Direct observation of potential distribution around defect structures in semiconductor in the vicinity of metal/semiconductor interface

• Project/Area Number: 23560795
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Physical properties of metals
• Research Institution: Japan Fine Ceramics Center
• Principal Investigator: KATO Takeharu 一般財団法人ファインセラミックスセンター, その他部局等, 研究員 (90399600)
• Co-Investigator(Kenkyū-buntansha): YOSHIDA Ryuji 一般財団法人ファインセラミックスセンター, ナノ構造研究所, 技師補 (50595725)
• Project Period (FY): 2011 – 2013
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000); Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2011: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
• Keywords: ショットキー障壁 / 電位分布 / 金属/半導体界面 / 電子線ホログラフィー / ピエゾ駆動電圧印加ホルダー / 電圧印加 / FIB

Research Abstract

A TEM specimen preparation technique with uniform thickness and damage less has been developed. The technique was applied metal/semiconductor interface to analyze the potential distribution in the semiconductor materials using electron holography. A TEM holder with an electrode controlled by a piezo drive was used to apply forward bias and reversed bias to the interface. I-V carve of local region of the interface could be measured using the holder. Combination technique using the TEM holder and electron holography could measure potential distributions, and the change of depletion layer and the electric field in the semiconductor around the metal/semiconductor interfaces.

