• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of a spatio-time-resolved cathodoluminescence spectroscopy technique applicable for wide bandgap semiconductors through the generation and focusing of high-brightness femtosecond pulsed photoelectron beams

Research Project

Project/Area Number 23656206
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Electronic materials/Electric materials
Research InstitutionTohoku University

Principal Investigator

CHICHIBU Shigefusa  東北大学, 多元物質科学研究所, 教授 (80266907)

Co-Investigator(Renkei-kenkyūsha) HAZU Kouji  東北大学, 多元物質科学研究所, 助教 (30367057)
Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2011: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywords電気・電子材料 / 高輝度フェムト秒収束電子線 / ワイドバンドギャップ半導体 / 時間空間同時分解計測 / 結晶評価
Research Abstract

To probe local carrier dynamics in wide bandgap semiconductors such as AlN and high AlN mole fraction AlGaN alloys, the use of spatio-time-resolved cathodoluminescence (STRCL) technique offering high spatial and temporal resolutions is preferred, becauseelectron beams can be focused and implanted into sub-micrometer to nanometer regions of interest. In this study, we succeeded in developing a novel front-excitation type high-brightness pulsed photoelectron (PE)- gun driven by femtosecond laser pulses, and the STRCL measurement system equipped with this PE-gun was used to measure the local emission dynamics in GaN, AlN, and high AlN mole fraction AlGaN alloys.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (41 results)

All 2013 2012 2011 Other

All Journal Article (8 results) (of which Peer Reviewed: 7 results) Presentation (29 results) (of which Invited: 3 results) Book (1 results) Remarks (3 results)

  • [Journal Article] Impacts ofSi-doping and resultant cation vacancy formation on the luminescence dynamics for the near-band-edge emission of Al_<0.6>Ga_<0.4>N films grown on AlN templates by metalorganic vapor phase epitaxy2013

    • Author(s)
      S. F. Chichibu, H. Miyake, Y. Ishikawa, M. Tashiro, T. Ohtomo, K. Furusawa, K. Hazu, K. Hiramatsu, and A. Uedono
    • Journal Title

      Journal of Applied Physics

      Volume: Vo. 113

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Spatio-time-resolved cathodoluminescence studies on freestanding GaN substrates grown by hydride vapor phase epitaxy2013

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, H. Namita, S. Nagao, K. Fujito, and A. Uedono
    • Journal Title

      Electrochemical Society Transactions

      Volume: Vol. 50, No.42 Pages: 1-8

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Time-resolved luminescence studies on AlN and high AlN mole fraction AlGaN alloys2013

    • Author(s)
      S. F. Chichibu, T. Onuma, K. Hazu, and A. Uedono
    • Journal Title

      Physica Status Solidi (c)

      Volume: 10 Issue: 3 Pages: 501-506

    • DOI

      10.1002/pssc.201200676

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Local lifetime and luminescence efficiency for the near-band-edge emission of freestanding GaN substrates determined using spatio-time-resolved cathodoluminescence2012

    • Author(s)
      Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, H. Namita, S. Nagao, K. Fujito, and S. F. Chichibu
    • Journal Title

      Applied Physics Letters

      Volume: 101 Issue: 21 Pages: 2121061-4

    • DOI

      10.1063/1.4767357

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Femtosecond-laser-driven photoelectron-gun for time-resolved cathodoluminescence measurement of GaN2012

    • Author(s)
      T.Onuma, Y.Kagamitani, K.Hazu, T.Ishiguro, T.Fukuda, S.F.Chichibu
    • Journal Title

      Review of Scientific Instruments

      Volume: 83 Issue: 4 Pages: 0439051-7

    • DOI

      10.1063/1.3701368

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Advantages and remaining issues of state-of-the-art m-plane freestanding GaN substrates grown by halide vapor phase epitaxy for m-plane InGaN epitaxial growth2012

    • Author(s)
      S. F. Chichibu, M. Kagaya, P. Corfdir, J. D. Ganiere, B. Deveaud-Pledran, N. Grandjean, S. Kubo, and K. Fujito
    • Journal Title

      Semiconductor Science and Technology

      Volume: Vol. 27,024008 Issue: 2 Pages: 1-7

    • DOI

      10.1088/0268-1242/27/2/024008

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Collateral evidence for an excellent radiative performance of Al_xGa_<1-x>N alloy films of high AlN mole fractions2011

    • Author(s)
      S.F.Chichibu, K.Hazu, T.Onuma, A.Uedono
    • Journal Title

      Applied Physics Letters

      Volume: 99 Issue: 5 Pages: 0519021-3

    • DOI

      10.1063/1.3615681

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] ワイドバンドギャップ半導体の新機能出現と時間空間分解分光計測2011

