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Development of reference-less wavelength scanning interferometerfor micro aspherical lens

Research Project

Project/Area Number 23656111
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionThe Graduate School for the Creation of New Photonics Industries

Principal Investigator

HANAYAMA Ryohei  光産業創成大学院大学, 光産業創成研究科, 助教 (20418924)

Co-Investigator(Kenkyū-buntansha) ISHII Katsuhiro  光産業創成大学院大学, 光産業創成研究科, 准教授 (30311517)
Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Keywords精密位置決め・加工計測 / 光干渉計測 / 非球面形状計測 / 零位法 / 空間位相変調器 / 波長走査干渉法 / 超精密計測 / 応用光学・量子光工学 / 精密部品加工
Research Abstract

In this research, we developed two types of interferometercharacterized in that reference surface is not necessary. One is polar coordinate shearinginterferometer, which realizes wave front shearing for rotational and radial direction.Another is zero-method interferometer using spatial light modulator as a reference mirror.In the interferometer, the dynamic range was expanded by zero-methodology. Moreover, theevaluation method of phase detection algorithms were also developed. It is of assistance ofimprovement of phase detection algorithms.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (7 results)

All 2013 2012 Other

All Presentation (6 results) Remarks (1 results)

  • [Presentation] Development of a zero-method interferometer bymeans of dynamic generation of reference wavefront2013

    • Author(s)
      Ryohei Hanayama, Katsuhiro Ishii
    • Organizer
      SPIE Optical Metrology
    • Place of Presentation
      Munich
    • Related Report
      2012 Final Research Report
  • [Presentation] Development of a zero-method interferometer by means of dynamic generation of reference wave front2013

    • Author(s)
      花山 良平
    • Organizer
      SPIE Optical Metrology 2013
    • Place of Presentation
      ドイツ・ミュンヘン
    • Related Report
      2012 Annual Research Report
  • [Presentation] 空間位相変調器を用いた零位法干渉計の開発2012

    • Author(s)
      花山良平,石井勝弘
    • Organizer
      第50回光波センシング技術研究会講演論文集
    • Place of Presentation
      東京
    • Related Report
      2012 Final Research Report
  • [Presentation] Error estimation of phase detection algorithms and comparison of window functions Error analysis of phase detection algorithms in the frequency domain2012

    • Author(s)
      R. Hanayama and K. Hibino
    • Organizer
      Interferometry XVI
    • Place of Presentation
      San Diego
    • Related Report
      2012 Final Research Report
  • [Presentation] Error estimation of phase detection algorithms and comparison of window functions Error analysis of phase detection algorithms in the frequency domain2012

    • Author(s)
      花山 良平
    • Organizer
      SPIE Optics + Photonics 2012
    • Place of Presentation
      アメリカ・サンディエゴ
    • Related Report
      2012 Annual Research Report
  • [Presentation] 空間位相変調器を用いた零位法干渉計の開発2012

    • Author(s)
      花山 良平
    • Organizer
      第50回光波センシング技術研究会
    • Place of Presentation
      東京
    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.gpi.ac.jp/research/teacher/professor-16.html

    • Related Report
      2012 Final Research Report

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Published: 2011-08-05   Modified: 2019-07-29  

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