Development of the automatic R&D system for reaction processes
| Project/Area Number |
23560919
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Reaction engineering/Process system
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| Research Institution | Shizuoka University |
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Principal Investigator |
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| Project Period (FY) |
2011 – 2013
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Keywords | 化学気相堆積法 / CVD / 実数値遺伝的アルゴリズム / Bio-inspired algorithms / 反応機構 / モデリング / 自動化 / 微細加工 / 反応工学 / 遺伝的アルゴリズム / バイオインスパイアードアルゴリズム / 化学気相成長法 |
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| Research Abstract |
In this study, we developed the automatic system to model the reaction mechanisms of CVD processes, in order to decrease the labor requirement and increase the speed of R&D in semiconductor industries. We evaluated the various optimization algorithms, which is dominant to the performance of the system, and found the real-coded genetic algorithms as the candidates for the implementation to the system. As a result, we successfully improved both the accuracy and the cost of the calculations of the system. In addition, we proposed and evaluated a mechanism for interlocking the system and a CFD simulator in order to apply the system to the commercial CVD reactor with complex physical and chemical phenomena.
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Report
(4 results)
Research Products
(26 results)
