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Development of very thin coaxial cable using fluorine resin covered with high adhesion electroless copper plating

Research Project

Project/Area Number 23656105
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

YAMAMURA Kazuya  大阪大学, 大学院・工学研究科, 准教授 (60240074)

Co-Investigator(Kenkyū-buntansha) ZETTSU Nobuyuki  名古屋大学, グリーンモビリティー連携研究センター, 准教授 (10432519)
Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2012: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2011: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords大気圧プラズマ / 無電解めっき / グラフト共重合 / ラジカル基 / フッ素樹脂 / 無電解銅めっき
Research Abstract

Recently, a material with a low dielectric constant and low dielectric loss factor in the GHz band is required for coaxial cable and printed circuit boards. Fluorocarbon polymers have excellent high-frequency properties. However, owing to their low surface energy, it is difficult to form highly adhesive metal patterns on their surface. The surface modification of fluorocarbon polymers before metallization is an essential step. We have proposed a surface modification technique for fluorocarbon polymers that enhances the adhesion of electroless copper (Cu) film/fluorocarbon polymers by a combination of atmospheric-pressure plasma treatment with liquid-phase self-assembly. We investigated the adhesion strength of an electroless Cu-plated layer on a tetrafluoroetylene-perfluoroalkylvinylethercopolymer (PFA) surface modified by medium-pressure or atmospheric-pressure plasma. The atmospheric-pressure He plasma treatment resulted in twice the adhesion strength of that obtained by the medium-pressure He plasma treatment. It is considered that a damaged layer is easily formed in the bulk of PFA by medium-pressure He plasma irradiation because a strong IR peak assigned to the CF2 bond was observed from the surface of the electroless Cu film by FTIR analysis after a 90° peel test.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (25 results)

All 2013 2012 2011 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (24 results)

  • [Journal Article] Adhesion strength of electroless copper plated layer on fluoropolymer surface modified by medium pressure plasma2012

    • Author(s)
      K. Ooka、Y. Yamamoto、Y. Hara、N. Zettsu, K. Yamamura
    • Journal Title

      Key Engineering Materials

      Volume: 523-524 Pages: 262-266

    • DOI

      10.4028/www.scientific.net/kem.523-524.262

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Presentation] 大気圧プラズマ化学液相堆積法を用いたフッ素ポリマー表面における選択的銅メタライジングプロセスの開発 -インクジェット法を用いた銅配線のダイレクトパターニング-2013

    • Author(s)
      佐藤悠、大岡健人、山村和也
    • Organizer
      日本機械学会 関西学生会平成 24 年度学生員卒業研究発表講演会
    • Place of Presentation
      大阪工業大学 大宮キャンパス
    • Year and Date
      2013-03-15
    • Related Report
      2012 Final Research Report
  • [Presentation] Interfacial Analysis of Electroless Copper Thin Film on Fluorocarbon Polymer Fabricated by Plasma Irradiation with Graft Copolymerization2012

    • Author(s)
      K. Ooka、Y. Hara、K. Yamamura
    • Organizer
      International Symposium on Dry Process(DPS2012)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2012-11-16
    • Related Report
      2012 Final Research Report
  • [Presentation] Adhesion strength of electroless copper plated layer on fluoropolymer surface modified by medium pressure plasma2012

    • Author(s)
      K. Ooka、Y. Yamamoto、Y. Hara、N. Zettsu、K. Yamamura
    • Organizer
      The 14th International Conference on Precision Engineering(ICPE2012)
    • Place of Presentation
      Awaji, Japan
    • Year and Date
      2012-11-09
    • Related Report
      2012 Final Research Report
  • [Presentation] Effect of Atmospheric Plasma Treatment on Adhesion Strength of Electroless Copper Film/Fluorocarbon Polymer Interface2012

    • Author(s)
      K. Ooka、Y. Hara、K. Yamamura
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, JAPAN
    • Year and Date
      2012-10-23
    • Related Report
      2012 Final Research Report
  • [Presentation] プラズマを用いたフッ素ポリマー表面の高密着性銅メタライジングプロセスの開発 -無電解銅めっき膜の剥離界面の調査-2012

