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Development of bridged nitride semiconductor nanowire LED on Si substrate

Research Project

Project/Area Number 23651146
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Microdevices/Nanodevices
Research InstitutionNagoya University

Principal Investigator

HONDA Yoshio  名古屋大学, 工学研究科, 助教 (60362274)

Co-Investigator(Kenkyū-buntansha) YAMAGUCHI Masahito  名古屋大学, 大学院・工学研究科, 准教授 (20273261)
Co-Investigator(Renkei-kenkyūsha) AMANO Hiroshi  名古屋大学, 大学院・工学研究科, 教授 (60202694)
Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2011: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
KeywordsMBE / 結晶成長 / 半導体超微細化 / 半導体物性 / 量子細線 / ナノワイヤ / InGaN / フォトルミネッセンス / STEM / 双晶 / LED
Research Abstract

We succeeded in growth of GaN nanowires (NWs) on trench wall of Si microstructure. In order to reduce adverse effects of a polarization electric fieldand buffer layers, we also succeeded in growth of InGaN NWs on Si substrate without any buffer layer. In contrast to GaN NWs, however, there are some twin boundaries in InGaN NWs. We investigated the relationship between the twin boundaries and the optical properties. Lastly, we attempted to grow GaN NWs on highly oriented pyrolytic graphite(HOPG) substrate in order to apply to future device, and we observed that GaN NWs grew on HOPG substrate.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (27 results)

All 2013 2012 2011

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (21 results)

  • [Journal Article] Stacking 10 nm図 4:STEM 観察による InGaN ナノワイヤにおける双晶図 5 :InGaN ナノワイヤにおける双晶密度と積分 PL 強度の関係1011021034 1055 1056 1057 1058 105Integrated PL intensity (a.u.)Density of stacking faults (/cm)図 6:HOPG 基板上 GaN ナノワイヤ1μm faults and luminescence property of In- GaN nanowires2013

    • Author(s)
      T. Tabata, J.H. Paek, Y. Honda, M. Yamaguchi, and H. Amano
    • Journal Title

      Jpn. J. Appl. Phys

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] GaN nanowires grown on a graphite substrate by RF-MBE2013

    • Author(s)
      S. Nakagawa, T. Tabata, Y. Honda, M. Yamaguchi, and H. Amano
    • Journal Title

      Jpn. J. Appl. Phys

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Stacking faults and luminescence property of In- GaN nanowires2013

    • Author(s)
      T. Tabata, J.H. Paek, Y. Honda, M. Yamaguchi, and H. Amano
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 52 Pages: 1-4

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] GaN nanowires grown on a graphite substrate by RF-MBE2013

    • Author(s)
      S. Nakagawa, T. Tabata, Y. Honda, M. Yamaguchi, and H. Amano
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 52 Pages: 1-4

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of InGaN nanowires on a (111)Si substrate by RF-MBE2012

    • Author(s)
      T. Tabata, J.H. Paek, Y. Honda, M. Yamaguchi, and H. Amano
    • Journal Title

      phys. stat. sol

      Volume: 9 Pages: 646-649

    • NAID

      110008726018

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth of InGaN Nanowires on a (111)Si Substrate by RF-MBE2012

    • Author(s)
      T. Tabata, J.H. Paek, Y. Honda, M. Yamaguchi, and H. Amano
    • Journal Title

      phys. stat. sol. (c)

      Volume: 9 Issue: 3-4 Pages: 646-649

    • DOI

      10.1002/pssc.201100446

    • NAID

      110008726018

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] RF-MBE法による各種基板上GaN系ナノワイヤ成長2013

    • Author(s)
      水谷駿介,田畑拓也,中川慎太,山口雅史,天野浩,井村将隆,中山佳子,竹口雅樹
    • Organizer
      第60回応用物理学会春期学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Annual Research Report
  • [Presentation] Stacking faults and luminescence property of In- GaN nanowires2012

    • Author(s)
      T. Tabata, J.H. Paek, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      International Workshop on Nitride Semiconductors 2012
    • Place of Presentation
      Sapporo
    • Year and Date
      2012-10-19
    • Related Report
      2012 Final Research Report
  • [Presentation] GaN nanowires grown on a graphite substrate by RF-MBE2012

    • Author(s)
      S. Nakagawa, T. Tabata, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      International Workshop on Nitride Semiconductors 2012
    • Place of Presentation
      Sapporo
    • Year and Date
      2012-10-19
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE 法によるグラファイト基板上 GaN ナノワイヤの成長2012

    • Author(s)
      中川慎太,田畑拓也,本田善央,山口雅史,天野 浩
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛
    • Year and Date
      2012-09-14
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE 法によるガラス基板上 InGaN ナノ構造の作製2012

