, G.Hashiguchi
    • Organizer
      The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2013)
    • Place of Presentation
      Barcelona. Spain
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] 埋め込み型エレクトレットに於ける帯電過程のその場観察と高電圧帯電に関する検討2013

    • Author(s)
      杉山達彦,芝田 泰,橋口 原
    • Organizer
      電気学会E部門総合研究会フィジカルセンサ研究会
    • Place of Presentation
      東京工科大学 蒲田キャンパス(東京都)
    • Related Report
      2013 Annual Research Report
  • [Presentation] リング型振動子側壁の高電荷密度エレクトレット化による圧力計測2013

    • Author(s)
      三屋裕幸,芦澤久幸,杉山達彦,安宅 学,久米村 百子,藤田 博之,橋口 原
    • Organizer
      第30回センサ・マイクロマシンと応用シンポジウム
    • Place of Presentation
      仙台国際センター(宮城県)
    • Related Report
      2013 Annual Research Report
  • [Presentation] 振り子型エレクトレット発電素子の特性評価2013

    • Author(s)
      吉井 健太郎、杉山 達彦、橋口 原
    • Organizer
      機械学会 IIP2013 情報・知能・精密機器部門(IIP部門)講演会
    • Place of Presentation
      東洋大学白山校舎(東京都)
    • Related Report
      2012 Research-status Report
  • [Presentation] ELECTROSTATIC MICRO TRANSFORMER USING POTASSIUM ION ELECTRET2013

    • Author(s)
      H. Hayashi, M. Suzuki, A. Mori, T. Sugiyama and G. Hashiguchi
    • Organizer
      The 17th Internatinal Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Centro de Convenciones Internacional de Barcelona (Barcelona. Spain)
    • Related Report
      2012 Research-status Report
  • [Presentation] ELECTRO STATIC MICRO POWER GENERATOR USING POTASSIUM ION ELECTRET FORMING ON A COMB-DRIVE ACTUATOR2012

    • Author(s)
      M. Suzuki, H. Hayashi, A. Mori, T. Sugiyama, and G. Hashiguchi
    • Organizer
      The 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
    • Place of Presentation
      Atlanta, Georgia, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] Molecular Tweezers with Optical Fiber Function2012

    • Author(s)
      Kentaro Yoshii, Gen Hashiguchi, Momoko Kememura, and Hiroyuki Fujita
    • Organizer
      OPTICAL MEMS & NANOPHOTONICS CONFERENCE, Banff
    • Place of Presentation
      Alberta, Canada
    • Related Report
      2013 Final Research Report
  • [Presentation] Characterization of an electret comb-drive actuator as an energy harvesting device2012

    • Author(s)
      Kentaro Yoshii, Tatsuhiko Sugiyama, Masato Suzuki, Hiroki Hayashi, Takashi Konno, Yasushi Shibata, Mitsuru Aoyama, and Gen Hashiguchi
    • Organizer
      2012 Joint International Conference on Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Santa Clara, California, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] EVALUATION OF THE RESONANCE FREQUENCY SHIFT OF VB-FET CAUSED BY JOULE HEATING AT THE CHANNEL2012

    • Author(s)
      Shinji Ueki, Yuki Nishimori, Hiroshi Imamoto, Masakazu Sugiyama, and Gen Hashiguchi
    • Organizer
      2012 Joint International Conference on Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Santa Clara, California, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] A NEW EXPERIMENTAL APPROACH TO EVALUATE PLASMA-INDUCED DAMAGE IN MICROCANTILEVER2012

    • Author(s)
      Yuki Nishimori, Shinji Ueki, Masakazu Sugiyama, Seiji Samukawa, and Gen Hashiguchi
    • Organizer
      2012 Joint International Conference on Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Santa Clara, California, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] 環境発電素子を目指したアルカリレット膜の高電圧化に関する検討2012

    • Author(s)
      吉井 健太郎,杉山 達彦,鈴木 雅人,林 宏樹,今野 隆,芝田 泰,青山 満,橋口 原
    • Organizer
      ロボティクス・メカトロニクス講演会2012in浜松
    • Place of Presentation
      アクトシティ浜松(静岡県)
    • Related Report
      2012 Research-status Report
  • [Presentation] アルカリイオン含有酸化膜エレクトレットを形成した櫛歯振動子の発電特性2012

    • Author(s)
      吉井 健太郎,杉山 達彦,鈴木 雅人,林 宏樹,今野 隆,芝田 泰,青山 満,橋口 原
    • Organizer
      日本機械学会 2012年度年次大会
    • Place of Presentation
      金沢大学(石川県)
    • Related Report
      2012 Research-status Report
  • [Presentation] 半導体としての静電型MEMSと新機能デバイス2012

    • Author(s)
      橋口 原
    • Organizer
      日本機械学会 2012年度年次大会
    • Place of Presentation
      金沢大学(石川県)
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] アルカリ含有酸化膜エレクトレットを用いたカンチレバー方式による振動発電素子に関する検討2012

    • Author(s)
      杉山 達彦,青山 満,鈴木 雅人,芝田 泰,橋口 原
    • Organizer
      日本機械学会 2012年度年次大会
    • Place of Presentation
      金沢大学(石川県)
    • Related Report
      2012 Research-status Report
  • [Presentation] K イオン含有SiO2 エレクトレット膜を形成した静電櫛歯を用いた振動発電2012

