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Development of a novel space X-ray telescope based on micromachining technologies

Research Project

Project/Area Number 23684009
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Astronomy
Research InstitutionTokyo Metropolitan University

Principal Investigator

EZOE Yuichiro  首都大学東京, 理工学研究科, 准教授 (90462663)

Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000)
Fiscal Year 2013: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2012: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Fiscal Year 2011: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
KeywordsX線・γ線天文学 / X線望遠鏡 / マイクロマシン技術 / X線天文学 / マイクロマシン
Research Abstract

High sensitivity space X-ray observations need a large-aperture X-ray telescope. We invented and have been developing a novel space X-ray telescope based on micro machining technologies. Our method utilizes side walls of micropores made in a thin wafer for X-ray mirrors. A typical wafer thickness is hundreds micro meters, while the width of the micropore is tens micro meters. We verified X-ray reflection and imaging with this method for the first time in the world. In this research, we have succeeded to improve resolution and reflectivity with single-stage sample optics and to fabricate a 2-stage X-ray telescope. We also have verified a new process to coat the micropores with heavy metal and fabricated a 12-inch optic, which is to our knowledge the largest micropore optics ever fabricated. Furthermore, we have studied and proposed an X-ray imaging spectrometer using this telescope for future space missions.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (64 results)

All 2014 2013 2012 2011 Other

All Journal Article (14 results) (of which Peer Reviewed: 13 results) Presentation (44 results) (of which Invited: 10 results) Book (2 results) Remarks (2 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results)

  • [Journal Article] JUXTA : a new probe ofX-ray emission from the Jupiter system2013

    • Author(s)
      Y. Ezoe、T. Kimura、S. Kasahara、A. Yamazaki、K. Mitsuda、M. Fujimoto、Y. Miyoshi、G. Branduardi-Raymont、I. Mitsuishi、T. Ohashi
    • Journal Title

      Advances in Space Research

      Volume: 51 Pages: 1605-1621

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Iridium-coated microporeX-ray optics using dry etching of a silicon wafer and atomic layer deposition2013

    • Author(s)
      T. Ogawa、Y. Ezoe、T. Moriyama、I. Mitsuishi、T. Kakiuchi、T. Ohashi、K. Mitsuda、M. Putkonen
    • Journal Title

      Applied Optics

      Volume: 52 Pages: 5949-5956

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer deposition2013

    • Author(s)
      T. Ogawa, et al.
    • Journal Title

      Applied Optics

      Volume: 52 Issue: 24 Pages: 5949-5956

    • DOI

      10.1364/ao.52.005949

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] JUXTA:A New Probe of X-ray Emission from the Jupiter System2013

    • Author(s)
      Yuichiro Ezoe, Tomoki Kimura, Satoshi Kasahara, Atsushi Yamazaki, Kazuhisa Mitsuda, Masaki Fujimoto, Yoshizumi Miyoshi, Graziella Branduardi-Raymont, Kumi Ishikawa, Ikuyuki Mitsuishi, Tomohiro Ogawa, Takuya, Kakiuchi, Takaya Ohashi ゛
    • Journal Title

      Advances in Space Research

      Volume: 51 Issue: 9 Pages: 1605-1621

    • DOI

      10.1016/j.asr.2012.11.029

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Large aperture focusing ofX-rays with micro pore optics using dry etching silicon wafers2012

    • Author(s)
      Y. Ezoe、T. Moriyama、T. Ogawa、T. Kakiuchi、I. Mitsuishi、K. Mitsuda、T. Aoki、K. Morishita、K. Nakajima
    • Journal Title

      Optics Letters

      Volume: 37 Pages: 779-781

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-ray Optics2012

    • Author(s)
      R.E. Riveros、I. Mitsuishi、U. Takagi、Y. Ezoe、K. Mitsuda、H. Yamaguchi、T. Boggs、K. Ishizu、T. Moriyama
    • Journal Title

