Digital encoders for curvilinear displacement and rotational angle based on periodic surface acoustic wave

Research Project

Project/Area Number	23656059
Research Category	Grant-in-Aid for Challenging Exploratory Research
Allocation Type	Multi-year Fund
Research Field	Applied physics, general
Research Institution	Shizuoka University
Principal Investigator	OIWA Takaaki 静岡大学, 工学部, 教授 (00223727)
Co-Investigator(Kenkyū-buntansha)	ASAMA Junichi 静岡大学, 工学部, 准教授 (70447522) 近藤淳静岡大学, 創造科学技術大学院, 教授 (10293606)
Co-Investigator(Renkei-kenkyūsha)	KONDOH Jun 静岡大学, 創造科学技術大学院, 教授 (10293606)
Project Period (FY)	2011 – 2012
Project Status	Completed (Fiscal Year 2012)
Budget Amount *help	¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000) Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000) Fiscal Year 2011: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywords	変位計測 / 弾性表面波 / 櫛歯形電極 / 超音波振動
Research Abstract	It has been so difficult to provide highly precise gratings required for conventional digital encoders. In this study, no process above is needed because displacement measurement is based on periodic surface acoustic waves (SAWs) generated on a surface of measured object. SAW devices consisting of a piezoelectric substrate and interdigital electrodes were fabricated both for generating and for receiving the SAW with a wavelength of 0.16 mm. Moreover, it was confirmed to detect the SAW propagated along a glass substrate by measuring delay time.