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Development of High-Quality and High-Throughput Micro-HoleProcessing Using Hollow Microneedle Array

Research Project

Project/Area Number 23656103
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionToyohashi University of Technology

Principal Investigator

SHIBATA Takayuki  豊橋技術科学大学, 大学院・工学研究科, 教授 (10235575)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2011: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywordsナノ・マイクロ加工 / マイクロ穴加工 / 熱インプリント / マイクロニードルアレイ / MEMS
Research Abstract

):A novel thermal imprinting technique has been developed to enable the high-throughput fabrication of through holes with a minimum feature of a few tens of micrometers in a wide variety of polymers with high quality and precision by using an array of out-of-plane, hollow microneedles as an imprint tool. This technique can also be applicable to the formation of through holes with almost any non-circular cross-sections (triangle, square, star-shaped holes, etc.) as well as circular ones.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (11 results)

All 2013 2012 2011 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (7 results) (of which Invited: 1 results) Remarks (3 results)

  • [Journal Article] Modified Imprinting Process Using Hollow Microneedle Array for Forming Through Holes in Polymers2011

    • Author(s)
      T. Shibata, S. Yukizono, T. Kawashima, M. Nagai, T. Kubota, M. Mita
    • Journal Title

      Microelectron. Eng

      Volume: 88 Issue: 8 Pages: 2121-2125

    • DOI

      10.1016/j.mee.2010.12.048

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Presentation] マイクロニードルアレイを用いた高品位・高能率マイクロ穴加工技術の開発(第4 報)-穴加工時の振動援用効果検討-2013

    • Author(s)
      三苫祐輝,永井萌土,川島貴弘,柴田隆行,久保田俊夫,御田 護,西川忠寛
    • Organizer
      2013 年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京工業大学(東京)
    • Year and Date
      2013-03-15
    • Related Report
      2012 Final Research Report
  • [Presentation] マイクロニードルアレイを用いた高品位・高能率マイクロ穴加工技術の開発(第3報)-樹脂フィルムへの貫通穴加工過程の評価-2013

    • Author(s)
      三苫祐輝,永井萌土,川島貴弘,柴田隆行,久保田俊夫,御田 護,西川忠寛
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] マスクレス微細加工技術と細胞機能解析用MEMS プラットフォーム2012

    • Author(s)
      柴田隆行(招待講演)
    • Organizer
      第31回マイクロファブリケーションシンポジウム(理研シンポジウム)
    • Place of Presentation
      理化学研究所
    • Year and Date
      2012-11-01
    • Related Report
      2012 Final Research Report
  • [Presentation] マスクレス微細加工技術と細胞機能解析用MEMSプラットフォーム2012

    • Author(s)
      柴田隆行
    • Organizer
      第31回マイクロファブリケーションシンポジウム
    • Place of Presentation
      和光
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] マイクロニードルアレイを用いた高品位・高能率マイクロ穴加工技術の開発(第3 報)-樹脂フィルムへの貫通穴加工過程の評価-2011

    • Author(s)
      吉田隼兵,永井萌土,川島貴弘,柴田隆行,久保田俊夫,御田 護
    • Organizer
      2011 年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学(金沢市)
    • Year and Date
      2011-09-21
    • Related Report
      2012 Final Research Report
  • [Presentation] A Novel Thermal Imprinting Technique for Forming Through Holes in Polymers by Using Hollow Microneedle Array2011

    • Author(s)
      T. Shibata, J. Yoshida, M. Nagai, T. Kawashima, T. Kubota, M. Mita
    • Organizer
      The 37th International Conference on Micro and Nano Engineering 2011 (MNE 2011)
    • Place of Presentation
      Berliner Congress Center (Berlin, Germany)
    • Year and Date
      2011-09-20
    • Related Report
      2012 Final Research Report 2011 Research-status Report
  • [Presentation] マイクロニードルアレイを用いた高品位・高能率マイクロ穴加工技術の開発(第3報)-樹脂フィルムへの貫通穴加工過程の評価-2011

    • Author(s)
      吉田隼兵,永井萌土,川島貴弘,柴田隆行,久保田俊夫,御田 護
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学(金沢)
    • Related Report
      2011 Research-status Report
  • [Remarks]

    • URL

      http://mems.me.tut.ac.jp/

    • Related Report
      2012 Final Research Report
  • [Remarks] 豊橋技術科学大学 マイクロ・ナノ機械システム研究室ホームページ

    • URL

      http://mems.me.tut.ac.jp/r_f_micropunch.html

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://mems.me.tut.ac.jp/r_f_micropunch.html

    • Related Report
      2011 Research-status Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

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