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Micro multi-pole magnetization of NdFeB magnet and its application to MEMS devices

Research Project

Project/Area Number 23656117
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionTokyo Institute of Technology

Principal Investigator

SHINSHI Tadahiko  東京工業大学, 精密工学研究所, 教授 (60272720)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsネオジム磁石 / 薄膜 / 微細着磁 / リニアモータ / レーザ加熱 / 着磁 / 微細化 / MEMS / 薄膜磁石 / 減磁 / 飽和 / マイクロリニアモータ / ホールプローブ
Research Abstract

Recently, a multilayered thin film Nd2Fe14B/Ta permanent magnet (TFPM), which not only has a high remnant flux density and a high coercive force similar to those of conventional sintered bulk neodymium magnets, but also has high heat tolerance, was developed. In this study, micro magnetization assisted by laser heating under an external DC magnetic field was proposed and tested. The laser beam conditions were determined using unsteady heat conduction analysis. Using a magnetic field analysis simulator, neodymium PM arrays are designed to apply the DC magnetic field to the TFPM. Magnetized strips of 0.1mm in width were patterned in the TFPM of 4.5micrometer in thickness Agreement between measured and simulated magnetic flux densities over the TFPM was obtained. Furthermore, a MEMS linear motor utilizing TFPM was also developed.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (28 results)

All 2013 2012 2011 Other

All Journal Article (9 results) (of which Peer Reviewed: 7 results) Presentation (13 results) Remarks (6 results)

  • [Journal Article] 薄膜ネオジム磁石の交番着磁とそれを用いた MEMS リニアモータの試作2013

    • Author(s)
      藤原 良元, 石橋 正登, 進士 忠彦, 上原 稔, 堀 充孝, 藤原 閲夫
    • Journal Title

      精密工学会

      Volume: Vol.79,No.8 Pages: 773-778

    • NAID

      130003385026

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design and Analysis of a Thin Film Permanent Magnet Actuated Micro Pump2013

    • Author(s)
      Chao Zhi, Tadahiko Shinshi, Minoru Uehara
    • Journal Title

      International Journal of Automation Technology

      Volume: Vol.7,No.2 Pages: 196-204

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Positioning Characteristics of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet and DLC Coating2013

    • Author(s)
      Ryogen Fujiwara, Tadahiko Shinshi, Minoru Uehara
    • Journal Title

      International Journal of Automation Technology

      Volume: Vol.7,No.2 Pages: 148-155

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] 薄膜ネオジム磁石の交番着磁とそれを用いたMEMSリニアモータの試作2013

    • Author(s)
      藤原 良元, 石橋 正登, 進士 忠彦, 上原 稔, 堀 充孝, 藤原 閲夫
    • Journal Title

      精密工学会

      Volume: 79 Pages: 773-778

    • NAID

      130003385026

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design and Analysis of a Thin Film Permanent Mgnet Actuated Micro Pump2013

    • Author(s)
      Chao Zhi, Tadahiko Shinshi, Minoru Uehara
    • Journal Title

      International Journal of Automation Technology

      Volume: 7, 2 Pages: 196-204

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Nd-Fe-B/Ta 多層永久磁石薄膜の特徴と磁気デバイスへの応用2012

    • Author(s)
      上原 稔, 進士 忠彦
    • Journal Title

      日立金属技報, 日立金属

      Volume: Vol.28 Pages: 14-19

    • NAID

      40019241780

    • Related Report
      2013 Final Research Report
  • [Journal Article] A Micro Pump Driven by a Thin Film Permanent Magnet, Journal of Advanced Mechanical Design2012

    • Author(s)
      Chao ZHI, Tadahiko SHINSHI, Minoru UEHARA
    • Journal Title

      Systems, and Manufacturing, JSME

      Volume: Vol.6,No.7 Pages: 1180-1189

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] A Micro Pump Driven by a Thin Film Permanent Magnet2012

    • Author(s)
      Chao ZHI, Tadahiko SHINSHI, Minoru UEHARA
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 6 Issue: 7 Pages: 1180-1189

    • DOI

      10.1299/jamdsm.6.1180

    • NAID

      130002099455

    • ISSN
      1881-3054
    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Nd-Fe-B/Ta多層永久磁石薄膜の特徴と磁気デバイスへの応用2012

    • Author(s)
      上原 稔, 進士 忠彦
    • Journal Title

      日立金属技報

      Volume: 28 Pages: 14-19

    • NAID

      40019241780

    • Related Report
      2011 Research-status Report
  • [Presentation] Micro Mgnetic Patterning of Thin Film Neodymium Magnet for MEMS Devices2013

    • Author(s)
      Ryogen Fujiwara, Tadahiko Shinshi, Minoru Uehara, Elito Kazawa
    • Organizer
      The 5th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Taiwan National University
    • Related Report
      2013 Final Research Report
  • [Presentation] 薄膜ネオジム磁石のレーザアシスト微細着磁2013

    • Author(s)
      藤原 良元, 進士 忠彦, 上原 稔
    • Organizer
      日本機械学会第5回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] The 5th international Conference of Asian Society for Precision Engineering and Nanotechnology2013

