| Project/Area Number |
23656097
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TAKAHASHI Satoru 東京大学, 大学院・工学系研究科, 准教授 (30283724)
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| Co-Investigator(Kenkyū-buntansha) |
TAKAMASU Kiyoshi 東京大学, 大学院・工学系研究科, 教授 (70154896)
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| Project Period (FY) |
2011 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2011: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Keywords | 精密位置決め / 加工計測 / 微細構造 / 非破壊計測 / 内部情報計測 / 高分解能計測 / 回折限界超越 / 回折限界 |
|---|
| Research Abstract |
We propose a novel nano thickness inspection method of residual layer film of nanoimprint lithography, allowing nondestructive evaluation of residual layer thickness. In the proposed method, we applied near-field optical enhancement of a fine metal tip as a high spatial resolution measurement probe, with which we can get near-field optical response generated by dynamic interaction of the tip, thin residual layer film and a Si substrate. By performing theoretical analyses based on finite-difference time-domain method and fundamental experiments using a newly developed near-field optical response detection system, we verified the feasibility of the proposed method.
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