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Establishment of a real time measurement method of carbon film deposition process and its surface modification process during plasma generated in liquid, and the clalification of these processes

Research Project

Project/Area Number 23654203
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Plasma science
Research InstitutionNagasaki University

Principal Investigator

SHINOHARA Masanori  長崎大学, 工学(系)研究科(研究院), 助教 (80346931)

Co-Investigator(Renkei-kenkyūsha) MATSUDA Yoshinobu  長崎大学, 大学院・工学研究科, 准教授 (60199817)
Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2011: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords液中プラズマ / 反応計測 / 赤外吸収分光 / 多重内部反射 / 溶液 / 堆積物 / バイオ応用 / 実時間計測 / 膜堆積 / 炭素系膜 / 表面改質 / その場 / 実時間 / 反応過程 / カーボン / アミン基 / 多重内部反射赤外分光 / 「その場・実時間」計測 / 反応
Research Abstract

Plasma generated in liquid is a new promising plasma source. However, the reaction measurement is difficult because plasma diagnostics have been developed for low-pressure plasma process. Thereby, we developed a new measurement system for plasma in liquid, using Infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS). We succeeded in the measurement of the plasma process: the changes in chemical states of the solution and the chemical states of deposits due to the plasma generation in the solution. We also succeeded in the measurement of the reaction of the plasma with bio-model materials. This result suggests the MIR-IRAS is suitable to diagnostics of plasma in liquid for the bio- and medical application.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (39 results)

All 2014 2013 2012 2011

All Journal Article (14 results) (of which Peer Reviewed: 10 results) Presentation (24 results) (of which Invited: 2 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Reactions of Surface Hydrogen on Amorphous Carbon Films with Hydrogen Plasma2014

    • Author(s)
      Masanori Shinohara, Taka-aki Kawakami, Ko-jiro Hara, Shohei Yagi, Yoshinobu Matsuda, Hiroshi Fujiyama
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 1 Pages: 10204-10204

    • DOI

      10.7567/jjap.53.010204

    • NAID

      210000143216

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of an in-situ infrared spectroscopic measurement of plasma-induced reactions in ethanol2014

    • Author(s)
      M. Shinohara, A. Fuakae, K. Amano, Y. Yoshida, Y. Matsuda, H. Fujiyama
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol. 52, No.11 Issue: 11S Pages: 11NC06-11NC06

    • DOI

      10.7567/jjap.52.11nc06

    • NAID

      210000143109

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reactions of Plasma with Self-Assemble Monolayer for plasma-bio application2014

    • Author(s)
      Naoki Maruno, Yuta Yoshida, Yujiro Taniguchi, Shohei Yagi, Masanori Shinohara, Yoshinobu Matsuda, Hiroshi Fujiyama
    • Journal Title

      Proceedings of 8th International conference on reactive plasmas

      Volume: 1

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Recent Trends of Plasma Engineering2014

    • Author(s)
      篠原 正典, 金 載浩
    • Journal Title

      IEEJ Transactions on Fundamentals and Materials

      Volume: 134 Issue: 1 Pages: 41-46

    • DOI

      10.1541/ieejfms.134.41

    • NAID

      130003382669

    • ISSN
      0385-4205, 1347-5533
    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Absorption Spectroscopy in Multiple Internal Reflection Geometry2013

    • Author(s)
      M. Shinohara, Y. Takami, S. Takabayashi, A. Oda, Y. Matsuda, H. Fujiyama
    • Journal Title

      IEEE Trans. Plasma Sci.

      Volume: 41 Issue: 8 Pages: 1878-1883

    • DOI

      10.1109/tps.2013.2263850

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 自己組織化膜と液中プラズマとの反応の赤外分光解析2013

    • Author(s)
      吉田 裕太,丸野 尚紀,篠原 正典,松田 良信,藤山 寛
    • Journal Title

      電気学会プラズマ研究会資料

      Volume: PST-13-103 Pages: 91-94

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Surface modification of DLC film due to oxygen plasma exposure, observed by IR absorption spectroscopy in multipleinternal- reflection geometry2012

    • Author(s)
      M. Shinohara, Y. Takaki, Y. Takami, Y. Matuda, and H. Fujiyama
    • Journal Title

      IEEE Trans. of Plasma Science

      Volume: Vo l . 40, No. 10 Issue: 10 Pages: 2756-2761

    • DOI

      10.1109/tps.2012.2208766

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Development of In-situ MIR-IRAS monitoring systm for reactions induced by so lution plasma generation2012

    • Author(s)
      A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
    • Journal Title

      ICRERA 2012 Proceedings

      Volume: CD-ROM

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] 多重内部反射赤外吸収分光法を用いたプラズマが誘起する表面反応の解析~気相プラズマから液中プラズマ~2012

    • Author(s)
      篠原正典,松田良信,藤山 寛
    • Journal Title

      化学工業

      Volume: 63 Pages: 942-946

    • Related Report
      2012 Research-status Report
  • [Journal Article] Effects of the surface bond states in as-deposited DLC films on the incorporation of nitrogen and oxygen atoms into the DLC films2012