    • Author(s)
      大岡健人、原 安寛、山村和也
    • Organizer
      2012 年度精密工学会秋季大会学術講演会講演論文集
    • Place of Presentation
      九州工業大学
    • Year and Date
      2012-09-14
    • Related Report
      2012 Final Research Report
  • [Presentation] 中圧プラズマを用いたフッ素ポリマー表面の銅メタライジング2012

    • Author(s)
      大岡健人、原 安寛、山村和也
    • Organizer
      精密工学会 2012 年度関西地方定期学術講演会講演論文集
    • Place of Presentation
      立命館大学びわこ・くさつキャンパス
    • Year and Date
      2012-06-15
    • Related Report
      2012 Final Research Report
  • [Presentation] プラズマ化学液相堆積法によるフッ素ポリマー表面の銅メタライジング-電解銅めっき膜の密着強度におけるプラズマ発生圧力依存性-2012

    • Author(s)
      大岡健人、山本悠人、是津信行、山村和也
    • Organizer
      2012 年度精密工学会春季大会学術講演会講演論文集
    • Place of Presentation
      首都大学東京 南大沢キャンパス
    • Year and Date
      2012-03-14
    • Related Report
      2012 Final Research Report
  • [Presentation] プラズマ化学液相堆積法によるフッ素ポリマー表面の銅メタライジングー電解銅めっき膜の密着強度におけるプラズマ発生圧力依存性-2012

    • Author(s)
      大岡健人, 山本悠人, 是津信行, 山村和也
    • Organizer
      2012年度精密工学会春季大会学術講演会
    • Place of Presentation
      首都大学東京 南大沢キャンパス
    • Related Report
      2011 Research-status Report
  • [Presentation] 大気圧プラズマ化学液相堆積法によるフッ素ポリマー表面への高密着性金属配線パタン作製2011

    • Author(s)
      大岡健人、秋山弘貴、山本悠人、原 安寛、山村和也、是津信行
    • Organizer
      Plasma Conference (PLASMA2011)
    • Place of Presentation
      石川県立音楽堂
    • Year and Date
      2011-11-23
    • Related Report
      2012 Final Research Report
  • [Presentation] Fabrication of Patterned Metal Layer on Poly(tetrafluoroethylene)Substrate through Atmospheric Pressure Plasma Liquid Deposition Approach2011

    • Author(s)
      K. Ooka、H. Akiyama、Y. Yamamoto、N. Zettsu、K. Yamamura
    • Organizer
      Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, JAPAN
    • Year and Date
      2011-11-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Study on Adhesion Strength of Cu Plating Film Formed on PTFE Substrate through Atmospheric Pressure Plasma Liquid Deposition2011

    • Author(s)
      Y. Hara、K. Oooka、H. Akiyama、N. Zettsu、K. Yamamura
    • Organizer
      Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, JAPAN
    • Year and Date
      2011-11-01
    • Related Report
      2012 Final Research Report
  • [Presentation] 大気開放下におけるプラズマ化学液相堆積法によるフッ素ポリマー表面の銅メタライジング-過酸化物ラジカルの存在形態と無電解銅めっき膜の密着強度の相関-2011

    • Author(s)
      大岡健人、秋山弘貴、山本悠人、是津信行、山村和也
    • Organizer
      2011 年度精密工学会秋季大会学術講演会講演論文集
    • Place of Presentation
      金沢大学
    • Year and Date
      2011-09-21
    • Related Report
      2012 Final Research Report
  • [Presentation] 大気開放下におけるプラズマ化学液相堆積法によるフッ素ポリマー表面の銅メタライジング2011

    • Author(s)
      大岡健人、秋山弘貴、山本悠人、是津信行、山村和也
    • Organizer
      精密工学会 2011 年度関西地方定期学術講演会講演論文集
    • Place of Presentation
      兵庫県立大学姫路書写キャンパス
    • Year and Date
      2011-06-30
    • Related Report
      2012 Final Research Report
  • [Presentation] Fabrication of Patterned Metal Layer on Poly(tetrafluoroethylene)Substrate through Atmospheric Pressure Plasma Liquid Deposition Approach2011

