| Project/Area Number |
23656111
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The Graduate School for the Creation of New Photonics Industries |
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Principal Investigator |
HANAYAMA Ryohei 光産業創成大学院大学, 光産業創成研究科, 助教 (20418924)
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| Co-Investigator(Kenkyū-buntansha) |
ISHII Katsuhiro 光産業創成大学院大学, 光産業創成研究科, 准教授 (30311517)
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| Project Period (FY) |
2011 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
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| Keywords | 精密位置決め・加工計測 / 光干渉計測 / 非球面形状計測 / 零位法 / 空間位相変調器 / 波長走査干渉法 / 超精密計測 / 応用光学・量子光工学 / 精密部品加工 |
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| Research Abstract |
In this research, we developed two types of interferometercharacterized in that reference surface is not necessary. One is polar coordinate shearinginterferometer, which realizes wave front shearing for rotational and radial direction.Another is zero-method interferometer using spatial light modulator as a reference mirror.In the interferometer, the dynamic range was expanded by zero-methodology. Moreover, theevaluation method of phase detection algorithms were also developed. It is of assistance ofimprovement of phase detection algorithms.
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