Research Project
Grant-in-Aid for Challenging Exploratory Research
In this study, a sensitive detection technique of cantilever displacement and fabrication process of customized cantilevers are developed in order to control Casimir force using metamaterials. A detection system using Fabry-Perot interferometer is constructed and a real-time sensitivity on the order of 10 pm is realized. A home-built double-sided mask aligner is constructed to establish a fabrication process of microcantilever based on SOI wafers.
All 2013 2012 2011
All Presentation (6 results)