Physical properties of optimization and control of nitride superconducting thin films for superconducting device applications

• Project/Area Number: 23560431
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: National Institute of Information and Communications Technology
• Principal Investigator: MAKISE Kazumasa 独立行政法人情報通信研究機構, 未来ICT研究所 ナノICT研究室, 研究員 (60363321)
• Project Period (FY): 2011 – 2013
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000); Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2011: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
• Keywords: 超伝導デバイス / 超伝導薄膜 / 窒化物薄膜 / 窒化物

Research Abstract

In order to find the optimum condition for fabrication of high-quality NbTiN thin films, we investigated the relationship between superconducting properties and crystal structure for the NbTiN thin films deposited on various substrates under different depositing conditions.It is found that the superconducting properties of the films depend on the lattice constnt
Next,we developed NbN-based SFQ circuits consisting of high-quality epitaxial NbN/AlN/NbN trilayer grown on MgO (100) substrate. We succeeded in demonstrating correct operations of all the designed SFQ cells.

Research Products

• [Journal Article] Electron weak localization and electron-electron interaction effects on magneto-conductivity in In-Ga-Zn oxide films (2014)
  • Author(s): B. Shinozaki, K. Hidaka, S. Ezaki, K. Makise, T. Asano, S. Tomai, K. Yano, H, Nakamura
  • Journal Title: Thin Solid films Volume: 551 Pages: 195-199
  • DOI: 10.1016/j.tsf.2013.11.088
  • Peer Reviewed
• [Journal Article] Design and Fabrication of All-NbN SFQ Circuits for SSPD Signal Processing (2013)
  • Author(s): K. Makise, H. Terai, S. Miki, T. Yamashita, Z. Wang
  • Journal Title: IEEE Trans. Appl. Supercon. Volume: 23 (2013) Issue: 3 Pages: 1100804-1100804
  • DOI: 10.1109/tasc.2012.2235504
  • Peer Reviewed
• [Journal Article] Higgs Amplitude Mode in the BCS Superconductors Nb1-xTixN Induced by Terahertz Pulse Excitation (2013)
  • Author(s): R. Matsunaga, YI. Hamada, K. Makise, Y. Uzawa, Z. Wang, R. Shimano
  • Journal Title: Physical Review Letters Volume: 111 Issue: 5 Pages: 57002-57002
  • DOI: 10.1103/physrevlett.111.057002
  • Peer Reviewed
• [Journal Article] Development and testing of Band 10 receivers for the ALMA project (2013)
  • Author(s): Y. Uzawa, Y. Fujii, A. gonzalez, K. Kaneko, M. Kroug, T. Kojima, K. Kuroiwa, A. Miyachi, S. Saito, K. Makise, Z. Wang, S. Asayama,
  • Journal Title: Physica C Volume: 494 Pages: 189-194
  • DOI: 10.1016/j.physc.2013.04.008
  • Peer Reviewed
• [Journal Article] Parallel Bias and Readout Techniques Toward Realization of Large-Scale SSPD Array With SFQ Circuit (2013)
  • Author(s): T. Yamashita, S. Miki, H. Terai, K. Makise, Z. Wang
  • Journal Title: IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY Volume: 23 Issue: 3 Pages: 2500804-2500804
  • DOI: 10.1109/tasc.2012.2234199
  • Peer Reviewed