    • Author(s)
      秩父重英,羽豆耕治
    • Journal Title

      マテリアルインテグレーション (特集)

      Volume: 24 Pages: 273-276

    • Related Report
      2011 Research-status Report
  • [Presentation] 高輝度表面入射型パルス電子銃を搭載した時間空間分解カソードルミネッセンス装置によるHVPE成長GaN基板の評価2013

    • Author(s)
      石川陽一,古澤健太郎,田代公則,羽豆耕治,長尾哲,池田宏隆,藤戸健史,秩父重英
    • Organizer
      2013年春季応用物理学会(30p-G21-3)
    • Place of Presentation
      神奈川工業大学,神奈川県
    • Year and Date
      2013-03-30
    • Related Report
      2012 Final Research Report
  • [Presentation] Impacts of point defects on the photoluminescence lifetime of Si-doped Al_<0.6>Ga_<0.4>N epilayers grown on an AlN template2012

    • Author(s)
      S. F. Chichibu, K. Hazu, Y. Ishikawa, M. Tashiro, H. Miyake, K. Hiramatsu, and A. Uedono
    • Organizer
      International Workshop on Nitride Semiconductors 2012 (IWN2012)
    • Place of Presentation
      Sapporo,Japan
    • Year and Date
      2012-10-17
    • Related Report
      2012 Final Research Report
  • [Presentation] Spatio-time-resolved cathodoluminescence studies on freestanding GaN substrates grown by hydride vapor phase epitaxy2012

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, K. Hazu, M. Tashiro, K. Furusawa, H. Namita, S. Nagao, K. Fujito, and A. Uedono
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2012), Session J3: Materials for Solid State Lighting, Hawaii Convention Center
    • Place of Presentation
      Honolulu, Hawaii, USA
    • Year and Date
      2012-10-08
    • Related Report
      2012 Final Research Report
  • [Presentation] 表面入射型パルス光電子銃を搭載した時間空間分解カソードルミネッセンス装置によるワイドバンドギャップ半導体の評価2012

    • Author(s)
      古澤健太郎,石川陽一,田代公則,羽豆耕治,秩父重英
    • Organizer
      2012年秋季応用物理学会(12p-H10-21)
    • Place of Presentation
      愛媛大学,愛媛県
    • Year and Date
      2012-09-12
    • Related Report
      2012 Final Research Report
  • [Presentation] Spatio-time-resolved cathodoluminescence study using a femtosecond focused electron beam on freestanding GaN substrates grown by hydride vapor phase epitaxy2012

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, S. Nagao, K. Fujito, and A. Uedono
    • Organizer
      The 39th International Symposium on Compound Semiconductors (ISCS 2012)
    • Place of Presentation
      Santa Barbara, CA, USA
    • Year and Date
      2012-08-29
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Timeresolved luminescence studies on AlN and high AlN mole fraction AlGaN alloys, 招 待講演2012

    • Author(s)
      S. F. Chichibu and A. Uedono
    • Organizer
      The Fourth International Symposium on Growth of III-Nitrides (ISGN-4)
    • Place of Presentation
      St. Petersburg, Russia
    • Year and Date
      2012-07-18
    • Related Report
      2012 Final Research Report
  • [Presentation] III-V族窒化物半導体の欠陥評価最前線2012

    • Author(s)
      秩父重英,上殿明良
    • Organizer
      応用物理学会シリコンテクノロジー分科会第148回研究集会
    • Place of Presentation
      グランキューブ大阪(大阪国際会議場),大阪府,招待講演
    • Year and Date
      2012-06-14
    • Related Report
      2012 Final Research Report
  • [Presentation] Advantages and issues of m-plane freestanding GaN substrates grown by halide vapor phase epitaxy for InGaN and AlGaN epitaxial growth, 招待講演2012

    • Author(s)
      S. F. Chichibu, K. Hazu, P. Corfdir, J.-D. Ganiere, B. Deveaud-Pledran, N. Grandjean, S. Kubo, H. Namita, S. Nagao, K. Fujito, K. Shimoyama, and A. Uedono
    • Organizer
      German Physical Society (DPG) Spring Meeting, Technical University of Berlin
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2012-03-26
    • Related Report
      2012 Final Research Report
  • [Presentation] Advantages and issues of m-plane freestanding GaN substrates grown by halide vapor phase epitaxy for InGaN and AlGaN epitaxial growth2012