      J. Manufacturing Science and Engineering

      Volume: 134 Pages: 51001-51001

    • Related Report
      2013 Final Research Report
  • [Journal Article] Novel ultra-lightweight and high-resolutionX-ray optics for space astronomy2012

    • Author(s)
      I. Mitsuishi、Y. Ezoe、K.Ishizu、T. Moriyama、M. Mita、N.Y. Yamasaki、K. Mitsuda、Y. Kanamori、K. Morishita、K. Nakajima
    • Journal Title

      Sensors & Actuators A

      Volume: 188 Pages: 411-416

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Magnetic Field Assisted Finishing of Silicon MEMS Micropore X-ray Optics2012

    • Author(s)
      R. Riveros et al.,
    • Journal Title

      J. Manufacturing Science and Engineering

      Volume: 134 Issue: 5

    • DOI

      10.1115/1.4006967

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Novel ultra-lightweight and high-resolution MEMS X-ray optics for space astronomy2012

    • Author(s)
      Ikuyuki Mitsuishi, Yuichiro Ezoe, Kensuke Ishizu, Teppei Moriyama, Makoto Mita, Noriko Y.Yamasaki, Kazuhisa Mitsuda, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima
    • Journal Title

      Sensors and Actuators

      Volume: (印刷中) Pages: 411-416

    • DOI

      10.1016/j.sna.2012.02.042

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Large aperture focusing of x rays with micro pore optics using dry etching of silicon wafers2012

    • Author(s)
      Y.Ezoe, et al
    • Journal Title

      Optics Letters

      Volume: 37 Issue: 5 Pages: 779-781

    • DOI

      10.1364/ol.37.000779

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 将来木星探査とX線観測2011

    • Author(s)
      江副祐一郎、木村智樹、笠原慧、山崎敦、三好由純
    • Journal Title

      日本惑星科学会誌

      Volume: 20 Pages: 300-308

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 将来木星探査とX線観測2011

    • Author(s)
      江副祐一郎, ほか
    • Journal Title

      日本惑星科学会誌遊星人

      Volume: 20 Pages: 300-308

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Novel Ultra-lightweight and High-resolution MEMS X-ray Optics for Space Astronomy

    • Author(s)
      I.Mitsuishi, et al
    • Journal Title

      Sensors & Actuators

      Volume: (受理済)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magnetic Field Assisted Finishing of Silicon MEMS Micro-pore X-ray Optics

    • Author(s)
      R.E.Riveros, et al
    • Journal Title

      ASME J.of Manufacturing Science and Enginnering

      Volume: (受理済)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] 地球磁気圏をX線で可視化する GEO-X 衛星の検討2014

    • Author(s)
      江副 祐一郎ほか
    • Organizer
      第14回宇宙科学シンポジウム
    • Place of Presentation
      JAXA 宇宙研
    • Related Report
      2013 Annual Research Report
  • [Presentation] 将来衛星に向けた超軽量・高角度分解能 MEMS X線光学系の開発2014

    • Author(s)
      生田 昌寛ほか
    • Organizer
      第14回宇宙科学シンポジウム
    • Place of Presentation
      JAXA 宇宙研
    • Related Report
      2013 Annual Research Report
  • [Presentation] 地球磁気圏をX線で可視化する GEO-X 衛星の検討2014

    • Author(s)
      江副 祐一郎ほか
    • Organizer
      研究環シンポジウム:宇宙の化学進化 2014
    • Place of Presentation
      首都大
    • Related Report
      2013 Annual Research Report
  • [Presentation] 将来衛星に向けた超軽量・高角度分解能 MEMS X線光学系の開発2014

    • Author(s)
      生田 昌寛ほか
    • Organizer
      研究環シンポジウム:宇宙の化学進化 2014
    • Place of Presentation
      首都大
    • Related Report
      2013 Annual Research Report
  • [Presentation] Suzaku observations of diffuse X-rays from the Earth’s magnetosphere and beyond2014