• [Journal Article] Crossover from weak localization to anti-weak localization in indium oxide systems with wide range of resistivity (2013)
  • Author(s): B. Shinozaki, K. Hidaka, S. Ezaki, K. Makise, T. Asano, S. Tomai, K. Yano, H. Nakamura
  • Journal Title: Journal of Applied Physics Volume: 113 Issue: 15 Pages: 153707-153707
  • DOI: 10.1063/1.4801809
  • Peer Reviewed
• [Journal Article] High-quality epitaxial NbN/AlN/NbN tunnel junctions with a wide range of current density (2013)
  • Author(s): Z. Wang, H. Terai, W. Qiu, K. Makise, Y. Uzawa, K. Kimoto, Y. Nakamura
  • Journal Title: Applied Physics Letters Volume: 102 Issue: 14 Pages: 142604-142604
  • DOI: 10.1063/1.4801972
  • Peer Reviewed
• [Journal Article] Technologies for superconducting nanowire single-photon detector array system (2013)
  • Author(s): S. Miki, T. Yamashita, H. Terai, T. Yamashita, K. Makise, Z. Wang
  • Journal Title: ADVANCED PHOTON COUNTING TECHNIQUES VII Volume: 8727 Pages: 872708-872708
  • DOI: 10.1117/12.2016750
• [Journal Article] The First Six ALMA Band 10 Receivers (2013)
  • Author(s): Y. Fujii, A. Gonzalez, M. Kroug, K. Kaneko, A. Miyachi, T. Yokoshima, K. Kuroiwa, H. Ogawa, K. Makise, Z. Wang, Y. Uzawa
  • Journal Title: IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY Volume: 3 Issue: 1 Pages: 39-49
  • DOI: 10.1109/tthz.2012.2236147
  • Peer Reviewed
• [Journal Article] (2012)
  • Author(s): S. Ezaki, K. Makise, B. Shinozaki, T. Odou, T. Asano, H. Terai, T. Yamashita, S. Miki, Z. Wang
  • Journal Title: J. Phys. Condens. Matter Volume: 24 Issue: 47 Pages: 475702-475702
  • DOI: 10.1088/0953-8984/24/47/475702
  • Peer Reviewed
• [Journal Article] Resistively shunted NbN/AlN/NbN tunnel junctions for single flux quantum circuits (2012)
  • Author(s): K. Makise, H. Terai, Z. Wang
  • Journal Title: Physics Proceed Volume: 36 (2012) Pages: 116-120
  • DOI: 10.1016/j.phpro.2012.06.056
  • Peer Reviewed
• [Journal Article] Fluctuation conductance and the Berezinskii-Kosterlitz-Thouless transition in two dimensional epitaxial NbTiN ultra-thin films (2012)
  • Author(s): K. Makise, H. Terai, T. Yamashita, S. Miki, Z. Wang, Y. Uzawa, S. Ezaki, T. Odou, B. Shinozaki
  • Journal Title: JOURNAL OF PHYSICS：Conference Series Volume: 400 Issue: 2 Pages: 22064-22064
  • DOI: 10.1088/1742-6596/400/2/022064
  • Peer Reviewed
• [Journal Article] Depression of positive magneto-conductance due to anti-weak localization effect in annealed In2O3-ZnO thick films (2012)
  • Author(s): B. Shinozaki, S. Ezaki, K. Hidaka, K. Makise, T. Asano, N. Kokubo, K. Yamada, K. Yano, H. Nakamura
  • Journal Title: JOURNAL OF PHYSICS：Conference Series Volume: 400 Issue: 4 Pages: 42052-42052
  • DOI: 10.1088/1742-6596/400/4/042052
  • Peer Reviewed
• [Journal Article] Activation like behaviour on the temperature dependence of the carrier density in In2O3-ZnO films (2012)
  • Author(s): K. Makise, B. Shinozaki, T. Asano, K. Yano, H. Nakamura
