| Budget Amount *help |
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2011: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
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| Research Abstract |
An inchworm is a device which has unlimited working area with small displacement. A piezoelectric actuator (piezo) realizes one micron or smaller deformation. In order to manufacture free-form surface, six degree-of-freedom (6-DOF) positioning device is required; 3-DOF for linear motion and 3-DOF for rotational motion. The developed positioning device is an inchworm based hexapod. It consists of six piezos and six electromagnets. The linear slides in the hexapod are replaced by the stacked-type piezos. Six electromagnets are placed between two piezos. Three electromagnets at the bottom touch the base, and the other three support a platform. Tilt motion is obtained by a hemisphere platform. The electromagnets' excitation and the piezos' deformation are determined by the desired motion. The 5 um linear displacement and 1.3 mrad tilt were obtained. The angle reduced to 0.6 mrad when the 40 g load is applied. The load characteristic depended on the electromagnetic force.
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