    • Author(s)
      Y. Nitta, K. Okamoto, T. Nakatani, M. Shinohara
    • Journal Title

      IEEE Transactions of Plasma Science

      Volume: 40 Issue: 8 Pages: 2073-2078

    • DOI

      10.1109/tps.2012.2203613

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Investigation on Reactions of Hydrogen Plasma with Si surface, using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS)2012

    • Author(s)
      M. Shinohara, K. Hara, Y. Takami, Y. Takaki, Y. Matsuda, and H. Fujiyama
    • Journal Title

      Proceeding of IC-PLANTS2012

      Volume: 1

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] プラズマが誘起する表面反応の赤外分光解析2011

    • Author(s)
      篠原正典,原幸治郎,高見佳生,高木雄也,深江陽大,天野勝裕,松田良信,藤山 寛
    • Journal Title

      電気学会プラズマ研究会資料

      Volume: PST-11-069, Pages: 31-34

    • NAID

      10029502639

    • Related Report
      2011 Research-status Report
  • [Journal Article] プラズマプロセスの赤外分光診断2011

    • Author(s)
      篠原 正典,高木雄也,原 幸治郎,高見佳生,天野勝裕,深江陽大,松田良信,藤山 寛
    • Journal Title

      電気学会プラズマ パルスパワー 合同研究会 資料

      Volume: PST-11-093, PPT-11-094 Pages: 11-14

    • NAID

      10030330356

    • Related Report
      2011 Research-status Report
  • [Journal Article] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011

    • Author(s)
      M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama
    • Journal Title

      Proceeding of The 8th Asian-European Internationala Conference on Plasma Surface Engineering (AEPSE-2011)

      Volume: 1 Pages: 345-345

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] Infrared spectroscopy of reactions induced by plasma2013

    • Author(s)
      M. Shinohara, S. Yagi, Y. Taniguchi, N. Maruno, Y. Yoshida, Y. Matsuda, H. Fujiyama
    • Organizer
      原子分子データのフォーラム
    • Place of Presentation
      核融合科学研究所
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Infrared spectroscopic study of the reaction between NH-terminated self-assembled monomerand solution plasma2013

    • Author(s)
      Yuta Yoshida, Naoki Maruno, Masanori Shinohara, Yoshinobu Matsuda,and Hiroshi Fujiyama
    • Organizer
      The 26th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS
    • Place of Presentation
      九州大学医学部 百年講堂,福岡県福岡市
    • Related Report
      2013 Annual Research Report
  • [Presentation] Infrared spectroscopic study of the reaction between bio related molecules and air-pressureplasma2013

    • Author(s)
      Naoki Maruno, Yuta Yoshida, Masanori Shinohara, Yoshinobu Matsuda,and Hiroshi Fujiyama
    • Organizer
      The 26th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS
    • Place of Presentation
      九州大学医学部 百年講堂,福岡県福岡市
    • Related Report
      2013 Annual Research Report
  • [Presentation] 自己組織化膜と液中プラズマとの反応の赤外分光解析2013

    • Author(s)
      吉田裕太,丸野尚紀,篠原正典,松田良信,藤山 寛
    • Organizer
      応用物理学会九州支部学術講演会
    • Place of Presentation
      長崎大学,長崎県長崎市
    • Related Report
      2013 Annual Research Report
  • [Presentation] Carbon-related particle formation with plasma generated in liquid phas2013

    • Author(s)
      Musab Timan , M. Shinohara, Y. Yoshida, Y. Matsuda and H. Fujiyama
    • Organizer
      Symposium of MTS-Japan
    • Place of Presentation
      横浜市開港記念会館,神奈川県横浜市
    • Related Report
      2013 Annual Research Report
  • [Presentation] Infrared spectroscopy of reactions induced by plasma2013

    • Author(s)
      Masanori Shinohara, Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Yuta Yoshida, Yoshinobu Matsuda, Hiroshi Fujiyama
    • Organizer
      原子分子データのフォーラム
    • Place of Presentation
      核融合科学研究所,岐阜県土岐市
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Development of MIR-IRAS monitoring system for solution plasmas2013

    • Author(s)
      A. Fukae, K. Amano, Y. Takaki, Y. Takami, M. Shinohara, Y. Matsuda, H. Fujiyama
    • Organizer
      ISPLASMA2013
    • Place of Presentation
      Nagoya-Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Development of In-situ MIR-IRAS monitoring system for reactions induced by solution plasma generation2012

    • Author(s)
      A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
    • Organizer
      International Conference on Renewable Energy Researches and Applications 2012
    • Place of Presentation
      長崎
    • Related Report
      2013 Final Research Report
  • [Presentation] Development of IR monitoring system of solution plasma2012

    • Author(s)
      A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
    • Organizer
      Asia Pacific Conference on Plasma Science and Technology 2012
    • Place of Presentation
      京都
    • Related Report
      2013 Final Research Report
  • [Presentation] 多重内部反射赤外吸収分光法を用いたプラズマプロセスの計測2012