  • Journal Title: JOURNAL OF PHYSICS：Conference Series Volume: 400 Issue: 4 Pages: 42043-42043
  • DOI: 10.1088/1742-6596/400/4/042043
  • Peer Reviewed
• [Journal Article] Characteristics of Tc and ρ(T) of polycrystalline (In2O3)-(ZnO) films with low carrier density (2012)
  • Author(s): B. Shinozaki, S. Takada, N. Kokubo, K. Makise, T. Asano, K. Yamada, K. Yano, H. Nakamura
  • Journal Title: JOURNAL OF PHYSICS：Conference Series Volume: 400 Issue: 2 Pages: 22107-22107
  • DOI: 10.1088/1742-6596/400/2/022107
  • Peer Reviewed
• [Journal Article] Development of fiber-coupled four-element superconducting nanowire single-photon detectors (2012)
  • Author(s): S. Miki, T. Yamashita, H. Terai, K. Makise, M. Fujiwara, M. Sasaki, Z. wang
  • Journal Title: Physics Procedia Volume: 36 Pages: 77-81
  • DOI: 10.1016/j.phpro.2012.06.216
  • Peer Reviewed
• [Journal Article] Developing superconducting flux qubit by using epitaxial NbN/AlN/NbN junction (2012)
  • Author(s): W. Qiu, K. Makise, H. Terai, Z. Wang
  • Journal Title: Physics Procedia Volume: 36 Pages: 360-364
  • DOI: 10.1016/j.phpro.2012.06.245
  • Peer Reviewed
• [Journal Article] Low-jitter single flux quantum signal readout from superconducting single photon detector (2012)
  • Author(s): H. Terai, T. Yamashita, S. Miki, K. Makise, Z. Wang
  • Journal Title: OPTICS EXPRESS Volume: 18 Issue: 18 Pages: 20115-20123
  • DOI: 10.1364/oe.20.020115
  • Peer Reviewed
• [Journal Article] Relationship between variable range hopping transport and carrier density of amorphous In2O3-10 wt.% ZnO thin films (2012)
  • Author(s): K. Makise, B. Shinozaki, T. Asano, K. Mitsuishi, K. Yano, K. Inoue, H. Nakamura
  • Journal Title: JOURNAL OF APPLIED PHYSICS Volume: 112 Issue: 3 Pages: 33716-33716
  • DOI: 10.1063/1.4745055
  • Peer Reviewed
• [Journal Article] Crosstalk-free operation of multielement superconducting nanowire single-photon detector array integrated with single-flux-quantum circuit in a 0.1 W Gifford-McMahon cryocooler (2012)
  • Author(s): T. Yamashita, S. Miki, H.Terai, K. Makise, Z. Wang
  • Journal Title: OPTICS LETTERS Volume: 37 Issue: 14 Pages: 2982-2984
  • DOI: 10.1364/ol.37.002982
  • Peer Reviewed
• [Journal Article] Characterization of NbTiN Thin Films Deposited on Various Substrates (2011)
  • Author(s): K. Makise, H. Terai, M. Takeda, Y. Uzawa, Z. Wang
  • Journal Title: IEEE Trans. Appl. Supercon. Volume: 21 (2011) Issue: 3 Pages: 139-142
  • DOI: 10.1109/tasc.2010.2088350
  • Peer Reviewed
• [Journal Article] Performance of the ALMA Band 10 SIS Receiver Prototype Model (2011)
  • Author(s): Y.Fujii, M.Kroug, K.Kaneko. A.Gonzalez, Y.Uzawa, T.Kojima, K.Kuroiwa, A.MIyachi, K.Makise, Z.Wang W.Shan
  • Journal Title: IEEE Transactions on Applied Superconductivity Volume: 21 Issue: 3 Pages: 606-611
  • DOI: 10.1109/tasc.2010.2093861
  • Peer Reviewed
• [Journal Article] An Optical Input Module With Superconducting Single-Flux-Quantum Circuit Operating at 1550 nm (2011)
  • Author(s): H.Terai, S.Shinada, K.Makise, Z.Wang, N.Wada
