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Development of tunable wavelength filter chip with remarkable productivity and optical properties

Research Project

Project/Area Number 23560385
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionUtsunomiya University

Principal Investigator

YODA Hidehiko  宇都宮大学, 工学(系)研究科(研究院), 准教授 (30312862)

Project Period (FY) 2011-04-28 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2011: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywords光波長フィルタ / 光デバイス / 透明ヒータ膜
Outline of Final Research Achievements

In future optical access network based on WDM-PON, wavelength-tunable narrow bandpass filters (BPFs) are required for colorless optical network units. Tunable BPFs using a-Si:D/SiOx multilayer have simple structure, high productivity, narrow bandpass (0.8 nm), and wide tuning range (30 nm). The tunable BPF is based on thermo-optic effect in thin film of amorphous silicon. In fabrication, a-Si:D/SiOx multilayer was deposited using RF magnetron sputtering. A heating layer of ITiO film was formed on the multilayer in advance. The BPF chip size was 2x2 mm^2 and 0.05 mmt. When current is applied to the heater layer, both temperature and selective wavelength of the BPF increase. We measured the center wavelength of the BPF chip when the power consumption at the heating layer was varied. The power of 0.3 W was used for the wavelength shift of +20 nm. It is noteworthy that the power required for the wavelength shift of +30 nm can be reduced to 0.45 W.

Report

(5 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (15 results)

All 2015 2014 2013 2012 2011 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (12 results)

  • [Journal Article] Infrared polarizer employing multiple metal-film subwavelength gratings2013

    • Author(s)
      K. Shiraishi and H. Yoda
    • Journal Title

      Optics Express

      Volume: vol. 21, Iss. 12 Pages: 13998-14007

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] A two-port polarization-insensitive coupler module between single-mode fiber and silicon-wire waveguide2012

    • Author(s)
      K. Shiraishi, H. Yoda and Chen S. Tsai
    • Journal Title

      Optics Express

      Volume: vol. 20, no 22 Pages: 24370-24375

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] High Focusing Power Lensed Fibers Employing Graded-Index Fiber With Eigen-Beam Diameter2011

    • Author(s)
      K. Shiraishi, H. Yoda, Y. Kogami, and C. S. Tsai
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 23 Pages: 1376-1378

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] Si/SiNチューナブル波長フィルタの作製と評価に関する研究2015

    • Author(s)
      田島正彦, 依田秀彦
    • Organizer
      第5回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      宇都宮大学工学部
    • Year and Date
      2015-03-02 – 2015-03-03
    • Related Report
      2014 Annual Research Report
  • [Presentation] EOチューナブル波長フィルタ用PLZT薄膜の電気及光学特性評価に関する研究2015

    • Author(s)
      飯富真, 依田秀彦
    • Organizer
      第5回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      宇都宮大学工学部
    • Year and Date
      2015-03-02 – 2015-03-03
    • Related Report
      2014 Annual Research Report
  • [Presentation] Robust lensed fibers having high focusing effects in resin bond2014

    • Author(s)
      K. Shiraishi, M. Horiuchi, H. Yoda, and C. S. Tsai
    • Organizer
      International Conference on Electronics Packaging (ICEP 2014)
    • Place of Presentation
      Toyama, Japan
    • Year and Date
      2014-04-23 – 2014-04-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] A spot-size converter with vertical down taper for the coupling between single-mode fiber and silicon-wire waveguide2014

    • Author(s)
      K. Shiraishi, R. Takasaki, H. Yoda, H. Oshikiri, and C. S. Tsai
    • Organizer
      International Conference on Electronics Packaging (ICEP 2014)
    • Place of Presentation
      Toyama, Japan
    • Year and Date
      2014-04-23 – 2014-04-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] Si/SiN多層膜フィルタの作製と評価2013

    • Author(s)
      川崎将人, 依田秀彦
    • Organizer
      第3回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      宇都宮大学
    • Related Report
      2012 Research-status Report
  • [Presentation] TOチューナブル波長フィルタ省電力化のための局部薄型加工2013

    • Author(s)
      水沼秀聡, 依田秀彦
    • Organizer
      第3回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      宇都宮大学
    • Related Report
      2012 Research-status Report
  • [Presentation] EOチューナブル波長フィルタ用PLZT薄膜の作製2013

    • Author(s)
      佐藤慶, 豊田篤志, 依田秀彦
    • Organizer
      第3回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      宇都宮大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Response Evaluation of Tunable Optical Bandpass Filter Using a-Si:D/SiO2 Multilayer2011

    • Author(s)
      H. Yoda, T. Tashiro, K. Shiraishi, and C. S. Tsai
    • Organizer
      the Asia-Pacific Interdisciplinary Research Conference 2011 (AP-IRC 2011)
    • Place of Presentation
      Toyohashi, Japan
    • Related Report
      2011 Research-status Report
  • [Presentation] 温度制御型波長選択フィルタ用透明ヒータ膜の作製

    • Author(s)
      小檜山知弘, 依田秀彦
    • Organizer
      第4回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      群馬大学工学部
    • Related Report
      2013 Research-status Report
  • [Presentation] マルチキャビティ型Si/SiOx多層膜フィルタの作製

    • Author(s)
      サナテムウォンビライ, 依田秀彦
    • Organizer
      第4回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      群馬大学工学部
    • Related Report
      2013 Research-status Report
  • [Presentation] PLZTを用いたEOチューナブル波長フィルタの作製要素技術の開発

    • Author(s)
      豊田篤志, 依田秀彦
    • Organizer
      第4回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      群馬大学工学部
    • Related Report
      2013 Research-status Report
  • [Presentation] 温度制御型チューナブル波長フィルタチップの局所加工による省電力化

    • Author(s)
      水沼秀聡, 依田秀彦
    • Organizer
      第4回電気学会東京支部栃木・群馬支所合同研究発表会
    • Place of Presentation
      群馬大学工学部
    • Related Report
      2013 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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