| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Research Abstract |
In this study, we developed the automatic system to model the reaction mechanisms of CVD processes, in order to decrease the labor requirement and increase the speed of R&D in semiconductor industries. We evaluated the various optimization algorithms, which is dominant to the performance of the system, and found the real-coded genetic algorithms as the candidates for the implementation to the system. As a result, we successfully improved both the accuracy and the cost of the calculations of the system. In addition, we proposed and evaluated a mechanism for interlocking the system and a CFD simulator in order to apply the system to the commercial CVD reactor with complex physical and chemical phenomena.
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