  • Journal Title: IEEE Transactions on Applied Superconductivity Volume: 21 Issue: 3 Pages: 896-899
  • DOI: 10.1109/tasc.2010.2103911
  • Peer Reviewed
• [Journal Article] Superconducting single photon detectors integrated with single flux quantum readout circuits in a cryocooler (2011)
  • Author(s): S.Miki, H.Terai, T.Yamashita, K.Makise, M.Fujiwara, M.Sasaki, Z.Wang
  • Journal Title: Applied Physics Letters Volume: 99 Issue: 11 Pages: 1111081-3
  • DOI: 10.1063/1.3640503
  • Peer Reviewed
• [Journal Article] Origin of intrinsic dark count in superconducting nanowire single-photon detectors (2011)
  • Author(s): T.Yamashita, S.Miki, K.Makise, W.Qiu, H.Terai, M.Fujiwara, M.Sasaki, Z.Wang,
  • Journal Title: Applied Physics Letters Volume: 99 Issue: 16
  • DOI: 10.1063/1.3652908
  • Peer Reviewed
• [Journal Article] Superconducting characteristics and microstructure of polycrystalline Zn-doped In2O3 films (2011)
  • Author(s): B.Shinozaki, S.Takada, N.Kokubo, K.Makise, K.Mitsuishi, K.Yamada, K.Yano, H. Nakamura
  • Journal Title: Physica C Volume: 471 Issue: 21-22 Pages: 717-720
  • DOI: 10.1016/j.physc.2011.05.036
  • Peer Reviewed
• [Journal Article] 1/f noise in NbN/AlN/NbN Josephson junction with a low critical current density (2011)
  • Author(s): W.Qiu, K.Makise, H.Terai, Z.Wang,
  • Journal Title: Physica C Volume: 471 Issue: 21-22 Pages: 1196-1198
  • DOI: 10.1016/j.physc.2011.05.157
  • Peer Reviewed
• [Presentation] 窒化物超伝導ナノワイヤの超伝導-絶縁体転移 (2014)
  • Author(s): 牧瀬圭正
  • Organizer: 日本物理学会第69回年次大会
  • Place of Presentation: 東海大学, 神奈川県, 平塚市
• [Presentation] TiN/AlN/TiNトンネル接合の作製と評価 (2014)
  • Author(s): 牧瀬圭正
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学, 神奈川県, 平塚市
• [Presentation] 窒化物超伝導ナノワイヤの超伝導 絶縁体転移 (2014)
  • Author(s): 牧瀬 圭正、丘 偉、 寺井 弘高、 富成 征弘、 田中 秀吉、 篠崎 文重
  • Organizer: 日本物理学会 第69回年次大会
  • Place of Presentation: 東海大学 神奈川県 日本
• [Presentation] TiN/AlN/TiNトンネル接合の作製と評価 (2014)
  • Author(s): 牧瀬 圭正、孫 鋭、寺井 弘高、王 鎮
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 青山学院大学 神奈川県 日本
• [Presentation] 64ピクセルSSPDアレイ用SFQ信号処理回路の設計と動作 (2014)
  • Author(s): 寺井 弘高、牧瀬 圭正、山下 太郎、三木 茂人、王 鎮
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 青山学院大学 神奈川県 日本
• [Presentation] Epitaxial Growth of TiN films on Single-crystal Si(100) Substrates with High Vacuum Magnetron Sputtering Method (2014)
  • Author(s): 孫 鋭、牧瀬 圭正、丘 偉、寺井 弘高、王 鎮
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 青山学院大学 神奈川県 日本
• [Presentation] アタカマ大型ミリ波サブミリ波干渉計用バンド10受信機全73台の性能 (2014)
  • Author(s): 鵜澤 佳徳、藤井 泰範、マティアス クロッグ、金子 慶子、小嶋 崇文、アルバロ ゴンザレス、黒岩 宏一、宮地 晃平、牧瀬 圭正、王 鎮
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 青山学院大学 神奈川県 日本
• [Presentation] Investigation of losses in eptaxially grown superconducting microwave resonator on MgO substrate (2014)
  • Author(s): 丘 偉、牧瀬 圭正、孫 鋭、寺井 弘高、王 鎮
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 青山学院大学 神奈川県 日本
• [Presentation] エピタキシャルNbN超伝導ナノ細線における負の磁気抵抗 (2013)
  • Author(s): 牧瀬圭正