Research Products

• [Journal Article] Development of In Situ Transmission Electron Microscopy of the Anode Reaction in a Lithium-Ion Battery (2014)
  • Author(s): T. Suzuki, A. Sobukawa, C. Takahashi, R. Yoshida, T. Kato, K. Sasaki, T. Yamamoto
  • Journal Title: AMTC Letters Volume: vol.4
• [Journal Article] Development of in situ transmission electron microscopy of the anode reaction in the lithium-ion battery (2014)
  • Author(s): T. Suzuki, A. Sobukawa, C. Takahashi, R. Yoshida, T. Kato, K. Sasaki, T. Yamamoto
  • Journal Title: AMTC Letters Volume: 4 Pages: 274-274
  • Peer Reviewed
• [Journal Article] Effect of Surface Concentration of Lu on Oxygen Permeation of Polycrystalline Alumina at High Temperatures (2013)
  • Author(s): M. Wada, T. Matsudaira, T. Kato and S. Kitaoka
  • Journal Title: J. Am. Ceram. Soc. Volume: vol.96 Issue: 7 Pages: 2322-2329
  • DOI: 10.1111/jace.12316
  • Peer Reviewed
• [Journal Article] Characterization of microstructures of thermal oxide scales on silicon carbide using transmission electron microscopy (2012)
  • Author(s): B. Chayasombat, T. Kato, T. Hirayama, T. Tokunaga, K. Sasaki and K. Kuroda
  • Journal Title: Journal of Ceramics Society of Japan Volume: vol.120 Pages: 64-68
  • NAID: 130002067590
• [Journal Article] Oxidation kinetics of single crystal silicon carbide using electron microscopy (2012)
  • Author(s): B. Chayasombat, T. Kato, T. Hirayama, T. Tokunaga, K. Sasaki and K. Kuroda
  • Journal Title: Journal of Ceramics Society of Japan Volume: vol.120 Pages: 181-185
  • NAID: 40019240833
• [Journal Article] Domain formation in anatase TiO_2 thin films on LaAlO_3 substrates (2012)
  • Author(s): S. Zheng, C. A. J. Fisher, T. Kato, Y. Nagao, H. Ohta and Y. Ikuhara
  • Journal Title: Appl. Phys. Lett. Volume: vol.101, 191602
• [Journal Article] High-resolution observation of basal-plane C-core edge dislocations in 4H-SiC crystal by transmission electron microscopy (2012)
  • Author(s): H. Matsuhata, T. Kato, S. Tsukimoto and Y. Ikuhara
  • Journal Title: Philos. Mag. Volume: vol.92 Pages: 3780-3788
• [Journal Article] Effect of dopants on mutual grain-boundary transport of aluminum and Oxgen in polycrystalline Al_2O_3 (2012)
  • Author(s): S. Kitaoka, T. Matsudaira, M. Wada, T. Hamanaka and T. Kato
  • Journal Title: AMTC Letters Volume: vol.3 Pages: 24-25
• [Journal Article] Domain formation in anatase TiO2 thin films on LaAlO3 substrates (2012)
  • Author(s): S. Zheng, C. A. J. Fisher, T. Kato, Y. Nagao, H. Ohta and Y. Ikuhara
  • Journal Title: Appl. Phys. Lett. Volume: 101 Pages: 191602-191602
  • Peer Reviewed
• [Journal Article] Electric field thermopower modulation analysis of an interfacial conducting layer formed between Y_2O_3 and rutile TiO_2 (2011)
  • Author(s): T. Mizuno, Y. Nagao, A. Yoshikawa, K. Koumoto, T. Kato, Y. Ikuhara and H. Ohta
  • Journal Title: J. Appl. Phys. Volume: vol.110, 063719
• [Journal Article] Unusually Large Enhancement of Thermopower in an Electric Field Induced Two-Dimensional Electron Gas (2011)
  • Author(s): H. Ohta, T. Mizuno, S. Zheng, T. Kato, Y. Ikuhara, K. Abe, H. Kumomi, K. Nomura and H. Hosono
  • Journal Title: Adv. Mater. Volume: vol.24 Pages: 740-744
• [Journal Article] FIBを用いたTEM試料作製技術 (2011)
  • Author(s): 佐々木宏和、加藤丈晴、松田竹善、平山司
  • Journal Title: 顕微鏡 Volume: vol.46、No.3
  • NAID: 10029694888
• [Journal Article] Electric field thermopower modulation analysis of an interfacial conducting layer formed between Y2O3 and rutile TiO2 (2011)
  • Author(s): T. Mizuno, Y. Nagao, A. Yoshikawa, K. Koumoto, T. Kato, Y. Ikuhara and H. Ohta
  • Journal Title: J. Appl. Phys. Volume: 110 Pages: 63719-63719
  • Peer Reviewed
• [Presentation] 電気化学反応のその場観察の試み (2014)
  • Author(s): 鈴木隆文、曽布川栄太郎、高橋知里、佐々木勝寛、吉田竜視、加藤丈晴、徳永智春、山本剛久
  • Organizer: 日本顕微鏡学会第70回記念学術講演会
  • Place of Presentation: 幕張メッセ
• [Presentation] デュアルビーム(FIB-SEM)装置を用いた三次元構造解析 (2013)
  • Author(s): 吉田竜視
  • Organizer: 「明日を拓くモノづくり新技術2013」3機関合同発表会
• [Presentation] "電気化学反応のその場観察の試み" (2013)
  • Author(s): 鈴木隆文、曽布川栄太郎、高橋知里、佐々木勝寛、吉田竜視、加藤丈晴、徳永智春、山本剛久
  • Organizer: 日本顕微鏡学会第70回記念学術講演会
• [Presentation] デュアルビーム（FIB-SEM）装置を用いた三次元構造解析 (2013)
  • Author(s): 吉田竜視
  • Organizer: 「明日を拓くモノづくり新技術2013」３機関合同発表会
  • Place of Presentation: 名古屋市工業研究所
• [Presentation] ガリウムイオンダメージによるチタンの状態変化 (2012)
  • Author(s): 加藤丈晴、吉田竜視、平山司
  • Organizer: 第44回東海若手セラミスト懇話会2012年夏期セミナー
• [Presentation] Effect of dopants on mutual grain-boundary transport of aluminum and Oxgen in polycrystalline Al2O3 (2012)
  • Author(s): S. Kitaoka, T. Matsudaira, M. Wada, T. Hamanaka and T. Kato
  • Organizer: The 3rd International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC3)
  • Place of Presentation: 岐阜
• [Presentation] ガリウムイオンダメージによるチタンの状態変化 (2012)
  • Author(s): 加藤 丈晴、吉田 竜視、平山 司
  • Organizer: 第44回東海若手セラミスト懇話会2012年夏期セミナー
  • Place of Presentation: 浜松
• [Presentation] 酸化物半導体SrTiO3に電界誘起された二次元電子ガスの巨大熱電能変調 (2011)
  • Author(s): 水野拓、Shijian Zheng、加藤丈晴、幾原雄一、安部勝美、雲見日出也、野村研二、細野秀雄、太田裕道
  • Organizer: 薄膜材料デバイス研究会
• [Presentation] ナノ孔に閉じ込められた水を利用した二次元電子ガス生成と巨大熱電能変調 (2011)
  • Author(s): 太田裕道、水野拓、S. Zheng、加藤丈晴、幾原雄一、安部勝美、雲見日出也、野村研二、細野秀雄
  • Organizer: 日本金属学会2011年度秋季大会
• [Presentation] SrTiO3二次元電子ガスの巨大熱電能電界変調 (2011)
  • Author(s): 水野拓、Shijian Zheng、加藤丈晴、幾原雄一、安部勝美、雲見日出也、野村研二、細野秀雄、太田裕道
  • Organizer: 平成23年度日本セラミックス協会東海支部学術研究発表会
• [Presentation] SrTiO3二次元電子ガスの巨大熱電能電界変調 (2011)
  • Author(s): 水野拓、Shijian Zheng、加藤丈晴、幾原雄一、安部勝美、
  • Organizer: 平成23年度日本セラミックス協会東海支部学術研究発表会
  • Place of Presentation: 名古屋工業大学