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Zinc oxide transparent transistor and its application to stacked image sensor

Research Project

Project/Area Number 23560408
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionKochi University of Technology

Principal Investigator

FURUTA MAMORU  高知工科大学, 工学部, 教授 (20412439)

Co-Investigator(Kenkyū-buntansha) URAOKA Yukiharu  奈良先端科学技術大学院大学, 物質創成科学研究科, 教授 (20314536)
KIMURA Mutsumi  龍谷大学, 理工学部, 教授 (60368032)
Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2011: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywords先端機能デバイス / 電子・電気材料 / 半導体物性 / 酸化物半導体 / 透明回路 / イメージセンサ / イメージセンサー / 薄膜トランジスタ / デバイスシミュレーション
Research Abstract

The aim of this research is to achieve transparent thin-film transistor by using wide-gap oxide semiconductors. Based on the analysis of the influence of lattice defects existing in an oxide semiconductor bulk and at an interface between insulator and oxide semiconductor on electrical properties and reliability of the transistor, we investigated the defect passivation method of oxide semiconductors.
As a consequence of this research, transparent thin-film transistor, which was not influenced by visible light irradiation, could be achieved, and the stacked organic image sensor has been successively demonstrated with transparent signal readout circuits.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (98 results)

All 2014 2013 2012 2011 Other

All Journal Article (32 results) (of which Peer Reviewed: 31 results) Presentation (55 results) (of which Invited: 6 results) Book (3 results) Remarks (8 results)

  • [Journal Article] Suppression of degradation induced by negative gate bias and illumination stress in amorphous InGaZnO thin-film transistor by applying negative drain bias2014

    • Author(s)
      D. Wang, M. Furuta, 他計5名(5番)
    • Journal Title

      ACS applied Materials and Interfaces

      Volume: 6 Issue: 8 Pages: 5713-5718

    • DOI

      10.1021/am500300g

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] High performance solution-processed InGaZnO thin-film Transistor fabricated by ozone-assisted atmospheric pressure mist deposition2014

    • Author(s)
      M. Furuta, 他計5名(1番)
    • Journal Title

      Journal of Display Technology (IEEE)

      Volume: (in-press) Issue: 11 Pages: 934-938

    • DOI

      10.1109/jdt.2013.2294967

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Negative bias illumination stress induced electron trapping at back-channel interface of InGaZnO thin-film transistor2014

    • Author(s)
      M. P. Hung, M. Furuta, 他計4名(4番)
    • Journal Title

      Electrochemical and Solid-State Letters

      Volume: 3(3) Issue: 3 Pages: Q13-Q16

    • DOI

      10.1149/2.010403ssl

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Ultrasonic-assisted mist chemical vapor deposition of II-oxide and related oxide compounds2014

    • Author(s)
      Shizuo Fujita, Kentaro Kaneko, Takumi Ikenoue, Toshiyuki Kawaharamura and Mamoru Furuta
    • Journal Title

      Physica status solidi (c)

      Volume: 未定 Issue: 7-8 Pages: 1225-1228

    • DOI

      10.1002/pssc.201300655

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of drain bias on negative gate bias and illumination stress induced degradation in amorphous InGaZnO thin-film transistors2014

    • Author(s)
      D. Wang, M.-P. Hung, J. Jiang, T. Toda, C. Li, and M. Furuta
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 3S1 Pages: 03CC01-03CC01

    • DOI

      10.7567/jjap.53.03cc01

    • NAID

      210000143469

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low temperature deposition of SiOx insulator film with newly developed facing electrodes chemical vapor deposition2014

    • Author(s)
      T. Matsuda, M. Furuta, T. Hiramatsu, H. Furuta, T. Kawaharamura, and T. Hirao
    • Journal Title

      Vacuum

      Volume: 101 Pages: 189-192

    • DOI

      10.1016/j.vacuum.2013.08.003

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of Substrates on Formation of Zinc Oxide Nanostructures by a Novel Reducing Annealing Method2014

    • Author(s)
      X. Li, C. Li, T. Kawaharamura, D. Wang, N. Nitta, M. Furuta, H. Furuta, and A. Hatta
    • Journal Title

      Nanoscience and Nanotechnology Letters

      Volume: 6 Issue: 2 Pages: 174-180

    • DOI

      10.1166/nnl.2014.1708

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thermal analysis of amorphous oxide thin-film transistor degraded by combination of joule heating and hot carrier effect2013

    • Author(s)
      S. Urakawa, M. Furuta, Y. Uraoka, 他計11名(8番)
    • Journal Title

