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Fundamental study on optimization of nanocarbon materials fabrication technique using an atmospheric-pressure plasma-assisted chemical vapor deposition

Research Project

Project/Area Number 23560325
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Power engineering/Power conversion/Electric machinery
Research InstitutionChiba Institute of Technology

Principal Investigator

ODA Akinori  千葉工業大学, 工学部, 教授 (70335090)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2011: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywordsナノカーボン材料 / プラズマCVD / 大気圧プラズマ / シミュレーション / 低温プラズマ / 容量結合プラズマ / メタン / 容量結合型プラズマ / 水素 / ヘリウム
Research Abstract

In this research project, numerical simulation of non-thermal atmospheric-pressure hydrocarbon plasmas has been conducted using a one-dimensional fluid model, in order to examine whether volumetric and radially-uniform atmospheric-pressure plasmas can be obtained. Usually, hydrocarbon plasmas at low-pressure can be utilized for the fabrication of nanocarbon materials such as diamond-like carbon, diamond, graphene, carbon nanotube, etc. As a result, it is clarified that the volumetric and radially-uniform plasmas at atmospheric-pressure hydrocarbon gas, which are suitable for novel technique of plasma CVD, can not be produced, since electron multiplication, which is important factor for plasma generation, tends to increase rapidly under atmospheric-pressure hydrocarbon condition. Therefore, we need to further investigation on this project, in order to overcome this problem.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (9 results)

All 2014 2013 2012 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (3 results) Book (2 results) Remarks (2 results)

  • [Journal Article] Numerical Analysis on Substrate-Incident Carbon Flux in Low-Pressure Radio-Frequency CH<sub>4</sub> Plasmas for Deposition of Diamond-Like Carbon Films2014

    • Author(s)
      小田昭紀,上坂裕之
    • Journal Title

      IEEJ Transactions on Fundamentals and Materials

      Volume: 134 Issue: 1 Pages: 53-59

    • DOI

      10.1541/ieejfms.134.53

    • NAID

      130003382671

    • ISSN
      0385-4205, 1347-5533
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Absorption Spectroscopy in Multiple Internal Reflection Geometry2013

    • Author(s)
      M. Shinohara, Y. Takami, S. Takabayashi, A. Oda, Y. Matsuda, H. Fujiyama
    • Journal Title

      IEEE Trans. Plasma Sci.

      Volume: 41 Issue: 8 Pages: 1878-1883

    • DOI

      10.1109/tps.2013.2263850

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Presentation] Numerical Simulation on Fundamental Properties in Low-Pressure Radio- Frequency CH_4 Plasmas for Diamond-Like Carbon Films2012

    • Author(s)
      A. Oda and H. Kousaka
    • Organizer
      XXI Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG)
    • Place of Presentation
      Viana do Castelo, Portugal(P2.8.8, 2 pages)
    • Related Report
      2013 Final Research Report
  • [Presentation] Numerical Simulation on fundamental properties in low-pressure radio-frequency CH4 plasmas for diamond-like carbon films2012

    • Author(s)
      A. Oda and H. Kousaka
    • Organizer
      XXI Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 2012)
    • Place of Presentation
      Viana do Castelo, Portugal
    • Related Report
      2012 Research-status Report
  • [Presentation] ダイヤモンドライクカーボン成膜用高周波CH4プラズマのシミュレーション2012

    • Author(s)
      小田 昭紀,上坂 裕之
    • Organizer
      化学工学会第44回秋季大会
    • Place of Presentation
      東北大学 川内キャンパス(仙台)
    • Related Report
      2012 Research-status Report
  • [Book] 現代電気電子材料2013

    • Author(s)
      山本秀和, 小田昭紀
    • Total Pages
      189
    • Publisher
      コロナ社
    • Related Report
      2013 Final Research Report
  • [Book] 現代 電気電子材料2013

    • Author(s)
      山本秀和,小田昭紀
    • Total Pages
      189
    • Publisher
      コロナ社
    • Related Report
      2013 Annual Research Report
  • [Remarks]

    • URL

      http://scdatabase.cc.it-chiba.ac.jp/cithp/KgApp?kyoinId=ymdogyyyggy

    • Related Report
      2013 Final Research Report
  • [Remarks] 千葉工業大学・小田昭紀研究室の紹介ページ

    • URL

      http://www.eece.it-chiba.ac.jp/prof/show_lab.html?gID=oda

    • Related Report
      2012 Research-status Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

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