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Fabrication of ZnO films with a composition and polarity modulated structure

Research Project

Project/Area Number 23656035
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionNational Institute for Materials Science

Principal Investigator

ADACHI Yutaka  独立行政法人物質・材料研究機構, 光・電子材料ユニット, 主任研究員 (30354418)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2013: ¥260,000 (Direct Cost: ¥200,000、Indirect Cost: ¥60,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Keywords酸化亜鉛 / PLD / 透明導電膜 / ドーピング / 極性 / 変調構造 / フォトルミネッセンス / 極性制御 / 不純物添加 / 分極反転デバイス / 光電子分光法
Research Abstract

In this study, composition modulated (Al,Mg,Zn)O films with a periodically polarity-inverted structure were prepared using pulsed laser deposition. The mobility of the films was about 1.5 times larger than that of (Al,Mg,Zn)O films having no composition modulation or periodic polarity inversion. It was demonstrated that photoluminescence measurements can be applied to polarity determination of a ZnO film.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (21 results)

All 2014 2013 2012

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (17 results)

  • [Journal Article] Influence of Crystal Polarity on Mg incorporation in ZnO2013

    • Author(s)
      Y. Adachi, N. Ohashi, I. Sakaguchi and H. Haneda
    • Journal Title

      Phys. Status Solidi B

      Volume: 250 Pages: 2122-2122

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Crystal Polarity and Electrical Properties of Heavily Doped ZnO Films2013

    • Author(s)
      Y. Adachi, N. Ohashi, I. Sakaguchi and H. Haneda
    • Journal Title

      MRS Proceedings

      Volume: 1434 Pages: 1-1

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Crystal Polarity and Electrical Properties of Heavily Doped ZnO Films2013

    • Author(s)
      Yutaka Adachi, Naoki Ohashi, Isao Sakaguchi, Hajime Haneda
    • Journal Title

      MRS Proceedings

      Volume: 1494 Pages: 133-138

    • DOI

      10.1557/opl.2012.1579

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Influence of crystal polarity on Mg incorporation in ZnO2013

    • Author(s)
      Yutaka Adachi, Naoki Ohashi, Isao Sakaguchi, Hajime Haneda
    • Journal Title

      physica status solidi (c)

      Volume: -

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] 不純物添加ZnO薄膜の極性2014

    • Author(s)
      安達 裕, 大橋直樹, 坂口 勲, 羽田 肇
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学(相模原市)
    • Related Report
      2013 Final Research Report
  • [Presentation] 不純物添加ZnO薄膜の極性2014

    • Author(s)
      安達 裕、大橋直樹、坂口 勲、羽田 肇
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学(相模原市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Polarity of heavily doped ZnO films2013

    • Author(s)
      Yutaka Adachi, Isao Sakaguchi, Naoki Ohashi, Hajime Haneda
    • Organizer
      MRS 2013 Fall Meeting
    • Place of Presentation
      ヘインズコンベンションセンター(ボストン, アメリカ)
    • Related Report
      2013 Final Research Report
  • [Presentation] 不純物添加ZnO薄膜の構造特性2013

    • Author(s)
      安達 裕, 坂口 勲, 大橋直樹, 羽田 肇
    • Organizer
      第33回エレクトロセラミックス研究討論会
    • Place of Presentation
      研究交流センター(つくば市)
    • Related Report
      2013 Final Research Report
  • [Presentation] Polarity of impurity doped ZnO films2013

    • Author(s)
      Yutaka Adachi, Isao Sakaguchi, Naoki Ohashi, Hajime Haneda
    • Organizer
      E-MRS 2013 Fall Meeting
    • Place of Presentation
      ワルシャワ工科大学(ワルシャワ, ポーランド)
    • Related Report
      2013 Final Research Report
  • [Presentation] Alバッファー層を用いたZnO単結晶基板上の無添加ZnO薄膜の極性2013

    • Author(s)
      安達 裕, 坂口 勲, 大橋直樹, 羽田 肇
    • Organizer
      日本セラミックス協会第26回秋季シンポジウム
    • Place of Presentation
      信州大学(長野市)
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] a 面配向ZnO薄膜に生じる面内異方性の膜厚依存性2013

