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Evaluation of glass thin films by the ultrasonic microspectroscopy technology

Research Project

Project/Area Number 23656260
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Measurement engineering
Research InstitutionTohoku University

Principal Investigator

KUSHIBIKI Jun-ichi  東北大学, 大学院・工学研究科, 名誉教授 (50108578)

Co-Investigator(Kenkyū-buntansha) ARAKAWA Mototaka  東北大学, 大学院・工学研究科, 助教 (00333865)
Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2011: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywords超音波マイクロスペクトロスコピー技術 / 薄膜 / 音響特性計測 / 不純物 / 欠陥
Research Abstract

The ultrasonic microspectroscopy technology was applied to evaluation of glass thin films. Two SiO2/Ta2O5 multilayer films were deposited on SiO2 glass substrates by rf ion beam sputtering, and one of them was annealed. Frequency characteristics of leaky surface acoustic wave (LSAW) velocity were measured for specimens by the line-focus-beam ultrasonic material characterization system, and LSAW velocity changes due to the annealing were detected. TiO2-SiO2 thin films were also deposited on SiO2 glass substrates or TiO2-SiO2 glass substrates, and LSAW velocity changes due to the fictivetemperature changes of films were detected.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (6 results)

All 2011 Other

All Presentation (4 results) Remarks (2 results)

  • [Presentation] 直線集束ビーム超音波材料解析システムによるガラス多層膜の評価2011

    • Author(s)
      荒川元孝,櫛引淳一,伊藤和彦,江藤和幸
    • Organizer
      超音波研究会
    • Place of Presentation
      仙台
    • Year and Date
      2011-09-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 直線集束ビーム超音波材料解析システムによるガラス薄膜の評価2011

    • Author(s)
      荒川元孝,櫛引淳一,伊藤和彦,江藤和幸
    • Organizer
      第72回応用物理学会
    • Place of Presentation
      山形
    • Year and Date
      2011-08-31
    • Related Report
      2012 Final Research Report
  • [Presentation] 直線集束ビーム超音波材料解析システムによるガラス薄膜の評価

    • Author(s)
      荒川元孝, 櫛引淳一, 伊藤和彦, 江藤和幸
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Related Report
      2011 Research-status Report
  • [Presentation] 直線集束ビーム超音波材料解析システムによるガラス多層膜の評価

    • Author(s)
      荒川元孝, 櫛引淳一, 伊藤和彦, 江藤和幸
    • Organizer
      超音波研究会
    • Place of Presentation
      仙台
    • Related Report
      2011 Research-status Report
  • [Remarks]

    • URL

      http://www.ecei.tohoku.ac.jp/kushi/

    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://www.ecei.tohoku.ac.jp/kushi/

    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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