    • Author(s)
      篠原正典, 深江陽大, 天野勝裕, 高見佳生, 高木雄也, 八木翔平, 津村高成, 松田良信, 藤山 寛
    • Organizer
      電気学会プラズマ研究会
    • Place of Presentation
      岩手大学
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] Development of IR monitoring system of solution plasm2012

    • Author(s)
      A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
    • Organizer
      Asia Pacific Conference on Plasma Science and Technology
    • Place of Presentation
      Kyoto-Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Development of In-situ MIR-IRAS monitoring systm for reactions induced by solution plasma generation2012

    • Author(s)
      A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
    • Organizer
      nternational Conference on Renewable Energy Research and Applications (ICRERA) 2012
    • Place of Presentation
      Nagasaki-Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] 赤外吸収分光法を用いた液中プラズマの反応解析2012

    • Author(s)
      深江陽大,天野勝裕,高木雄也,篠原正典,松田良信,藤山 寛
    • Organizer
      プラズマ・核融合学会山口九州沖縄支部 第16回支部会
    • Place of Presentation
      九州大学
    • Related Report
      2012 Research-status Report
  • [Presentation] 多重内部反射赤外分光法を用いた液中プラズマの反応計測法の開発2012

    • Author(s)
      深江陽大、天野勝裕、篠原正典、松田良信、藤山 寛
    • Organizer
      九州表面・真空研究会2012(第17回九州薄膜表面研究会)
    • Place of Presentation
      佐賀放射光センター
    • Related Report
      2012 Research-status Report
  • [Presentation] 多重内部反射赤外吸収分光法を用いた液中プラズマの診断法の開発2012

    • Author(s)
      深江陽大,天野勝裕,篠原正典,松田良信,藤山 寛
    • Organizer
      応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Research-status Report
  • [Presentation] 多重内部反射赤外吸収分光法を用いた液中プラズマの「その場」「実時間」反応計測法の開発2012

    • Author(s)
      深江陽大・天野勝裕・篠原正典・松田良信・藤山 寛
    • Organizer
      電気関係学会九州支部学術講演会
    • Place of Presentation
      長崎大学
    • Related Report
      2012 Research-status Report
  • [Presentation] 赤外吸収分光法計測を用いたプラズマが誘起する表面反応の解析・解明2012

    • Author(s)
      篠原正典, 高木雄也, 高見佳生, 深江陽大, 天野勝裕, 八木翔平, 津村高成, 松田良信, 藤山 寛
    • Organizer
      九州山口プラズマ研究会
    • Place of Presentation
      由布院倶楽部
    • Related Report
      2012 Research-status Report
  • [Presentation] 多重内部反射赤外吸収分光法を用いた液中プラズマ誘起反応の計測2012

    • Author(s)
      深江陽大、天野勝裕、高木雄也、篠原正典、松田良信、藤山 寛
    • Organizer
      表面科学会全国大会
    • Place of Presentation
      東北大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Investigation on Reactions of Hydrogen Plasma with Si surface, using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS)2012

    • Author(s)
      M. Shinohara, K. Hara, Y. Takami, Y. Takaki, Y. Matsuda, and H. Fujiyam
    • Organizer
      IC-PLANTS2012
    • Place of Presentation
      愛知県犬山市
    • Related Report
      2011 Research-status Report
  • [Presentation] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011

    • Author(s)
      M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama
    • Organizer
      The 8th Asian-European International Conference on Plasma Surface Engineering
    • Place of Presentation
      大連・中国
    • Related Report
      2013 Final Research Report
  • [Presentation] プラズマが誘起する表面反応の赤外分光解析2011

    • Author(s)
      篠原正典,原幸治郎,高見佳生,高木雄也,深江陽大,天野勝裕,松田良信,藤山 寛
    • Organizer
      電気学会プラズマ研究会
    • Place of Presentation
      大阪府大阪市
    • Related Report
      2011 Research-status Report
  • [Presentation] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011

    • Author(s)
      M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama,
    • Organizer
      The 8th Asian-European Internationala Conference on Plasma Surface Engineering (AEPSE-2011)(招待講演)
    • Place of Presentation
      Dlian- China
    • Related Report
      2011 Research-status Report
  • [Presentation] In-situ Monitoring of Plasma-induced Reactions with Infrared Spectroscop2011

    • Author(s)
      Masanori Shinohara
    • Organizer
      3rd International Workshop on Plasma Scientech for All Something(招待講演)
    • Place of Presentation
      Beijin-China
    • Related Report
      2011 Research-status Report
  • [Presentation] プラズマプロセスの赤外分光診断2011

    • Author(s)
      篠原 正典,高木雄也,原 幸治郎,高見佳生,天野勝裕,深江陽大,松田良信,藤山 寛
    • Organizer
      電気学会プラズマ パルスパワー 合同研究会
    • Place of Presentation
      神奈川県長津田市
    • Related Report
      2011 Research-status Report
  • [Patent(Industrial Property Rights)] ダイヤモンド様薄膜、その製造方法及び製造装置2012

    • Inventor(s)
      篠原正典 他4名
    • Industrial Property Rights Holder
      篠原正典 他4名
    • Filing Date
      2012
    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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