    • Author(s)
      安達 裕, 大橋直樹, 坂口 勲, 羽田 肇
    • Organizer
      日本セラミックス協会2013年年会
    • Place of Presentation
      東京工業大学(東京)
    • Related Report
      2013 Final Research Report
  • [Presentation] Polarity of impurity doped ZnO films2013

    • Author(s)
      Yutaka Adachi, Isao Sakaguchi, Naoki Ohashi, Hajime Haneda
    • Organizer
      E-MRS 2013 Fall Meeting
    • Place of Presentation
      ワルシャワ工科大学(ワルシャワ、ポーランド)
    • Related Report
      2013 Annual Research Report
  • [Presentation] 不純物添加ZnO薄膜の構造特性2013

    • Author(s)
      安達 裕、坂口 勲、大橋直樹、羽田 肇
    • Organizer
      第33回エレクトロセラミックス研究討論会
    • Place of Presentation
      研究交流センター(つくば市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Polarity of heavily doped ZnO films2013

    • Author(s)
      安達 裕、坂口 勲、大橋直樹、羽田 肇
    • Organizer
      MRS 2013 Fall Meeting
    • Place of Presentation
      ヘインスコンベンションセンター(ボストン、アメリカ)
    • Related Report
      2013 Annual Research Report
  • [Presentation] a面配向ZnO薄膜に生じる面内異方性の膜厚依存性2013

    • Author(s)
      安達 裕、大橋直樹、坂口 勲、羽田 肇
    • Organizer
      日本セラミックス協会2013年年会
    • Place of Presentation
      東京工業大学(東京)
    • Related Report
      2012 Research-status Report
  • [Presentation] 極性がヘビードープZnOおよび (Mg, Zn)O薄膜の結晶成長, 光学特性および電気特性に及ぼす影響2012

    • Author(s)
      安達 裕, 大橋直樹, 坂口 勲, 羽田 肇
    • Organizer
      日本セラミックス協会第25回秋季シンポジウム
    • Place of Presentation
      名古屋大学(名古屋市)
    • Related Report
      2013 Final Research Report
  • [Presentation] Influence of crystal polarity on Mg incorporation in ZnO films2012

    • Author(s)
      Yutaka Adachi, Naoki Ohashi, Isao Sakaguchi, Hajime Haneda
    • Organizer
      International Workshop on Zinc Oxide and Related Materials 2012
    • Place of Presentation
      Acropolis conference centre(ニース, フランス)
    • Related Report
      2013 Final Research Report
  • [Presentation] Structural and Electrical Propperties of a-axis Oriented ZnO and (Mg.Zn)O Films on (11-20) Sapphire Substrates2012

    • Author(s)
      Yutaka Adachi, Naoki Ohashi, Isao Sakaguchi, Hajime Haneda
    • Organizer
      STAC-6
    • Place of Presentation
      メルパルク横浜(横浜市)
    • Related Report
      2013 Final Research Report
  • [Presentation] Structural and Electrical Properties of a-axis Oriented ZnO and (Mg,Zn)O Films on (1-102) Sapphire Substrates2012

    • Author(s)
      Yutaka Adachi, Naoki Ohashi, Isao Sakaguchi, Hajime Haneda
    • Organizer
      STAC-6
    • Place of Presentation
      メルパルク横浜(横浜市)
    • Related Report
      2012 Research-status Report
  • [Presentation] Influence of crystal polarity on Mg incorporation in ZnO films2012

    • Author(s)
      Yutaka Adachi, Naoki Ohashi, Isao Sakaguchi, Hajime Haneda
    • Organizer
      International Workshop on Zinc Oxide and Related Materials 2012
    • Place of Presentation
      Acropolis conference centre(ニース,フランス)
    • Related Report
      2012 Research-status Report
  • [Presentation] 極性がヘビードープZnOおよび(Mg,Zn)O薄膜の結晶成長、光学特性および電気特性に及ぼす影響2012

    • Author(s)
      安達 裕、大橋直樹、坂口 勲、羽田 肇
    • Organizer
      日本セラミックス協会第25回秋季シンポジウム
    • Place of Presentation
      名古屋大学(名古屋市)
    • Related Report
      2012 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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