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Research on metal-film subwavelength grating polarizer

Research Project

Project/Area Number 23656231
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionUtsunomiya University

Principal Investigator

SHIRAISHI Kazuo  宇都宮大学, 工学(系)研究科(研究院), 教授 (90134056)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2011: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywords偏光子 / サブ波長格子 / 中赤外 / テラヘルツ / 異方性エッチング
Research Abstract

New polarizers with high performance have been successively obtained. (1) Terahertz region: A new fabrication method utilizing the thermal imprinting was employed to fabricate the polarizer. The method is simple and applicable for the mass production. The insertion loss of less than 0.2dB with an extinction ratio as high as 50dB have been obtained at the frequency of 2THz, showing that the goal of the project has been reached. (2) Mid-infrared region: Triplicated subwavelength metal films for the polarizer are formed on both sides of a 0.3mm-thick silicon wafer. The nsertion loss of 1.0dB with an extinction ratio of 32dB have been obtained at the wavelength of 18um, showing that data close to the goal have been obtained. A new polarizer structure having an anti-reflection effect to the silicon substrate was newly proposed, which is promising to attain the goal.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (17 results)

All 2014 2013 2012 2011

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (13 results) (of which Invited: 1 results)

  • [Journal Article] Infrared polarizer employing multiple metal-film subwavelength gratings2013

    • Author(s)
      K. Shiraishi and H. Yoda
    • Journal Title

      Optics Express

      Volume: vol. 21 Issue: 12 Pages: 13998-14007

    • DOI

      10.1364/oe.21.013998

    • Related Report
      2013 Annual Research Report 2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] インプリント法によるテラヘルツ帯用金属薄膜サブ波長格子構造偏光子の作製2012

    • Author(s)
      小藤美紗子, 稲川雄太, 依田秀彦, 白石和男
    • Journal Title

      電子情報通信学会論文誌©

      Volume: vol.J95-C Pages: 58-59

    • NAID

      110009418694

    • URL

      http://search.ieice.org/bin/pdf.php?lang=J&year=2012&fname=j95-c_3_58&abst=

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] A two-port polarization-insensitive coupler module between single-mode fiber and silicon-wire waveguide2012

    • Author(s)
      K. Shiraishi, H. Yoda, and C. S. Tsai
    • Journal Title

      Optics Express

      Volume: 20 Pages: 24370-24375

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] インプリント法によるテラヘルツ帯用金属薄膜サブ波長格子構造偏光子の作製2012

    • Author(s)
      小藤美紗子,稲川雄太,依田秀彦,白石和男
    • Journal Title

      電子情報通信学会論文誌

      Volume: J95-C Pages: 58-59

    • NAID

      110009418694

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] 金属薄膜サブ波長格子構造による中赤外~テラヘルツ帯用偏光子の高性能化2014

    • Author(s)
      白石和男
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      新潟大学
    • Related Report
      2013 Final Research Report
  • [Presentation] 金属薄膜サブ波長多層格子構造偏光子の反射損失低減化2014

    • Author(s)
      鈴木貴博, 六本木誠, 依田秀彦, 白石和男
    • Organizer
      電気学会栃木群馬支所合同研究発表会
    • Place of Presentation
      群馬大学
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] 金属薄膜サブ波長格子構造による中赤外~テラヘルツ帯用偏光子の高性能化2014

    • Author(s)
      白石 和男
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      新潟大学
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 中赤外用多層金属薄膜サブ波長格子構造偏光子の挿入損失低減化2013

    • Author(s)
      鈴木貴博, 諏訪翔也, 六本木誠, 依田秀彦, 白石和男
    • Organizer
      電子情報通信学会エレクトロニクスソサイエティ大会
    • Place of Presentation
      福岡工業大学
    • Related Report
      2013 Final Research Report
  • [Presentation] 中赤外用多層金属薄膜サブ波長格子構造偏光子の挿入損失低減化2013

    • Author(s)
      鈴木 貴博、諏訪 翔也、六本木 誠、依田 秀彦、白石 和男
    • Organizer
      電子情報通信学会ソサイエテイ大会
    • Place of Presentation
      福岡工業大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fabrication of Thin Metallic-film Subwavelength-Grating Polarizers for Terahertz Region by the Imprinting Method2012

    • Author(s)
      K. Shiraishi, M. Kofuji, Y. Inagawa, H. Yoda, and C. S. Tsai
    • Organizer
      Conference on Lasers and Electro-Optics Quantum Electronics and Laser Science Conference (CLEO/QELS 2012)
    • Place of Presentation
      San Jose, CA
    • Related Report
      2013 Final Research Report
  • [Presentation] 高い消光比を有する赤外用金属薄膜サブ波長多重格子構造偏光子2012

    • Author(s)
      鈴木貴博, 六本木誠, 依田秀彦, 白石和男
    • Organizer
      電子情報通信学会エレクトロニクスソサイエティ大会
    • Place of Presentation
      富山大学
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] インプリント法による低損失サブ波長格子構造偏光子の作製2012

    • Author(s)
      小藤美紗子, 依田秀彦, 白石和男
    • Organizer
      電子情報通信学会エレクトロニクスソサイエティ大会
    • Place of Presentation
      富山大学
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] 金属薄膜サブ波長格子を用いたTHz帯ハーフミラー2012

    • Author(s)
      酒巻和弘, 碇智文, 依田秀彦, 白石和男
    • Organizer
      電子情報通信学会エレクトロニクスソサイエティ大会
    • Place of Presentation
      富山大学
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] 中赤外用金属薄膜サブ波長多重格子構造偏光子の実験的検証2012

    • Author(s)
      稲川雄太, 依田秀彦, 白石和男
    • Organizer
      応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Related Report
      2013 Final Research Report 2011 Research-status Report
  • [Presentation] Fabrication of Thin Metallic-film Subwavelength-Grating Polarizers for Terahertz Region by the Imprinting Method2012

    • Author(s)
      K. Shiraishi, M. Kofuji, Y. Inagawa, H. Yoda, and C. S. Tsai
    • Organizer
      CLEO
    • Place of Presentation
      San Jose, CA
    • Related Report
      2012 Research-status Report
  • [Presentation] 金属薄膜サブ波長多重格子構造偏光子の実験的検討2011

    • Author(s)
      稲川雄太, 依田秀彦, 白石和男
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Place of Presentation
      北海道大学
    • Related Report
      2013 Final Research Report 2011 Research-status Report
  • [Presentation] 改良インプリント法による金属薄膜サブ波長格子構造偏光子の作製2011

    • Author(s)
      小藤美紗子, 稲川雄太, 大野泰司, 依田秀彦, 白石和男
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Place of Presentation
      北海道大学
    • Related Report
      2013 Final Research Report 2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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