  • Organizer: 日本物理学会2013年秋季大会
  • Place of Presentation: 徳島大学, 徳島県, 徳島市
• [Presentation] Operating of SFQ logic circuits consisting of NbN/AlN/NbN tunnel junctions (2013)
  • Author(s): 牧瀬圭正
  • Organizer: European Conference on Applied Superconductivity
  • Place of Presentation: Magazzini del Contone conference centerジェノバ, イタリア
• [Presentation] エピタキシャルNbN超伝導ナノ細線における負の磁気抵抗 (2013)
  • Author(s): 牧瀬 圭正、寺井弘高、山下 太郎、三木 茂人、王 鎮、富成 征弘、田中 秀吉、篠崎 文重
  • Organizer: 日本物理学会 2013年秋季大会
  • Place of Presentation: 徳島大学 徳島県 日本
• [Presentation] 非断熱的テラヘルツパルス励起によるBCS超伝導体Nb1-xTixNにおけるヒッグスモードの観測 (2013)
  • Author(s): 松永 隆佑、浜田 裕紀、牧瀬 圭正、鵜澤 佳徳、寺井 弘高、王 鎮、島野 亮
  • Organizer: 日本物理学会 2013年秋季大会
  • Place of Presentation: 徳島大学 徳島県 日本
• [Presentation] クロミック化合物CuMoO4の磁性と結晶粒径の相関 (2013)
  • Author(s): 浅野 貴行、福井 博章、久保 克隆、三田 稔、松尾 晶、金道 浩一、牧瀬 圭正、伊藤 利充
  • Organizer: 日本物理学会 2013年秋季大会
  • Place of Presentation: 徳島大学 徳島県 日本
• [Presentation] Operation of SFQ logic circuits consisting of NbN/AlN/NbN tunnel junctions (2013)
  • Author(s): K. Makise, H. Terai, T. Yamashita, S. Miki, Z wang
  • Organizer: European Conference on Applied Superconductivity (EUCAS2013)
  • Place of Presentation: Magazzini del Cotone Conference Center ジェノバ イタリア
• [Presentation] 64 pixel NbTiN superconducting nanowire single photon detectors with SFQ readout circuit (2013)
  • Author(s): S. Miki, T. Yamashita, H. Terai, K. Makise, Z wang
  • Organizer: European Conference on Applied Superconductivity (EUCAS2013)
  • Place of Presentation: Magazzini del Cotone Conference Center ジェノバ イタリア
• [Presentation] Advanced NbN circuit fabrication process for superconducting qubit applications (2013)
  • Author(s): H. Terai, K. Makise, W. Qiu , Z. Wang, J. Kimura, T. Ishikawa, R. Yamazaki, Y. Nakamura
  • Organizer: European Conference on Applied Superconductivity (EUCAS2013)
  • Place of Presentation: Magazzini del Cotone Conference Center ジェノバ イタリア
• [Presentation] Proximity effects of quench-condensed Ga films overcoated with Ni (2013)
  • Author(s): K. Makise, S. Maeda, F. Ichikawa, B. Shinozaki
  • Organizer: The 12th Asia Pacific Physics Conference of AAPPS(APPC12)
  • Place of Presentation: 幕張メッセ国際会議場 千葉県 日本
• [Presentation] Design and fabrication of all-NbN SFQ circuits for SSPD signal processing (2012)
  • Author(s): 牧瀬圭正
  • Organizer: Applied Superconductivity Conference
  • Place of Presentation: Oregon convention center, ポートランド, アメリカ
• [Presentation] NbN超薄膜の超伝導揺らぎと転移温度抑制機構 (2012)
  • Author(s): 牧瀬圭正
  • Organizer: 日本物理学会2012年秋季大会
  • Place of Presentation: 横浜国立大学, 神奈川県, 横浜市
• [Presentation] グラニュラーNbN超薄膜の輸送特性と超伝導特性 (2012)
  • Author(s): 牧瀬圭正
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学・松山大学, 愛媛県, 松山市
• [Presentation] Operation and readout techniques toward realization of large-scale SSPD array with SFQ circuit (2012)
  • Author(s): T. Yamashita, S. Miki, H. Terai, K. Makise, Z wang
  • Organizer: Applied Superconductivity Conference
  • Place of Presentation: Oregon Convention Center ポートランド アメリカ