    • Author(s)
      Y. Ezoe et al.,
    • Organizer
      Suzaku MAXI conference 2014
    • Place of Presentation
      Ehime, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] GEO-Xteam、GEO-X : Imaging of DiffuseX-rays from the Earth's Magnetosphere2013

    • Author(s)
      Y. Ezoe、Y. Miyoshi、S. Kasahara
    • Organizer
      Magnetospheric Plasmas 2013
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Improvement in sidewall roughness of MEMS X-ray optics2013

    • Author(s)
      M. Ikuta et al.,
    • Organizer
      Optical MEMS and Nanophotonics 2013
    • Place of Presentation
      Kanazawa, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Assembly of a MEMS-based Wolter type-I X-ray optic toward a future planetary exploration mission2013

    • Author(s)
      I. Mitsuishi et al.,
    • Organizer
      Optical MEMS and Nanophotonics 2013
    • Place of Presentation
      Kanazawa, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] 将来衛星に向けた超軽量・高角度分解能 MEMS X線光学系の開発2013

    • Author(s)
      垣内拓也ほか
    • Organizer
      第13回宇宙科学シンポジウム
    • Place of Presentation
      JAXA 宇宙科学研究所
    • Related Report
      2012 Annual Research Report
  • [Presentation] 将来衛星に向けた超軽量 MEMS X線光学系の高分解能化の研究2013

    • Author(s)
      小川智宏ほか
    • Organizer
      応用物理学会 春季年会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] マイクロマシン技術を用いた Wolter I型宇宙X線望遠鏡の開発 (1)2013

    • Author(s)
      生田昌寛ほか
    • Organizer
      応用物理学会 春季年会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] マイクロマシン技術を用いた Wolter I型宇宙X線望遠鏡の開発 (2)2013

    • Author(s)
      三石郁之ほか
    • Organizer
      応用物理学会 春季年会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] マイクロマシン技術を用いた超軽量・高角度分解能X線光学系の開発と現状2012

    • Author(s)
      小川智弘, ほか
    • Organizer
      物理学会春季年会
    • Place of Presentation
      西宮
    • Year and Date
      2012-03-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] 将来衛星に向けた超軽量・高角度分解能新MEMS X線光学系の基礎開発(4)2012

    • Author(s)
      垣内拓也, ほか
    • Organizer
      応用物理学会春季年会
    • Place of Presentation
      早稲田
    • Year and Date
      2012-03-18
    • Related Report
      2011 Annual Research Report
  • [Presentation] SWCXのサイエンスと太陽系探査2012

    • Author(s)
      江副祐一郎
    • Organizer
      宇宙の化学進化シンポジウム
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Planetary magnetospheres and their solar wind interaction observed inX-rays : Past, present and future2012

    • Author(s)
      Y. Ezoe
    • Organizer
      Geotail 20^<th> workshop
    • Place of Presentation
      Tokyo、Japan
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] 将来衛星に向けた超軽量・高角度分解能新MEMS X線光学系の基礎開発(5)2012

    • Author(s)
      垣内拓也ほか
    • Organizer
      応用物理学会 秋季年会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ir 膜付け MEMS X 線 光学系の反射率測定2012

    • Author(s)
      小川智弘ほか
    • Organizer
      応用物理学会 秋季年会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 将来木星探査衛星を目指す X線撮像分光装置 JUXTA の検討2012

    • Author(s)
      江副祐一郎ほか
    • Organizer
      天文学会 秋季年会
    • Place of Presentation
      大分大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] SWCX のサイエンスと太陽系探査2012

    • Author(s)
      江副祐一郎
    • Organizer
      複合的アプローチで探る宇宙の化学進化
    • Place of Presentation
      ホテル伊豆高原
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] MEMS-based novel X-ray optics for future astronomical missions2012

