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Theoretical study on abnormal phenomena and degradation in GaN-based HEMTs and reuction method of them

Research Project

Project/Area Number 23560411
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionShibaura Institute of Technology

Principal Investigator

HORIO KAZUSHIGE  芝浦工業大学, システム工学部, 教授 (10165590)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywordsガリウムナイトライド / HEMT / 電流コラプス / フィールドプレート / 耐圧 / 2次元解析 / バッファ層 / トラップ / 計算機解析
Research Abstract

Two-dimensional analysis of slow current transients in AlGaN/GaN field effecttransistors is performed and their mechanisms are studied. Also the method of reduce these slow transients is discussed. Particularly, it is shown that the slow transients are reduced by introducing a so-called field plate, and the optimum field-plate structures are discussed. It is also discussed how the off-state breakdown voltage is enhanced by introducing a field plate.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (41 results)

All 2014 2013 2012 2011 Other

All Journal Article (16 results) (of which Peer Reviewed: 8 results) Presentation (25 results)

  • [Journal Article] Increase in breakdown voltage of AlGaN/GaN HEMTs with a high-k dielectric layer2014

    • Author(s)
      H. Hanawa, K. Horio
    • Journal Title

      Phys. Status Solidi (a)

      Volume: vol.211, no.4 Pages: 784-787

    • Related Report
      2013 Final Research Report
  • [Journal Article] Numerical analysis of breakdown voltage enhancement in AlGaN/GaN HEMTs with a high-k passivation layer2014

    • Author(s)
      H. Hanawa, H. Onodera, A. Nakajima, K. Horio
    • Journal Title

      IEEE Trans. Electron Devices

      Volume: vol.61, no.3 Pages: 769-775

    • Related Report
      2013 Final Research Report
  • [Journal Article] Numerical analysis of breakdown voltage enhancement in AlGaN/GaN HEMTs with a high-k passivation layer2014

    • Author(s)
      H. Hanawa, H. Onodera, A. Nakajima, and K. Horio
    • Journal Title

      IEEE Trans. Electron Devices

      Volume: 61 Pages: 769-775

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Increase in breakdown voltage of AlGaN/GaN HEMTs with a high-k dielectric layer2014

    • Author(s)
      H. Hanawa and K. Horio
    • Journal Title

      Physica Status Solidi (a)

      Volume: 211 Pages: 784-787

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Analysis of lags and current collapse in source-field-plate AlGaN/GaN high electron mobility transistors2013

    • Author(s)
      H. Hanawa, H. Onodera, K. Horio
    • Journal Title

      Jpn J. Appl. Phys.

      Volume: vol.52, no.8

    • NAID

      210000142767

    • Related Report
      2013 Final Research Report
  • [Journal Article] Analysis of lags and current collapse in source-field-plate AlGaN/GaN high electron mobility transistors2013

    • Author(s)
      H. Hanawa, H. Onodera and K. Horio
    • Journal Title

      Jpn J. Appl. Phys

      Volume: 52

    • NAID

      210000142767

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Analysis of buffer-impurity and field-plate effects on breakdown characteristics in small sized AlGaN/GaN high electron mobility transistors2012

    • Author(s)
      H. Onodera, K. Horio
    • Journal Title

      Semicond. Sci. Technol.

      Volume: vol.27, no.8

    • Related Report
      2013 Final Research Report
  • [Journal Article] Backside-electrode effects on current collapse in field-plate AlGaN/GaN HEMTs2012

    • Author(s)
      K. Horio, H. Onodera
    • Journal Title

      Phys. Status Solidi C

      Volume: vol.9, no.7 Pages: 1655-1657

    • Related Report
      2013 Final Research Report
  • [Journal Article] Buffer-related gate lag in AlGaN/GaN HEMTs2012

    • Author(s)
      A. Nakajima, K. Fujii, K. Horio
    • Journal Title

      Phys. Status Solidi C

      Volume: vol.9, no.7 Pages: 1658-1660

    • Related Report
      2013 Final Research Report
  • [Journal Article] Analysis of buffer-impurity and field-plate effects on breakdown characteristics in small sized AlGaN/GaN high electron mobility transistors2012

    • Author(s)
      H. Onodera and K. Horio
    • Journal Title

      Semicond. Sci. Technol.

