Study of dissipative quantum state by means of high-frequency ultrasonic devices processed by micromachining

• Project/Area Number: 23654116
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Condensed matter physics II
• Research Institution: Niigata University
• Principal Investigator: NEMOTO Yuichi 新潟大学, 自然科学系, 准教授 (10303174)
• Co-Investigator(Kenkyū-buntansha): AKATSU Mitsuhiro 新潟大学, 自然科学系, 博士研究員 (10431876)
• Project Period (FY): 2011 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000); Fiscal Year 2012: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
• Keywords: 超音波 / 圧電デバイス / 微細加工 / 圧電素子 / 高周波 / 弾性定数 / 強相関

Research Abstract

We usually use a variety of piezoelectric transducers for generation and detecting of ultrasound signals in low-temperature measurements of elastic constants and ultrasonic attenuation coefficients. In this work, we tried to make high-frequency transducers developed by using processing technology. At first, basic process is involved in manufacturing inverted mesa-type crystals. The thickness of limited central area of conventional AT-cut quarts crystal is etched down to 5 μm for desired frequency over 150 MHz with fundamental mode. We successfully made devices with fundamental frequency of 260 MHz with blanks and applied to measure the elasticconstant C44 in Ce_3Pd_20Ge_6 with inverted mesa-type AT-cut quarts transducer. On the other hand, we found it is difficult to etch practically the LiNbO_3 and LiTaO_3 in thesame process with quarts crystal. The advanced technique using nano-particle fluid is nowdeveloped utilizing for inverted mesa-type tips made of LiNbO_3.

Research Products

• [Journal Article] Coexistence of Ising and XY Spin Systems on a Single Tb Atom in TbCoGa_5 (2013)
  • Author(s): Naoyuki SANADA, Yuta AMOU, Ryuta WATANUKI, Kazuya SUZUKI, Isao YAMAMOTO, Hiroyuki MITAMURA, Toshiro SAKAKIBARA, Mitsuhiro AKATSU, Yuichi NEMOTO, Terutaka GOTO
  • Journal Title: J.Phys.Soc.Jpn Volume: 82 Pages: 447131-8
  • Peer Reviewed
• [Journal Article] Antiferroquadrupolar ordering and magnetic-field-induced phase transition in the cage compound PrRh_2Zn_20 (2013)
  • Author(s): Isao Ishii, Hitoshi Muneshige, Shuhei Kamikawa, Takahiro K. Fujita, Takahiro Onimaru, Naohiro Nagasawa, Toshiro Takabatake, Takashi Suzuki, Genki Ano, Mitsuhiro Akatsu, Yuichi Nemoto, Terutaka Goto
  • Journal Title: Phys.Rev Volume: B87 Pages: 2051061-7
  • Peer Reviewed
• [Journal Article] Coexistence of Ising and XΥ Spin Systems on a Single Tb Atom in TbCoGas (2013)
  • Author(s): Naoyuki Sanada
  • Journal Title: Journal of the Phys i caI Society of Japan Volume: 82 Issue: 4 Pages: 0447131-8
  • DOI: 10.7566/jpsj.82.044713
  • Peer Reviewed
• [Journal Article] Dissipation In Non-Kramaers Doublet of PrMg3 (2012)