• [Presentation] Design and fabrication of all-NbN SFQ circuits for SSPD signal processing (2012)
  • Author(s): K. Makise, H. Terai, S. Miki, T. Yamashita, Z. Wang
  • Organizer: Applied Superconductivity Conference
  • Place of Presentation: Oregon Convention Center ポートランド アメリカ
• [Presentation] Improvement of input current sensitivity and timing jitter of SFQ readout circuit operating with SSPD (2012)
  • Author(s): H. Terai, S. Miki, T. Yamashita, K. Makise, Z. Wang
  • Organizer: Applied Superconductivity Conference
  • Place of Presentation: Oregon Convention Center ポートランド アメリカ
• [Presentation] Characterization of the superconducting gap in the electrodes of epitaxial NbN/AlN/NbN tunnel junctions (2012)
  • Author(s): Y. Uzawa, W. Qiu, K. Makise, H. Terai, Z. Wang, K. Matthias
  • Organizer: Applied Superconductivity Conference
  • Place of Presentation: Oregon Convention Center ポートランド アメリカ
• [Presentation] Interface and tunneling properties of epitaxially grown NbN/AlN/NbN tunnel junctions (2012)
  • Author(s): Z. Wang, H. Terai, K. Makise, W. Qiu, Y. Uzawa
  • Organizer: Applied Superconductivity Conference
  • Place of Presentation: Oregon Convention Center ポートランド アメリカ
• [Presentation] NbN超薄膜の超伝導揺らぎと転移温度抑制機構 (2012)
  • Author(s): 牧瀬 圭正、尾堂 智隆、江崎 翔平、浅野貴行、篠崎 文重、寺井 弘高、山下 太郎、 三木 茂人、王 鎮
  • Organizer: 日本物理学会 2012年秋季大会
  • Place of Presentation: 横浜国立大学 神奈川 日本
• [Presentation] NbN超伝導薄膜のTc近傍における非弾性散乱時間 (2012)
  • Author(s): 尾堂 智隆、江崎 翔平、浅野貴行、篠崎 文重、牧瀬 圭正、寺井 弘高、山下 太郎、 三木 茂人、王 鎮
  • Organizer: 日本物理学会 秋季大会
  • Place of Presentation: 横浜国立大学 神奈川 日本
• [Presentation] SFQ 信号処理回路を用いたアレイ型SSPD の性能評価 (2012)
  • Author(s): 山下 太郎、三木 茂人、寺井 弘高、牧瀬 圭正、王 鎮
  • Organizer: 応用物理学会 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学・松山大学 愛媛 日本
• [Presentation] グラニュラーNbN 超薄膜の輸送特性と超伝導特性 (2012)
  • Author(s): 牧瀬 圭正、寺井 弘高、山下 太郎、三木 茂人、王 鎮、富成 征弘、尾堂 智隆、浅野 貴行、篠崎 文重
  • Organizer: 応用物理学会 秋季応用物理学会学術講演会
  • Place of Presentation: 愛媛大学・松山大学 愛媛 日本
• [Presentation] SFQ 回路を用いたSSPD からの低ジッタ信号読み出し (2012)
  • Author(s): 寺井 弘高、山下 太郎、三木 茂人、牧瀬 圭正、王 鎮
  • Organizer: 応用物理学会 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学・松山大学 愛媛 日本
• [Presentation] エピタキシャルNbN/AlN/NbN 接合電極の超伝導ギャップ特性 (2012)
  • Author(s): 鵜澤 佳徳、丘 偉、牧瀬 圭正、寺井 弘高、黒岩 宏一、Matthias Kroug、藤井 泰範、王 鎮
  • Organizer: 応用物理学会 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学・松山大学 愛媛 日本
• [Presentation] Indium系酸化物薄膜の金属絶縁体転移 (2012)
  • Author(s): 日高 和也、江崎 翔平、牧瀬 圭正、山田 和正、浅野 貴行、篠崎 文重、苫井 重和、矢野 公規、中村 浩昭
  • Organizer: 応用物理学会 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学・松山大学 愛媛 日本
• [Presentation] 超伝導ナノワイヤ単一光子検出器におけるダークカウントの物理的起源 (2012)
  • Author(s): 山下 太郎、三木 茂人、牧瀬 圭正、丘 偉、寺井 弘高、藤原 幹生、佐々木 雅英、王 鎮
  • Organizer: 応用物理学会 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学 東京 日本
• [Presentation] NbN薄膜における超伝導転移温度の抑制 (2012)
  • Author(s): 江崎 翔平、尾堂 智隆、浅野貴行、篠崎 文重、牧瀬 圭正、寺井 弘高、山下 太郎、 三木 茂人、王 鎮
  • Organizer: 応用物理学会 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学 東京 日本
• [Presentation] SSPD信号処理のためのNbN-SFQ回路の作製2 (2012)