    • Author(s)
      S. F. Chichibu, K. Hazu, P. Corfdir, J. -D. Ganiere, B. Deveaud-Pledran, N. Grandjean, S. Kubo, H. Namita, S. Nagao, K. Fujito, K. Shimoyama, and A. Uedono
    • Organizer
      German Physical Society (DPG) Spring Meeting(招待講演)
    • Place of Presentation
      Berlin, Germany
    • Related Report
      2011 Research-status Report
  • [Presentation] フェムト秒パルス電子線発生とワイドギャップ半導体の評価2012

    • Author(s)
      秩父重英,羽豆耕治,石川陽一,古澤健太郎,上殿明良
    • Organizer
      2012年春季応用物理学会(招待講演)
    • Place of Presentation
      早稲田大学,東京
    • Related Report
      2011 Research-status Report
  • [Presentation] 高AlNモル分率AlGaN混晶薄膜の時間分解PL/CL評価2012

    • Author(s)
      秩父重英,羽豆耕治,尾沼猛儀,上殿明良
    • Organizer
      2012年春季応用物理学会
    • Place of Presentation
      早稲田大学, 東京都
    • Related Report
      2011 Research-status Report
  • [Presentation] 時空間同時分解カソードルミネッセンス法によるIII族窒化物半導体評価(2) - HVPE成長GaN基板(2) -2012

    • Author(s)
      石川陽一,羽豆耕治,田代公則,松本創,藤戸健史,下山謙司,秩父重英
    • Organizer
      2012年春季応用物理学会
    • Place of Presentation
      早稲田大学, 東京都
    • Related Report
      2011 Research-status Report
  • [Presentation] Time-resolved photoluminescence and time-resolved cathodoluminescence studies on AlN andhigh AlN mole fraction AlGaN alloys, 招待講演2011

    • Author(s)
      S. F. Chichibu, T. Onuma, K. Hazu, T. Sota, and A. Uedono
    • Organizer
      European Materials Research Society, 2011 Spring Meeting
    • Place of Presentation
      Session F, Nice, France
    • Year and Date
      2011-05-10
    • Related Report
      2012 Final Research Report
  • [Presentation] Time-resolved photoluminescence and time-resolved cathodoluminescence studies on AlN and high AlN mole fraction AlGaN alloys2011

    • Author(s)
      S. F. Chichibu, T. Onuma, K. Hazu, T. Sota, and A. Uedono
    • Organizer
      European Materials Research Society, 2011 Spring Meeting(招待講演)
    • Place of Presentation
      Nice, France
    • Related Report
      2011 Research-status Report
  • [Presentation] Spatio-time-resolved cathodoluminescence study on a freestanding GaN substrate grown by halide vapor phase epitaxy2011

    • Author(s)
      Y. Ishikawa, K. Hazu, H. Matsumoto, K. Suzaki, K. Fujito, S. Nagao, M. Shigeiwa, and S. F. Chichibu
    • Organizer
      The 9th International Conference on Nitride Semiconductors (ICNS-9)
    • Place of Presentation
      Glasgow, UK
    • Related Report
      2011 Research-status Report
  • [Presentation] Time-resolved photoluminescence and time-resolved cathodoluminescence studies on AlN and high AlN mole fraction AlGaN alloys2011

    • Author(s)
      S. F. Chichibu, T. Onuma, K. Hazu, T. Sota, and A. Uedono
    • Organizer
      The 9th International Conference on Nitride Semiconductors (ICNS-9)
    • Place of Presentation
      Glasgow, UK
    • Related Report
      2011 Research-status Report
  • [Presentation] フェムト秒パルス電子線を用いた窒化物半導体の時間・空間分解カソードルミネッセンス計測2011

    • Author(s)
      秩父重英
    • Organizer
      多元系機能性材料研究会平成23年度年末講演会
    • Place of Presentation
      愛媛大学, 愛媛県
    • Related Report
      2011 Research-status Report
  • [Presentation] AlNエピタキシャル薄膜の発光寿命と点欠陥他の関係について2011

    • Author(s)
      秩父重英,羽豆耕治,尾沼猛儀,上殿明良
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形大学, 山形県
    • Related Report
      2011 Research-status Report
  • [Presentation] 時空間同時分解カソードルミネッセンス法によるIII族窒化物半導体評価(1) - HVPE成長GaN基板2011

    • Author(s)
      石川陽一,羽豆耕治,松本創,藤戸健史,下山謙司,秩父重英
    • Organizer
      2011年秋季応用物理学会
    • Place of Presentation
      山形大学, 山形県
    • Related Report
      2011 Research-status Report
  • [Presentation] Time-resolved luminescence studies on AlN and high AlN mole fraction AlGaN alloys