  • Author(s): Koji Araki, Terutaka Goto, Keisuke Mitsumoto, Yuichi Nemoto, Mitsuhiro Akatsu, Hiroyuki S. Suzuki, Hiroshi Tanida, Shigeru Takagi, Shadi Yasin, Sergei Zherlitsyn, Joachim Wosnitza
  • Journal Title: J.Phys.Soc.Jpn Volume: 81 Pages: 237101-4
  • Peer Reviewed
• [Journal Article] Quadrupole Ordering and Rattling Motion of Clathrate Compound Pr_3Pd_20Ge_6 (2012)
  • Author(s): Genki Ano, Mitsuhiro Akatsu, Koji Araki, Kazuo Matsuo, Yoshiaki Tachikawa, Keisuke Mitsumoto, Takashi Yamaguchi, Yuichi Nemoto, Terutaka Goto, Naoya Takeda, Andreas Donni, Hideaki Kitazawa
  • Journal Title: J.Phys.Soc.Jpn Volume: 81 Pages: 347101-11
  • Peer Reviewed
• [Journal Article] Effect of nitrogen Doping on Vacancy state in Silicon Crystals Observed by Low-Temperature Ultrasonic Measurements (2012)
  • Author(s): Hiroshi Yamada-Kaneta, Satoru Komatsu, Shotaro Baba, Yuta Nagai, Mitsuhiro Akatsu, Yuichi Nemoto, Terutaka Goto
  • Journal Title: Mater. Sci. forum Volume: Vol.725 Pages: 217-220
  • Peer Reviewed
• [Journal Article] Dissipation in Non-Kramers Doublet of PrMg_3 (2012)
  • Author(s): Koji Araki, Terutaka Goto, Keisuke Mitsumoto, Yuichi Nemoto, Mitsuhiro Akatsu, Hiroyuki S.Suzuki, Hiroshi Tanida, Shigeru Takagi, Shadi Yasin, Sergei Zherlitsyn, Joachim Wosnitza
  • Journal Title: J.Phys.Soc.Jpn. Volume: 81 Issue: 2 Pages: 23710-23710
  • DOI: 10.1143/jpsj.81.023710
  • Peer Reviewed
• [Journal Article] Quadrupole Orderings and Rattling Motions of Clathrate Compound Pr_3Pd_<20>Ge_6 (2012)
  • Author(s): Genki Ano, Mitsuhiro Akatsu, Koji Araki, Kazuo Matsuo, Yoshiaki Tachikawa, Keisuke Mitsumoto, Takashi Yamaguchi, Yuichi Nemoto, Terutaka Goto, Naoya Takeda, Andreas Donni, Hideaki Kitazawa
  • Journal Title: J.Phys.Soc.Jpn. Volume: 81 Issue: 3 Pages: 34710-34710
  • DOI: 10.1143/jpsj.81.034710
  • Peer Reviewed
• [Journal Article] Effect of Nitrogen Doping on Vacancy State in Silicon Crystals Observed by Low-Temperature Ultrasonic Measurements (2012)
  • Author(s): Hiroshi Yamada-Kaneta
  • Journal Title: Materials Science Forum Volume: 725 Pages: 217-220
  • DOI: 10.4028/www.scientific.net/msf.725.217
  • Peer Reviewed
• [Journal Article] Quadrupole Effects of Layered Iron Pnictide Superconductor Ba(Fe_0.9Co_0.1)_2A_s2 (2011)
  • Author(s): Terutaka Goto, Ryosuke Kurihara, Koji Araki, Keisuke Mitsumoto, Mitsuhiro Akatsu, Yuichi Nemoto, Shunichi Tatematsu, Masatoshi Sato
  • Journal Title: J. Phys.Soc.Jpn Volume: 80 Pages: 737021-4
  • Peer Reviewed
• [Journal Article] Multipole effects of Γ_3 doublet -Γ_4 triplet states in PrMg3 (2011)
  • Author(s): Koji Araki, Yuichi Nemoto, Mitsuhiro Akatsu, Shinya Jyumonji, Terutaka Goto, Hiroyuki S. Suzuki, Hiroshi Tanida, Shigeru Takagi
  • Journal Title: Phys.Rev Volume: B84 Pages: 451101-8
  • Peer Reviewed