      Volume: 27 Issue: 8 Pages: 0850161-6

    • DOI

      10.1088/0268-1242/27/8/085016

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Buffer-related gate lag in AlGaN/GaN HEMTs2012

    • Author(s)
      A. Nakajima, K. Fujii and K. Horio
    • Journal Title

      Phys. Status Solidi C

      Volume: 9 Issue: 7 Pages: 1658-1660

    • DOI

      10.1002/pssc.201100636

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Backside-electrode effects on current collapse in field-plate AlGaN/GaN HEMTs2012

    • Author(s)
      K. Horio and H. Onodera
    • Journal Title

      Phys. Status Solidi C

      Volume: 9 Issue: 7 Pages: 1655-1657

    • DOI

      10.1002/pssc.201100554

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Numerical analysis of buffer-trap effects on gate lag in AlGaN/GaN high electron mobility transistors2011

    • Author(s)
      A. Nakajima, K. Fujii, K. Horio
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: vol.50, no.10

    • NAID

      40019043757

    • Related Report
      2013 Final Research Report
  • [Journal Article] Analysis of backside-electrode and gate-field-plate effects on buffer-related current collapse in AlGaN/GaN high electron mobility transistors2011

    • Author(s)
      K. Horio, H. Onodera, A. Nakajima
    • Journal Title

      J. Appl. Phys.

      Volume: vol.109, no.11

    • Related Report
      2013 Final Research Report
  • [Journal Article] Numerical analysis of buffer-trap effects on gate lag in AlGaN/GaN high electron mobility transistors2011

    • Author(s)
      A. Nakajima, K. Fujii and K. Horio
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 50 Pages: 1043031-6

    • NAID

      40019043757

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Analysis of backside-electrode and gate-field-plate effects on buffer-related current collapse in AlGaN/GaN high electron mobility transistors2011

    • Author(s)
      K. Horio, H. Onodera and A. Nakajima
    • Journal Title

      J. Appl. Phys.

      Volume: 109 Pages: 1145081-7

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] Increase in breakdown voltage of AlGaN/GaN HEMTs with a high-k dielectric layer2013

    • Author(s)
      H. Hanawa, K. Horio
    • Organizer
      Abstracts of the Tenth International Conference of Nitride Semiconductors (ICNS-10)
    • Place of Presentation
      Washington, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] Breakdown voltage enhancement in AlGaN/GaN HEMTs using a high-k passivation layer2013

    • Author(s)
      K. Horio, H. Hanawa
    • Organizer
      Proceedings of 37th Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE 2013)
    • Place of Presentation
      Rostok, Germany
    • Related Report
      2013 Final Research Report
  • [Presentation] Simulation of back-electrode effects on lags and current collapse in field-plate AlGaN/GaN HEMTs2013

    • Author(s)
      K. Horio, H. Onodera, T. Fukai
    • Organizer
      Proceedings of Nanotech 2013
    • Place of Presentation
      Washington, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] Similarities of lags, current collapse and breakdown characteristics between source and gate field-plate AlGaN/GaN HEMTs2013

    • Author(s)
      H. Hanawa, H. Onodera, A. Nakajima, K. Horio
    • Organizer
      Proceedings of 2013 IEEE International Reliability Physics Symposium (IRPS 2013)
    • Place of Presentation
      Monterey, USA
    • Related Report
      2013 Final Research Report
  • [Presentation] Physics-based simulation of field-plate effects on breakdown characteristics in AlGaN/GaN HEMTs2012

    • Author(s)
      H. Onodera, K. Horio
    • Organizer
      Proceedings of the European Microwave Integrated Circuits Conference 2012
    • Place of Presentation
      Amsterdam, Netherland
    • Related Report
      2013 Final Research Report
  • [Presentation] Analysis of lags and current collapse in source-field-plate AlGaN/GaN HEMTs2012

    • Author(s)
      H. Hanawa, H. Onodera, K. Horio
    • Organizer
      Proceedings of 2012 International Workshop on Nitride Semiconductors
    • Place of Presentation
      Sapporo, Japan(MoP-ED-18)
    • Related Report
      2013 Final Research Report
  • [Presentation] Analysis of breakdown characteristics in small-sized field-plate AlGaN/GaN HEMTs2012

    • Author(s)
      H. Onodera, K. Horio
    • Organizer
      Proceedings of 36th Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE 2012)
    • Place of Presentation
      Porquerolles, France
    • Related Report
      2013 Final Research Report
  • [Presentation] ゲート及びソースフィールドプレートAlGaN/GaN HEMTのラグや電流コラプスの類似性2012

    • Author(s)
      塙,小野寺,中島,堀尾
    • Organizer
      2012年電子情報通信学会総合大会
    • Place of Presentation
      岡山大学
    • Related Report
      2011 Research-status Report
  • [Presentation] ソースフィールドプレート構造AlGaN/GaN HEMTにおける電流コラプスの解析2012

    • Author(s)
      塙,小野寺,堀尾
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Related Report
      2011 Research-status Report
  • [Presentation] フィールドプレート構造微細AlGaN/GaN HEMTの耐圧特性の解析2012

    • Author(s)
      小野寺,堀尾
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Related Report
      2011 Research-status Report
  • [Presentation] 微細AlGaN/GaN HEMTの耐圧特性に与えるバッファ層内不純物とフィールドプレートの影響の解析2012

    • Author(s)
      小野寺,中島,堀尾
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      機会振興会館(東京都)
    • Related Report
      2011 Research-status Report
  • [Presentation] Physics-based simulation of back-electrode effects on lag and current collapse in field-plate AlGaN/GaN HEMTs2011