    • Author(s)
      鈴木 雅人,林 宏樹,森 昭登,杉山 達彦,橋口 原
    • Organizer
      日本機械学会マイクロ・ナノ工学部門主催第4 回「マイクロ・ナノ工学シンポジウム」
    • Place of Presentation
      北九州国際会議場 および西日本総合展示場(福岡県)
    • Related Report
      2012 Research-status Report
  • [Presentation] Characterization of an electret comb-drive actuator as an energy harvesting device2012

    • Author(s)
      Kentaro Yoshii, Tatsuhiko Sugiyama, Masato Suzuki, Hiroki Hayashi, Takashi Konno, Yasushi Shibata, Mitsuru Aoyama, and Gen Hashiguchi
    • Organizer
      2012 Joint International Conference on Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Santa Clara University (Santa Clara, California, USA)
    • Related Report
      2012 Research-status Report
  • [Presentation] A NEW EXPERIMENTAL APPROACH TO EVALUATE PLASMA-INDUCED DAMAGE IN MICROCANTILEVER2012

    • Author(s)
      Yuki Nishimori, Shinji Ueki, Masakazu Sugiyama, Seiji Samukawa, and Gen Hashiguchi
    • Organizer
      2012 Joint International Conference on Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Santa Clara University (Santa Clara, California, USA)
    • Related Report
      2012 Research-status Report
  • [Presentation] ELECTRO STATIC MICRO POWER GENERATOR USING POTASSIUM ION ELECTRET FORMING ON A COMB-DRIVE ACTUATOR2012

    • Author(s)
      M. Suzuki, H. Hayashi, A. Mori, T. Sugiyama, and G. Hashiguchi
    • Organizer
      The 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
    • Place of Presentation
      Georgia Tech Hotel and Conference Center (Atlanta, Georgia, USA)
    • Related Report
      2012 Research-status Report
  • [Presentation] SIO2 ELECTRET INDUCED BY POTASSIUM IONS ON A COMB-DRIVE ACTUATOR2012

    • Author(s)
      T. Sugiyama, M. Aoyama, Y. Shibata, M. Suzuki, T. Konno, M. Ataka, H. Fujita, and G. Hashiguchi
    • Organizer
      MEMS2012
    • Place of Presentation
      Paris Marriott Rive Gauche Hotel and Conference Center, Paris, France
    • Related Report
      2011 Research-status Report
  • [Presentation] 櫛歯振動子への酸化膜エレクトレット形成に関する検討2011

    • Author(s)
      杉山達彦、青山満、鈴木雅人、橋口 原
    • Organizer
      電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      東京工業大学すずかけ台( 神奈川県横浜市緑区長津田町 4259)
    • Related Report
      2011 Research-status Report
  • [Presentation] 櫛歯振動子への酸化膜エレクトレット形成2011

    • Author(s)
      杉山達彦、青山満、橋口 原
    • Organizer
      機械学会年次大会
    • Place of Presentation
      東京工業大学大岡山( 東京都目黒区大岡山2-12-1)
    • Related Report
      2011 Research-status Report
  • [Presentation] 櫛歯型エレクトレット素素子の大きな周波数減少2011

    • Author(s)
      杉山達彦、青山満、鈴木雅人、柴田秦、橋口 原
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京・タワーホール船堀
    • Related Report
      2011 Research-status Report
  • [Presentation] アルカリエレクトレットを用いた高効率、低消費電力デバイス開発とその展開

    • Author(s)
      橋口原
    • Organizer
      第25回マイクロナノ先端技術交流会「材料・工法が切り開く技術レイヤ縦断型MEMSの研究」
    • Place of Presentation
      一般財団法人 マイクロマシンセンター・新テクノサロン(東京都)
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Patent(Industrial Property Rights)] 静電アクチュエータ及び電位差検出装置2014

    • Inventor(s)
      橋口 原、杉山達彦
    • Industrial Property Rights Holder
      国立大学法人静岡大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-088379
    • Filing Date
      2014-04-22
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 静電アクチュエータ及び電位差検出装置2014

    • Inventor(s)
      橋口 原、杉山達彦
    • Industrial Property Rights Holder
      国立大学法人静岡大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-088379
    • Filing Date
      2014-04-22
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] アクチュエータ、シャッタ装置、流体制御装置、スイッチおよび2次元走 査型センサ装置2013

    • Inventor(s)
      橋口 原・鈴木雅人・森 昭登・ 杉山達彦・今本浩史・大場正利・三屋 裕幸・芦澤久幸・石橋和徳
    • Industrial Property Rights Holder
      国立大学法人静岡大学・アオイ電子株式会社・オムロン株式会社・株式会社鷺宮製作所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-165166
    • Filing Date
      2013-08-08
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] アクチュエータ、シャッタ装置、流体制御装置、スイッチおよび2次元走査型センサ装置2013

    • Inventor(s)
      橋口 原他
    • Industrial Property Rights Holder
      国立大学法人静岡大学他
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-165166
    • Filing Date
      2013-08-08
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 静電型変換装置及びDC-DCコンバーター2012

    • Inventor(s)
      鈴木雅人、林宏樹、橋口原、杉山達彦
    • Industrial Property Rights Holder
      アオイ電子株式会社、静岡大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-08-31
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 静電型変換装置及びDC-DCコンバーター2012

    • Inventor(s)
      橋口 原、杉山達彦、鈴木雅人、林 宏樹
    • Industrial Property Rights Holder
      静岡大学、アオイ電子
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-09-07
    • Related Report
      2012 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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