    • Author(s)
      I. Mitsuishi et al.,
    • Organizer
      OPTICAL MEMS & NANOPHOTONICS CONFERENCE
    • Place of Presentation
      Banff, Canada
    • Related Report
      2012 Annual Research Report
  • [Presentation] Assembly of a MEMS-based Wolter type-I x-ray optic2012

    • Author(s)
      T. Kakiuchi et al.,
    • Organizer
      OPTICAL MEMS & NANOPHOTONICS CONFERENCE
    • Place of Presentation
      Banff, Canada
    • Related Report
      2012 Annual Research Report
  • [Presentation] X-ray reflectivity measurement of a iridium coated MEMS optic with atomic layer deposition2012

    • Author(s)
      T. Ogawa et al.,
    • Organizer
      OPTICAL MEMS & NANOPHOTONICS CONFERENCE
    • Place of Presentation
      Banff, Canada
    • Related Report
      2012 Annual Research Report
  • [Presentation] Planetary magnetospheres and their solar wind interaction observed in X-rays: Past, present and future2012

    • Author(s)
      Y. Ezoe
    • Organizer
      Geotail-20 workshop
    • Place of Presentation
      東京工業大学
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] MEMS技術を用いた超軽量・高角度分解能X線光学系の開発と現状2012

    • Author(s)
      小川智弘, ほか
    • Organizer
      第21回宇宙科学シンポジウム
    • Place of Presentation
      相模原
    • Related Report
      2011 Annual Research Report
  • [Presentation] Progress in MEMS X-ray optics2011

    • Author(s)
      Y.Ezoe
    • Organizer
      International Workshop on Astronomical X-ray Optics
    • Place of Presentation
      Prague, Chez
    • Year and Date
      2011-12-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] 木星探査計画EJSM JMOに向けたX線撮像・分光装置の検討2011

    • Author(s)
      江副祐一郎, ほか
    • Organizer
      地球電磁気・惑星圏学会年会
    • Place of Presentation
      神戸
    • Year and Date
      2011-11-04
    • Related Report
      2011 Annual Research Report
  • [Presentation] 将来木星探査衛星に向けた超軽量X線望遠鏡の技術実証2011

    • Author(s)
      江副祐一郎, ほか
    • Organizer
      小型衛星による実証シンポジウム
    • Place of Presentation
      一橋
    • Year and Date
      2011-09-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] マイクロマシン技術による高分解能X線望遠鏡2011

    • Author(s)
      江副祐一郎
    • Organizer
      第11回X線結像光学シンポジウム
    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Invited
  • [Presentation] 宇宙X線望遠鏡とシリコン高温塑性変形技術2011

    • Author(s)
      江副祐一郎
    • Organizer
      JSPS 161委員会結晶技術の宇宙応用
    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Invited
  • [Presentation] Simulation-based Study of A MEMS Wolter type-I telescope2011

    • Author(s)
      Y.Ezoe, et al
    • Organizer
      International Conference on Optical MEMS & Nanophotonics
    • Place of Presentation
      Istanbul, Turk
    • Related Report
      2011 Annual Research Report
  • [Presentation] Measurement of the Taper Angle and X-ray Reflectivity of MEMS-based Silicon Mirrors2011

    • Author(s)
      T.Ogawa, et al
    • Organizer
      International Conference on Optical MEMS & Nanophotonics
    • Place of Presentation
      Istanbul, Turk
    • Related Report
      2011 Annual Research Report
  • [Presentation] Smoothing Sidewalls of A MEMS-based Silicon X-ray Optics2011

    • Author(s)
      T.Moriyama, et al
    • Organizer
      International Conference on Optical MEMS & Nanophotonics
    • Place of Presentation
      Istanbul, Turk
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of Novel Ultra Light Weight and High Resolution X-ray Micro Pore Optics for Space Research2011

    • Author(s)
      T.Ogawa, et al
    • Organizer
      Workshop on Chemical Evolution of Universe
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] MEMS 技術を用いた超軽量宇宙X線光学系の開発