    • Author(s)
      H. Onodera, A. Nakajima, K. Horio
    • Organizer
      Proceedings of the European Microwave Integrated Circuits Conference 2011
    • Place of Presentation
      Manchester, United Kingdom
    • Related Report
      2013 Final Research Report
  • [Presentation] Effects of buffer impurities and field plate on breakdown performance in small-sized AlGaN/GaN HEMTs2011

    • Author(s)
      H. Onodera, A. Nakajima, K. Horio
    • Organizer
      Abstracts of the 9th International Conference on Nitride Semiconductors (ICNS-9)
    • Place of Presentation
      Glasgow, United Kingdom(J1.6)
    • Related Report
      2013 Final Research Report
  • [Presentation] Backside-electrode effects on current collapse in field-plate AlGaN/GaN HEMTs2011

    • Author(s)
      K. Horio, H. Onodera
    • Organizer
      Abstracts of the 16th Semiconducting and Insulating Materials Conference (SIMC-XVI)
    • Place of Presentation
      Stockholm, Sweden(Tu1-8)
    • Related Report
      2013 Final Research Report
  • [Presentation] Buffer-related gate lag in AlGaN/GaN HEMTs2011

    • Author(s)
      A. Nakajima, K. Fujii, K. Horio
    • Organizer
      Abstracts of the 16th Semiconducting and Insulating Materials Conference (SIMC-XVI)
    • Place of Presentation
      Stockholm, Sweden(Tu3-24)
    • Related Report
      2013 Final Research Report
  • [Presentation] Effects of buffer traps on breakdown characteristics in field-plate AlGaN/GaN HEMTs2011

    • Author(s)
      H. Onodera, A. Nakajima, K. Horio
    • Organizer
      Proceedings of the 5th Asia-Pacific Workshop on Widegap Semiconductors (APWS 2011)
    • Place of Presentation
      Toba, Japan
    • Related Report
      2013 Final Research Report
  • [Presentation] Field-plate and back-electrode effects on lag and current collapse in AlGaN/GaN HEMTs2011

    • Author(s)
      H. Onodera, A. Nakajima, K. Horio
    • Organizer
      Proceedings of the 5th Asia-Pacific Workshop on Widegap Semiconductors (APWS 2011)
    • Place of Presentation
      Toba, Japan
    • Related Report
      2013 Final Research Report
  • [Presentation] Physics-based simulation of back-electrode effects on lag and current collapse in field-plate AlGaN/GaN HEMTs2011

    • Author(s)
      K. Horio
    • Organizer
      2011 European Microwave Integrated Circuits Conference
    • Place of Presentation
      Manchester, England
    • Related Report
      2011 Research-status Report
  • [Presentation] フィールドプレート構造微細AlGaN/GaN HEMTの耐圧特性の数値解析2011

    • Author(s)
      小野寺,中島,堀尾
    • Organizer
      平成23年度電気関係学会東北支部連合大会
    • Place of Presentation
      東北学院大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Physics-based simulation of field-plate effects on breakdown characteristics in AlGaN/GaN HEMTs

    • Author(s)
      H. Onodera and K. Horio
    • Organizer
      2012 European Microwave Integrated Circuits Conference
    • Place of Presentation
      Amsterdam, Netherland
    • Related Report
      2012 Research-status Report
  • [Presentation] Analysis of lags and current collapse in source-field-plate AlGaN/GaN HEMTs

    • Author(s)
      H. Hanawa, H. Onodera and K. Horio
    • Organizer
      2012 International Workshop on Nitride Semiconductors
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Analysis of breakdown characteristics in small-sized field-plate AlGaN/GaN HEMTs

    • Author(s)
      H. Onodera and K. Horio
    • Organizer
      36th Workshop on Compound Semiconductor Devices and Integrated Circuits
    • Place of Presentation
      Porquerolles, France
    • Related Report
      2012 Research-status Report
  • [Presentation] 高誘電率パシベーション膜を有するAlGaN/GaN HEMTの耐圧向上の解析

    • Author(s)
      塙,中島,堀尾
    • Organizer
      2013年春季第60回応用物理学関係連合講演会
    • Place of Presentation
      神奈川大学
    • Related Report
      2012 Research-status Report
  • [Presentation] ソースフィールドプレート構造AlGaN/GaN HEMTのラグ現象,電流コラプス及び耐圧特性の解析

    • Author(s)
      塙,小野寺,堀尾
    • Organizer
      電子情報通信学会電子デバイス・マイクロ波研究会
    • Place of Presentation
      東京
    • Related Report
      2012 Research-status Report
  • [Presentation] ソースフィールドプレート構造AlGaN/GaN HEMTにおける電流コラプスの解析(2)

    • Author(s)
      塙,小野寺,堀尾
    • Organizer
      2012年秋季第73回応用物理学会学術講演会
    • Place of Presentation
      松山大学
    • Related Report
      2012 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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