      Applie Physics letters

      Volume: 102 Issue: 5

    • DOI

      10.1063/1.4790619

    • NAID

      120005254613

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] The deterioration phenomenon of amorphous InSnZnO transistors derivered from the process of annealing2013

    • Author(s)
      S. Tomai, M. Furuta, 他計10名(10番)
    • Journal Title

      Electrochemical and Solid-State Letters

      Volume: 2(12) Issue: 12 Pages: P107-P109

    • DOI

      10.1149/2.003312ssl

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth and electrical properties of AlOx grown by mist chemical vapor deposition2013

    • Author(s)
      T. Kawaharamura, M. Furuta, 計4名(4番)
    • Journal Title

      AIP Advances

      Volume: 3(3) Issue: 3

    • DOI

      10.1063/1.4798303

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Thermal Distribution in Amorphous InSnZnO Thin-Film Transistor2013

    • Author(s)
      Satoshi Urakawa, Shigekazu Tomai, Yoshihiro Ueoka, Haruka Yamazaki, Masashi Kasami, Koki Yano, Dapeng Wang, Mamoru Furuta, Masahiro Horita, Yasuaki Ishikawa, and Yukiharu Uraoka
    • Journal Title

      Physica Status Solidi C

      Volume: 10 Issue: 11 Pages: 1561-1564

    • DOI

      10.1002/pssc.201300253

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhancing carrier mobility of IGZO TFT fabricated by non-vacuum mist CVD with O3 assistance2013

    • Author(s)
      T. Kawaharamura, T. Uchida, M. Sanada, and M. Furuta
    • Journal Title

      Physica status solidi (c)

      Volume: 10 Issue: 11 Pages: 1565-1568

    • DOI

      10.1002/pssc.201300247

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thin-Film Transistors Using Uniform and Well-Aligned Single-Walled Carbon Nanotubes Channels by Dielectrophoretic Assembly2013

    • Author(s)
      T. Toda, H. Furusawa, and M. Furuta
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 3S Pages: 03BB09-03BB09

    • DOI

      10.7567/jjap.52.03bb09

    • NAID

      210000141915

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Trap Densities in ZnO TFTs with SiNx/SiOx Stacked Gate Insulators Fabricated Using Several N2O Flow Rate during SiOx Deposition2013

    • Author(s)
      Mutsumi Kimura, Tokiyoshi Matsuda, Mamoru Furuta, Takahiro Hiramatsu, Hiroshi Furuta, Chaoyang Li, Takashi Hirao, Yudai Kamada, and Shizuo Fujita
    • Journal Title

      ECS Transaction

      Volume: 54 (1) Issue: 1 Pages: 121-126

    • DOI

      10.1149/05401.0121ecst

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] (Invited) Negative-Bias with Illumination Stress Induced State Creation in Amorphous InGaZnO Thin-Film Transistor2013

    • Author(s)
      M. Furuta, M. P. Hung, J. Jiang, D. Wang, S. Tomai, H. Hayasaka, amd K. Yano
    • Journal Title

      ECS Transaction

      Volume: 54 (1) Issue: 1 Pages: 127-134

    • DOI

      10.1149/05401.0127ecst

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thin-Film Transistors Using Dielectrophoretic Assembly of Single-Walled Carbon Nanotubes2013

    • Author(s)
      T. Toda, T. Kawaharamura, H. Furusawa, and M. Furuta
    • Journal Title

      ECS Transaction

      Volume: 50 (8) Issue: 8 Pages: 223-228

    • DOI

      10.1149/05008.0223ecst

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A-InGaZnO Thin-Film Transistor with Non-Vacuum Processed InGaZnO/AlOx Gate Dielectric Stack2013

    • Author(s)
      M. Furuta, T. Kawaharamura, T. Toda, and D. Wang
    • Journal Title

      ECS Transaction

      Volume: 50 (8) Issue: 8 Pages: 95-100

    • DOI

      10.1149/05008.0095ecst

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Stoichiometry Control of ZnO Thin Film by Adjusting Working Gas Ratio during Radio Frequency Magnetron Sputtering2013

    • Author(s)
      C. Li, D. Wang, Z. Li, X. Li, T. Kawaharamura, and M. Furuta
    • Journal Title

      Journal of Materials

      Volume: 2013 Pages: 1-6

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ミストCVD法によるAlOx薄膜作製に対するO3支援の効果2013

    • Author(s)
      内田貴之, 川原村敏幸, 古田守, 眞田克
    • Journal Title

      日本材料学会誌

      Volume: 62 Pages: 663-667

    • NAID

      130003384101

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Electrical Properties of the Thin-Film Transistor With an Indium–Gallium–Zinc Oxide Channel and an Aluminium Oxide Gate Dielectric Stack Formed by Solution-Based Atmospheric Pressure Deposition2012

