Project/Area Number |
23654116
|
Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
Allocation Type | Multi-year Fund |
Research Field |
Condensed matter physics II
|
Research Institution | Niigata University |
Principal Investigator |
NEMOTO Yuichi 新潟大学, 自然科学系, 准教授 (10303174)
|
Co-Investigator(Kenkyū-buntansha) |
AKATSU Mitsuhiro 新潟大学, 自然科学系, 博士研究員 (10431876)
|
Project Period (FY) |
2011 – 2012
|
Project Status |
Completed (Fiscal Year 2012)
|
Budget Amount *help |
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2012: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
|
Keywords | 超音波 / 圧電デバイス / 微細加工 / 圧電素子 / 高周波 / 弾性定数 / 強相関 |
Research Abstract |
We usually use a variety of piezoelectric transducers for generation and detecting of ultrasound signals in low-temperature measurements of elastic constants and ultrasonic attenuation coefficients. In this work, we tried to make high-frequency transducers developed by using processing technology. At first, basic process is involved in manufacturing inverted mesa-type crystals. The thickness of limited central area of conventional AT-cut quarts crystal is etched down to 5 μm for desired frequency over 150 MHz with fundamental mode. We successfully made devices with fundamental frequency of 260 MHz with blanks and applied to measure the elasticconstant C44 in Ce_3Pd_20Ge_6 with inverted mesa-type AT-cut quarts transducer. On the other hand, we found it is difficult to etch practically the LiNbO_3 and LiTaO_3 in thesame process with quarts crystal. The advanced technique using nano-particle fluid is nowdeveloped utilizing for inverted mesa-type tips made of LiNbO_3.
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