    • Author(s)
      Ryogen Fujiwara, Tadahiko Shinshi, Minoru Uehara, Elito Kazawa. Micro Mgnetic Patterning of Thin Film Neodymium Magnet for MEMS Devices
    • Organizer
      The Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      台北
    • Related Report
      2013 Annual Research Report
  • [Presentation] A Micro Polydimenthylsiloxane Diaphragm Integrated with Sputtered Thin Film NdFeB Magnet2013

    • Author(s)
      Chao Zhi, Tadahiko Shinshi, Minoru Uehara, Akihiro Matsutani, Isamu Yuito, Teruaki Takeuchi
    • Organizer
      The 17th International Conference On Mechatronic Technology
    • Place of Presentation
      チェジュ
    • Related Report
      2013 Annual Research Report
  • [Presentation] A Valveless MEMS Pump Utilizing a Thin Film Permanent Magnet2012

    • Author(s)
      Chao Zhi, Tadahiko Shinshi, Minoru Uehara
    • Organizer
      14th International Conference on Precision Engineering
    • Place of Presentation
      Awaji
    • Related Report
      2013 Final Research Report
  • [Presentation] Design of a Micro Pump Actuator Using a Thin Film Permanent Magnet2012

    • Author(s)
      Chao Zhi, Tadahiko Shinshi, Minoru Uehara
    • Organizer
      16TH International Conference on Mechatronics Technology
    • Place of Presentation
      Tianjin University
    • Related Report
      2013 Final Research Report
  • [Presentation] Positioning of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet2012

    • Author(s)
      Ryogen Fujiwara, Tadahiko Shinshi, Minoru Uehara, Michitaka Hori, Etsuo Fujiwara
    • Organizer
      16TH International Conference on Mechatronics Technology
    • Place of Presentation
      Tianjin University
    • Related Report
      2013 Final Research Report
  • [Presentation] 薄膜ネオジム磁石を用いたマイクロリニアモータ2012

    • Author(s)
      藤原 良元, 進士 忠彦, 上原 稔, 堀 充孝 藤原 閲夫
    • Organizer
      2012年度精密工学会秋季大会
    • Place of Presentation
      九州工業大学
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] Positioning of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet2012

    • Author(s)
      Ryogen Fujiwara, Tadahiko Shinshi, Minoru Uehara, Michitaka Hori, Etsuo Fujiwara
    • Organizer
      16TH International Conference on Mechatronics Technology
    • Place of Presentation
      中国天津
    • Related Report
      2012 Research-status Report
  • [Presentation] Design of a Micro Pump Actuator Using a Thin Film Permanent Magnet2012

    • Author(s)
      Chao Zhi, Tadahiko Shinshi, Minoru Uehara
    • Organizer
      16TH International Conference on Mechatronics Technology
    • Place of Presentation
      中国天津
    • Related Report
      2012 Research-status Report
  • [Presentation] 薄膜永久磁石を用いたMEMSリニアモータの試作研究2012

    • Author(s)
      藤原 良元, 進士 忠彦, 上原 稔.
    • Organizer
      日本機械学会 関東支部第51回学生員卒業研究発表講演会
    • Place of Presentation
      日本大学生産工学部(千葉県)
    • Related Report
      2011 Research-status Report
  • [Presentation] A MEMS Linear Motor Utilizing a Thin FilmPermanent Magnet2011

    • Author(s)
      Tadahiko Shinshi, Masato Ishibashi, Minoru Uehara
    • Organizer
      The 20th MAGDA Conference in Pacific Asia
    • Place of Presentation
      Garden Villa (台湾高雄市)
    • Related Report
      2011 Research-status Report
  • [Presentation] 薄膜ネオジム磁石を用いたマイクロリニアモータ2011

    • Author(s)
      進士 忠彦, 石橋 正登, 上原 稔.
    • Organizer
      2011年度精密工学会秋季大会
    • Place of Presentation
      金沢大学(石川県)
    • Related Report
      2011 Research-status Report
  • [Remarks] (受賞)本研究に関連し, 2012年度精密工学会秋季大会にて, ベストプレゼンテーション賞受賞, 16th International Conference on Mechatronics Technology にて, BEST PAPER AWARD を受賞した.ホームページ等

    • URL

      http://www.nano.pi.titech.ac.jp/

    • Related Report
      2013 Final Research Report
  • [Remarks] 東京工業大学 精密工学研究所 進士研究室

    • URL

      http://www.nano.pi.titech.ac.jp/

    • Related Report
      2013 Annual Research Report
  • [Remarks] 東京工業大学 精密工学研究所

    • URL

      http://www.pi.titech.ac.jp/

    • Related Report
      2013 Annual Research Report
  • [Remarks] 東京工業大学 大学院総合理工学研究科 メカノマイクロ工学専攻

    • URL

      http://www.pms.titech.ac.jp/Japanese/

    • Related Report
      2013 Annual Research Report
  • [Remarks] 東京工業大学 精密工学研究所 集積マシン研究分野ホームページ

    • URL

      http://www.nano.pi.titech.ac.jp/

    • Related Report
      2012 Research-status Report
  • [Remarks]

    • URL

      http://www.nano.pi.titech.ac.jp/

    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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