• [Journal Article] Antiferro -Quadrupolar Ordering at the Lowest Temperature and Anisotropic Magnetic Field -Temperature Phase Diagram in the Cage Compound PrIr_2Zn_20 (2011)
  • Author(s): Isao Ishii, Hitoshi Muneshige, Yasuhiko Suetomi, Takahiro K. Fujita, Takahiro Onimaru, Keisuke T. Matsumoto, Toshiro Takabatake, Koji Araki, Mitsuhiro Akatsu, Yuichi Nemoto, Terutaka Goto, Takashi Suzuki
  • Journal Title: J.Phys.Soc.Jpn Volume: 80 Pages: 936011-4
  • Peer Reviewed
• [Journal Article] Quadrupole Effects of Vacancy Orbital in Boron-Doped Silicon (2011)
  • Author(s): Shotaro Baba, Terutaka Goto, Yuta Nagai, Mitsuhiro Akatsu, Hajime Watanabe, Keisuke Mitsumoto, Takafumi Ogawa, Yuichi Nemoto, and Hiroshi Yamada-Kaneta
  • Journal Title: J.Phys.Soc.Jpn Volume: 80 Pages: 94601-8
  • NAID: 210000109197
  • Peer Reviewed
• [Journal Article] Quadrupole Effects of Layered Iron Pnictide Superconductor Ba(Fe_<0.9>Co_<0.1>)_2As_2 (2011)
  • Author(s): Terutaka Goto, Ryosuke Kurihara, Koji Araki, Keisuke Mitsumoto, Mitsuhiro Akatsu, Yuichi Nemoto, Shunichi Tatematsu, Masatoshi Sato
  • Journal Title: J.Phys.Soc.Jpn. Volume: 80 Issue: 7 Pages: 73702-73702
  • DOI: 10.1143/jpsj.80.073702
  • Peer Reviewed
• [Journal Article] Quadrupole Effects of Vacancy Orbital in Boron-Doped Silicon (2011)
  • Author(s): Shotaro Baba, Terutaka Goto, Yuta Nagai, Mitsuhiro Akatsu, Hajime Watanabe, Keisuke Mitsumoto, Takafumi Ogawa, Yuichi Nemoto, Hiroshi Yamada-Kaneta
  • Journal Title: J.Phys.Soc.Jpn. Volume: 80 Issue: 9 Pages: 94601-8
  • DOI: 10.1143/jpsj.80.094601
  • NAID: 210000109197
  • Peer Reviewed
• [Journal Article] Multipole effects of Γ_3 doublet-Γ_4 triplet states in PrMg_3 (2011)
  • Author(s): Koji Araki, Yuichi Nemoto, Mitsuhiro Akatsu, Shinya Jyumonji, Terutaka Goto, Hiroyuki S.Suzuki, Hiroshi Tanida, Shigeru Takagi
  • Journal Title: Phys.Rev.B Volume: 84 Issue: 4 Pages: 45110-45110
  • DOI: 10.1103/physrevb.84.045110
  • Peer Reviewed
• [Journal Article] Antiferro-Quadrupolar Ordering at the Lowest Temperature and Anisotropic Magnetic Field-Temperature Phase Diagram in the Cage Compound PrIr_2Zn_<20> (2011)
  • Author(s): Isao Ishii, Hitoshi Muneshige, Yasuhiko Suetomi, Takahiro K.Fujita, Takahiro Onimaru, Keisuke T.Matsumoto, Toshiro Takabatake, Koji Araki, Mitsuhiro Akatsu, Yuichi Nemoto, Terutaka Goto, Takashi Suzuki
  • Journal Title: J.Phys.Soc.Jpn. Volume: 80 Issue: 9 Pages: 93601-93601
  • DOI: 10.1143/jpsj.80.093601
  • Peer Reviewed
• [Presentation] 超音波によるPrFe_4P_12の結晶場と多極子秩序の解明 (2012)
  • Author(s): 根本祐一,池田佳生,三本啓輔,赤津光洋,,阿野元貴,荒木幸治,後藤輝孝,黒瀧直哉,中野智仁,武田直也
  • Organizer: 日本物理学会2012年秋季大会
  • Place of Presentation: 横浜国立大学
  • Year and Date: 2012-09-19
• [Presentation] 超音波によるPrFe4P12の結晶場と多極子秩序の解明 (2012)
  • Author(s): 根本祐一
  • Organizer: 日本物理学会