    • Author(s)
      江副 祐一郎ほか
    • Organizer
      第30回センサーマイクロマシンと応用システムシンポジウム
    • Place of Presentation
      仙台国際センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] 地球磁気圏を可視化するX線望遠鏡

    • Author(s)
      江副 祐一郎
    • Organizer
      イプシロンを用いた小型惑星探査シンポジウム
    • Place of Presentation
      神戸大
    • Related Report
      2013 Annual Research Report
  • [Presentation] 地球磁気圏を可視化する GEO-X 衛星の検討

    • Author(s)
      江副 祐一郎ほか
    • Organizer
      次期地球電磁気圏探査検討会
    • Place of Presentation
      東北大
    • Related Report
      2013 Annual Research Report
  • [Presentation] 将来衛星に向けた超軽量 MEMS X線光学系の高分解能化の研究

    • Author(s)
      小川 智弘ほか
    • Organizer
      応用物理学会
    • Place of Presentation
      青山学院大
    • Related Report
      2013 Annual Research Report
  • [Presentation] 地球磁気圏をX線で可視化する GEO-X 衛星の検討

    • Author(s)
      江副 祐一郎ほか
    • Organizer
      天文学会
    • Place of Presentation
      国際基督大
    • Related Report
      2013 Annual Research Report
  • [Presentation] JUXTA : A New Probe of X-ray Emission from Jupiter and the Solar System

    • Author(s)
      Y. Ezoe et al.,
    • Organizer
      The 5th Nano-Satellite Symposium
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Suzaku observations of solar wind charge exchange and future Japanese missions

    • Author(s)
      Y. Ezoe et al.,
    • Organizer
      European Planetary Science Congress 2013
    • Place of Presentation
      London, UK
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] GEO-X : Imaging of Diffuse X-rays from the Earth’s Mag- netosphere

    • Author(s)
      Y. Ezoe et al.,
    • Organizer
      Magnetospheric Plasmas
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] MEMS技術を用いた超軽量・高角度分解能 次世代X線望遠鏡の開発

    • Author(s)
      三石郁之
    • Organizer
      補償光学会議
    • Place of Presentation
      国立天文台
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Ultra-Lightweight and High-Performance MEMS-based X-ray Optics for Future Astronomical Missions

    • Author(s)
      I. Mitsuishi et al.,
    • Organizer
      JSPE International Symposium
    • Place of Presentation
      東京工業大学
    • Related Report
      2012 Annual Research Report
  • [Book] X線天文における反射鏡の製作方法と将来技術2012

    • Author(s)
      江副祐一郎
    • Publisher
      砥粒加工学会誌
    • Related Report
      2013 Final Research Report
  • [Book] 砥粒加工学会誌2012

    • Author(s)
      江副 祐一郎
    • Total Pages
      4
    • Publisher
      砥粒加工学会
    • Related Report
      2012 Annual Research Report
  • [Remarks] 1.首都大学東京 修士論文3件(2011-13年度、各1件)

    • Related Report
      2013 Final Research Report
  • [Remarks] 2.ナノ・マイクロマシン展2013における「12インチSi-MEMSX線望遠鏡レンズ」の展示(産業技術総合研究所との協力)

    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] X線反射装置及びその製造方法2013

    • Inventor(s)
      倉島優一、廣島洋、伊藤寿浩、前田 龍太郎、高木秀樹、池原毅、江副祐一郎
    • Industrial Property Rights Holder
      倉島優一、廣島洋、伊藤寿浩、前田 龍太郎、高木秀樹、池原毅、江副祐一郎
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-01-29
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] X 線反射装置及びその製造方法2013

    • Inventor(s)
      倉島優一 ほか
    • Industrial Property Rights Holder
      倉島優一 ほか
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-01-29
    • Related Report
      2012 Annual Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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