    • Author(s)
      K. Ooka, H. Akiyama, Y. Yamamoto, N. Zettsu, K. Yamamura
    • Organizer
      Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      大阪大学中之島センター
    • Related Report
      2011 Research-status Report
  • [Presentation] Study on Adhesion Strength of Cu Plating Film Formed on PTFE Substrate through Atmospheric Pressure Plasma Liquid Deposition2011

    • Author(s)
      Y. Hara, K. Oooka, H. Akiyama, N. Zettsu, K. Yamamura
    • Organizer
      Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      大阪大学中之島センター
    • Related Report
      2011 Research-status Report
  • [Presentation] 大気開放下におけるプラズマ化学液相堆積法によるフッ素ポリマー表面の銅メタライジング2011

    • Author(s)
      大岡健人, 秋山弘貴, 山本悠人, 是津信行, 山村和也
    • Organizer
      精密工学会2011年度関西地方定期学術講演会
    • Place of Presentation
      兵庫県立大学姫路書写キャンパス
    • Related Report
      2011 Research-status Report
  • [Presentation] 大気開放下におけるプラズマ化学液相堆積法によるフッ素ポリマー表面の銅メタライジング-過酸化物ラジカルの存在形態と無電解銅めっき膜の密着強度の相関-2011

    • Author(s)
      大岡健人, 秋山弘貴, 山本悠人, 是津信行, 山村和也
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学
    • Related Report
      2011 Research-status Report
  • [Presentation] 大気圧プラズマ化学液相堆積法によるフッ素ポリマー表面への高密着性金属配線パターン作製2011

    • Author(s)
      大岡健人, 秋山弘貴, 山本悠人, 原 安寛, 山村和也, 是津信行
    • Organizer
      Plasma Conference (PLASMA2011)
    • Place of Presentation
      石川県立音楽堂
    • Related Report
      2011 Research-status Report
  • [Presentation] Effect of Atmospheric Plasma Treatment on Adhesion Strength of Electroless Copper Film/Fluorocarbon Polymer Interface

    • Author(s)
      K. Ooka
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, JAPAN
    • Related Report
      2012 Annual Research Report
  • [Presentation] Adhesion strength of electroless copper plated layer on fluoropolymer surface modified by medium pressure plasma

    • Author(s)
      K. Ooka
    • Organizer
      The 14th International Conference on Precision Engineering
    • Place of Presentation
      Awaji, JAPAN
    • Related Report
      2012 Annual Research Report
  • [Presentation] Interfacial Analysis of Electroless Copper Thin Film on Fluorocarbon Polymer Fabricated by Plasma Irradiation with Graft Copolymerization

    • Author(s)
      K. Ooka
    • Organizer
      International Symposium on Dry Process
    • Place of Presentation
      Tokyo, JAPAN
    • Related Report
      2012 Annual Research Report
  • [Presentation] 中圧プラズマを用いたフッ素ポリマー表面の銅メタライジング

    • Author(s)
      大岡健人
    • Organizer
      精密工学会2012年度関西地方定期学術講演会
    • Place of Presentation
      立命館大学びわこ・くさつキャンパス
    • Related Report
      2012 Annual Research Report
  • [Presentation] プラズマを用いたフッ素ポリマー表面の高密着性銅メタライジングプロセスの開発 -無電解銅めっき膜の剥離界面の調査-

    • Author(s)
      大岡健人
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      九州工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 大気圧プラズマ化学液相堆積法を用いたフッ素ポリマー表面における選択的銅メタライジングプロセスの開発 -インクジェット法を用いた銅配線のダイレクトパターニング-

    • Author(s)
      佐藤悠
    • Organizer
      日本機械学会 関西学生会平成24年度学生員卒業研究発表講演会
    • Place of Presentation
      大阪工業大学・大宮キャンパス
    • Related Report
      2012 Annual Research Report

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Published: 2011-08-05   Modified: 2019-07-29  

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