    • Author(s)
      M. Furuta, T. Kawaharamura, D. Wang, T. Hirao, T. Toda, and G. T. Dang
    • Journal Title

      IEEE Electron Devices Letters

      Volume: 33 Issue: 6 Pages: 851-853

    • DOI

      10.1109/led.2012.2192902

    • NAID

      120005254627

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Photoleakage current of TFTs with ZnO channels formed at various oxygen partial pressure under visible light irradiation2012

    • Author(s)
      S. Shimakawa, M. Furuta, 他計8名(8番)
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 3S Pages: 03CB04-03CB04

    • DOI

      10.1143/jjap.51.03cb04

    • Related Report
      2013 Final Research Report 2012 Research-status Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] A 128×96 Pixel, 50 mm Pixel Pitch Transparent Readout Circuit using InGaZnO4 Thin Film Transistor Array with Indium-Tin-Oxide Electrodes for Organic Image Sensor2012

    • Author(s)
      T. Sakai, H. Seo, S. Aihara, M. Kubota, N. Egami, D. Wang, and M. Furuta
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 1R Pages: 010202-010202

    • DOI

      10.1143/jjap.51.010202

    • Related Report
      2013 Final Research Report 2012 Research-status Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Photo Induced Negative Bias Instability of Zinc Oxide Thin-Film Transistors2012

    • Author(s)
      S. Shimakawa, D. Wang, and M. Furuta
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 10R Pages: 108003-108003

    • DOI

      10.1143/jjap.51.108003

    • NAID

      210000073028

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Crystallization Using Biomineralized Nickel Nanodots of Amorphous Silicon Thick Films Deposited by Chemical Vapor Deposition, Sputtering and Electron Beam Evaporation2012

    • Author(s)
      Takashi Nishida
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 3S Pages: 03CA01-03CA01

    • DOI

      10.1143/jjap.51.03ca01

    • NAID

      210000140373

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Well-arrayed ZnO nanostructure formed by multi-annealing processes at low temperature2012

    • Author(s)
      D. Wang, Z. Li, T. Kawaharamura, M. Furuta, T. Narusawa, and C. Li
    • Journal Title

      physica status solidi (c)

      Volume: 9 Issue: 2 Pages: 194-197

    • DOI

      10.1002/pssc.201100271

    • NAID

      120005729026

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Practical Guidance of Parameter Extraction for Device Simulation of Thin-Film Transistors2012

    • Author(s)
      M. Kimura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 5R Pages: 054302-054302

    • DOI

      10.1143/jjap.51.054302

    • NAID

      40019280399

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition2012

    • Author(s)
      Yumi Kawamura
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51 Issue: 2S Pages: 02BF04-02BF04

    • DOI

      10.1143/jjap.51.02bf04

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Extraction of Trap Densities in ZnO Thin-film Transistors and Dependence on Oxygen Partial Pressures during Sputtering of ZnO Films2011

    • Author(s)
      M. Kimura, M. Furuta,他計9名(2番)
    • Journal Title

      IEEE Trans. Electron Devices

      Volume: 58 Issue: 9 Pages: 3018-3024

    • DOI

      10.1109/ted.2011.2158546

    • Related Report
      2013 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Trap Densities in ZnO Thin-Film Transistors with SiOx Gate Insulators by Several Deposition Conditions2011

    • Author(s)
      M. Kimura, M. Furuta, 他計9名
    • Journal Title

      Electrochemical and Solid-State Letters

      Volume: 14 Issue: 9 Pages: H365-H365

    • DOI

      10.1149/1.3601058

    • Related Report
      2013 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] ZnO Thin Films Fabricated by Plasma-Assisted Atomic, Layer Deposition2011

    • Author(s)
      Yumi Kawamura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol.50 Issue: 4S Pages: 04DF05-04DF05

    • DOI

      10.1143/jjap.50.04df05

    • Related Report
      2013 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Successful growth of conductive highly-crystalline Sn-dopedα-Ga2O3 thin films by fine channel mist chemical vapor deposition2011

    • Author(s)
      T. Kawaharamura, Giang T. Dang, and M. Furuta
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol.51 Issue: 4R Pages: 40207-40207

    • DOI

      10.1143/jjap.51.040207

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Unque Phenomenon in Degradation of Amorphous In_2O_3-Ga_2O_3-ZnO Thin-Film Transistors under Dynamic Stress2011

    • Author(s)
      Mami Fujii
    • Journal Title

      Appl.Phys.Express

      Volume: 4 Issue: 10 Pages: 104103-104105

    • DOI

      10.1143/apex.4.104103

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] Negative bias with illumination stress induced state creation in a-InGaZnO TFT2013

    • Author(s)
      M. Furuta, 計7名(1番)
    • Organizer
      International Conference of Semiconductor Technology for ULSI and TFT
    • Place of Presentation
      Grenoble, France
    • Related Report
      2013 Final Research Report
  • [Presentation] High performance oxide Thin-Film Transistor fabricated using atmospheric pressure deposition method2013

    • Author(s)
      M. Furuta, 計1名(1番)
    • Organizer
      International Conference on Advanced Materials
    • Place of Presentation
      Qingdao, China
    • Related Report
      2013 Final Research Report
  • [Presentation] Atmospheric pressure Processed InGaZnO Thin-film transistors2013

    • Author(s)
      M. Furuta, 計2名(1番)
    • Organizer
      IEEE International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      Osaka, Japan
    • Related Report
      2013 Final Research Report
  • [Presentation] High Mobility Atmospheric-Pressure-Processed IGZO TFT with AlOx/IGZO Stack Fabricated by Mist Chemical Vapor Deposition2013

    • Author(s)
      M. Furuta, T. Kawaharamura, T. Kaida, and D. Wang
    • Organizer
      The 20th International Display Workshops (IDW’13)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Reaction Mechanism for Fabrication of High Quality IGZO Thin Films Grown by Non-Vacuum Mist CVD with O3 Assistance2013

    • Author(s)
      T. Kawaharamura, T. Kaida, and M. Furuta
    • Organizer
      2013 MRS Fall Meeting & Exhibit
    • Place of Presentation
      Boston, MA, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Single Crystalline ZnO Nanorods Fabricated by Mist Chemical Vapor Deposition for Optical Applications2013

    • Author(s)
      C. Li, X. Li, D. Wang, T. Kawaharamura, M. Furuta, and A. Hatta
    • Organizer
      The 20th International Display Workshops (IDW’13)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Influence of Charge Trapping on Hysteresis of InGaZnO Thin-Film Transistors under Negative Bias and Illumination Stress2013

    • Author(s)
      M. P. Hung, D. Wang, J. Jiang, and M. Furuta
    • Organizer
      The 20th International Display Workshops (IDW’13)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] High-performance oxide thin-film transistors fabricated using atmospheric pressure deposition method2013

    • Author(s)
      M. Furuta, T. Kawaharamura
    • Organizer
      International Conference on Advanced Materials (IUMRS-ICAM2013)
    • Place of Presentation
      Qingdao, China.
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Effect of Active Layer Thickness on Negative Bias and Illumination Stress Induced Degradation in Amorphous InGaZnO Thin-Film Transistors2013

    • Author(s)
      D. Wang, J. Jiang, M. P. Hung, T. Toda, C. Li, and M. Furuta
    • Organizer
      International Conference on Advanced Materials (IUMRS-ICAM2013)
    • Place of Presentation
      Qingdao, China.
    • Related Report
      2013 Annual Research Report
  • [Presentation] Developing a Novel Hybrid Method for Fabricating Well-aligned Zinc Oxide Nanorod2013

    • Author(s)
      X. Li, E. Pradeep, T. Kawaharamura, D. Wang, A. Hatta, M. Furuta, and C. Li
    • Organizer
      International Conference on Advanced Materials (IUMRS-ICAM2013)
    • Place of Presentation
      Qingdao, China.
    • Related Report
      2013 Annual Research Report
  • [Presentation] Investigation of Degradation Mechanism in Amorphous InGaZnO Thin-Film Transistors under Negative Bias and Illumination Stress by Simulation2013

    • Author(s)
      D. Wang, J. Jiang, M. P. Hung, T. Toda, C. Li, and M. Furuta
    • Organizer
      The 13th International Meeting on Information Display (IMID 2013)
    • Place of Presentation
      Daegu, Republic of Korea
    • Related Report
      2013 Annual Research Report
  • [Presentation] High Mobility IGZO TFT fabricated by Solution-Based Non-Vacuum Mist Chemical Vapor Deposition2013

    • Author(s)
      T. Kawaharamura and M. Furuta
    • Organizer
      4th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors
    • Place of Presentation
      Villard-de-Lans (Grenoble area), France
    • Related Report
      2013 Annual Research Report
  • [Presentation] Negative-Bias with Illumination Stress Induced State Creation in a-InGaZnO TFT2013

    • Author(s)
      M. Furuta, M. P. Hung, J. Jiang, D. Wang, S. Tomai, H. Hayasaka, K. Yano
    • Organizer
      4th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors
    • Place of Presentation
      Villard-de-Lans (Grenoble area), France
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Effect of Drain Bias on Negative Gate Bias and Illumination Stress Induced Degradation in Amorphous InGaZnO Thin-Film Transistors2013

    • Author(s)
      D. Wang, M. P. Hung, J. Jiang, C. Li, and M. Furuta
    • Organizer
      The Twentieth International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD 13)
    • Place of Presentation
      Kyoto, Japan.
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fabrication of High Conductive ITO Thin Film for Photovoltaic Applications2013

    • Author(s)
      X. Li, C. Li, D. Wang, C. Pradeep, M. Furuta, and A. Hatta
    • Organizer
      The Twentieth International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD 13)
    • Place of Presentation
      Kyoto, Japan.
    • Related Report
      2013 Annual Research Report
  • [Presentation] Thermal Degradation and Theoretical Analysisof Amorphous Oxide Thin-Film Transistor2013

    • Author(s)
      S. Urakawa, S. Tomai, M. Kasami, K. Yano, D. Wang, M. Furuta, M. Kimura, M. Horita, Y. Ishikawa, and Y. Uraoka
    • Organizer
      The Twentieth International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD 13)
    • Place of Presentation
      Kyoto, Japan.
    • Related Report
      2013 Annual Research Report
  • [Presentation] Morphology Controlled Single-crystal ZnO Nanostructures Fabricated by a Novel Mist Chemical Vapor Deposition2013

    • Author(s)
      C. Li, X. Li, D. Wang, T. Kawaharamura, N. Nitta, M. Furuta, and A. Hatta
    • Organizer
      Society for Information Display (SID2013)
    • Place of Presentation
      Vancouver, Canada
    • Related Report
      2013 Annual Research Report
  • [Presentation] Trap States in Amorphous In-Sn-Zn-O Thin-Film Transistors Analyzed Using Dependence on Channel Thickness2013

    • Author(s)
      T. Matsuda, M. Kimura, J. Jiang, D. Wang, M. Furuta, M. Kasami, S. Tomai, and K. Yano
    • Organizer
      Society for Information Display (SID2013)
    • Place of Presentation
      Vancouver, Canada
    • Related Report
      2013 Annual Research Report
  • [Presentation] Atmospheric Pressure Processed InGaZnO Thin-Film Transistors2013

    • Author(s)
      M. Furuta, T. Kawaharamura
    • Organizer
      International Meeting for Future of Electron Devices, Kansai (IMFEDK)
    • Place of Presentation
      Osaka, Japan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Enhancing carrier mobility of IGZO TFT fabricated by Mist CVD with O3 assistance2013

    • Author(s)
      T. Kawaharamura, T. Uchida, D. Wang, M. Sanada, and M. Furuta
    • Organizer
      The 40th International Symposium on Compound Semiconductors (ISCS 2013)
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Thermal Distribution in Amorphous InSnZnO Thin-Film Transistor2013

    • Author(s)
      S. Urakawa, S. Tomai, Y. Ueoka, H. Yamazaki, M. Kasami, K. Yano, D. Wang, M. Furuta, M. Horita, Y. Ishikawa, and Y. Uraoka
    • Organizer
      The 40th International Symposium on Compound Semiconductors (ISCS 2013)
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] バックチャネル欠陥準位がa-InGaZnO薄膜トランジスタ特性及び信頼性に与える影響2013

    • Author(s)
      戸田達也,Dapeng Wang,Jingxin Jiang,Phi Hung Mai,古田守
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学(京都)
    • Related Report
      2013 Annual Research Report
  • [Presentation] 酸化物薄膜トランジスタにおける発熱効果および劣化現象のサイズ依存性2013

    • Author(s)
      浦川哲,笘井重和,笠見雅司,矢野公規,Wang Dapeng,古田守,堀田昌宏,石河泰明,浦岡行治
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学(京都)
    • Related Report
      2013 Annual Research Report
  • [Presentation] ZnSnO薄膜トランジスタにおけるMgOドーピング効果2013

    • Author(s)
      竹之内良太, 王大鵬, 石井林太郎, 高橋広己, 久保田高史, 古田守
    • Organizer
      第9回薄膜材料デバイス研究集会
    • Place of Presentation
      龍谷大学アバンティ響都ホール(京都)
    • Related Report
      2013 Annual Research Report
  • [Presentation] オゾン支援ミストCVD法による高移動度(>10cme/Vs)IGZO TFT~TFT特性のチャネル組成依存性~2013