  • Author(s): 牧瀬 圭正、寺井 弘高、山下 太郎、三木 茂人、王 鎮
  • Organizer: 応用物理学会 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学 東京 日本
• [Presentation] テラヘルツ時間領域分光法による窒化ニオブチタン薄膜の特性評価 (2012)
  • Author(s): 鵜澤 佳徳、齋藤 伸吾、牧瀬 圭正、武田 正典、黒岩 宏一、Matthias Kroug、藤井 泰範、王 鎮、寳迫 巌
  • Organizer: 応用物理学会 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学 東京 日本
• [Presentation] 高品質NbN薄膜およびジョセフソン接合とその応用 (2012)
  • Author(s): 寺井 弘高、三木 茂人、山下 太郎、牧瀬 圭正、丘 偉、中村 泰信、猪股 邦宏、山本 剛、王 鎮
  • Organizer: 応用物理学会 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学 東京 日本
• [Presentation] Resistively shunted NbN/AlN/NbN tunnel juncitionss for single flux quantum circuits (2011)
  • Author(s): 牧瀬圭正
  • Organizer: European Conference on Applied Superconductivity
  • Place of Presentation: World Forum Conference Centreハーグ, オランダ
  • Year and Date: 2011-09-19
• [Presentation] SSPD信号処理のためのNbN-SFQ集積回路の開発 (2011)
  • Author(s): 牧瀬圭正
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学, 山形県, 山形市
  • Year and Date: 2011-08-31
• [Presentation] Fluctuation conductance and the Bereziskii-Kosterilitz-Thouless transition in two dimensional epitaxial NbTiN ultra-thin films (2011)
  • Author(s): 牧瀬圭正
  • Organizer: 26^<th> International Conference on Low Temperature Physics
  • Place of Presentation: China international conference center, 北京, 中国
  • Year and Date: 2011-08-15
• [Presentation] Fluctuation conductance and the Berezinskii-Kosterlitz-Thouless transition in two dimensional epitaxial NbTiN ultra-thin films (2011)
  • Author(s): K.Makise, H.Terai, T.Yamashita, S.Miki, Z.Wang, Y.Uzawa, S.Ezaki, T.Odou, B.Shinozaki
  • Organizer: 26th International Conference on Low Temperature Physics
  • Place of Presentation: CHINA INTERNATIONAL CONFERENCE CENTER 中国 北京
• [Presentation] Activation like behavior on the temperature dependence of the carrier density in In2O3-ZnO films (2011)
  • Author(s): K.Makise, B.Shinozaki, T.Asano, K.Yano, H.Nakamura
  • Organizer: 26th International Conference on Low Temperature Physics
  • Place of Presentation: CHINA INTERNATIONAL CONFERENCE CENTER 中国 北京
• [Presentation] Depression of positive magneto-conductance due to anti-weak localization effect in annealed In2O3-ZnO thick films (2011)
  • Author(s): B.Shinozaki, S.Ezaki, K.Hidaka, K.Makise, T.Asano, N.kokubo, K.Yamada, K.Yano, H.Nakamura
  • Organizer: 26th International Conference on Low Temperature Physics
  • Place of Presentation: CHINA INTERNATIONAL CONFERENCE CENTER 中国 北京
• [Presentation] Characteristics of Tc and ρ(T) of polycrystalline (In2O3)-(ZnO) films with low carrier density (2011)
  • Author(s): B.Shinozaki, S.Takada, N.Kokubo, K.Makise, T.Asano, K.Yamada, K.Yano, H.Nakamura
  • Organizer: 26th International Conference on Low Temperature Physics
  • Place of Presentation: CHINA INTERNATIONAL CONFERENCE CENTER 中国 北京
• [Presentation] Readout operation using single-flux-quantum circuit implemented with superconducting nanowire single-photon detector in a same refrigerator (2011)