    • Author(s)
      S. F. Chichibu and A. Uedono
    • Organizer
      The Fourth International Symposium on Growth of III-Nitrides (ISGN-4)
    • Place of Presentation
      St. Petersburg, Russia
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Spatio-time-resolved cathodoluminescence studies on freestanding GaN substrates grown by hydride vapor phase epitaxy

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, K. Hazu, M. Tashiro, K. Furusawa, H. Namita, S. Nagao, K. Fujito, and A. Uedono
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2012), ECS222nd
    • Place of Presentation
      Hawaii, USA
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] III-V族窒化物半導体の欠陥評価最前線

    • Author(s)
      秩父重英,上殿明良
    • Organizer
      応用物理学会 シリコンテクノロジー分科会 第148回研究集会
    • Place of Presentation
      グランキューブ大阪(大阪国際会議場)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Local carrier dynamics in freestanding GaN substrates grown by hydride vapor phase epitaxy studied using the spatio-time-resolved cathodoluminescence technique

    • Author(s)
      K. Furusawa, Y. Ishikawa, M. Tashiro, K. Hazu, S. Nagao, K. Fujito, A. Uedono, and S. F. Chichibu
    • Organizer
      International Workshop on Nitride Semiconductors 2012 (IWN2012)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Impacts of point defects on the photoluminescence lifetime of Si-doped Al0.6Ga0.4N epilayers grown on an AlN template

    • Author(s)
      S. F. Chichibu, K. Hazu, Y. Ishikawa, M. Tashiro, H. Miyake, K. Hiramatsu, and A. Uedono
    • Organizer
      International Workshop on Nitride Semiconductors 2012 (IWN2012)
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] 表面入射型パルス光電子銃を搭載した時間空間分解カソードルミネッセンス装置によるワイドバンドギャップ半導体の評価

    • Author(s)
      古澤健太郎,石川陽一,田代公則,羽豆耕治,秩父重英
    • Organizer
      2012年秋季応用物理学会
    • Place of Presentation
      愛媛大学,愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] m面GaN基板上にNH3-MBE成長したAl0.25Ga0.75Nの時間空間分解CL評価-GaN基板のチルトモゼイクが発光特性に及ぼす影響-

    • Author(s)
      秩父重英,羽豆耕治,石川陽一,田代公則,古澤健太郎,長尾哲,藤戸健史
    • Organizer
      2012年秋季応用物理学会
    • Place of Presentation
      愛媛大学,愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] 六方晶BN微結晶の時間・空間分解カソードルミネッセンス評価

    • Author(s)
      石川陽一,田代公則,羽豆耕治,古澤健太郎,小南裕子,原和彦,秩父重英
    • Organizer
      2012年秋季応用物理学会
    • Place of Presentation
      愛媛大学,愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] Si添加Al0.6Ga0.4N混晶薄膜の時間分解カソードルミネッセンス評価

    • Author(s)
      羽豆耕治,石川陽一,田代公則,古澤健太郎,三宅秀人,平松和政,上殿明良,秩父重英
    • Organizer
      2013年春季応用物理学会
    • Place of Presentation
      神奈川工大, 神奈川県
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高輝度表面入射型パルス電子銃を搭載した時間空間分解カソードルミネッセンス装置によるHVPE成長GaN基板の評価

    • Author(s)
      石川陽一,古澤健太郎,田代公則,羽豆耕治,長尾哲,池田宏隆,藤戸健史,秩父重英
    • Organizer
      2013年春季応用物理学会
    • Place of Presentation
      神奈川工大, 神奈川県
    • Related Report
      2012 Annual Research Report
  • [Book] 「ワイドバンドギャップ半導体の新機能出現と時間空間分解分光計測」2011

    • Author(s)
      秩父重英,羽豆耕治
    • Publisher
      マテリアルインテグレーション(特集:地域と世界に貢献する東北大学多元物質科学研究所)、第24巻,4,5月号
    • Related Report
      2012 Final Research Report
  • [Remarks] (1)国立大学法人東北大学産学連携推進本部「産学連携ものがたり」(2012年4月)p.26-27にSTRCL概念図等を掲載

    • Related Report
      2012 Final Research Report
  • [Remarks] (2)フェムト秒パルス電子線を用いたAlN・AlGaNの時間分解分光評価結果に関して2012年7月にSt.Petersburgで開催された第4回窒化物半導体結晶成長国際会議(ISGN-4)の招待講演で紹介した内容を表す図表が、会議のProceedingsであるPhysica Status Solidi(c)10(2013).の表紙に選定された。

    • URL

      http://onlinelibrary.wiley.com/doi/10.1002/pssc.201390004/abstract

    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://www.tagen.tohoku.ac.jp/labo/chichibu/Ronbun.html

    • Related Report
      2012 Final Research Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi