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Loss reduction of longitudinal-type leaky surface acoustic wave by reverse proton exchange and its application to high-frequency filter

Research Project

Project/Area Number 23560365
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Yamanashi

Principal Investigator

KAKIO Shoji  山梨大学, 医学工学総合研究部, 教授 (70242617)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Keywords弾性表面波 / LiNbO3 / 逆プロトン交換 / AlN薄膜 / 低損失フィルタ / バルク波放射 / 縦波型リーキー弾性表面波 / 低損失化
Research Abstract

Surface acoustic wave (SAW) devices with higher frequency have been strongly demanded to realize the next generation mobile communication system. The longitudinal-type leaky surface acoustic wave (LLSAW) is one of the SAW modes that is advantageous for application to high-frequency SAW devices. However, the LLSAW has huge inherent losses. In this study, it has been found theoretically and experimentally for the LLSAW propagating on LiNbO3 substrate that, the losses due to bulk wave radiation can be considerably reduced by forming a reverse proton exchange layer or by loading with a dielectric thin film with a higher velocity than the substrate.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (46 results)

All 2014 2013 2012 2011 Other

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (37 results) Remarks (3 results)

  • [Journal Article] Loss reduction of longitudinal-type leaky surface acoustic wave by loading with high-velocity thin film2014

    • Author(s)
      F. Matsukura and S. Kakio
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: vol.53, no.7S Issue: 7S Pages: 07KD04-07KD04

    • DOI

      10.7567/jjap.53.07kd04

    • NAID

      210000144230

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Loss reduction of longitudinal-type leaky surface acoustic wave by loading with high-velocity thin film2014

    • Author(s)
      Fumiya Matsukura and Shoji Kakio
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 53

    • NAID

      210000144230

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Longitudinal-type leaky surface acoustic wave on LiNbO3 with high-velocity thin film2013

    • Author(s)
      F. Matsukura, M. Uematsu, K. Hosaka, and S. Kakio
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: vol.52, no.7 Issue: 7S Pages: 07HD02-07HD02

    • DOI

      10.7567/jjap.52.07hd02

    • NAID

      210000142495

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Longitudinal-type leaky SAW on LiNbO3 with high-velocity thin film2013

    • Author(s)
      F. Matsukura, M. Uematsu, K. Hosaka, and S. Kakio
    • Journal Title

      Proc. of 2013 Joint UFFC, EFTF, and PFM Symp

      Volume: 1692-1695

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Loss reduction of longitudinal-type leaky surface acoustic wave by reverse proton exchange2012

    • Author(s)
      S. Kakio and M. Abe
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: vol.51, no.7 Issue: 7S Pages: 07GC17-07GC17

    • DOI

      10.1143/jjap.51.07gc17

    • NAID

      210000140940

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange2012

    • Author(s)
      S. Kakio and M. Abe
    • Journal Title

      Proc. of 2012 IEEE International Ultrasonics Symp

      Pages: 1802-1805

    • NAID

      110008899853

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化2014

    • Author(s)
      松倉史弥, 垣尾省司
    • Organizer
      圧電材料・デバイスシンポジウム2014
    • Place of Presentation
      仙台, 東北大(予稿集, F-3, pp.79-84)
    • Year and Date
      2014-01-30
    • Related Report
      2013 Final Research Report
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by loading with high-velocity thin film2013

    • Author(s)
      F. Matsukura and S. Kakio
    • Organizer
      The 34th Symposium on ULTRASONIC ELECTRONICS
    • Place of Presentation
      Doshisha Univ., Kyoto(1P-3-8, pp.145-146)
    • Year and Date
      2013-11-20
    • Related Report
      2013 Final Research Report
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化2013

    • Author(s)
      松倉史弥, 垣尾省司
    • Organizer
      日本学術振興会弾性波技術第150委員会第133回研究会
    • Place of Presentation
      仙台, 仙台ガーデンパレス(資料, pp.19-24)
    • Year and Date
      2013-10-03
    • Related Report
      2013 Final Research Report
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化2013

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      日本音響学会2013年秋季研究発表会
    • Place of Presentation
      豊橋, 豊橋技術科学大(講演論文集, 1-4-19, pp.1171-1174)
    • Year and Date
      2013-09-25
    • Related Report
      2013 Final Research Report
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化2013

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京田辺, 同志社大(講演予稿集, 17p-A2-1, p.01-120)
    • Year and Date
      2013-09-17
    • Related Report
      2013 Final Research Report
  • [Presentation] 高音速薄膜装荷LiNbO3基板上の縦型漏洩弾性表面波2013

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      第42回EMシンポジウム
    • Place of Presentation
      東京, 東京理科大学(pp.43-46)
    • Year and Date
      2013-05-17
    • Related Report
      2013 Final Research Report
  • [Presentation] 高音速薄膜装荷LiNbO3基板上の縦型漏洩弾性表面波2013

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(29a-B5-5, p.01-139)
    • Year and Date
      2013-03-29
    • Related Report
      2013 Final Research Report
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange2012

    • Author(s)
      S. Kakio and M. Abe
    • Organizer
      2012 International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems
    • Place of Presentation
      Chiba University, Chiba(pp.131-135)
    • Year and Date
      2012-12-07
    • Related Report
      2013 Final Research Report
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange–Dependence of recovery of piezoelectricity on fabrication conditions–2012

    • Author(s)
      M. Abe and S. Kakio
    • Organizer
      The 33th Symposium on ULTRASONIC ELECTRONICS
    • Place of Presentation
      Chiba University, Chiba(2P3-6, pp.205-206)
    • Year and Date
      2012-11-14
    • Related Report
      2013 Final Research Report
  • [Presentation] 高音速薄膜装荷LiNbO3基板上の縦型漏洩弾性表面波2012

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      日本音響学会2012年秋期研究発表会
    • Place of Presentation
      長野, 信州大学(2-5-8, pp.1365-1366)
    • Year and Date
      2012-09-20
    • Related Report
      2013 Final Research Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化―圧電性回復の作製条件依存性―2012

    • Author(s)
      阿部真也, 垣尾省司
    • Organizer
      日本音響学会2012年秋期研究発表会
    • Place of Presentation
      長野, 信州大学(2-5-6, pp.1361-1362)
    • Year and Date
      2012-09-20
    • Related Report
      2013 Final Research Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2012

    • Author(s)
      垣尾省司, 阿部真也
    • Organizer
      日本学術振興会弾性波素子技術第150委員会第125回研究会
    • Place of Presentation
      東京, 弘済会館(pp.7-12)
    • Year and Date
      2012-05-14
    • Related Report
      2013 Final Research Report
  • [Presentation] アルミナ薄膜装荷LiNbO3基板上の縦型漏洩弾性表面波2012

    • Author(s)
      垣尾省司, 植松真人, 保坂桂子
    • Organizer
      2012年電子情報通信学会総合大会
    • Place of Presentation
      岡山大学(A-11-4, p.204)
    • Year and Date
      2012-03-20
    • Related Report
      2013 Final Research Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2012

    • Author(s)
      垣尾省司, 阿部真也
    • Organizer
      圧電材料・デバイスシンポジウム2012
    • Place of Presentation
      仙台, 東北大学(B-3, pp.23-28)
    • Year and Date
      2012-01-30
    • Related Report
      2013 Final Research Report
  • [Presentation] Longitudinal-type leaky SAW on LiNbO3 with high-velocity thin film2012

    • Author(s)
      F. Matsukura, M. Uematsu, K. Hosaka, and S. Kakio
    • Organizer
      The 33th Symposium on ULTRASONIC ELECTRONICS
    • Place of Presentation
      Chiba University, Chiba(2P3-5, pp.203-204)
    • Related Report
      2013 Final Research Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2012

    • Author(s)
      垣尾 省司,阿部 真也
    • Organizer
      圧電材料・デバイスシンポジウム2012, B-3, pp.23-28
    • Place of Presentation
      仙台,東北大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange2011

    • Author(s)
      M. Abe and S. Kakio
    • Organizer
      The 32th Symposium on ULTRASONIC ELECTRONICS
    • Place of Presentation
      Kyoto University, Kyoto(2Pb3-8, pp.227-228)
    • Year and Date
      2011-11-09
    • Related Report
      2013 Final Research Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2011

    • Author(s)
      阿部真也, 垣尾省司
    • Organizer
      電子情報通信学会超音波研究会
    • Place of Presentation
      甲府, 山梨大学(US2011-64, p.35-39)
    • Year and Date
      2011-10-31
    • Related Report
      2013 Final Research Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2011

    • Author(s)
      阿部真也, 垣尾省司
    • Organizer
      日本音響学会2011年秋期研究発表会
    • Place of Presentation
      松江, 島根大学(3-2-12)
    • Year and Date
      2011-09-22
    • Related Report
      2013 Final Research Report
  • [Presentation] 逆プロトン交換LiNbO3基板上の縦型漏洩弾性表面波の伝搬特性2011

    • Author(s)
      垣尾省司, 阿部真也, 清水秀徳
    • Organizer
      第40回EMシンポジウム
    • Place of Presentation
      東京, 東京理科大学(pp.85-90)
    • Year and Date
      2011-05-20
    • Related Report
      2013 Final Research Report
  • [Presentation] 逆プロトン交換LiNbO3基板上の縦型漏洩弾性表面波の伝搬特性2011

    • Author(s)
      垣尾 省司,阿部 真也,清水 秀徳
    • Organizer
      第40回EMシンポジウム,pp.85-90.
    • Place of Presentation
      東京,東京理科大学
    • Related Report
      2011 Research-status Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2011

    • Author(s)
      阿部 真也,垣尾 省司
    • Organizer
      日本音響学会2011年秋期研究発表会,3-2-12, p.1277-1278.
    • Place of Presentation
      松江,島根大学
    • Related Report
      2011 Research-status Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2011

    • Author(s)
      阿部 真也,垣尾 省司
    • Organizer
      電子情報通信学会超音波研究会,US2011-64, p.35-39.
    • Place of Presentation
      甲府,山梨大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange2011

    • Author(s)
      Masaya Abe and Shoji Kakio
    • Organizer
      The 31th Symposium on ULTRASONIC ELECTRONICS, 2Pb3-8, pp.227-228.
    • Place of Presentation
      京都,京都大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Longitudinal-type leaky SAW on LiNbO3 with high-velocity thin film

    • Author(s)
      Fumiya Matsukura, Masato Uematsu, Keiko Hosaka, and Shoji Kakio
    • Organizer
      2013 Joint UFFC, EFTF, and PFM Symposium
    • Place of Presentation
      Prague, Czech Republic
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高音速薄膜装荷高音速薄膜装荷による縦型漏洩弾性表面波の低損失化

    • Author(s)
      松倉 史弥,植松 真人,保坂 桂子,垣尾 省司
    • Organizer
      日本音響学会2013年秋季研究発表会
    • Place of Presentation
      豊橋,豊橋技術科学大
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化

    • Author(s)
      松倉 史弥,垣尾 省司
    • Organizer
      日本学術振興会 弾性波技術第150委員会 第133回研究会
    • Place of Presentation
      仙台,仙台ガーデンパレス
    • Related Report
      2013 Annual Research Report
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by loading with high-velocity thin film

    • Author(s)
      Fumiya Matsukura and Shoji Kakio
    • Organizer
      The 34th Symposium on ULTRASONIC ELECTRONICS
    • Place of Presentation
      京都,同志社大
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化

    • Author(s)
      松倉 史弥,垣尾 省司
    • Organizer
      圧電材料・デバイスシンポジウム2014
    • Place of Presentation
      仙台,東北大
    • Related Report
      2013 Annual Research Report
  • [Presentation] Electrooptic effect in reverse-proton-exchanged X-cut LiNbO3 waveguides

    • Author(s)
      Y. Sakai and S. Kakio
    • Organizer
      Technical Digest of OECC2012, pp. 641-642
    • Place of Presentation
      Busan, Korea
    • Related Report
      2012 Research-status Report
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange

    • Author(s)
      S. Kakio and M. Abe
    • Organizer
      Proceeding of 2012 IEEE International Ultrasonics Symposium, P4H-9, pp.1802-1805
    • Place of Presentation
      Dresden, Germany
    • Related Report
      2012 Research-status Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化

    • Author(s)
      垣尾 省司,阿部 真也
    • Organizer
      日本学術振興会弾性波素子技術第150委員会第125回研究会, pp.7-12
    • Place of Presentation
      東京,弘済会館
    • Related Report
      2012 Research-status Report
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化 ―圧電性回復の作製条件依存性―

    • Author(s)
      阿部 真也,垣尾 省司
    • Organizer
      日本音響学会2012年秋期研究発表会,2-5-6,pp.1361-1362
    • Place of Presentation
      長野,信州大学
    • Related Report
      2012 Research-status Report
  • [Presentation] 逆プロトン交換X カットLiNbO3光導波路の圧電・電気光学特性

    • Author(s)
      酒井 香雄,垣尾 省司
    • Organizer
      日本音響学会2012年秋期研究発表会,2-5-7,pp.1364-1365
    • Place of Presentation
      長野,信州大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Evaluation of piezoelectric and electrooptic properties in reverse-proton-exchanged X-cut LiNbO3 optical waveguides

    • Author(s)
      Y. Sakai and S. Kakio
    • Organizer
      The 33th Symposium on ULTRASONIC ELECTRONICS, 3bP3-4, pp.455-456
    • Place of Presentation
      Chiba University, Chiba
    • Related Report
      2012 Research-status Report
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange – Dependence of recovery of piezoelectricity on fabrication conditions –

    • Author(s)
      M. Abe and S. Kakio
    • Organizer
      The 33th Symposium on ULTRASONIC ELECTRONICS, 2P3-6, pp.205-206
    • Place of Presentation
      Chiba University, Chiba
    • Related Report
      2012 Research-status Report
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange

    • Author(s)
      S. Kakio and M. Abe
    • Organizer
      2012 International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems,pp.131-135
    • Place of Presentation
      Chiba University, Chiba
    • Related Report
      2012 Research-status Report
  • [Remarks] ホームページ

    • URL

      http://www.ccn.yamanashi.ac.jp/~kakio/

    • Related Report
      2013 Final Research Report
  • [Remarks] 山梨大学 垣尾研究室

    • URL

      http://www.ccn.yamanashi.ac.jp/~kakio/

    • Related Report
      2012 Research-status Report
  • [Remarks] 本研究内容、研究成果を以下のURLで公開している。

    • URL

      http://pine.ese.yamanashi.ac.jp/~kakio/

    • Related Report
      2011 Research-status Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

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