  • Author(s): H.Terai, S.Miki, T.Yamashita, K.Makise, Z. Wang
  • Organizer: Superconductivity Centennial Conference (EUCAS-ISEC-ICMC 2011)
  • Place of Presentation: World Forum Conference Centre ハーグ オランダ
• [Presentation] Resistively shunted NbN/AlN/NbN tunnel junctions for single flux quantum circuits (2011)
  • Author(s): K. Makise, H. Terai, Z. Wang
  • Organizer: Superconductivity Centennial Conference (EUCAS-ISEC-ICMC 2011)
  • Place of Presentation: World Forum Conference Centre ハーグ オランダ
• [Presentation] Vortex-induced mechanism of intrinsic dark count generated in superconducting nanowire single-photon detectors (2011)
  • Author(s): T. Yamashita, S. Miki, K. Makise, W. Qiu, H. Terai, M. Fujiwara, M. Sasaki, Z. Wang
  • Organizer: Superconductivity Centennial Conference (EUCAS-ISEC-ICMC 2011)
  • Place of Presentation: World Forum Conference Centre ハーグ オランダ
• [Presentation] Resonances in Superconducting Circuits at THz Frequencies (2011)
  • Author(s): M. Kroug, A. Gonzales, K. Kuroiwa, A. Miyachi, Y. Uzawa, K. Makise, Z. Wang
  • Organizer: Superconductivity Centennial Conference (EUCAS-ISEC-ICMC 2011)
  • Place of Presentation: World Forum Conference Centre ハーグ オランダ
• [Presentation] Direct Observation of Superconducting Gap Broadening in a Niobium Nitride film by Terahertz Time Domain Spectroscopy (2011)
  • Author(s): Y. Uzawa, S. Saito, K. Kuroiwa, M. Kroug, Y. Fujii, M. Takeda, K. Makise, Z. Wang, I. Hosako
  • Organizer: Superconductivity Centennial Conference (EUCAS-ISEC-ICMC 2011)
  • Place of Presentation: World Forum Conference Centre ハーグ オランダ
• [Presentation] Recent Progress in a SFQ Readout System for Large-Scale SNSPD Arrays (2011)
  • Author(s): H.Terai, S.Miki, T.Yamashita, K.Makise, Z.Wang
  • Organizer: The 7th FLUXONICS RSFQ Design Workshop 2011
  • Place of Presentation: Ilmenau University of Technology Institute of Information Technology イルミナウ ドイツ
• [Presentation] Fabrication of NbN-based SFQ Circuits (2011)
  • Author(s): K.Makise, H.Terai, S.Miki, T.Yamashita, Z.Wang
  • Organizer: The 7th FLUXONICS RSFQ Design Workshop 2011
  • Place of Presentation: Ilmenau University of Technology Institute of Information Technology イルミナウ ドイツ
• [Presentation] SSPD信号処理のためのNbN-SFQ集積回路の開発I (2011)
  • Author(s): 牧瀬 圭正、寺井 弘高、山下 太郎、三木 茂人、王 鎮
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学 山形 日本
• [Presentation] 超伝導単一光子検出器における揺らぎとダークカウント起源 (2011)
  • Author(s): 山下 太郎、三木 茂人、牧瀬 圭正、丘 偉、藤原 幹生、佐々木 雅英、王 鎮
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学 山形 日本
• [Presentation] SSPDアレイシステム構築に向けたSFQ 信号処理回路実装技術の開発 (2011)
  • Author(s): 三木 茂人、寺井 弘高、山下 太郎、牧瀬 圭正、王 鎮
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学 山形 日本
• [Presentation] NbTiNおよびNbN薄膜における揺らぎ効果 (2011)
  • Author(s): 江崎翔平，尾堂智隆，浅野貴行，篠崎文重，牧瀬圭正，寺井弘高，山下太郎，三木茂人，王鎮
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学 山形 日本
• [Presentation] SSPD信号処理のためのNbN-SFQ回路の作製2
  • Author(s): 牧瀬圭正
  • Organizer: 応用物理学会第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学, 東京都, 新宿区