  • Place of Presentation: 横浜国立大学
• [Presentation] 超音波による正方晶化合物YbCu2Si2の価数揺動状態の研究 (2012)
  • Author(s): 西方丈智
  • Organizer: 日本物理学会
  • Place of Presentation: 横浜国立大学
• [Presentation] 超音波による鉄ヒ素超伝導体Ba(Fe1-xCox)2As2の電気四極子効果 (2012)
  • Author(s): 栗原綾佑
  • Organizer: 日本物理学会
  • Place of Presentation: 横浜国立大学
• [Presentation] 超音波によるカゴ状化合物YbCo2Zn20の多極子の研究 (2012)
  • Author(s): 大井友貴
  • Organizer: 日本物理学会
  • Place of Presentation: 横浜国立大学
• [Presentation] 擬スピン一次元系BaCo2V2O8の弾性ソフト化 (2012)
  • Author(s): 赤津光洋，早坂千明，根本祐一
  • Organizer: 日本物理学会 第67回年次大会
  • Place of Presentation: 関西学院大学西宮上ケ原キャンパス
• [Presentation] 鉄ヒ素超伝導体Ba(Fe1-xCox)2As2における電気四極子揺らぎ (2012)
  • Author(s): 栗原綾佑，後藤輝孝，根本祐一
  • Organizer: 日本物理学会 第67回年次大会
  • Place of Presentation: 関西学院大学西宮上ケ原キャンパス
• [Presentation] SmOs4Sb12の強磁場下に於ける弾性応答 (2012)
  • Author(s): 柳澤達也，門別翔太，根本祐一
  • Organizer: 日本物理学会 第67回年次大会
  • Place of Presentation: 関西学院大学西宮上ケ原キャンパス
• [Presentation] パルス磁場を用いたSmOs4Sb12の超音波測定 (2012)
  • Author(s): 門別翔太，柳澤達也，根本祐一
  • Organizer: 日本物理学会 第67回年次大会
  • Place of Presentation: 西学院大学西宮上ケ原キャンパス
• [Presentation] PrMg3の非クラマース二重項と格子の結合による散逸量子状態 (2012)
  • Author(s): 荒木幸治，後藤輝孝，根本祐一
  • Organizer: 日本物理学会 第67回年次大会
  • Place of Presentation: 西学院大学西宮上ケ原キャンパス
• [Presentation] 希土類カゴ状化合物Pr3Pd20Ge6の交流帯磁率測定 (2012)
  • Author(s): 岩上欧史，浪指悠平，根本祐一
  • Organizer: 日本物理学会 第67回年次大会
  • Place of Presentation: 西学院大学西宮上ケ原キャンパス
• [Presentation] PrRh2Zn20の弾性率 (2012)
  • Author(s): 石井勲，宗重仁士，根本祐一
  • Organizer: 日本物理学会 第67回年次大会
  • Place of Presentation: 西学院大学西宮上ケ原キャンパス
• [Presentation] YbCo2Zn20の四極子効果による弾性ソフト化 (2012)
  • Author(s): 三本啓輔，大井友貴，根本祐一
  • Organizer: 日本物理学会 第67回年次大会
  • Place of Presentation: 西学院大学西宮上ケ原キャンパス
• [Presentation] Ultrasonic investigation of quadrupole (2011)
  • Author(s): Y. Nemoto, Y. Ikeda, T. Nishikata, G. Ano, K. Araki, K. Mitsumoto, M. Akatsu, T. Goto, N. Kurotaki, N. Takeda
  • Organizer: 強相関電子系国際会議2011
  • Place of Presentation: イギリス,ケンブリッジ大学
  • Year and Date: 2011-08-31
• [Presentation] 希土類六硼化物CexLa1-xB6の一軸圧四極子効果II (2011)
  • Author(s): 赤津光洋，倉上慶大，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] 磁場中超音波計測によるHoRh2Si2の四極子効果 (2011)
  • Author(s): 三本啓輔，小池達哉，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] ボロン添加シリコンの原子空孔軌道と横波弾性定数C44の異方的な磁場依存性 (2011)
  • Author(s): 馬場正太郎，赤津光洋，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] 超音波を用いた鉄ヒ素超伝導体 Ba(Fe0.9Co0.1)2As2 の四極子効果の研究 (2011)
  • Author(s): 栗原綾佑，後藤輝孝，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] SmOs4Sb12の音響ドハース・ファンアルフェン効果 (2011)
  • Author(s): 柳澤達也，門別翔太，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] 超音波による鉄砒素超伝導体の電気四極子の研究 (2011)
  • Author(s): 後藤輝孝，栗原綾佑，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] PrIr2Zn20の反強四極子秩序 (2011)
  • Author(s): 石井勲，宗重仁士，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] 中性子非弾性散乱法によるカゴ状化合物Pr3Pd20Si6の結晶場準位の決定II (2011)