    • Author(s)
      中川慎太,田畑拓也,本田善央,山口雅史, 天野 浩, 渕真悟 , 竹田美和
    • Organizer
      第4回 窒化物半導体結晶成長講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-04-28
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE 法による各種基板上 GaN系ナノワイヤ成長2012

    • Author(s)
      水谷駿介,田畑拓也,中川慎太,山口雅史,天野 浩,井村将隆,中山佳子,竹口雅樹
    • Organizer
      第60回応用物理学会春期学術講演会
    • Place of Presentation
      神奈 川
    • Year and Date
      2012-03-30
    • Related Report
      2012 Final Research Report
  • [Presentation] Si 基板上 III-V族化合物半導体ナノワイヤの成長と応用2012

    • Author(s)
      山口雅史,白 知鉉,田畑拓也,中川慎太, 本田善央, 天野 浩
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-18
    • Related Report
      2012 Final Research Report
  • [Presentation] Si 基板上 InGaN ナノワイヤの積層欠陥と発光特性2012

    • Author(s)
      田畑拓也,白 知鉉,本田善央,山口雅史,天野 浩
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-18
    • Related Report
      2012 Final Research Report
  • [Presentation] Stacking faults and luminescence property of In- GaN nanowires2012

    • Author(s)
      T. Tabata, J.H. Paek, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      International Workshop on Nitride Semiconductors 2012(IWN2012)
    • Place of Presentation
      札幌
    • Related Report
      2012 Annual Research Report
  • [Presentation] GaN nanowires grown on a graphite substrate by RF-MBE2012

    • Author(s)
      S. Nakagawa, T. Tabata, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      International Workshop on Nitride Semiconductors 2012(IWN2012)
    • Place of Presentation
      札幌
    • Related Report
      2012 Annual Research Report
  • [Presentation] RF-MBE法によるガラス基板上InGaNナノ構造の作製2012

    • Author(s)
      中川慎太, 田畑拓也, 本田善央, 山口雅史, 天野浩, 渕真悟, 竹田美和
    • Organizer
      日本結晶成長学会ナノ構造・エピタキシャル成長分科会第4回 窒化物半導体結晶成長講演会
    • Place of Presentation
      東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] RF-MBE法によるグラファイト基板上GaNナノワイヤの成長2012

    • Author(s)
      中川慎太,田畑拓也,本田善央,山口雅史,天野 浩
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛
    • Related Report
      2012 Annual Research Report
  • [Presentation] Si基板上InGaNナノワイヤの積層欠陥と発光特性2012

    • Author(s)
      田畑拓也,白 知鉉,本田善央,山口雅史,天野 浩
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Related Report
      2011 Research-status Report
  • [Presentation] MBE 法による Si 基板上化合物半導体ナノワイヤ成長と評価2011

    • Author(s)
      山口雅史,白 知鉉,田畑拓也,本田善央,天野 浩
    • Organizer
      第15回名古屋大学 VBL シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2011-11-08
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE 法による(111)Si 基板上への InGaN ナノワイヤの成長 II2011

    • Author(s)
      田畑拓也,白 知鉉,本田善央,山口雅史,天野 浩
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-09-02
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth of InGaN nanowires on a (111)Si substrate by RF-MBE2011

    • Author(s)
      T. Tabata, J.H. Paek, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      9th International Conference on Nitride Semiconductors
    • Place of Presentation
      Glasgow (U.K.)
    • Year and Date
      2011-07-14
    • Related Report
      2012 Final Research Report
  • [Presentation] RF-MBE法による(111)Si基板上へのInGaNナノワイヤ成長2011

    • Author(s)
      田畑拓也,白 知鉉,本田善央,山口雅史,天野 浩
    • Organizer
      信学会電子デバイス(ED)研究会
    • Place of Presentation
      名古屋ベンチャービジネスラボラトリー(愛知県)
    • Related Report
      2011 Research-status Report
  • [Presentation] Growth of InGaN nanowires on a (111)Si substrate by RF-MBE2011

    • Author(s)
      T. Tabata, J.H. Paek, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      5th Asia-Pacific Workshop on Widegap Semiconductors
    • Place of Presentation
      鳥羽国際ホテル(三重県)
    • Related Report
      2011 Research-status Report
  • [Presentation] Growth of InGaN Nanowires on a (111)Si Substrate by RF-MBE2011

    • Author(s)
      T. Tabata, J.H. Paek, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      9th International Conference on Nitride Semiconductors
    • Place of Presentation
      Glasgow, U.K.
    • Related Report
      2011 Research-status Report
  • [Presentation] RF-MBE 法による(111)Si 基板上へのInGaN ナノワイヤの成長II2011

    • Author(s)
      田畑拓也,白 知鉉,本田善央,山口雅史,天野 浩
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Related Report
      2011 Research-status Report
  • [Presentation] 石英基板上InGaN ナノワイヤの成長2011

    • Author(s)
      山口雅史,田畑拓也,白 知鉉,本田善央,天野 浩
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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