    • Author(s)
      介田忠宏, 川原村敏幸, 古田守
    • Organizer
      第9回薄膜材料デバイス研究集会
    • Place of Presentation
      龍谷大学アバンティ響都ホール(京都)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Degradation Phenomena in Amorphous Oxide Thin-Film Transistor by Self-Heating Effect2013

    • Author(s)
      Satoshi Urakawa, Shigekazu Tomai, Yoshihiro Ueoka, Haruka Yamazaki, Masashi Kasami, Koki Yano, Dapeng Wang, Mamoru Furuta, Masahiro Horita, Yasuaki Ishikawa, Yukiharu Uraoka
    • Organizer
      The 9th International Thin-Film Transistor Conference 2013 (ITC2013)
    • Place of Presentation
      The University of Tokyo, Tokyo, Japan.
    • Related Report
      2012 Research-status Report
  • [Presentation] Influence of Front- and Back-Channel Traps on Electrical Properties of Oxide TFTs with Various Channel Thicknesses2013

    • Author(s)
      Jingxin Jiang, Dapeng Wang, Mamoru Furuta
    • Organizer
      The 9th International Thin-Film Transistor Conference 2013 (ITC2013)
    • Place of Presentation
      The University of Tokyo, Tokyo, Japan.
    • Related Report
      2012 Research-status Report
  • [Presentation] High performance a-InGaZnOx Thin-Film Transistors fabricated by Solution-Based Atmospheric Pressure Deposition Method2013

    • Author(s)
      Mamoru Furuta, Toshiyuki Kawaharamura, T. Uchida, Dapeng Wang, M. Sanada
    • Organizer
      The 9th International Thin-Film Transistor Conference 2013 (ITC2013)
    • Place of Presentation
      The University of Tokyo, Tokyo, Japan.
    • Related Report
      2012 Research-status Report
  • [Presentation] Solution-Based Atmospheric Pressure Deposition Method for Oxide TFTs2012

    • Author(s)
      M. Furuta, 計3名(1番)
    • Organizer
      The 19th International Display Workshops
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Final Research Report
  • [Presentation] Oxide Thin-Film Transistors for Flat Panel Displays and Transparent Electronics2012

    • Author(s)
      M. Furuta, 計1名(1番)
    • Organizer
      20th International Conference on Composites or Nano Engineering
    • Place of Presentation
      Beijing, China
    • Related Report
      2013 Final Research Report
  • [Presentation] Optical Properties of Nanostructured ZnO Films Influenced by Different Gas Ratio Deposition with Radio Frequency Magnetron Sputtering2012

    • Author(s)
      Chaoyang Li, Xin Li, Dapeng Wang, Toshiyuki Kawaharamura, Mamoru Furuta, Akimitsu Hatta
    • Organizer
      The 19th International Display Workshops in conjunction with Asia Display 2012 (IDW/AD’12)
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Solution-Based Atmospheric Pressure Deposition Method for Oxide TFTs2012

    • Author(s)
      Mamoru Furuta, Toshiyuki Kawaharamura, Dapeng Wang
    • Organizer
      The 19th International Display Workshops in conjunction with Asia Display 2012 (IDW/AD’12)
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] a-InGaZnO Thin-Film Transistor with Non-Vacuum Processed InGaZnO/AlOx Gate Dielectric Stack2012

    • Author(s)
      Mamoru Furuta, Toshiyuki Kawaharamura, Tatsuya Toda, Dapeng Wang
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid-state Science (PRiME2012)
    • Place of Presentation
      Honolulu, Hawaii
    • Related Report
      2012 Research-status Report
  • [Presentation] Self-Organized Growth ZnO Based Nanorods for Photonic Device Application2012

    • Author(s)
      Chaoyang Li, Dapeng Wang, Xin Li, Toshiyuki Kawaharamura, Mamoru Furuta, Akimitsu Hatta
    • Organizer
      The 12th International Meeting on Information Display (IMID2012)
    • Place of Presentation
      Daegu, Korea
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] Floating Body Effects in High-Mobility Oxide Thin-film Transistor2012

    • Author(s)
      Mamoru Furuta, Dapeng Wang, Jingxin Jiang, Toshiyuki Kawaharamura, Chaoyang Li
    • Organizer
      The 12th International Meeting on Information Display (IMID2012)
    • Place of Presentation
      Daegu, Korea
    • Related Report
      2012 Research-status Report
  • [Presentation] Extraction of trap density on oxide thin-film transistors with various channel thickness2012

    • Author(s)
      Jingxin Jiang, Dapeng Wang, Chaoyang Li, Mamoru Furuta
    • Organizer
      20th Annual International Conference on Composites or Nano Engineering (ICCE-20)
    • Place of Presentation
      Beijing, China
    • Related Report
      2012 Research-status Report
  • [Presentation] Influence of substrate on zinc oxide nanostructrues grown by thermal annealing2012

    • Author(s)
      Xin Li, Chaoyang Li, Toshiyuki Kawaharamura, Dapeng Wang, Hiroshi Furuta, Mamoru Furuta, Akimitsu Hatta
    • Organizer
      The 20th Annual International Conference on Composites or Nano Engineering (ICCE-20)
    • Place of Presentation
      Beijing, China
    • Related Report
      2012 Research-status Report
  • [Presentation] Oxide Thin-film Transistors for Flat Panel Display and Transparent Electronics Applications2012

    • Author(s)
      Mamoru Furuta
    • Organizer
      The 20th Annual International Conference on Composites or Nano Engineering (ICCE-20)
    • Place of Presentation
      Beijing, China
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] Influence of Active Layer Thickness on Performance and Reliability of InSnZnO Thin-Film Transistors2012

    • Author(s)
      Dapeng Wang, Chaoyang Li, Mamoru Furuta, Shigekazu Tomai, Misa Sunagawa, Mami Nishimura, Emi Kawashima, Masashi Kasami, Koki Yano
    • Organizer
      The Nineteenth International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD 12)
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Structural and Electrical Properties of Al2O3 Film Grown by Mist Chemical Vapour Deposition2012

    • Author(s)
      Toshiyuki Kawaharamura, Dapeng Wang, Tetsuya Toda, Chaoyang Li, Mamoru Furuta
    • Organizer
      The Nineteenth International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD 12)
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Synthesis and photoluminescence properties of vertically well-aligned ZnO nanostructures2012

    • Author(s)
      Chaoyang Li, Dapeng Wang, Toshiyuki Kawaharamura, Zeming Li, Noriko Nitta, Mamoru Furuta, Akimitsu Hatta
    • Organizer
      Information Display's Display Week 2012 (SID 2012)
    • Place of Presentation
      Boston, USA
    • Related Report
      2012 Research-status Report
  • [Presentation] Electrical properties of oxide TFT with an IGZO/AlOx stack grown by solution-based non-vacuum mist chemical vapour deposition2012

    • Author(s)
      Toshiyuki Kawaharamura, Dapeng Wang, Mamoru Furuta
    • Organizer
      Information Display's Display Week 2012 (SID 2012)
    • Place of Presentation
      Boston, USA
    • Related Report
      2012 Research-status Report
  • [Presentation] Amorphous InGaZnO Thin-Film Transistor with solution-based atmospheric pressure deposited IGZO/AlOx Gate Dielectric Stack2012

    • Author(s)
      Mamoru Furuta, Toshiyuki Kawaharamura, Dapeng Wang
    • Organizer
      8th International Thin-Film Transistor Conference (ITC 2012)
    • Place of Presentation
      Lisbon, Portugal
    • Related Report
      2012 Research-status Report
  • [Presentation] Photo-induced Bias Instability of Zinc Oxide Thin-Film Transistors2012

    • Author(s)
      Shin-ichi Shimakawa, Dapeng Wang, Mamoru Furuta
    • Organizer
      8th International Thin-Film Transistor Conference (ITC 2012)
    • Place of Presentation
      Lisbon, Portugal
    • Related Report
      2012 Research-status Report
  • [Presentation] Photo-Induced Bias Instability of Zinc Oxide Thin-Film Transistors2012

    • Author(s)
      S. Shimakawa, D. Wang, and M. Furuta
    • Organizer
      International Thin-Film Transistor Conference (ITC2012)
    • Place of Presentation
      Lisbon, Portugal
    • Related Report
      2011 Research-status Report
  • [Presentation] a-IGZO TFT with Solution-Based Atmospheric Pressure Deposited IGZO/AlOx Gate Dielectric Stack2012

    • Author(s)
      M. Furuta, S. Shimakawa, D. Wang,
    • Organizer
      International Thin-Film Transistor Conference (ITC2012)
    • Place of Presentation
      Lisbon, Portugal
    • Related Report
      2011 Research-status Report
  • [Presentation] Super Low-Temperature Crystallization of Polycrystalline Silicon Thin Films by Underwater Laser Annealing2012

    • Author(s)
      E. Machida, Y.Uraoka
    • Organizer
      International Thin-Film Transistor Conference (ITC2012)
    • Place of Presentation
      Lisbon, Portugal
    • Related Report
      2011 Research-status Report
  • [Presentation] High reliability a-InGaZnO thin film transistors with low hydrogen SiNx gate insulators2012

    • Author(s)
      Y.Haruka, Y.Uraoka
    • Organizer
      International Thin-Film Transistor Conference (ITC2012)
    • Place of Presentation
      Lisbon, Portugal
    • Related Report
      2011 Research-status Report
  • [Presentation] Color Image Sensor with Virtically-stacked Organic Photoconductive Films2011

    • Author(s)
      M. Furuta, 計7名(6番)
    • Organizer
      The 18th International Display Workshops (IDW'11)
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2013 Final Research Report
  • [Presentation] Photo-Leakage Current and Hysteresis of the ZnO TFTs under Visible Light Irradiation2011

    • Author(s)
      M. Furuta, Y. Kamada, T. Hiramatsu, T. Matsuda, S. Shimakawa, C. Li, S. Fujita, and T. Hirao
    • Organizer
      International Workshop on Active-Matrix Flatpanel Display and Devices
    • Place of Presentation
      京都
    • Related Report
      2011 Research-status Report
  • [Presentation] Effects of Excimer Laser annealing of Oxide Semiconductor Films2011

    • Author(s)
      M.Fujii, Y.Uraoka
    • Organizer
      2011 International Conference on Solid State Devices and Materials
    • Place of Presentation
      名古屋
    • Related Report
      2011 Research-status Report
  • [Presentation] Crystallinity of Polycrystalline Silicon Formed by Underwater Laser Annealing2011

    • Author(s)
      E.Machida, Y.Uraoka
    • Organizer
      International Meeting on Information Display
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2011 Research-status Report
  • [Presentation] 酸化亜鉛薄膜トランジスタのサブギャップ準位と電気特性・信頼性への影響2011

    • Author(s)
      古田 守、島川 伸一
    • Organizer
      シリコン材料デバイス研究会(招待講演)
    • Place of Presentation
      奈良
    • Related Report
      2011 Research-status Report
  • [Presentation] Features and Applications of Various TFTs - Si based Matured TFTs and Oxide Semiconductor based Transparent TFTs2011

    • Author(s)
      Mutsumi Kimura
    • Organizer
      2011 IEEE Photonics Conference(招待講演)
    • Place of Presentation
      USA
    • Related Report
      2011 Research-status Report
  • [Presentation] 広がる薄膜トランジスタ技術とデバイス2011

    • Author(s)
      木村 睦
    • Organizer
      第131回電子セラミック・プロセス研究会(招待講演)
    • Place of Presentation
      横浜
    • Related Report
      2011 Research-status Report
  • [Book] 応用物理, "ミスト化学気相成長法を用いた大気圧薄膜形成と酸化物機能デバイスのグリーンプロセス化"2014

    • Author(s)
      川原村敏幸, 古田守
    • Total Pages
      5
    • Publisher
      応用物理学会(2014年9月号掲載決定)
    • Related Report
      2013 Final Research Report
  • [Book] 月刊ディスプレイ(2013年10月号), "溶液プロセスによる酸化物半導体TFTの大気圧形成技術"2013

    • Author(s)
      古田守, 川原村敏幸
    • Publisher
      テクノタイムス社
    • Related Report
      2013 Final Research Report
  • [Book] 月刊ディスプレイ 2013年10月号2013

    • Author(s)
      古田 守、川原村 敏幸
    • Publisher
      (株)テクノタイムズ社
    • Related Report
      2013 Annual Research Report
  • [Remarks] 高知工科大学 古田研究室

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/

    • Related Report
      2013 Final Research Report
  • [Remarks] 本研究の詳細に関する公開

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/research01.html

    • Related Report
      2013 Final Research Report
  • [Remarks] 高知工科大学 古田研究室ホームページ

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/

    • Related Report
      2013 Annual Research Report
  • [Remarks] 研究紹介(積層式色分離型イメージセンサ)

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/research01.html

    • Related Report
      2013 Annual Research Report
  • [Remarks] 古田研究室HP 酸化物半導体による透明エレクトロニクスによる研究

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/research01.html

    • Related Report
      2012 Research-status Report
  • [Remarks] 古田研究室HP 研究紹介

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/research.html

    • Related Report
      2012 Research-status Report
  • [Remarks] 古田研究室HP 論文リスト

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/result.html

    • Related Report
      2012 Research-status Report
  • [Remarks] 古田研究室HP 国際会議発表リスト

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/result01.html

    • Related Report
      2012 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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