  • Author(s): 北澤英明，Andreas Donni，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] 単結晶R3Pd20Si6の磁場中比熱III (2011)
  • Author(s): 小野宏基，中野智仁，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] 希土類化合物Ce3Pd20Si6の近藤効果II (2011)
  • Author(s): 阿野元貴，藤田雅也，根本祐一
  • Organizer: 日本物理学会2011年秋季大会
  • Place of Presentation: 富山大学五福キャンパス
• [Presentation] Ultrasonic investigation of quadrupole effects (2011)
  • Author(s): Y. Nemoto, Y. Ikeda, T. Nishikata
  • Organizer: Strongly Correlated Electron Systems 2011
  • Place of Presentation: Cambridge, UK
• [Presentation] Low-Temperature Ultrasonic Dispersion (2011)
  • Author(s): K. Araki, T. Goto,Y. Nemoto et al
  • Organizer: Strongly Correlated Electron Systems 2011
  • Place of Presentation: Cambridge, UK
• [Presentation] Ultrasonic Investigation of Ground State (2011)
  • Author(s): M. Akatsu, S. Baba, Y. Nemoto et al
  • Organizer: LT26
  • Place of Presentation: Beijing, China
• [Presentation] Ultrasonic Investigation on Layerd Iron (2011)
  • Author(s): Terutaka Goto, Ryousuke Kurihara, Nemoto et al
  • Organizer: LT26
  • Place of Presentation: Beijing, China
• [Remarks]
  • URL: http://www.sc.niigata-u.ac.jp/goto/
• [Remarks]
  • URL: http://www.sc.niigata-u.ac.jp/goto/
• [Patent(Industrial Property Rights)] シリコンウェーハ表層中の原子空孔評価方法及び装置 (2013)
  • Inventor(s): 後藤輝孝,根本祐一,金田寛,赤津光洋,三本啓輔
  • Industrial Property Rights Holder: 国立大学法人新潟大学
  • Industrial Property Number: 2013-017810
  • Filing Date: 2013-01-31
• [Patent(Industrial Property Rights)] シリコンウェーハ中の原子空孔濃度の絶対値の決定方法 (2013)
  • Inventor(s): 後藤輝孝,根本祐一,金田寛,赤津光洋,三本啓輔,鹿島一日兒
  • Industrial Property Rights Holder: 国立大学法人新潟大学
  • Industrial Property Number: 2013-017811
  • Filing Date: 2013-01-31
• [Patent(Industrial Property Rights)] シリコンウェーハ表層中の原子空孔評価方法及び装置 (2013)
  • Inventor(s): 後藤輝孝，根本祐一，金田寛，赤津光洋，三本啓輔
  • Industrial Property Rights Holder: 後藤輝孝，根本祐一，金田寛，赤津光洋，三本啓輔
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2013-017810
  • Filing Date: 2013-01-31
• [Patent(Industrial Property Rights)] シリコンウェーハ中の原子空孔濃度の絶対値の決定方法 (2013)
  • Inventor(s): 後藤輝孝，根本祐一，金田寛，赤津光洋，三本啓輔，鹿島一日兒
  • Industrial Property Rights Holder: 後藤輝孝，根本祐一，金田寛，赤津光洋，三本啓輔，鹿島一日兒
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2013-017811
  • Filing Date: 2013-01-31
• [Patent(Industrial Property Rights)] シリコンウェーハ中に存在する原子空孔の定量評価装置,その方法,シリコンウェーハの製造方法,及び薄膜振動 (2012)
  • Inventor(s): 子後藤輝孝,根本祐一,金田寛
  • Industrial Property Rights Holder: 国立大学法人新潟大学
  • Acquisition Date: 2012-07-10
  • Overseas
• [Patent(Industrial Property Rights)] シリコンウェーハ中に存在する原子空孔濃度の定量評価方法,シリコンウェーハの製造方法,および当該製造方法により製造したシリコンウェーハ (2009)
  • Inventor(s): 後藤輝孝,金田寛,根本祐一,赤津光洋
  • Industrial Property Rights Holder: 国立大学法人新潟大学
  • Industrial Property Number: 2009-206397
  • Filing Date: 2009-09-07