Fabrication of ZnO films with a composition and polarity modulated structure
| Project/Area Number |
23656035
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | National Institute for Materials Science |
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Principal Investigator |
ADACHI Yutaka 独立行政法人物質・材料研究機構, 光・電子材料ユニット, 主任研究員 (30354418)
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| Project Period (FY) |
2011 – 2013
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2013: ¥260,000 (Direct Cost: ¥200,000、Indirect Cost: ¥60,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
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| Keywords | 酸化亜鉛 / PLD / 透明導電膜 / ドーピング / 極性 / 変調構造 / フォトルミネッセンス / 極性制御 / 不純物添加 / 分極反転デバイス / 光電子分光法 |
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| Research Abstract |
In this study, composition modulated (Al,Mg,Zn)O films with a periodically polarity-inverted structure were prepared using pulsed laser deposition. The mobility of the films was about 1.5 times larger than that of (Al,Mg,Zn)O films having no composition modulation or periodic polarity inversion. It was demonstrated that photoluminescence measurements can be applied to polarity determination of a ZnO film.
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Report
(4 results)
Research Products
(21 results)
