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Vector tactile sensing with single MEMS sensor using resonant frequencyshift

Research Project

Project/Area Number 23656239
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionKyoto Institute of Technology

Principal Investigator

YAMASHITA Kaoru  京都工芸繊維大学, 工芸科学研究科, 准教授 (40263230)

Co-Investigator(Kenkyū-buntansha) NODA Minoru  京都工芸繊維大学, 工芸科学研究科, 教授 (20294168)
Research Collaborator YANG Yi  京都工芸繊維大学, 工芸科学研究科, 前期課程大学院生
TANAKA Hikaru  京都工芸繊維大学, 工芸科学研究科, 博士
KII Hirotoshi  京都工芸繊維大学, 工芸科学部, 4年生
Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords触覚 / 共振 / 圧電 / MEMS
Research Abstract

A new technique for vector tactile sensing with MEMS devices was proposed. While tactile vectors had been conventionally measured with a combination of plural sensor elements each of which detected force in only one direction, the proposed technique enabled a single sensor element to measure a tactile vector based on resonant frequency shift of a vibratory microcantilever. The principle was confirmed in finite element analysis and the cantilever sensors were fabricated and evaluated. It was found that nonlinearity in the frequency response of the sensors drastically affected the tactile vector estimation, and an improved sensor structure to reduce the nonlinearity was designed and fabricated.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (11 results)

All 2013 2012 2011

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (10 results)

  • [Journal Article] Piezoelectric Vibratory-Cantilever Force Sensors and Axial Sensitivity Analysis for Individual Triaxial Tactile Sensor2013

    • Author(s)
      Kaoru Yamashita
    • Journal Title

      IEEE Sensors Journal

      Volume: 13 Issue: 3 Pages: 1074-1080

    • DOI

      10.1109/jsen.2012.2237547

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Presentation] Curvature Controlled Microstructures for Improved Triaxial Sensitivity in Piezoelectric Vibratory Cantilever-Type Tactile Sensors Based on Resonant Frequency Shift2013

    • Author(s)
      Hikaru Tanaka
    • Organizer
      The 2013 International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      Suita, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] 共振周波数変化型触覚センシング用圧電カンチレバー構造の設計2013

    • Author(s)
      紀宏俊
    • Organizer
      平成25年電気学会全国大会
    • Place of Presentation
      名古屋市
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Curvature Controlled Microstructures for Improved Triaxial Sensitivity in Piezoelectric Vibratory Cantilever-Type Tactile Sensors Based on Resonant Frequency Shift2013

    • Author(s)
      Hikaru Tanaka
    • Organizer
      The 2013 International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      吹田市
    • Related Report
      2012 Annual Research Report
  • [Presentation] Vibration Mode Design for Precision Improvement of Triaxial Tactile Measurement Using Individual Vibratory Microcantilever Sensor2012

    • Author(s)
      Yi Yang
    • Organizer
      IEEE Sensors2012
    • Place of Presentation
      Taipei, Taiwan
    • Related Report
      2012 Final Research Report
  • [Presentation] Vibratory Mode Design for Precision Improvement of Triaxial Tactile Measurement Using Individual Vibratory Microcantilever Sensor2012

    • Author(s)
      Yi Yang
    • Organizer
      IEEE Sensors 2012
    • Place of Presentation
      台北市,台湾
    • Related Report
      2012 Annual Research Report
  • [Presentation] Piezoelectric Vibratory-Cantilever Force Sensors and Axial Sensitivity Analysis for Individual Triaxial Tactile Sensing2011

    • Author(s)
      Kaoru Yamashita
    • Organizer
      IEEE Sensors2011
    • Place of Presentation
      Limerick, Ireland
    • Related Report
      2012 Final Research Report
  • [Presentation] Vector Tactile Sensing by a Single Sensor Element of Vibratory Microcantilever Based on Multimode Resonant Frequency Shift2011

    • Author(s)
      Kaoru Yamashita
    • Organizer
      Eurosensor XXV
    • Place of Presentation
      Athens, Greece
    • Related Report
      2012 Final Research Report
  • [Presentation] Piezoelectric Vibratory Microcantilever-type Tactile Sensors and Three-axis Sensitivity by a Single Sensor Element Using Resonant Frequency Shift2011

    • Author(s)
      Yi Yang
    • Organizer
      The 28th Sensor Symposium on Sensors
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] Pieaoelectric vibratory-cantilever force sensors and axial sensitivity analysis for individual triaxial tactile sensing2011

    • Author(s)
      Kaoru Yamashita
    • Organizer
      IEEE Sensors 2011
    • Place of Presentation
      University of Limerick, Limerick, Ireland
    • Related Report
      2011 Research-status Report
  • [Presentation] Vector tactile sensing by a single sensor element of vibratory microcantilever based on multimode resonant frequency shift2011

    • Author(s)
      Kaoru Yamashita
    • Organizer
      Eurosensors XXV
    • Place of Presentation
      Magaron Athens International Conference Center, Athens, Greece
    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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